公开(公告)号：US20210020422A1

公开(公告)日：2021-01-21

申请号：US16306911

申请日：2016-06-23

Applicant: Hitachi High-Technologies Corporation

Inventor： Mitsuhiro NAKAMURA ,  Hironori ITABASHI ,  Hirofumi SATOU ,  Tsutomu SAITO ,  Masahiro SASAJIMA ,  Natsuki TSUNO ,  Yohei NAKAMURA

IPC: H01J49/08 ,  H01J37/147 ,  H01J49/10 ,  H01J3/36 ,  H01J3/26

Abstract: In order to provide a charged particle beam apparatus capable of stably detecting secondary particles and electromagnetic waves even for a non-conductive sample under high vacuum environment and enabling excellent observation and analysis, the charged particle beam apparatus includes a charged particle gun (12), scanning deflectors (17 and 18) configured to scan a charged particle beam (20) emitted from the charged particle gun (12) onto a sample (21), detectors (40 and 41) configured to detect a scanning control voltage input from an outside into the scanning deflectors, an arithmetic unit (42) configured to calculate, based on the detected scanning control voltage, irradiation pixel coordinates for the charged particle beam; and an irradiation controller (45) configured to control irradiation of the sample with the charged particle beam according to the irradiation pixel coordinates.

公开(公告)号：US20200266046A1

公开(公告)日：2020-08-20

申请号：US16738129

申请日：2020-01-09

Applicant: SHIMADZU CORPORATION

Inventor： Osamu FURUHASHI ,  Junichi TANIGUCHI ,  Kiyoshi OGAWA

IPC: H01J49/42 ,  H01J49/00 ,  H01J49/08 ,  H01J49/24

Abstract: A mass spectrometer includes: a vacuum chamber; and an ion trap and a surface emission-type electron emissive element, the ion trap and the surface emission-type electron emissive element being disposed inside the vacuum chamber.

公开(公告)号：US10446384B2

公开(公告)日：2019-10-15

申请号：US15567474

申请日：2016-04-19

Applicant: DH Technologies Development Pte. Ltd.

Inventor： James Walter Hager

IPC: H01J49/00 ,  H01J49/38 ,  H01J49/42 ,  H01J49/08

Abstract: A quadrupole is filled with ions and the ions are cooled by applying a pressure and gas flow within the quadrupole. Ions are trapped in the quadrupole by applying a DC voltage and an RF voltage to quadrupole rods of the quadrupole, one or more DC voltages to a plurality of auxiliary electrodes of the quadrupole, and a DC voltage and an RF voltage to an exit lens at the end of the quadrupole. The ions are coherently oscillated after the filling and cooling by applying a coherent excitation between at least two rods of the quadrupole rods. The coherently oscillating ions are axially ejected through the exit lens and to a destructive detector for detection by changing one or more voltages of the one or more DC voltages of the plurality of auxiliary electrodes and changing the DC voltage of the exit lens.

公开(公告)号：US20190027348A1

公开(公告)日：2019-01-24

申请号：US15656909

申请日：2017-07-21

Applicant: ATONARP INC.

Inventor： Anand Pandurangan ,  Siva Selvaraj ,  Anoop Hegde

IPC: H01J49/00 ,  H01J49/02 ,  H01J49/42 ,  H01J49/08

Abstract: Methods and circuits for detecting an ion current in a mass spectrometer are described. A circuit and a method may involve converting, over a length of integration time, the ion current to a voltage ramp by an integrating circuit having a gain setting. The circuit and the method may also involve determining a slope of the voltage ramp. The circuit and the method may also involve determining a magnitude of the ion current based on the slope of the voltage ramp and the gain setting. The circuit and the method may further involves determining an out-of-range state based on the voltage ramp and adjusting the gain setting of the integrating circuit, or the length of integration time or both, in response to the determining of the out-of-range state.

公开(公告)号：US20180114685A1

公开(公告)日：2018-04-26

申请号：US15567474

申请日：2016-04-19

Applicant: DH Technologies Development Pte. Ltd.

Inventor： James Walter Hager

IPC: H01J49/38 ,  H01J49/42 ,  H01J49/08

CPC classification number: H01J49/38 ,  H01J49/08 ,  H01J49/4205

Abstract: A quadrupole is filled with ions and the ions are cooled by applying a pressure and gas flow within the quadrupole. Ions are trapped in the quadrupole by applying a DC voltage and an RF voltage to quadrupole rods of the quadrupole, one or more DC voltages to a plurality of auxiliary electrodes of the quadrupole, and a DC voltage and an RF voltage to an exit lens at the end of the quadrupole. The ions are coherently oscillated after the filling and cooling by applying a coherent excitation between at least two rods of the quadrupole rods. The coherently oscillating ions are axially ejected through the exit lens and to a destructive detector for detection by changing one or more voltages of the one or more DC voltages of the plurality of auxiliary electrodes and changing the DC voltage of the exit lens.

公开(公告)号：US20170200598A1

公开(公告)日：2017-07-13

申请号：US15320953

申请日：2015-12-09

Applicant: Korea Basic Science Institute

Inventor： Seung Yong KIM ,  Mo YANG ,  Hyun Sik KIM

IPC: H01J49/08 ,  H01J49/42

CPC classification number: H01J49/08 ,  H01J49/147 ,  H01J49/422 ,  H01J49/424

Abstract: The present invention relates to an electron bean injection control of a mass spectrometer. A mass spectrometer of the present invention includes: a reference waveform generator configured to generate a reference waveform signal having one type of a square wave and a sine wave, a waveform generator configured to generate a sync signal synchronized with the reference waveform signal; an RF module configured to generate an RF voltage signal from the reference waveform signal and apply the RF voltage signal to an RF electrode in the ion trap, an electron beam generator configured to control an operation of an ultraviolet (UV) diode for generating an electron beam injected into the ion trap according to an input control signal, and a control circuit configured to generate the control signal by using the square wave signal.

公开(公告)号：US08981289B2

公开(公告)日：2015-03-17

申请号：US14125436

申请日：2011-12-16

Applicant: Seung Yong Kim ,  Mo Yang ,  Hyun Sik Kim

Inventor： Seung Yong Kim ,  Mo Yang ,  Hyun Sik Kim

IPC: H01J49/10 ,  H01J49/06 ,  H01J49/26 ,  H01J49/16 ,  H01J49/00 ,  H01J49/08 ,  H01J49/42

CPC classification number: H01J49/161 ,  H01J49/0022 ,  H01J49/08 ,  H01J49/424 ,  Y10T29/49826

Abstract: The present invention relates to an ultraviolet diode and an atomic mass analysis ionization source collecting device using an MCP. In the manufacturing of a portable atomic mass analyzer, an object of the present invention is to use an MCP electron multiplier plate, whereby ultraviolet photons emitted from an ultraviolet diode are irradiated on a front surface plate of the MCP electron multiplier plate to induce primary electrons, an amplified electron beam is collected from the electrons, and an electron beam is generated at a low temperature and low power and having a discharge time that is accurately controlled. The atomic mass analysis ionization source collecting device using an ultraviolet diode and an MCP according to the present invention comprises: an ultraviolet diode emitting ultraviolet rays by means of supplied power; an MCP electron multiplier plate inducing and amplifying primary electron discharge from ultraviolet photons from the ultraviolet diode, and collecting a large amount of electron beams from an MCP reverse surface plate; an electron condenser lens condensing the electron beam amplified through the MCP electron multiplier plate; an ion trap atomic mass separator ionizing gas sample molecules by means of an electron beam injected through the electron condenser lens; and an ion detector performing detection of ions separated from the ion trap atomic mass separator, by means of an atomic mass spectrum.

Abstract translation: 本发明涉及使用MCP的紫外二极管和原子质量分析电离源收集装置。 在便携式原子质量分析仪的制造中，本发明的目的是使用MCP电子倍增器板，其中从紫外二极管发射的紫外光子照射在MCP电子倍增器板的前表面板上以诱导一次电子 从电子收集放大的电子束，并且在低温和低功率下产生电子束，并且具有被精确控制的放电时间。 根据本发明的使用紫外二极管和MCP的原子质量分析电离源收集装置包括：通过供电的电源发射紫外线的紫外二极管; MCP电子倍增器板从紫外二极管的紫外光子中诱发和放大一次电子放电，并从MCP反面板收集大量的电子束; 电子聚光透镜，聚合通过MCP电子倍增器板放大的电子束; 离子阱原子质量分离器通过通过电子聚光透镜注入的电子束离子化气体样品分子; 以及离子检测器，其通过原子质谱进行离子阱原子质量分离器分离的离子的检测。

公开(公告)号：US08674320B2

公开(公告)日：2014-03-18

申请号：US13795291

申请日：2013-03-12

Applicant: Attolight SA

Inventor： Jean Berney

IPC: H01J29/58 ,  H01J49/08 ,  G21K1/00

CPC classification number: G21K1/00 ,  G01N23/2254 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/06333 ,  H01J2237/226 ,  H01J2237/2611 ,  H01J2237/2808 ,  H01J2237/30472

Abstract: A method for generating a cathodoluminescence map comprising the steps of: generating an intensity modulated charged particle beam; focusing said charged particle beam on a specimen; gating temporally the cathodoluminescence emitted by said specimen to provide time-gated cathodoluminescence; measuring the time-gated cathodoluminescence for different charged particle beam positions on the specimen to generate a cathodoluminescence map; deconvoluting the cathodoluminescence map to improve the resolution of said cathodoluminescence map. The invention further provides devices for carrying out such methods.

Abstract translation: 一种用于产生阴极发光图的方法，包括以下步骤：产生强度调制带电粒子束; 将所述带电粒子束聚焦在样品上; 定时地选择由所述样品发射的阴极发光，以提供时间门控的阴极发光; 测量样品上不同带电粒子束位置的时间门阴极发光以产生阴极发光图; 解卷积阴极发光图以改善所述阴极发光图的分辨率。 本发明还提供了用于执行这种方法的装置。

公开(公告)号：US07928411B2

公开(公告)日：2011-04-19

申请号：US12276872

申请日：2008-11-24

Applicant: Guenter Klemm ,  Volker Hacker ,  Hans-Georg Lotz

Inventor： Guenter Klemm ,  Volker Hacker ,  Hans-Georg Lotz

IPC: H01J49/08 ,  H01J37/305

CPC classification number: H01J37/077 ,  C23C14/22 ,  C23C14/243 ,  C23C14/30 ,  H01J37/3053

Abstract: A method of charging a web or foil is described. The method includes guiding a web or foil having a thickness of 10 μm or larger with at least on roller; providing a linear electron source having a housing acting as an anode, the housing having side walls; a slit opening in the housing for trespassing of a linear electron beam, the slit opening defining a length direction of the source; a cathode being arranged within the housing and having a first side facing the slit opening; at least one gas supply for providing a gas into the housing; and a power supply for providing a high voltage between the anode and the cathode; and emitting the linear electron beam, wherein the high voltage is adjusted for providing an electron energy to implant electrons of the electron beam within the web or foil.

Abstract translation: 描述了对网或箔进行充电的方法。 该方法包括至少在辊上引导具有10μm或更大厚度的纤维网或箔; 提供具有用作阳极的壳体的线性电子源，所述壳体具有侧壁; 所述壳体中的狭缝开口用于侵入线性电子束，所述狭缝开口限定所述源的长度方向; 阴极布置在壳体内并且具有面向狭缝开口的第一侧面; 用于将气体提供到壳体中的至少一个气体供应装置; 以及用于在阳极和阴极之间提供高电压的电源; 并发射线性电子束，其中调节高电压以提供电子能量以在电子束或箔内注入电子束的电子。

公开(公告)号：US07635842B2

公开(公告)日：2009-12-22

申请号：US12032526

申请日：2008-02-15

Applicant: Mehran Nasser-Ghodsi ,  Ming Lun Yu ,  Stuart Friedman ,  Gabor Toth

Inventor： Mehran Nasser-Ghodsi ,  Ming Lun Yu ,  Stuart Friedman ,  Gabor Toth

IPC: H01J49/08 ,  G01N23/227 ,  G01N23/22

CPC classification number: G01N23/2276

Abstract: A method and the instrument for characterization of the defects on a surface with Auger electron spectroscopy in a high vacuum environment are disclosed. Defects on the surface of a sample may be characterized with Auger electron spectroscopy in a high vacuum environment.

Abstract translation: 公开了一种在高真空环境中用俄歇电子能谱表征表面缺陷的方法和仪器。 样品表面的缺陷可以在高真空环境下用俄歇电子能谱表征。