Interferometer
    31.
    发明申请
    Interferometer 有权
    干涉仪

    公开(公告)号:US20070097378A1

    公开(公告)日:2007-05-03

    申请号:US10577463

    申请日:2004-10-29

    Inventor: Jyrki Kauppinen

    CPC classification number: G01J3/26 G01J3/021 G01J3/4532 G01J3/4535

    Abstract: The present invention relates to an interferometer, comprising at least a beamsplitter (10), at least one end reflector (11) for returning beams (S2, S3), and a set of reflectors (14, 15) for reflecting the beams (S2, S3) between the beamsplitter (10) and the end reflector (11) or the end reflectors, at least some of said set of reflectors (14, 15) being adapted to be rotatable around an axis (ω). Said set of reflectors comprises two angle reflectors (14, 15), constituted by plane reflectors, and the said end reflector (11) is or the end reflectors are an angle reflector constituted by plane reflectors (11′, 11″). An angle line of the end reflector (11) is or the angle lines of end reflectors are arranged perpendicular to an angle line of both of the angle reflectors (14, 15).

    Abstract translation: 本发明涉及一种干涉仪,其至少包括分束器(10),用于返回光束(S 2,S 3)的至少一个端部反射器(11)和一组反射器(14,15),用于反射光束 (10)和端部反射器(11)或端部反射器之间的至少一个(S 2,S 3),所述一组反射器(14,15)中的至少一些适于围绕轴线(ω)旋转。 所述反射器组包括由平面反射器构成的两个角度反射器(14,15),并且所述端部反射器(11)是或端部反射器是由平面反射器(11',11“)构成的角度反射器。 端部反射器(11)的角度线是或端部反射器的角度线垂直于两个角度反射器(14,15)的角度线布置。

    Array and method for the spectrally resolving detection of a sample
    32.
    发明申请
    Array and method for the spectrally resolving detection of a sample 失效
    用于频谱分辨检测样品的阵列和方法

    公开(公告)号:US20060290938A1

    公开(公告)日:2006-12-28

    申请号:US10544043

    申请日:2004-01-26

    CPC classification number: G01J3/4535

    Abstract: Disclosed are an array and a method for the spectrally resolving detection of a sample (22) that is illuminated by means of an illuminating radiation (12) by detecting a sample radiation (24) emitted by the sample (22). Said array comprises an illuminating beam path via which illuminating radiation (12) can be delivered to the sample (22) from a lighting source (10, 10′), and an observation beam path via which sample radiation (24) can be delivered to a detector (40) as observation radiation. An interferometer (30) that is disposed in a section of the observation beam path, which does not comprise the sample (22), splits incident input interferometer radiation into two portions by means of an interferometer beam splitter, directs said two radiation portions via two paths which are provided with radiation-guiding means (34, 36) and whose effective path length difference can be modified, and superimposes the two radiation portions in a jointly interfering manner so as to form an output interferometer radiation such that the spectral distribution of the observation radiation (24) impinging a specific point of the detector (40) can be modified by modifying the effective path length difference. The interferometer (30) is arranged in a beam path section that is common to the illuminating beam path and the observation beam path such that the effective path length difference in the illuminating beam path changes when the effective path length difference is modified in the observation beam path.

    Abstract translation: 公开了用于通过检测由样品(22)发射的样品辐射(24)通过照射辐射(12)照射的样品(22)的光谱分辨检测的阵列和方法。 所述阵列包括照明光束路径,通过照明光束路径照明辐射(12)可以从照明源(10,10')传送到样品(22),以及观测光束路径,通过该观察光束路径可以将样品辐射(24)传送到 作为观察辐射的检测器(40)。 设置在不包括样品(22)的观察光束路径的一部分中的干涉仪(30)通过干涉仪分束器将入射的入射干涉仪辐射分成两部分,通过两个辐射部分引导两个辐射部分 设置有辐射引导装置(34,36)并且其有效路径长度差可以被修改的路径,并且以共同干扰的方式叠加两个辐射部分,以形成输出干涉仪辐射,使得 可以通过修改有效路径长度差来修改冲击检测器(40)的特定点的观察辐射(24)。 所述干涉仪(30)配置在所述照射光束路径和所述观察光束路径共有的光束路径部分中,使得当在所述观察光束中修改所述有效路径长度差时,所述照明光束路径中的有效路径长度差异变化 路径。

    Tilt-compensated interferometers
    33.
    发明授权
    Tilt-compensated interferometers 失效
    倾斜补偿干涉仪

    公开(公告)号:US06967722B2

    公开(公告)日:2005-11-22

    申请号:US10277439

    申请日:2002-10-21

    Abstract: The tilt-compensated interferometers of the present invention are novel variations of Michelson's interferometer that use tilt- and shear-compensation to provide excellent photometric accuracy even when there are imperfections in the scanning motion used to produce variation of path difference. The tilt-compensation mechanism of the present invention consists of antiparallel reflections from a beamsplitter element and a roof reflector element, which elements are held rigidly in alignment. Several particularly useful embodiments of the invention are described. Other advantages of the present invention include photometric stability and reduced cost because manual alignment is not required. This interferometer has applications in spectrometry, spectral imaging and metrology.

    Abstract translation: 本发明的倾斜补偿干涉仪是迈克尔逊干涉仪的新颖变型,其使用倾斜和剪切补偿来提供优异的测光精度,即使在用于产生路径差异的扫描运动中存在缺陷的情况下也是如此。 本发明的倾斜补偿机构包括来自分束器元件和屋顶反射器元件的反平行反射,这些元件被刚性地保持一致。 描述本发明的几个特别有用的实施例。 本发明的其它优点包括光度稳定性和降低的成本,因为不需要手动对准。 该干涉仪具有光谱,光谱成像和计量学应用。

    Multifunctional fourier transform infrared spectrometer system
    34.
    发明授权
    Multifunctional fourier transform infrared spectrometer system 有权
    多功能傅立叶变换红外光谱仪系统

    公开(公告)号:US06667808B2

    公开(公告)日:2003-12-23

    申请号:US09788855

    申请日:2001-02-20

    Abstract: A multifunctional infrared spectrometer system has an interferometer which receives the infrared beam from a source and provides a modulated output beam on beam paths to multiple spatially separated infrared detectors. A multi-position mirror element mounted at a junction position receives the beam on a main beam path and directs it on branch beam paths to sample positions, with the beam then being directed on the branch beam path to one of the detectors. One of the branch beam paths may include a sample holder at the sample position which can index between a position at which a sample is analyzed, to a reference material position, to a pass-through position for calibration purposes. The multi-position mirror element may also be indexed to direct the beam on a branch path to a fiber optic cable which has a probe at the end of it which may be inserted in a sample fluid or powder to be analyzed, with the reflected light from the probe being directed back on an optical fiber cable to a detector at the spectrometer. The multi-position mirror element may be moved to a position at which the beam is directed on a beam path to and through an integrating sphere to a solid sample, with the reflected light from the sample being directed by the surfaces of the integrating sphere to a detector. A detector may be mounted to detect the light transmitted through the sample to obtain measurements of both reflected and transmitted infrared light at the sample.

    Abstract translation: 多功能红外光谱仪系统具有干涉仪,其接收来自源的红外光束,并将光束路径上的调制输出光束提供给多个空间分离的红外探测器。 安装在连接位置处的多位镜子元件在主光束路径上接收光束并将其引导到分支光束路径到采样位置,然后光束被引导到分支光束路径到其中一个检测器。 分支光束路径中的一个可以包括在采样位置处的样品保持器,其可以将样品被分析的位置与参考材料位置之间的位置转换成用于校准目的的通过位置。 多位置反射镜元件还可被索引以将光束引导到光纤电缆的分支路径上,该光纤电缆在其末端具有探针,该探针可以插入待分析的样品流体或粉末中,其中反射光 从探头引导回光纤光缆到光谱仪上的检测器。 多位置反射镜元件可以被移动到光束被引导到通过积分球并通过积分球的光束到固体样品的位置,其中来自样品的反射光被积分球的表面引导到 检测器 可以安装检测器以检测通过样品透射的光,以获得样品上的反射和透射的红外光的测量。

    Multifunctional fourier transform infrared spectrometer system
    35.
    发明申请
    Multifunctional fourier transform infrared spectrometer system 有权
    多功能傅立叶变换红外光谱仪系统

    公开(公告)号:US20010035957A1

    公开(公告)日:2001-11-01

    申请号:US09788855

    申请日:2001-02-20

    Abstract: A multifunctional infrared spectrometer system has an interferometer which receives the infrared beam from a source and provides a modulated output beam on beam paths to multiple spatially separated infrared detectors. A multi-position mirror element mounted at a junction position receives the beam on a main beam path and directs it on branch beam paths to sample positions, with the beam then being directed on the branch beam path to one of the detectors. One of the branch beam paths may include a sample holder at the sample position which can index between a position at which a sample is analyzed, to a reference material position, to a pass-through position for calibration purposes. The multi-position mirror element may also be indexed to direct the beam on a branch path to a fiber optic cable which has a probe at the end of it which may be inserted in a sample fluid or powder to be analyzed, with the reflected light from the probe being directed back on an optical fiber cable to a detector at the spectrometer. The multi-position mirror element may be moved to a position at which the beam is directed on a beam path to and through an integrating sphere to a solid sample, with the reflected light from the sample being directed by the surfaces of the integrating sphere to a detector. A detector may be mounted to detect the light transmitted through the sample to obtain measurements of both reflected and transmitted infrared light at the sample.

    Abstract translation: 多功能红外光谱仪系统具有干涉仪,其接收来自源的红外光束,并将光束路径上的调制输出光束提供给多个空间分离的红外探测器。 安装在连接位置处的多位镜子元件在主光束路径上接收光束并将其引导到分支光束路径到采样位置,然后光束被引导到分支光束路径到其中一个检测器。 分支光束路径中的一个可以包括在采样位置处的样品保持器,其可以将样品被分析的位置与参考材料位置之间的位置转换成用于校准目的的通过位置。 多位置反射镜元件还可被索引以将光束引导到光纤电缆的分支路径上,该光纤电缆在其末端具有探针,该探针可以插入待分析的样品流体或粉末中,其中反射光 从探头引导回光纤光缆到光谱仪上的检测器。 多位置反射镜元件可以被移动到光束被引导到通过积分球并通过积分球的光束到固体样品的位置,其中来自样品的反射光被积分球的表面引导到 检测器 可以安装检测器以检测通过样品透射的光,以获得样品上的反射和透射的红外光的测量。

    Interferometer having a micromirror
    36.
    发明授权
    Interferometer having a micromirror 有权
    干涉仪具有微镜

    公开(公告)号:US06204925B1

    公开(公告)日:2001-03-20

    申请号:US09502860

    申请日:2000-02-11

    CPC classification number: G01J3/45 G01J3/4535 G01J9/02

    Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector.

    Abstract translation: 干涉仪包括用于将源束分解成测试光束和参考光束的分束器,用于检测干涉图案的成像装置,设置在测试光束的路径中以用于将测试光束反射到成像装置的反射镜, 设置在参考光束的路径中的微镜,用于将参考光束的一部分反射到成像装置;以及聚焦机构,设置成用于将参考光束聚焦在微镜上。 微镜的横向尺寸不超过由聚焦机构聚焦在其上的参考光束的中心波瓣的近似侧向尺寸。 用于减小光束中的像差影响的空间滤光器包括设置在透明基底上的反射器,其中反射器的横向尺寸不超过聚焦在反射器上的光束的空间强度分布的中心波瓣的近似侧向尺寸。

    Interferometer having a micromirror
    37.
    发明授权
    Interferometer having a micromirror 失效
    干涉仪具有微镜

    公开(公告)号:US6025912A

    公开(公告)日:2000-02-15

    申请号:US853562

    申请日:1997-05-08

    CPC classification number: G01J3/45 G01J3/4535 G01J9/02

    Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.In accordance with Office policy under M.P.E.P. Sec. 608.01(b), Applicant submits herewith as a part of the submitted Substitute Specification, a separate sheet with the subject Abstract as currently rewritten.

    Abstract translation: 干涉仪包括用于将源束分解成测试光束和参考光束的分束器,用于检测干涉图案的成像装置,设置在测试光束的路径中以用于将测试光束反射到成像装置的反射镜, 设置在参考光束的路径中的微镜,用于将参考光束的一部分反射到成像装置;以及聚焦机构,设置成用于将参考光束聚焦在微镜上。 微镜的横向尺寸不超过由聚焦机构聚焦在其上的参考光束的中心波瓣的近似侧向尺寸。 用于减小光束中的像差影响的空间滤光器包括设置在透明基底上的反射器,其中反射器的横向尺寸不超过聚焦在反射器上的光束的空间强度分布的中心波瓣的近似侧向尺寸。 还提供了一种在波前测量系统中对波束进行滤波的方法。 该方法包括聚焦光束,反射聚焦光束的特定第一部分,以及透射光束的第二部分。 根据M.P.E.P.的办公室政策。 第 608.01(b),申请人作为提交的替代规范的一部分提交了与当前重写的主题摘要的单独的表格。

    Integrated optical measurement instruments
    38.
    发明授权
    Integrated optical measurement instruments 失效
    集成光学测量仪器

    公开(公告)号:US5943122A

    公开(公告)日:1999-08-24

    申请号:US113610

    申请日:1998-07-10

    Inventor: Duane C. Holmes

    CPC classification number: G02B21/248 G01J3/02 G01J3/0235 G01J3/0291 G01J3/4535

    Abstract: A measuring instrument with a parfocal combination of an ultra-violet to near-infrared (UV-NIR) spectrophotometer and a Fourier Transform Infrared (FTIR) spectrometer is disclosed. The parfocal configuration of metrology tools obviates lateral movement of the sample between two separate measurement instruments. Consequently, the area occupied by the parfocal measuring instrument is reduced. Moreover, throughput is increased because there is no need to reposition the sample to properly align the measurement area for the separate measurements. The measuring instrument also includes an imaging apparatus, such as a camera or microscope ocular, to accurately position the measurement area of the sample. Beam directing elements, such as a mirror and objective lenses, are mounted on a common movable member. The common movable member, which may be, e.g., a linear or rotating turret, moves to properly align the desired beam directing element, thereby selecting the specific metrology mode. In addition, the measurement instrument includes a purging shroud along the FTIR spectrometer optical path to efficiently purge any atmospherical gases that may interfere with the FTIR measurement technique.

    Abstract translation: 公开了具有紫外 - 近红外(UV-NIR)分光光度计和傅立叶变换红外(FTIR)光谱仪的准焦点组合的测量仪器。 计量工具的准焦点配置避免了样品在两个单独的测量仪器之间的横向移动。 因此,平焦测量仪器占据的面积减少。 此外,由于不需要重新定位样本以适当地对准单独测量的测量区域,因此增加了吞吐量。 测量仪器还包括诸如相机或显微镜的成像装置,以准确地定位样品的测量面积。 诸如镜子和物镜的光束引导元件安装在公共可动构件上。 可以是例如线性或旋转的转台的公共可动构件移动以适当地对准所需的光束引导元件,由此选择特定的测量模式。 此外,测量仪器包括沿着FTIR光谱仪光路的清洗罩,以有效地清除可能干扰FTIR测量技术的任何大气气体。

    Interferometer alignment system utilizing a step calibration
    40.
    发明授权
    Interferometer alignment system utilizing a step calibration 失效
    采用步进校准的干涉仪校准系统

    公开(公告)号:US5825491A

    公开(公告)日:1998-10-20

    申请号:US608654

    申请日:1996-02-29

    Inventor: David J. Cutler

    CPC classification number: G01J3/4535

    Abstract: An interferometer comprises a source of radiation (10) and a beam splitter (12) for forming two beams. The beams travel along different optical paths and the optical path difference of the paths can be varies by rotatable mirror pairs M2/M3 and M4/M5. One of the paths includes an adjustable mirror M6 which is tiltable in orthogonal directions. A control unit (18) can be automatically initiate periodically an alignment procedure for aligning the interferometer.

    Abstract translation: 干涉仪包括辐射源(10)和用于形成两个光束的分束器(12)。 光束沿着不同的光路行进,路径的光程差可以通过旋转镜对M2 / M3和M4 / M5来改变。 路径之一包括可在正交方向上倾斜的可调镜M6。 控制单元(18)可以周期性地自动启动用于对准干涉仪的对准过程。

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