公开(公告)号：US4740697A

公开(公告)日：1988-04-26

申请号：US788757

申请日：1985-10-18

Applicant: Toshiko Suzuki

Inventor： Toshiko Suzuki

IPC: H01J37/252 ,  G01N23/225 ,  G01Q30/06 ,  H01J37/256 ,  H01J49/02 ,  H01J49/14 ,  H01J49/26 ,  G01N23/00

CPC classification number: H01J49/022 ,  H01J37/256 ,  H01J49/142

Abstract: In a secondary ion mass spectrograph, the electrical power supply voltages controlling and pertaining to the polarity of the target secondary ions are all switched between opposite polarities simultaneously while the deflection of the primary ion beam is automatically corrected for any error that may result from the polarity switch-over. This allows quick alternation of the polarity of target ions without loss of accuracy of the primary beam scan. The correction to the primary beam deflected may be predetermined under specific observing conditions or may be derived from theoretical considerations.

Abstract translation: 在二次离子质谱仪中，控制和关于目标二次离子的极性的电源电压全部在相反极性之间切换，同时主离子束的偏转被自动校正，这可能是由极性引起的任何误差 切换 这允许目标离子的极性的快速交替而不损失主波束扫描的精度。 对于偏转的主光束的校正可以在特定的观察条件下预先确定，或者可以从理论考虑得到。

公开(公告)号：US4570072A

公开(公告)日：1986-02-11

申请号：US458058

申请日：1983-01-14

Applicant: Chikara Kimura ,  Keiji Yada

Inventor： Chikara Kimura ,  Keiji Yada

IPC: H01J3/22 ,  H01J37/141 ,  H01J37/244 ,  H01J37/252 ,  H01J3/12

CPC classification number: H01J37/141

Abstract: Disclosed is an electromagnetic lens polepiece structure for use in an electron microscope comprising an upper polepiece and an opposite lower polepiece, each having a lens bore, wherein the lens bore portion of the upper polepiece protrudes toward the lens bore of the lower polepiece. The protrudant lens bore portion allows the provision of an X-ray conducting bore for the measurement without disturbing the magnetic field of the lens. This makes it possible a smaller lens bore and, consequently, the spherical aberration is reduced and the resolution of the microscope is improved. The protrudant lens bore structure allows the upper polepiece to be divided into two sections so that the bore section can be replaced easily for the measurement of X-rays.

Abstract translation: 公开了一种用于电子显微镜的电磁透镜杆结构，其包括上极片和相对的下极靴，每个具有透镜孔，其中上电极件的透镜孔部分朝向下极靴的透镜孔突出。 突起透镜孔部分允许提供用于测量的X射线导电孔而不干扰透镜的磁场。 这使得可能的是较小的透镜孔，并且因此减小了球面像差，并提高了显微镜的分辨率。 突出透镜孔结构允许上极片被分成两部分，使得可以容易地更换孔部分用于测量X射线。

公开(公告)号：US4564758A

公开(公告)日：1986-01-14

申请号：US575828

申请日：1984-02-01

Applicant: Georges Slodzian ,  Marcel Chaintreau ,  Roger Dennebouy

Inventor： Georges Slodzian ,  Marcel Chaintreau ,  Roger Dennebouy

IPC: G01Q30/02 ,  H01J37/02 ,  H01J37/252

CPC classification number: H01J37/252 ,  H01J37/026

Abstract: The invention provides a process and device for the ionic analysis of an insulating sample brought to a given negative potential, of the type in which a target on the surface of the sample to be analyzed is bombarded by means of a primary electron beam and negative ions emitted by the bombarded target are used for producing an ion image of the sample. An electron beam whose normal speed component cancels out just at level of the surface of the target is directed perpendicularly to the target.The device comprises for this purpose a filament, brought substantially to the same negative potential as the sample, which emits the electron beam. The electron beam, after emission, is deflected by a magnetic prism so as to be brought into coincidence with the optical axis of the negative ion beam emitted by the target.

Abstract translation: 本发明提供了一种用于离子分析的方法和装置，所述绝缘样品带到给定的负电位，其中待分析样品的表面上的靶通过一次电子束和负离子 由被轰击的靶发射的用于产生样品的离子图像。 其正常速度分量恰好在目标表面的水平上抵消的电子束垂直于目标。 该装置包括用于该目的的灯丝，其基本上带有与样品相同的负电位，其发射电子束。 发射后的电子束被磁性棱镜偏转，使其与目标发射的负离子束的光轴一致。

公开(公告)号：US4551599A

公开(公告)日：1985-11-05

申请号：US525413

申请日：1983-08-22

Applicant: Helmut Liebl

Inventor： Helmut Liebl

IPC: H01J37/12 ,  H01J37/244 ,  H01J37/252 ,  H01J37/26

CPC classification number: H01J37/252 ,  H01J37/12

Abstract: A combined objective and emission lens for a microbeam probe is described which is suitable for primary and secondary particles of the same charge sign, by which lens a bundle of primary rays of comparatively high energy can be focused on a very small spot of a plane sample surface and the secondary particles emitted by this spot can be collected into a collimated bundle of secondary rays which leaves the combined lens in a direction substantially opposite to the bundle of primary rays. In the present combined lens, the field strength between the sample surface and the lens electrode most closely adjacent to it is very high, in contrast to the known combined objective and emission lenses, so that a small emissivity of the secondary beam with a small diameter at the same time of the primary beam spot and an effective collection and collimation of the secondary particles are ensured. Certain embodiments can be changed over optionally to operation with primary and secondary particles of the same or opposite polarity.

Abstract translation: 描述了用于微束探针的组合的目标和发射透镜，其适用于相同电荷符号的初级和次级颗粒，通过该透镜，相对较高能量的一束主射线可以聚焦在平面样品的非常小的点上 表面和由该点发射的次级颗粒可以被收集成准直的二次射线束，其将组合透镜沿与主光束基本相反的方向离开。 在本发明的组合透镜中，与已知的组合物镜和发射透镜相反，样品表面与其最接近的透镜电极之间的场强非常高，使得具有小直径的次级束的小的发射率 同时保证了主光斑的有效收集和准直。 某些实施例可以任选地改变为具有相同或相反极性的初级和次级粒子的操作。

公开(公告)号：US4486659A

公开(公告)日：1984-12-04

申请号：US420223

申请日：1982-09-13

Applicant: David W. Turner

Inventor： David W. Turner

IPC: G01N23/227 ,  H01J37/252 ,  H01J37/285 ,  H01J49/44 ,  G01N23/22

CPC classification number: H01J37/285 ,  Y10S505/879

Abstract: An emission-electron microscope comprises an evacuated chamber with a superconducting magnet at one end generating a region of very high field strength. In this region a specimen is mounted and the surface of the specimen is irradiated with photons, typically x-ray or hard ultra-violet, from a source. As a result the specimen emits photo-electrons. The magnetic field is axially symmetrical along the length of the chamber and emitted electrons spiral about the lines of force traveling down the chamber into a region of lower magnetic field controlled by electro-magnet coils. Transverse kinetic energy of the electrons is converted into energy along the lines of force of the magnetic field and the divergence of the magnetic field lines causes electrons to produce on a detector an expanded electron image indicative of the distribution of electron flux across the surface region of the specimen. The emission-electrons may be produced by other stimulation methods, for example neutral atoms or heat (thermal electrons) and arrangements may be provided to permit only electrons of predetermined energy reaching the detector.

Abstract translation: PCT No.PCT / GB82 / 00008 Sec。 371日期1982年9月13日 102（e）1982年9月13日PCT申请日1982年1月15日PCT公布。 出版物WO82 / 02624 日期为1982年8月5日。发射电子显微镜包括在一端具有超导磁体的真空室，产生非常高的场强的区域。 在该区域中，安装了一个样品，并且来自样品的样品的表面被来自源的光子（通常为x射线或硬紫外线）照射。 因此，样品发射光电子。 磁场沿着腔室的长度轴向对称，并且发射的电子围绕围绕腔室的力线旋转到由电磁线圈控制的较低磁场的区域内。 电子的横向动能被沿着磁场的力线转化为能量，并且磁场线的发散使得电子在检测器上产生指示电子通量跨越表面区域的分布的扩展电子图像 标本。 发射电子可以通过其他刺激方法产生，例如中性原子或热（热电子），并且可以提供布置以仅允许预定能量的电子到达检测器。

公开(公告)号：US4479060A

公开(公告)日：1984-10-23

申请号：US454027

申请日：1982-12-28

Applicant: Hifumi Tamura ,  Tohru Ishitani ,  Akira Shimase

Inventor： Hifumi Tamura ,  Tohru Ishitani ,  Akira Shimase

IPC: H01J37/073 ,  G01Q30/20 ,  H01J37/08 ,  H01J37/10 ,  H01J37/12 ,  H01J37/252 ,  H01J3/14 ,  G01N23/04 ,  G01N23/225

CPC classification number: H01J37/10 ,  H01J37/252

Abstract: An apparatus according to the present invention for irradiating a specimen with charged particle beams comprises a single charged particle generating source from which the charged particle beams formed of electrons and negative ions, respectively, can be simultaneously derived; a specimen holder on which the specimen is placed; and charged particle irradiation means which is interposed between the charged particle generating source and the specimen holder in order to focus the charged particle beams and to irradiate the surface of the specimen with the focused beams, and which includes at least one magnetic lens and at least one electrostatic lens that are individually disposed.

Abstract translation: 根据本发明的用于用带电粒子束照射样本的装置包括单个带电粒子发生源，可以同时衍生由电子和负离子形成的带电粒子束; 放置样品的样品架; 以及带电粒子照射装置，其被插入在带电粒子发生源和样本保持器之间，以便聚焦带电粒子束并用聚焦束照射样本的表面，并且至少包括至少一个磁性透镜 一个静电透镜单独设置。

公开(公告)号：US4280049A

公开(公告)日：1981-07-21

申请号：US042269

申请日：1979-05-24

Applicant: Helmut W. W. Werner ,  Antonius W. Witmer ,  Wilhelmus F. Knippenberg

Inventor： Helmut W. W. Werner ,  Antonius W. Witmer ,  Wilhelmus F. Knippenberg

IPC: G01N23/225 ,  G01N23/22 ,  G01N23/223 ,  G21K1/06 ,  H01J35/04 ,  H01J35/14 ,  H01J37/16 ,  H01J37/252

CPC classification number: G01N23/22 ,  H01J35/04 ,  H01J35/14 ,  G01N2223/072 ,  G01N2223/076 ,  G01N2223/079 ,  G01N2223/1006 ,  G01N2223/1016 ,  G01N2223/204 ,  G01N2223/308 ,  G01N2223/309 ,  G01N2223/313 ,  G01N2223/3306

Abstract: An X-ray spectrometer which is arranged inside an evacuatable housing and which comprises a wavelength dependent X-ray detection system and, for irradiating the specimen to be examined, an electron source with an electron deflection system for generating an electron beam and an X-ray source for generating an X-ray beam. The X-ray source consists of an anticathode on which the electron beam can be directed by the electron deflection system in order to generate the X-ray beam.

Abstract translation: 一种X射线光谱仪，其布置在可抽空的外壳内，并且包括波长相关的X射线检测系统，并且用于照射待检查的样本，具有用于产生电子束的电子偏转系统的电子源， 用于产生X射线束的X射线源。 X射线源由抗电弧组成，电子束可由电子偏转系统引导到其上，以产生X射线束。

公开(公告)号：US4107526A

公开(公告)日：1978-08-15

申请号：US758836

申请日：1977-01-12

Applicant: James T. McKinney ,  Thomas W. Rusch

Inventor： James T. McKinney ,  Thomas W. Rusch

IPC: G01N23/227 ,  G01N23/22 ,  G01Q30/20 ,  H01J37/252 ,  H01J49/14 ,  H01J49/44 ,  H01J49/48 ,  H01J35/00

CPC classification number: G01N23/22 ,  H01J49/142 ,  H01J49/48 ,  H01J49/482 ,  G01N2223/056 ,  G01N2223/104

Abstract: An ion scattering spectrometer (ISS) providing enhanced sensitivity, reduced background, and preferential detection of low-mass scattered ions over that of high-mass sputtered ions is disclosed. These advantages are accomplished by a biasing arrangement which maintains a potential difference between the analyzer exit and the detector input at less than 30 volts and substantially eliminates the high potential provided on detector inputs of prior art ion scattering spectrometers which attracted and thereby accelerated ions prior to impinging on the inputs.

Abstract translation: 公开了一种离子散射光谱仪（ISS），其提供了比高质量溅射离子更高的灵敏度，降低的背景和低质量散射离子的优先检测。 这些优点通过偏置装置来实现，该偏置装置在分析器出口和检测器输入之间保持小于30伏的电位差，并且基本上消除了现有技术的离子散射光谱仪的检测器输入端上提供的高电位， 影响投入。

公开(公告)号：US3984683A

公开(公告)日：1976-10-05

申请号：US581043

申请日：1975-05-27

Applicant: Simon Larach

Inventor： Simon Larach

IPC: G01N23/227 ,  A61B10/00 ,  G01N23/225 ,  G01N33/48 ,  G01N33/483 ,  G01N33/487 ,  H01J37/252 ,  H01J37/06

CPC classification number: H01J37/252 ,  G01N23/225

Abstract: A specimen containing biological cells is exposed to an electron beam. The secondary electrons emitted from the specimen are measured. Specimens with and without malignancy exhibit differences in magnitude of charging under an electron beam and differences in secondary electron energy distributions.

Abstract translation: 含有生物细胞的样品暴露于电子束。 测量从样品发射的二次电子。 具有和不具有恶性肿瘤的样品在电子束下显示充电量的差异以及二次电子能量分布的差异。

公开(公告)号：US3914606A

公开(公告)日：1975-10-21

申请号：US44848074

申请日：1974-03-06

Applicant: JEOL LTD

Inventor： HASHIMOTO HIROSHI ,  MOGAMI AKINORI

IPC: G01N23/225 ,  H01J37/252 ,  H01J49/48 ,  H01J39/00

CPC classification number: H01J49/488

Abstract: A device for measuring electron densities at a given energy level in an electron beam or the like having strong background noise, for example, in the detection of Auger electric energy spectrums. An electron analyzer passes electrons at the given energy level and at the same time or ad seriatum electrons of at least one adjacent energy level. Detecting means associated therewith produce signals indicative of the densities of the electrons at each energy level and combine these signals to produce a signal indicative of the density of the electrons of the given energy level absent background noise.

Abstract translation: 用于在具有强背景噪声的电子束等中测量给定能级的电子密度的装置，例如在俄歇电能谱的检测中。 电子分析仪以给定的能级和相同的时间或者至少一个相邻能级的电子传递电子。 与其相关联的检测装置产生指示每个能级处的电子密度的信号，并组合这些信号以产生指示给定能量级别的电子密度而不存在背景噪声的信号。