公开(公告)号：US09925797B2

公开(公告)日：2018-03-27

申请号：US15326498

申请日：2015-08-02

Applicant: ORBOTECH LTD.

Inventor： Zvi Kotler ,  Michael Zenou ,  Itay Peled

IPC: B41J2/455

CPC classification number: B41J2/455 ,  B23K26/0676 ,  C23C14/04 ,  C23C14/28 ,  G03F7/2014

Abstract: Printing apparatus (20) includes a donor supply assembly (30), which provides a transparent donor substrate (26) having opposing first and second surfaces and a donor film formed on the second surface so as to position the donor film in proximity to a target area (28) on an acceptor substrate (22). An optical assembly (24) directs multiple output beams of laser radiation simultaneously in a predefined spatial pattern to pass through the first surface of the donor substrate and impinge on the donor film so as to induce ejection of material from the donor film onto the acceptor substrate according, thereby writing the predefined pattern onto the target area of the acceptor substrate.

公开(公告)号：US20170189995A1

公开(公告)日：2017-07-06

申请号：US15313569

申请日：2015-05-20

Applicant: ORBOTECH LTD.

Inventor： Michael Zenou ,  Zvi Kotler

IPC: B23K26/34 ,  H01C17/06 ,  H05K3/18 ,  H05K1/16 ,  B23K26/00 ,  C23C26/02

CPC classification number: B23K26/34 ,  B23K26/57 ,  B23K2103/10 ,  B23K2103/14 ,  C23C14/048 ,  C23C14/08 ,  C23C26/02 ,  H01C17/06 ,  H05K1/167 ,  H05K3/101 ,  H05K3/18 ,  H05K2203/0315 ,  H05K2203/087 ,  H05K2203/107 ,  H05K2203/128

Abstract: A method for material deposition includes providing a transparent donor substrate (34) having opposing first and second surfaces and a donor film (36) including a metal formed over the second surface. The donor substrate is positioned in proximity to an acceptor substrate (22), with the second surface facing toward the acceptor substrate, in an atmosphere containing oxygen. Pulses of laser radiation are directed to pass through the first surface of the donor substrate and impinge on the donor film so as to induce ejection from the donor film of droplets (44) of molten material onto the acceptor substrate, forming on the acceptor substrate particles (46) of the metal with an outer layer (54) comprising an oxide of the metal.

公开(公告)号：US20170178946A1

公开(公告)日：2017-06-22

申请号：US15124036

申请日：2015-04-05

Applicant: ORBOTECH LTD.

Inventor： Michael Zenou ,  Zvi Kotler ,  Jonathan Ankri ,  Abraham Rotnemer ,  Oleg Ermak

IPC: H01L21/70 ,  H05K3/12

CPC classification number: H01L21/705 ,  H01L21/4867 ,  H01L23/15 ,  H05K1/097 ,  H05K3/02 ,  H05K3/105 ,  H05K2203/107 ,  H05K2203/1492

Abstract: A method for manufacturing includes coating a substrate (22) with a matrix (28) containing a material to be patterned on the substrate. A pattern is fixed in the matrix by directing a pulsed energy beam to impinge on a locus of the pattern so as to cause adhesion of the material to the substrate along the pattern without fully sintering the material in the pattern. The matrix remaining on the substrate outside the fixed pattern is removed, and after removing the matrix, the material in the pattern is sintered.

公开(公告)号：US09232114B2

公开(公告)日：2016-01-05

申请号：US13966672

申请日：2013-08-14

Applicant: Orbotech Ltd.

Inventor： Yigal Katzir ,  Itay Gur-Arie ,  Yacov Malinovich

IPC: H04N3/14 ,  G01N21/88 ,  G01N21/89 ,  G01N21/956 ,  H01L27/146 ,  H04N5/374

CPC classification number: H04N3/155 ,  G01N21/8851 ,  G01N21/8901 ,  G01N21/956 ,  H01L27/14645 ,  H04N5/3743 ,  H04N5/37455

Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.

公开(公告)号：US20150285734A1

公开(公告)日：2015-10-08

申请号：US14246790

申请日：2014-04-07

Applicant: ORBOTECH LTD.

Inventor： Ronen LEVY ,  Ofer SAPHIER ,  Ariel DANAN

IPC: G01N21/21

CPC classification number: G01N21/8806 ,  G01N2201/06113 ,  G01N2201/0697

Abstract: An optical inspection system including a first multiplicity of cameras operative to image a second multiplicity of regions on an object, a third multiplicity of illumination sources and at least one illumination manager operative to combine illumination from the third multiplicity of illumination sources and thereafter to direct illumination therefrom to the second multiplicity of regions, the at least one illumination manager including a beam distributor receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams of a plurality of the non-mutually coherent, spatially concentrated laser pulses to a corresponding plurality of spatially distinct locations corresponding to the second multiplicity of regions.

Abstract translation: 一种光学检查系统，包括第一多个摄像机，其操作以对物体上的第二多个区域进行成像，第三多个照明源和至少一个照明管理器，其操作以组合来自第三多个照明源的照明，然后直接照射 所述至少一个照明管理器包括光束分布器，其接收多个非相互相干的空间集中的激光脉冲的复合输入光束，并且引导多个非相干空间集中的激光脉冲的多个复合输出光束， - 相当一致的，空间上集中的激光脉冲到对应于第二多个区域的对应的多个空间不同的位置。

公开(公告)号：US20140160757A1

公开(公告)日：2014-06-12

申请号：US13712580

申请日：2012-12-12

Applicant: ORBOTECH LTD.

Inventor： Ben-Zion LAVI ,  Ram ORON ,  Uri GOLD ,  Ilia LUTSKER ,  Mordechay SILBERBERG

IPC: F21V29/00

CPC classification number: H01L33/64 ,  F21V29/70 ,  H05K1/0207 ,  H05K1/0306 ,  H05K2201/10106

Abstract: An LED-based high power uniform light engine including an array of LEDs having a common anode and a fill factor which exceeds 0.85, the common anode having heat spreading functionality and an active heat sink which is thermally connected to the common anode.

Abstract translation: 一种基于LED的高功率均匀光引擎，其包括具有共同阳极的LED阵列和超过0.85的填充因子，具有热扩散功能的公共阳极和与公共阳极热连接的有源散热器。

公开(公告)号：US20040189787A1

公开(公告)日：2004-09-30

申请号：US10762246

申请日：2004-01-23

Applicant: ORBOTECH LTD

Inventor： Golan Hanina ,  Boris Kling

IPC: B41J002/455

CPC classification number: G02B27/1086 ,  G02B27/143 ,  G03F7/7005 ,  G03F7/70383

Abstract: An illumination system includes a plurality of solid state light emitters and a scanner operative to sequentially receive light from the plurality of solid state light emitters and to provide a time-multiplexed light output. The solid state light emitters are each operated in pulse mode to increase their brightness relative to the light output of similar emitters operating in continuous mode. The time multiplexed light output is a generally continuous output having a brightness that is greater than the brightness of the output of similar emitters operating in continuous mode. The time multiplexed light output is useful in photolithography and machine vision applications.

Abstract translation: 照明系统包括多个固态发光器和扫描器，其操作以顺序地接收来自多个固态发光体的光并提供时间复用的光输出。 固态光发射器各自以脉冲模式操作，以相对于以连续模式操作的类似发射器的光输出增加其亮度。 时间复用光输出是具有大于在连续模式下工作的类似发射器的输出的亮度的亮度的大致连续输出。 时间复用光输出在光刻和机器视觉应用中是有用的。

公开(公告)号：US20040156043A1

公开(公告)日：2004-08-12

申请号：US10753391

申请日：2004-01-09

Applicant: ORBOTECH LTD

Inventor： Gregory Toker ,  Andrei Brunfeld ,  Ilia Lutsker

IPC: G01B011/24 ,  G01N021/88

CPC classification number: G01N21/8806 ,  G01N21/95684 ,  G01N2021/1772 ,  G01N2021/1785 ,  G01N2021/8887 ,  G01N2201/06113

Abstract: Apparatus for sensing information regarding a surface including a first plurality of optical elements arranged to acquire two dimensional information about a surface, a second plurality of optical elements arranged to acquire topographical information about the surface, wherein the first plurality and the second plurality of optical elements are arranged to simultaneously provide the two dimensional information and the topographical information to at least partially non-overlapping portions of a single sensor array.

Abstract translation: 用于感测关于包括布置成获取关于表面的二维信息的第一多个光学元件的表面的信息的设备，布置成获取关于表面的形貌信息的第二多个光学元件，其中第一多个和第二多个光学元件 布置成同时向单个传感器阵列的至少部分不重叠的部分提供二维信息和形貌信息。

公开(公告)号：US20040126005A1

公开(公告)日：2004-07-01

申请号：US10706440

申请日：2003-11-12

Applicant: ORBOTECH LTD.

Inventor： Sharon Duvdevani ,  Tally Gilat-Bernshtein ,  Eyal Klingbell ,  Meir Mayo ,  Shmuel Rippa ,  Zeev Smilansky

IPC: G06K009/00

CPC classification number: G06K9/6253 ,  G06K9/00973 ,  G06K9/481 ,  G06K9/6204 ,  G06T7/001 ,  G06T2207/30141

Abstract: This invention discloses a system and method for inspecting objects, the method including creating a reference image for a representative object, the reference image comprising an at least partially vectorized first representation of boundaries within the image, acquiring an image of an object under inspection comprising a second representation of boundaries within the image, and comparing the second representation of boundaries to said at least partially vectorized first representation of boundaries, thereby to identify defects. A method and system for image processing in a software environment, the method including providing to a software based image processor a combination of user defined regions and defect triggers received from a hardware processor, and inspecting each of the user defined regions and regions surrounding hardware defect triggers each with a dynamically chosen set of inspection algorithms is also disclosed.

公开(公告)号：US20030047546A1

公开(公告)日：2003-03-13

申请号：US10265425

申请日：2002-10-07

Applicant: ORBOTECH LTD

Inventor： Abraham Gross ,  Zvi Kotler ,  Eliezer Lipman

IPC: B23K026/067

CPC classification number: B23K26/073 ,  B23K26/067 ,  B23K26/0676 ,  B23K26/082 ,  B23K26/382 ,  B23K26/40 ,  B23K2101/42 ,  B23K2103/16 ,  B23K2103/42 ,  B23K2103/50 ,  G02B26/0833 ,  G02B27/106 ,  G02B27/143 ,  G02B27/145 ,  H01S3/005 ,  H05K3/0026

Abstract: A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.

Abstract translation: 一种用于向衬底递送能量的系统，包括能够提供多个辐射束的动态可定向辐射能源，每个辐射束均以动态可选方向传播。 多个光束操纵元件中的独立定位的光束操纵元件可操作以接收光束并将其引导到基板上的可选位置。