METHOD AND SYSTEM TO COMPENSATE FOR LAMP INTENSITY DIFFERENCES IN A PHOTOLITHOGRAPHIC INSPECTION TOOL
    31.
    发明申请
    METHOD AND SYSTEM TO COMPENSATE FOR LAMP INTENSITY DIFFERENCES IN A PHOTOLITHOGRAPHIC INSPECTION TOOL 失效
    补偿光刻检测工具中的强度差异的方法和系统

    公开(公告)号:US20080218745A1

    公开(公告)日:2008-09-11

    申请号:US12101260

    申请日:2008-04-11

    Abstract: An after develop inspection tool considers tool-to-tool variability when determining confidence score for wafers under inspection. A golden wafer is used to calculate a RGB signature as well as the slope of the individual RGB curves for different lamp intensities. These slopes are normalized in order to generate a compensation factor for red values and blue values within a signature. When a wafer is subsequently inspected at an ADI station using a different lamp, the test wafer RGB signature is likely captured at a different lamp intensity. Consequently, when comparing the signatures, the golden wafer RGB signature is adjusted by the compensation factors, based on the different lamp's intensity setting, and this adjusted RGB signature is then used to determine whether a defect exists on the test wafer.

    Abstract translation: 在确定检查中的晶片的置信度得分后,开发后的检查工具会考虑刀具对刀具的变异性。 使用金色晶片来计算RGB特征以及不同灯泡强度的各个RGB曲线的斜率。 这些斜率被归一化以便在签名中产生红色值和蓝色值的补偿因子。 当使用不同的灯随后在ADI站检查晶片时,可能以不同的灯强度捕获测试晶片RGB特征。 因此,当比较签名时,基于不同的灯的强度设置,通过补偿因子来调整金色晶片RGB签名,然后使用该调整的RGB签名来确定在测试晶片上是否存在缺陷。

    Method and system to compensate for lamp intensity differences in a photolithographic inspection tool
    32.
    发明授权
    Method and system to compensate for lamp intensity differences in a photolithographic inspection tool 失效
    补偿光刻检测工具灯强度差异的方法和系统

    公开(公告)号:US07359545B2

    公开(公告)日:2008-04-15

    申请号:US10749887

    申请日:2003-12-31

    Abstract: An after develop inspection tool considers tool-to-tool variability when determining confidence score for wafers under inspection. A golden wafer is used to calculate a RGB signature as well as the slope of the individual RGB curves for different lamp intensities. These slopes are normalized in order to generate a compensation factor for red values and blue values within a signature. When a wafer is subsequently inspected at an ADI station using a different lamp, the test wafer RGB signature is likely captured at a different lamp intensity. Consequently, when comparing the signatures, the golden wafer RGB signature is adjusted by the compensation factors, based on the different lamp's intensity setting, and this adjusted RGB signature is then used to determine whether a defect exists on the test wafer.

    Abstract translation: 在确定检查中的晶片的置信度得分后,开发后的检查工具会考虑刀具对刀具的变异性。 使用金色晶片来计算RGB特征以及不同灯泡强度的各个RGB曲线的斜率。 这些斜率被归一化以便在签名中产生红色值和蓝色值的补偿因子。 当使用不同的灯随后在ADI站检查晶片时,可能以不同的灯强度捕获测试晶片RGB特征。 因此,当比较签名时,基于不同的灯的强度设置,通过补偿因子来调整金色晶片RGB签名,然后使用该调整的RGB签名来确定在测试晶片上是否存在缺陷。

    On-site analysis system with central processor and method of analyzing
    33.
    发明申请
    On-site analysis system with central processor and method of analyzing 有权
    具有中央处理器的现场分析系统和分析方法

    公开(公告)号:US20030154044A1

    公开(公告)日:2003-08-14

    申请号:US10188972

    申请日:2002-07-05

    Abstract: A method of analysis, analysis system, program product, apparatus, and method of supplying analysis of value incorporating the use of at least one data acquisition device, a central processor, and a communication link that is connectable between the data acquisition device and the central processor. The central processor is loaded with multivariate calibration models developed for predicting values for various properties of interest, wherein the calibration models are capable of compensating for variations in an effectively comprehensive set of measurement conditions and secondary material characteristics. As so configured, the calibration models can compensate for instrument variance without instrument-specific calibration transfer. Measurement results generated by the central processor can be transmitted to an output device of a user interface.

    Abstract translation: 一种分析,分析系统,程序产品,装置和提供分析价值的方法,该方法包括使用至少一个数据采集设备,中央处理器和通信链路,该数据采集设备和数据采集设备与中央 处理器。 中央处理器装载有用于预测感兴趣的各种性质的值的多变量校准模型,其中校准模型能够补偿有效全面的测量条件和次要材料特性的变化。 如此配置,校准模型可以补偿仪器差异,无需仪器特定的校准传输。 由中央处理器生成的测量结果可以被发送到用户界面的输出设备。

    Particle size distribution measuring apparatus with validation and instruction modes
    34.
    发明申请
    Particle size distribution measuring apparatus with validation and instruction modes 失效
    具有验证和指令模式的粒度分布测量仪器

    公开(公告)号:US20010048366A1

    公开(公告)日:2001-12-06

    申请号:US09858389

    申请日:2001-05-16

    CPC classification number: G01N15/02 G01N15/1012 G01N2201/12753

    Abstract: This invention provides a particle size distribution measuring apparatus, which has a function of informing an operator of a procedure of validation work of the particle size distribution measuring apparatus. A storage medium which records validation data providing a procedure of validation work for the particle size distribution measuring apparatus and a control unit which has a validation help function which successively reads a validation procedure from the validation data and controls the particle size distribution measuring apparatus according to a measuring procedure without any operation by an operator in the validation procedure while teaching the operator a work procedure requiring an operation by the operator.

    Abstract translation: 本发明提供了一种粒度分布测量装置,其具有向操作者通知粒度分布测量装置的验证工作程序的功能。 一种存储介质,其记录提供粒度分布测量装置的验证工作程序的验证数据和具有验证帮助功能的控制单元,该确认帮助功能从验证数据连续读取验证程序,并根据以下步骤控制粒度分布测量装置: 测量程序,无需操作人员在验证过程中的任何操作,同时向操作员讲授需要操作者进行操作的工作程序。

    Toner concentration sensing with self calibration
    35.
    发明授权
    Toner concentration sensing with self calibration 失效
    调色剂浓度感应与自校准

    公开(公告)号:US5319421A

    公开(公告)日:1994-06-07

    申请号:US949188

    申请日:1992-09-22

    Applicant: Daniel A. West

    Inventor: Daniel A. West

    Abstract: A self calibrating system for measuring concentration of a material carried in a fluid medium. The system has a flow cell means for measuring the transmissivity of a fluid medium passing therethrough, a first means for delivering a first fluid containing material carried in fluid medium, and a second means for delivering a clear dispersant fluid. The system also has a switching means for selecting among the delivering means, the switching means connecting one of the delivering means to the flow cell means, a first memory means for storing a table of C1 concentration and associated voltage values corresponding to the transmissivity measurement of the first fluid, a second memory means for storing a table of C2 concentration and associated voltage values corresponding to the transmissivity measurement of the clear dispersant, and calculating means for adding a C1 concentration value from the C1 table to a C2 concentration value from the C2 table thereby determining the concentration of the material in the fluid medium being measured by the flow cell. The system can have additional delivering means as is required for color printing. Also provided is a method for measuring the concentration of toner particles carried in a fluid medium during a calibration period and during run-time use.

    Abstract translation: 用于测量流体介质中携带的材料的浓度的自校准系统。 该系统具有用于测量通过其中的流体介质的透射率的流动池装置,用于输送在流体介质中运载的含有第一流体的材料的第一装置和用于输送透明分散剂流体的第二装置。 该系统还具有切换装置,用于在传送装置之间选择连接传送装置之一到流动池装置的切换装置,用于存储C1浓度表和对应于透射率测量的相应电压值的第一存储装置 第一流体,用于存储对应于透明分散剂的透射率测量的C2浓度表和相关电压值的表的第二存储器装置,以及用于将来自C1表的C1浓度值与C2浓度值相加的计算装置, 从而确定由流动池测量的流体介质中的材料的浓度。 该系统可以具有如彩色打印所需的附加传送手段。 还提供了一种用于在校准期间和运行时间使用期间测量在流体介质中携带的调色剂颗粒的浓度的方法。

    Apparatus and method for measuring a bodily constituent
    36.
    发明授权
    Apparatus and method for measuring a bodily constituent 失效
    用于测量身体成分的装置和方法

    公开(公告)号:US5179288A

    公开(公告)日:1993-01-12

    申请号:US769031

    申请日:1991-09-30

    Abstract: An apparatus and method for measuring a bodily constituent such as glucose or cholesterol by analyzing a sample taken from the body such as blood, saliva or urine. The sample is placed on a test strip inserted into the test block portion of the apparatus where the portion of the sample containing the constituent desired to be measured reacts with a chemical reagent. Products of this reaction have an absorbance/reflectance characteristic which is mathematically related to the concentration of the constituent in the bodily sample. The reflected light is absorbed by a photodiode and the output of the photodiode converted to a digital form where a microprocessor can calculate the concentration of the constituent using the mathematical relationship between the reflected light and concentration stored in memory means of the apparatus.

    Abstract translation: 一种用于通过摄取来自身体如血液,唾液或尿液的样品来测量身体成分如葡萄糖或胆固醇的装置和方法。 将样品放置在插入装置的测试块部分的测试条上,其中含有待测量的成分的样品的一部分与化学试剂反应。 该反应的产物具有在数学上与身体样品中成分浓度相关的吸光度/反射特性。 反射光被光电二极管吸收,并且光电二极管的输出转换成数字形式,其中微处理器可以使用存储在设备的存储器装置中的反射光和浓度之间的数学关系来计算组分的浓度。

    Industrial colorimeter having light intensity compensation means
    37.
    发明授权
    Industrial colorimeter having light intensity compensation means 失效
    具有光强度补偿手段的工业色彩

    公开(公告)号:US5082370A

    公开(公告)日:1992-01-21

    申请号:US538362

    申请日:1990-06-14

    Abstract: A colorimeter provides compensation for changes in the color signature of an object due to lamp aging, stand off distance and view angle changes. The colorimeter senses and stores values indicative of a sample object. In use, the colorimeter senses and creates values indicative of an object. The colorimeter includes a processor which then creates an average ratio wherein the stored values and corresponding sensed values are placed in a ratio, all of the ratios are then summed, and the total is divided by the number of values. Finally, the processor compares the sensed values with corresponding stored values, wherein one of the two values is adjusted by the average ratio.

    Microspectroscope
    38.
    发明授权
    Microspectroscope 失效
    显微镜

    公开(公告)号:US5048960A

    公开(公告)日:1991-09-17

    申请号:US361406

    申请日:1989-06-05

    Abstract: A method of and an apparatus for obtaining spectral data and calculating corrected spectral data. The method includes the steps of: obtaining spectral data S'(.lambda.) which is representative of the spectral characteristics of light which is generated by a light source and reflected by an object; substantially concurrently with the step of obtaining the spectral data S'(.lambda.), obtaining spectral data R(.lambda.) which is representative of the spectral characteristics of light which is generated by the light source; and calculating corrected spectral data S(.lambda.) as a function of the spectral data S'(.lambda.) and the spectral data R(.lambda.).

    Electro-optical coupler for catheter oximeter
    39.
    发明授权
    Electro-optical coupler for catheter oximeter 失效
    导电血氧仪电光耦合器

    公开(公告)号:US4684245A

    公开(公告)日:1987-08-04

    申请号:US791705

    申请日:1985-10-28

    Abstract: An optical module couples a fiberoptic catheter to a catheter oximeter processing apparatus. The module includes a plurality of LED's for coupling the electrical control signals from the processor and converting them to light signals to transmit to the catheter. The module also includes the means to convert the received reflected light signals from the catheter to electrical signals to be transmitted to the processor. The module further includes a memory to store calibration signals and other data so that the module and catheter can be disconnected from the processor and used with a different processor without necessitating a recalibration.

    Abstract translation: 光学模块将光纤导管连接到导管血氧计处理装置。 该模块包括多个LED,用于耦合来自处理器的电控制信号并将其转换为光信号以传送至导管。 模块还包括将从导管接收的反射光信号转换成要传输到处理器的电信号的装置。 该模块还包括用于存储校准信号和其他数据的存储器,使得模块和导管可以与处理器断开连接并与不同的处理器一起使用,而不需要重新校准。

    Fluorometer with high sensitivity and stability
    40.
    发明授权
    Fluorometer with high sensitivity and stability 失效
    荧光计具有高灵敏度和稳定性

    公开(公告)号:US4262205A

    公开(公告)日:1981-04-14

    申请号:US77817

    申请日:1979-09-21

    CPC classification number: G01N21/645 G01N21/0332 G01N2201/12753

    Abstract: The present inventive fluorometer provides a rapid means for accurate sample quantitative measurements by making instrumental calibration measurements during sample equilibration time. Increased speed of equilibration and calibration and simultaneously performing these two functions increases the throughput speed with which individual measurements can be accomplished, thus increasing the number of samples which can be routinely processed. This decreases the cost per test and more importantly renders new treatment protocols possible which require the doctor and patient to be able to know within minutes the level of certain drugs in various body fluids.

    Abstract translation: 本发明的荧光计提供了通过在样品平衡时间期间进行仪器校准测量来精确进行样品定量测量的快速方法。 增加平衡和校准速度并同时执行这两个功能可以提高吞吐速度,通过该速度实现单独的测量,从而增加可以常规处理的样品数量。 这降低了每次测试的成本,更重要的是使新的治疗方案成为可能,这需要医生和患者能够在几分钟内知道各种体液中某些药物的水平。

Patent Agency Ranking