公开(公告)号：US20060055300A1

公开(公告)日：2006-03-16

申请号：US10937947

申请日：2004-09-10

Applicant: Alan Janos ,  Malcolm Pack ,  Mohammad Kamarchi ,  Michael Colson

Inventor： Alan Janos ,  Malcolm Pack ,  Mohammad Kamarchi ,  Michael Colson

IPC: H01J1/50 ,  H01J23/10 ,  H01J3/20 ,  H01J29/76 ,  H01J3/32

CPC classification number: H01J65/044 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/42 ,  H01J61/302

Abstract: An electrodeless lamp and process for emitting ultraviolet and/or vacuum ultraviolet radiation comprises an envelope formed of an ultra-pure and/or low-defect quartz material and an ultraviolet and/or vacuum ultraviolet emissive material disposed in the interior region of the envelope. The electrodeless lamp formed of the ultra-pure and/or low-defect quartz material minimizes degradation during use.

Abstract translation: 用于发射紫外线和/或真空紫外线辐射的无电极灯和方法包括由超纯和/或低缺陷石英材料形成的外壳和设置在外壳的内部区域中的紫外线和/或真空紫外线发射材料。 由超纯和/或低缺陷石英材料形成的无电极灯在使用过程中使降解最小化。

公开(公告)号：US20050215413A1

公开(公告)日：2005-09-29

申请号：US11087885

申请日：2005-03-23

Applicant: Jochen Alkemper ,  Joerg Schuhmacher ,  Hrabanus Hack ,  Oliver Sohr

Inventor： Jochen Alkemper ,  Joerg Schuhmacher ,  Hrabanus Hack ,  Oliver Sohr

IPC: C03B19/01 ,  C03B32/00 ,  C03C3/04 ,  C03C3/06 ,  C03C4/00

CPC classification number: C03C3/06 ,  C03C2201/21 ,  C03C2201/42 ,  C03C2203/44 ,  C03C2203/50

Abstract: The invention discloses an SiO2—TiO2 glass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.

Abstract translation: 本发明公开了一种SiO 2 -TiO 2 SiO 2玻璃，其优选通过火焰水解制备，并且通过增加的耐辐射性，特别是与EUV光刻相关联来自身区分。 通过有目的地降低氢含量，实现了明显改善的耐辐射性和减少的收缩。

公开(公告)号：US06841242B2

公开(公告)日：2005-01-11

申请号：US10481895

申请日：2002-07-03

Applicant: Laurent Molins

Inventor： Laurent Molins

IPC: C03C13/02 ,  C03C3/06 ,  C03C13/00 ,  D01F9/08 ,  D03D15/12 ,  D02G3/00 ,  C08B19/08

CPC classification number: C03C13/00 ,  C03C3/06 ,  C03C2201/32 ,  C03C2201/42 ,  D01F9/08 ,  Y10T428/29 ,  Y10T428/2933

Abstract: The invention relates to a silica yarn and to woven or nonwoven fabrics produced from said yarn, which comprises 30 to 1500 ppm by weight of aluminum and 10 to 200 ppm by weight of titanium in oxidized form, the sum of the mass of the chemical elements different from Si and O being less than 5000 ppm by weight, the following elements being absent or present in a very small quantity: boron, sodium, calcium, potassium and lithium. The fabrics comprising this silica yarn have an excellent high-temperature withstand and thus retain their flexibility for a long time at above 600° C. They are useful especially in uses requiring good high-temperature flexibility, such as for furnace seals.

Abstract translation: 本发明涉及一种二氧化硅丝以及由所述纱线制成的机织或非织造织物，其包含30至1500重量ppm的铝和10至200重量ppm的氧化形式的钛，化学元素的质量之和 不同于Si和O的重量比小于5000ppm，以下元素不存在或以非常少的量存在：硼，钠，钙，钾和锂。 包含该二氧化硅纱线的织物具有优异的耐高温性，因此在600℃以上长时间保持其柔韧性。它们特别适用于要求良好的高温柔韧性的用途，例如炉密封。

公开(公告)号：US06832493B2

公开(公告)日：2004-12-21

申请号：US10086231

申请日：2002-02-27

Applicant: Bradley F. Bowden ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  Chunzhe C. Yu

Inventor： Bradley F. Bowden ,  Kenneth E. Hrdina ,  John F. Wight, Jr. ,  Chunzhe C. Yu

IPC: C03B1902

CPC classification number: C03B19/06 ,  C03C3/06 ,  C03C2201/42 ,  C03C2203/34

Abstract: The present invention relates to a method for forming an optical device. The method includes providing a glass aggregate. Typically, the glass aggregate is a mixture of fine glass soot particles and coarser ground or milled glass powder. The glass particles are mixed with a liquid to form a slurry which is cast in a mold to form a porous pre-form. Subsequently, the porous pre-form is consolidated into a glass object by heating the pre-form at a relatively high temperature. The method of the present invention produces optical components having substantially no striae. As a result, scattering is substantially reduced when EUV light is reflected from a component produced from the optical blank.

Abstract translation: 本发明涉及一种形成光学元件的方法。 该方法包括提供玻璃聚集体。 通常，玻璃聚集体是细玻璃烟灰颗粒和较粗糙的研磨或研磨玻璃粉末的混合物。 将玻璃颗粒与液体混合以形成在模具中铸造以形成多孔预成型体的浆料。 随后，通过在相对高的温度下加热预成型件将多孔预成型件固结成玻璃制品。 本发明的方法产生基本上没有条纹的光学部件。 结果，当EUV光从由光学坯料产生的组分反射时，散射显着降低。

公开(公告)号：US20030226377A1

公开(公告)日：2003-12-11

申请号：US10378390

申请日：2003-03-03

Inventor： W. Tim Barrett ,  Bradley F. Bowden ,  Claude L. Davis ,  Kenneth E. Hrdina ,  Michael MR. Robinson ,  Michael H. Wasilewski ,  John F. Wight

IPC: C03B019/00

CPC classification number: C03B32/005 ,  C03B19/01 ,  C03B2201/42 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/42 ,  C03C2203/10

Abstract: Methods and apparatus for manufacturing titania-containing fused silica bodies are disclosed. The titania-containing fused silica bodies are subsequently processed to make extreme ultraviolet soft x-ray masks. The methods and apparatus involve providing powders external to a furnace cavity and depositing the powders in the furnace cavity to form a titania-containing fused silica body.

Abstract translation: 公开了制造含二氧化钛的熔融石英体的方法和装置。 随后处理含二氧化钛的熔融二氧化硅体以制造极紫外线软X射线掩模。 所述方法和装置包括在炉腔外部提供粉末并将粉末沉积在炉腔中以形成含二氧化钛的熔融二氧化硅体。

公开(公告)号：US06542690B1

公开(公告)日：2003-04-01

申请号：US09566542

申请日：2000-05-08

Applicant: Adam J. G. Ellison ,  Rostislav R. Khrapko

Inventor： Adam J. G. Ellison ,  Rostislav R. Khrapko

IPC: G02B600

CPC classification number: G02B6/02114 ,  C03B19/1415 ,  C03B19/1423 ,  C03B37/01807 ,  C03B37/0183 ,  C03B2201/20 ,  C03B2201/58 ,  C03B2203/18 ,  C03C3/06 ,  C03C3/076 ,  C03C13/045 ,  C03C13/046 ,  C03C2201/10 ,  C03C2201/28 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/3417 ,  C03C2201/42 ,  C03C2201/58 ,  C03C2203/40 ,  C03C2203/44 ,  G02B6/02 ,  G02B6/021 ,  G02B6/02138 ,  G02B6/0219

Abstract: The present invention relates to a glass article for use as an optical waveguide fiber and more particularly to an optical waveguide fiber, the core of which is doped with a chalcogenide element to significantly increase the refractive index of the core. The subject of this invention is novel doped silica core compositions wherein a portion of the oxygen in the silica is replaced with either sulfur, selenium or tellurium using plasma enhanced chemical vapor deposition (PECVD). These compositions are designed to have higher refractive indices than silica, low coefficients of expansion, high optical transparency, and appropriate viscosity and softening points to make them ideal candidates for use as optical waveguide fibers.

Abstract translation: 本发明涉及一种用作光波导光纤的玻璃制品，更具体地说，涉及一种光纤光纤，其光纤掺杂有硫属元素元素以显着提高芯的折射率。 本发明的主题是新型掺杂二氧化硅芯组合物，其中使用等离子体增强化学气相沉积（PECVD）将二氧化硅中的氧的一部分用硫，硒或碲代替。 这些组合物被设计为具有比二氧化硅更高的折射率，低膨胀系数，高光学透明度和适当的粘度和软化点，以使其成为用作光波导纤维的理想候选物。

公开(公告)号：US20020157421A1

公开(公告)日：2002-10-31

申请号：US09844947

申请日：2001-04-27

Inventor： Bradford G. Ackerman ,  Kenneth E. Hrdina ,  Lisa A. Moore ,  Nikki J. Russo ,  C. Charles Yu

IPC: C03B019/00

CPC classification number: C03C4/0085 ,  C03B19/1415 ,  C03B19/1453 ,  C03B19/1484 ,  C03B2201/12 ,  C03B2201/42 ,  C03B2207/32 ,  C03B2207/62 ,  C03B2207/70 ,  C03C3/06 ,  C03C3/076 ,  C03C2201/12 ,  C03C2201/42 ,  C03C2203/40 ,  Y02P40/57

Abstract: A method for producing a fused silica glass containing titania includes synthesizing particles of silica and titania by delivering a mixture of a silica precursor and a titania precursor to a burner, growing a porous preform by successively depositing the particles on a deposition surface while rotating and translating the deposition surface relative to the burner, and consolidating the porous preform into a dense glass.

Abstract translation: 一种制备含有二氧化钛的熔融石英玻璃的方法包括通过将二氧化硅前体和二氧化钛前体的混合物输送到燃烧器来合成二氧化硅和二氧化钛的颗粒，通过将颗粒依次沉积在沉积表面上同时旋转和平移来生长多孔预型体 沉积表面相对于燃烧器，并将多孔预成型件固结成致密的玻璃。

公开(公告)号：US5851253A

公开(公告)日：1998-12-22

申请号：US734008

申请日：1996-10-18

Applicant: Robert J. Pet ,  Josephus J. Timmermans

Inventor： Robert J. Pet ,  Josephus J. Timmermans

IPC: C03B20/00 ,  C03C3/06 ,  H01K1/28 ,  H01K1/32 ,  C03B5/00

CPC classification number: H01K1/32 ,  C03C3/06 ,  C03C2201/36 ,  C03C2201/42

Abstract: The electric incandescent lamp has a quartz glass lamp vessel (1) or envelope (4') around the lamp vessel, which has a red coloured dope in the area at the side of the incandescent body (3). The quartz glass with red dope contains samarium.sup.II oxide, aluminium oxide, titanium dioxide, and silicon dioxide, the analysis of the glass in its oxidized form being Sm.sub.2 O.sub.3 1 to 3% by weight, Al.sub.2 O.sub.3 up to 3% by weight, TiO.sub.2, rest SiO.sub.2, the molar ratio Al/Sm being at least about 2 and the molar ratio Sm/Ti being from 2 to 8.

Abstract translation: 电白炽灯具有在灯泡周围的石英玻璃灯容器（1）或外壳（4'），其在白炽体（3）一侧的区域中具有红色涂料。 具有红色涂料的石英玻璃含有钐II氧化物，氧化铝，二氧化钛和二氧化硅，其氧化形式的玻璃分析为1至3重量％的Sm 2 O 3，3重量％的Al 2 O 3，TiO 2，其余为SiO 2 ，摩尔比Al / Sm为至少约2，摩尔比Sm / Ti为2至8。

公开(公告)号：US5547482A

公开(公告)日：1996-08-20

申请号：US270423

申请日：1994-07-05

Applicant: Julie B. Chalk ,  Jonathan C. Rowe ,  Paul M. Schermerhorn ,  Robert D. Shoup

Inventor： Julie B. Chalk ,  Jonathan C. Rowe ,  Paul M. Schermerhorn ,  Robert D. Shoup

IPC: C03B8/00 ,  C03B8/02 ,  C03B19/00 ,  C03B19/06 ,  C03B19/12 ,  C03B20/00 ,  C03B32/00 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B19/12 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/08 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03C2201/06 ,  C03C2201/42 ,  C03C2203/26 ,  C03C2203/27 ,  C03C2203/50 ,  Y02P40/57

Abstract: This invention is directed to the production of essentially defect-free high purity fused silica glass articles, the method comprising the following steps: (a) forming a green body from silica particulates or a porous body of amorphous silica; (b) sintering said body in a chamber by raising the temperature of the chamber to above 1720.degree. C., while purging the chamber with helium or applying a vacuum to the chamber; and (c) consolidating the sintered body in a chamber by raising the temperature within the chamber to at least 1750.degree. C., introducing an inert gas into the chamber at a pressure less than about 6.9 MPa (1000 psig), and cooling the chamber while maintaining the pressurized atmosphere to a temperature at least below the annealing point of the glass. In the most preferred practice, a green body of silica particulates will be prepared via a sol-gel process.

Abstract translation: 本发明涉及生产基本上无缺陷的高纯度熔融石英玻璃制品，该方法包括以下步骤：（a）由二氧化硅微粒或无定形二氧化硅的多孔体形成生坯; （b）通过将腔室的温度升高到1720℃以上，同时用氦气吹扫腔室或向室内施加真空来在室内烧结所述主体; 和（c）通过将室内的温度升高至至少1750℃将烧结体固化在室中，在小于约6.9MPa（1000psig）的压力下将惰性气体引入室中，并冷却室 同时将加压气氛保持在至少低于玻璃退火点的温度。 在最优选的实践中，将通过溶胶 - 凝胶法制备生物体的二氧化硅颗粒。

公开(公告)号：US5248637A

公开(公告)日：1993-09-28

申请号：US873206

申请日：1992-04-24

Applicant: Naoki Taneda ,  Kouichi Numata ,  Takashi Mukaiyama

Inventor： Naoki Taneda ,  Kouichi Numata ,  Takashi Mukaiyama

IPC: C03B37/01 ,  C03C1/00 ,  C03C3/06 ,  C03C13/00 ,  C03C13/02 ,  C30B35/00

CPC classification number: C03C13/00 ,  C03B37/011 ,  C03C1/006 ,  C03C3/06 ,  C30B35/00 ,  C03C2201/32 ,  C03C2201/42 ,  C03C2203/26

Abstract: Highly heat resistant glass fiber which comprises from 0.1 to 2.0 wt % of Al.sub.2 O.sub.3, from 0.1 to 2.0 wt % of TiO.sub.2, from 96 to 99.8 wt % of SiO.sub.2 and not more than 0.03 wt % of the sum of alkali metal oxides and alkaline earth metal oxides.