Abstract:
A flat light emitting plate, a method for calibrating a pyrometer and a method for determining the temperature of a semiconducting wafer inside a processing chamber by said pyrometer. The invention provides a method for calibrating a pyrometer by means of a cold source which is also applicable to processing chambers with a narrow slit. According to the invention, a flat light emitting plate for simulating thermal radiation is provided, comprising a main body made of a transparent material, a light emission area located on an upper surface of the light emitting plate for emitting light, at least one light source located on a lateral surface of the light emitting plate, at least one detector located on a lateral surface of the light emitting plate, and a regulating circuit for adjusting the intensity of light emitted by the light sources.
Abstract:
An optical identification module device has a light pipe integrally formed with transparent material, a lens holder, a lens, a sensing circuit board and a light emitting diode. A light source container and a guiding recess are arranged on one side of the light pipe. A first light channel is defined in the light pipe. An engaging bump and a separating bump aligned with the engaging bump are arranged on one side of the lens holder. The engaging bump engages with the guiding recess. A second light channel corresponding to the first light channel is defined in the lens holder, and the lens is arranged in the second light channel. The sensing circuit board with a receiver soldered at a position corresponding to the second light channel is arranged at the bottom of the lens holder. The light emitting diode is placed in the light source container.
Abstract:
A light source device 1 includes a laser light source 10 and an optical phase modulator 15 or the like. The optical phase modulator 15 inputs coherent light output from the laser light source 10 and transmitted through a beam splitter 14, phase-modulates the light according to the position on a beam cross section of the light, and outputs the phase-modulated light to the beam splitter 14. When (p+1) areas sectioned by p circumferences centered on a predetermined position are set on a beam cross section of light input to the optical phase modulator 15, the more outside each of the (p+1) areas is, the wider the radial width of the area, the amount of phase modulation is constant in each of the (p+1) areas, and the amounts of phase modulation differ by π between two adjacent areas out of the (p+1) areas.
Abstract:
A solar simulator is disclosed having a test chamber for receiving a photovoltaic device for testing, an illumination source for selectively illuminating the photovoltaic device to produce a test signal therefrom, a spectrophotometer for providing a measurement of the spectral distribution of the output of the illumination source, a database containing spectral response information of monitor cell, reference device and DUT, and a computation device for receiving said test signal and said measurement, wherein the computation device converts said test signal into a test value based on said measurement.
Abstract:
A solar simulator includes a light source, an optical reflection element positioned behind the light source to reflect light emitted from the light source in a form of pseudo parallel light, a low-angle light-diffusion optical element for diffusing the reflected light from the optical reflection element at a low diffusion angle, and a parallel light conversion optical element including a number of air holes arranged in parallel rows and provided with faculties for transmitting incident light parallel to the axis of the air holes to absorb or attenuate nonparallel incident light. The parallel light conversion optical element converts the incident light from the low-angle light-diffusion optical element to parallel light and emits the converted parallel light.
Abstract:
An apparatus for optical examination of documents. The apparatus includes a light source, a plurality of panels which are exchangeable with each other, a viewing unit having a window formed by at least one of the plurality of exchangeable panels through which window light emitted from the light source exits for examination of documents by an observer. Further included is a coupling unit configured to supply the light emitted from the light source into the viewing unit. The light source and the viewing unit are coupled together by a light guide and the light guide is adapted to supply the light from the light source to the coupling unit. At least one of the plurality of exchangeable panels is a fluorescent panel including a fluorescent substance. The fluorescent panel is fluorescent in the yellow-red-infrared wavelength range when being illuminated with light in the ultraviolet-blue-green wavelength range.
Abstract:
An optical identification module device has a light pipe integrally formed with transparent material, a lens holder, a lens, a sensing circuit board and a light emitting diode. A light source container and a guiding recess are arranged on one side of the light pipe. A first light channel is defined in the light pipe. An engaging bump and a separating bump aligned with the engaging bump are arranged on one side of the lens holder. The engaging bump engages with the guiding recess. A second light channel corresponding to the first light channel is defined in the lens holder, and the lens is arranged in the second light channel. The sensing circuit board with a receiver soldered at a position corresponding to the second light channel is arranged at the bottom of the lens holder. The light emitting diode is placed in the light source container.
Abstract:
A radiance source includes a housing having an interior wall, wherein at least a spherical portion of the interior wall of the housing is spherical, an interior volume, and an exit port. A light source is disposed within the interior volume of the housing. A calibration structure blocks and reflects a light ray that would otherwise travel directly from the light source to the exit port without reflecting from the interior wall. The calibration structure has a calibration body having a curved back surface facing the light source and a curved front surface facing the exit port. There is an optically diffuse, lambertian reflecting surface on at least the spherical portion of the interior wall of the housing, the back surface of the calibration body, and the front surface of the calibration body.
Abstract:
The present invention provides an optical transmission device, comprising a chamber having a light input into the chamber, and having a first port allowing light to pass out of the chamber, and comprising internal surfaces where at least a portion of the surfaces is diffusely reflecting, and where at least a portion of the one or more surfaces is specularly reflecting, and where the light input and the first port and the one or more surfaces are configured such that substantially all light entering the chamber via the light source within a first predetermined aperture must encounter the diffusely reflecting portion before exiting the chamber via the first port within a second predetermined aperture. The invention can provide substantially homogenous light transmission, both as a source of light for optical systems and as a collector of light from a sample.
Abstract:
A machine and methods measure a characteristic of an optical signal incident upon a detector characterized by one or more dynamic response parameters. One method receives an output signal from the detector and compares that output signal and a computationally determined response of the detector to a known optical signal incident upon the detector. The response is based on said one or more dynamic parameters. The method determines the characteristic based on a relationship between the output signal and the computationally determined response. Another method observes an output signal from an optical detector detecting one or more optical signals, accesses a characteristic curve of detector response, compares the observed output signal to the characteristic curve, and calculates at least one characteristic of one or more optical signals based on a relationship of the observed output signal and the characteristic curve.