公开(公告)号：US20130294476A1

公开(公告)日：2013-11-07

申请号：US13875375

申请日：2013-05-02

Applicant: LAYTEC AG

Inventor： Joerg-Thomas ZETTLER ,  Christian KASPARI

IPC: G01J5/02 ,  H05B33/08

CPC classification number: G01J5/02 ,  G01J1/08 ,  G01J5/0007 ,  G01J5/0896 ,  G01J5/522 ,  H05B33/0854

Abstract: A flat light emitting plate, a method for calibrating a pyrometer and a method for determining the temperature of a semiconducting wafer inside a processing chamber by said pyrometer. The invention provides a method for calibrating a pyrometer by means of a cold source which is also applicable to processing chambers with a narrow slit. According to the invention, a flat light emitting plate for simulating thermal radiation is provided, comprising a main body made of a transparent material, a light emission area located on an upper surface of the light emitting plate for emitting light, at least one light source located on a lateral surface of the light emitting plate, at least one detector located on a lateral surface of the light emitting plate, and a regulating circuit for adjusting the intensity of light emitted by the light sources.

Abstract translation: 平板发光板，用于校准高温计的方法和通过所述高温计确定处理室内的半导体晶片的温度的方法。 本发明提供了一种通过冷源校准高温计的方法，冷源也适用于具有狭窄狭缝的处理腔室。 根据本发明，提供了一种用于模拟热辐射的平板发光板，包括由透明材料制成的主体，位于发光板的上表面上用于发光的发光区域，至少一个光源 位于所述发光板的侧表面上，位于所述发光板的侧表面上的至少一个检测器和用于调节由所述光源发射的光的强度的调节电路。

公开(公告)号：US08561901B2

公开(公告)日：2013-10-22

申请号：US13067429

申请日：2011-06-01

Applicant: Kuo-Shu Huang ,  Ming-I Lee

Inventor： Kuo-Shu Huang ,  Ming-I Lee

IPC: G06K7/10

CPC classification number: G01J1/04 ,  G01J1/0271 ,  G01J1/0403 ,  G01J1/0411 ,  G01J1/08

Abstract: An optical identification module device has a light pipe integrally formed with transparent material, a lens holder, a lens, a sensing circuit board and a light emitting diode. A light source container and a guiding recess are arranged on one side of the light pipe. A first light channel is defined in the light pipe. An engaging bump and a separating bump aligned with the engaging bump are arranged on one side of the lens holder. The engaging bump engages with the guiding recess. A second light channel corresponding to the first light channel is defined in the lens holder, and the lens is arranged in the second light channel. The sensing circuit board with a receiver soldered at a position corresponding to the second light channel is arranged at the bottom of the lens holder. The light emitting diode is placed in the light source container.

Abstract translation: 光学识别模块装置具有与透明材料一体形成的光管，透镜保持器，透镜，感测电路板和发光二极管。 光源容器和引导凹部布置在光管的一侧。 在光管中限定第一光通道。 接合凸起和与接合凸起对准的分离凸起布置在透镜保持器的一侧上。 接合凸起与引导凹部接合。 在透镜保持器中限定对应于第一光通道的第二光通道，并且透镜布置在第二光通道中。 具有焊接在与第二光通道对应的位置处的接收器的感测电路板布置在透镜保持器的底部。 发光二极管放置在光源容器中。

公开(公告)号：US08553733B2

公开(公告)日：2013-10-08

申请号：US12527618

申请日：2008-02-21

Applicant: Taro Ando ,  Yoshiyuki Ohtake ,  Naoya Matsumoto ,  Takashi Inoue ,  Haruyoshi Toyoda ,  Norihiro Fukuchi

Inventor： Taro Ando ,  Yoshiyuki Ohtake ,  Naoya Matsumoto ,  Takashi Inoue ,  Haruyoshi Toyoda ,  Norihiro Fukuchi

IPC: H01S3/10

CPC classification number: G01J1/08 ,  B23K26/03 ,  B23K26/066 ,  G01J1/02 ,  G01J1/0204 ,  G01J1/04 ,  G01J1/0414 ,  G01N21/8806 ,  G02B27/58 ,  G11B7/1367 ,  G11B7/1387

Abstract: A light source device 1 includes a laser light source 10 and an optical phase modulator 15 or the like. The optical phase modulator 15 inputs coherent light output from the laser light source 10 and transmitted through a beam splitter 14, phase-modulates the light according to the position on a beam cross section of the light, and outputs the phase-modulated light to the beam splitter 14. When (p+1) areas sectioned by p circumferences centered on a predetermined position are set on a beam cross section of light input to the optical phase modulator 15, the more outside each of the (p+1) areas is, the wider the radial width of the area, the amount of phase modulation is constant in each of the (p+1) areas, and the amounts of phase modulation differ by π between two adjacent areas out of the (p+1) areas.

Abstract translation: 光源装置1包括激光光源10和光相位调制器15等。 光相位调制器15输入从激光光源10输出的相干光，并透过分束器14，根据光束横截面上的位置对光进行相位调制，并将相位调制光输出到 当在输入到光相位调制器15的光束的横截面上设定以预定位置为中心的以p周为中心的（p + 1）区域时，每个（p + 1）区域越多 ，区域的径向宽度越宽，相位调制量在（p + 1）区域的每个区域中是恒定的，并且相位调制量在（p + 1）区域之间的两个相邻区域之间不同pi 。

公开(公告)号：US20130194564A1

公开(公告)日：2013-08-01

申请号：US13358706

申请日：2012-01-26

Applicant: Chris Stapelmann ,  Johannes Kirchner

Inventor： Chris Stapelmann ,  Johannes Kirchner

IPC: G01J3/28

CPC classification number: G01J3/28 ,  G01J1/08 ,  H02S50/10

Abstract: A solar simulator is disclosed having a test chamber for receiving a photovoltaic device for testing, an illumination source for selectively illuminating the photovoltaic device to produce a test signal therefrom, a spectrophotometer for providing a measurement of the spectral distribution of the output of the illumination source, a database containing spectral response information of monitor cell, reference device and DUT, and a computation device for receiving said test signal and said measurement, wherein the computation device converts said test signal into a test value based on said measurement.

Abstract translation: 公开了一种太阳能模拟器，其具有用于接收用于测试的光伏器件的测试室，用于选择性地照射光伏器件以产生测试信号的照明源，用于提供照明源的输出的光谱分布的测量的分光光度计 ，包含监视单元，参考装置和DUT的频谱响应信息的数据库以及用于接收所述测试信号和所述测量的计算装置，其中所述计算装置基于所述测量将所述测试信号转换成测试值。

公开(公告)号：US20130003341A1

公开(公告)日：2013-01-03

申请号：US13583776

申请日：2011-03-14

Applicant: Nobuhiko Kubo ,  Kuniaki Takahashi

Inventor： Nobuhiko Kubo ,  Kuniaki Takahashi

IPC: F21V13/12

CPC classification number: F21S8/006 ,  G01J1/0411 ,  G01J1/0418 ,  G01J1/0474 ,  G01J1/08

Abstract: A solar simulator includes a light source, an optical reflection element positioned behind the light source to reflect light emitted from the light source in a form of pseudo parallel light, a low-angle light-diffusion optical element for diffusing the reflected light from the optical reflection element at a low diffusion angle, and a parallel light conversion optical element including a number of air holes arranged in parallel rows and provided with faculties for transmitting incident light parallel to the axis of the air holes to absorb or attenuate nonparallel incident light. The parallel light conversion optical element converts the incident light from the low-angle light-diffusion optical element to parallel light and emits the converted parallel light.

Abstract translation: 太阳模拟器包括光源，位于光源后面的光反射元件，用于以伪平行光的形式反射从光源发出的光;用于将来自光学器件的反射光扩散的低角度光扩散光学元件 具有低扩散角的反射元件和平行光转换光学元件，该平行光转换光学元件包括并排布置的多个气孔，并且设置有用于透射与空气孔的轴线平行的入射光的能量，以吸收或衰减不平行的入射光。 平行光转换光学元件将来自低角度光散射光学元件的入射光转换为平行光，并发射转换后的平行光。

公开(公告)号：US08308330B2

公开(公告)日：2012-11-13

申请号：US12475666

申请日：2009-06-01

Applicant: Günther Nath

Inventor： Günther Nath

IPC: G01D11/28

CPC classification number: G01J1/08 ,  G01J1/04 ,  G01J1/0474 ,  G01J1/58 ,  G01N21/8803 ,  G01N21/8806 ,  G01N2021/8835 ,  G01N2021/8845 ,  G01N2201/06133 ,  G01N2201/0634

Abstract: An apparatus for optical examination of documents. The apparatus includes a light source, a plurality of panels which are exchangeable with each other, a viewing unit having a window formed by at least one of the plurality of exchangeable panels through which window light emitted from the light source exits for examination of documents by an observer. Further included is a coupling unit configured to supply the light emitted from the light source into the viewing unit. The light source and the viewing unit are coupled together by a light guide and the light guide is adapted to supply the light from the light source to the coupling unit. At least one of the plurality of exchangeable panels is a fluorescent panel including a fluorescent substance. The fluorescent panel is fluorescent in the yellow-red-infrared wavelength range when being illuminated with light in the ultraviolet-blue-green wavelength range.

Abstract translation: 一种用于光学检查文件的设备。 该装置包括光源，可彼此交换的多个面板，观察单元，其具有由多个可更换面板中的至少一个形成的窗口，通过该窗口从光源发射的窗光通过该窗口离开以便通过 观察员 进一步包括被配置为将从光源发射的光提供到观察单元中的耦合单元。 光源和观察单元通过光导耦合在一起，并且光导适合于将来自光源的光提供给耦合单元。 多个可更换面板中的至少一个是包括荧光物质的荧光板。 当以紫外 - 蓝 - 绿色波长范围的光照射时，荧光板在黄 - 红 - 红外波长范围内是荧光的。

公开(公告)号：US20120235037A1

公开(公告)日：2012-09-20

申请号：US13067429

申请日：2011-06-01

Applicant: Kuo-Shu Huang ,  Ming-I Lee

Inventor： Kuo-Shu Huang ,  Ming-I Lee

IPC: G01J1/04 ,  G01J5/08

CPC classification number: G01J1/04 ,  G01J1/0271 ,  G01J1/0403 ,  G01J1/0411 ,  G01J1/08

Abstract: An optical identification module device has a light pipe integrally formed with transparent material, a lens holder, a lens, a sensing circuit board and a light emitting diode. A light source container and a guiding recess are arranged on one side of the light pipe. A first light channel is defined in the light pipe. An engaging bump and a separating bump aligned with the engaging bump are arranged on one side of the lens holder. The engaging bump engages with the guiding recess. A second light channel corresponding to the first light channel is defined in the lens holder, and the lens is arranged in the second light channel. The sensing circuit board with a receiver soldered at a position corresponding to the second light channel is arranged at the bottom of the lens holder. The light emitting diode is placed in the light source container.

Abstract translation: 光学识别模块装置具有与透明材料一体形成的光管，透镜保持器，透镜，感测电路板和发光二极管。 光源容器和引导凹部布置在光管的一侧。 在光管中限定第一光通道。 接合凸起和与接合凸起对准的分离凸起布置在透镜保持器的一侧上。 接合凸起与引导凹部接合。 在透镜保持器中限定对应于第一光通道的第二光通道，并且透镜布置在第二光通道中。 具有焊接在与第二光通道对应的位置处的接收器的感测电路板布置在透镜保持器的底部。 发光二极管放置在光源容器中。

公开(公告)号：US08194125B2

公开(公告)日：2012-06-05

申请号：US11980912

申请日：2007-10-31

Applicant: John A. Mack ,  Marion N. Todd ,  David F. Rock

Inventor： John A. Mack ,  Marion N. Todd ,  David F. Rock

IPC: H04N9/47

CPC classification number: G01J1/08 ,  G01J1/04 ,  G01J1/0437 ,  G01J1/0444

Abstract: A radiance source includes a housing having an interior wall, wherein at least a spherical portion of the interior wall of the housing is spherical, an interior volume, and an exit port. A light source is disposed within the interior volume of the housing. A calibration structure blocks and reflects a light ray that would otherwise travel directly from the light source to the exit port without reflecting from the interior wall. The calibration structure has a calibration body having a curved back surface facing the light source and a curved front surface facing the exit port. There is an optically diffuse, lambertian reflecting surface on at least the spherical portion of the interior wall of the housing, the back surface of the calibration body, and the front surface of the calibration body.

Abstract translation: 辐射源包括具有内壁的壳体，其中壳体的内壁的至少球形部分是球形的，内部容积和出口。 光源设置在壳体的内部空间内。 校准结构阻挡并反射否则将直接从光源行进到出口而不从内壁反射的光线。 校准结构具有校准体，其具有面向光源的弯曲后表面和面向出口的弯曲前表面。 在壳体的内壁的至少球形部分，校准体的后表面和校准体的前表面上存在光漫射的朗伯反射表面。

公开(公告)号：US08102531B2

公开(公告)日：2012-01-24

申请号：US11611133

申请日：2006-12-15

Applicant: Russell E. Abbink ,  Andrew D. Meigs

Inventor： Russell E. Abbink ,  Andrew D. Meigs

IPC: G01N21/00

CPC classification number: G01J1/08 ,  G01J1/04 ,  G01J1/0422 ,  G01J1/0474 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0216 ,  G01J3/0254 ,  G01J3/10 ,  G01J2001/0481

Abstract: The present invention provides an optical transmission device, comprising a chamber having a light input into the chamber, and having a first port allowing light to pass out of the chamber, and comprising internal surfaces where at least a portion of the surfaces is diffusely reflecting, and where at least a portion of the one or more surfaces is specularly reflecting, and where the light input and the first port and the one or more surfaces are configured such that substantially all light entering the chamber via the light source within a first predetermined aperture must encounter the diffusely reflecting portion before exiting the chamber via the first port within a second predetermined aperture. The invention can provide substantially homogenous light transmission, both as a source of light for optical systems and as a collector of light from a sample.

Abstract translation: 本发明提供了一种光传输装置，其包括具有入射到室中的光的腔室，并且具有允许光从腔室中流出的第一端口，并且包括至少部分表面漫反射的内表面， 并且其中所述一个或多个表面的至少一部分是镜面反射的，并且其中所述光输入和所述第一端口以及所述一个或多个表面被配置为使得基本上所有的光经由所述光源在第一预定孔内进入所述室 必须在第二预定孔径内经由第一端口离开室之前遇到漫反射部分。 本发明可以提供基本均匀的光透射，既作为光学系统的光源又作为来自样品的光的收集器。

公开(公告)号：US08072587B2

公开(公告)日：2011-12-06

申请号：US11621036

申请日：2007-01-08

Applicant: Prakash Kasturi ,  Adrian Nastase

Inventor： Prakash Kasturi ,  Adrian Nastase

IPC: G01J1/00

CPC classification number: G01J1/02 ,  G01J1/0219 ,  G01J1/0228 ,  G01J1/0271 ,  G01J1/08 ,  G01J1/4257 ,  G01J11/00

Abstract: A machine and methods measure a characteristic of an optical signal incident upon a detector characterized by one or more dynamic response parameters. One method receives an output signal from the detector and compares that output signal and a computationally determined response of the detector to a known optical signal incident upon the detector. The response is based on said one or more dynamic parameters. The method determines the characteristic based on a relationship between the output signal and the computationally determined response. Another method observes an output signal from an optical detector detecting one or more optical signals, accesses a characteristic curve of detector response, compares the observed output signal to the characteristic curve, and calculates at least one characteristic of one or more optical signals based on a relationship of the observed output signal and the characteristic curve.

Abstract translation: 机器和方法测量入射在特征为一个或多个动态响应参数的检测器上的光信号的特性。 一种方法从检测器接收输出信号，并将该输出信号和检测器的计算确定响应与入射到检测器上的已知光信号进行比较。 所述响应基于所述一个或多个动态参数。 该方法基于输出信号和计算确定的响应之间的关系确定特性。 另一种方法观察来自检测一个或多个光信号的光检测器的输出信号，访问检测器响应的特性曲线，将观察到的输出信号与特性曲线进行比较，并且基于一个或多个光信号来计算至少一个特性 观测输出信号与特性曲线的关系。