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    Optically powered charged particle accelerator
    41.
    发明授权
    Optically powered charged particle accelerator 失效
    光学带电粒子加速器

    公开(公告)号：US5049753A

    公开(公告)日：1991-09-17

    申请号：US549885

    申请日：1990-06-28

    Applicant: Larry D. Flesner

    Inventor： Larry D. Flesner

    IPC: H01J3/02 ,  H01J27/00 ,  H01J37/073 ,  H01J37/248 ,  H02J17/00 ,  H05H5/00

    CPC classification number: H02J17/00 ,  H01J27/00 ,  H01J3/021 ,  H01J37/073 ,  H01J37/248 ,  H05H5/00 ,  H01J2201/342

    Abstract: A charged particle control apparatus provides very high voltage particle beams. One or more photocell arrays provide bias voltages for beam accelerating stages. The arrays are made from a number of microfabricated photocells connected in series to produce a voltage output that is the sum of the voltages from the individual cells. Arrays of each stage are connected in series to produce a cumulative stage voltage that is applied to an accelerating electrode made part of the stage.These accelerating stages are disposed within a transparent vacuum chamber and are spaced from a charged particle source stage disposed near one end of the chamber. This charged particle source stage includes an emission source such as a photocathode. The photo arrays of the accelerating stages are connected in series to produce a potential that is applied to the particle source stage.Optical power illuminates the stages to generate desired voltage biases to the accelerating electrodes. A light source is used to excite the photocathode when this emission source is used. Electrons from the emission source are accelerated by the accelerating electrodes and are emitted from the chamber which is typically conjoined with other apparatus.By utilizing photocell arrays to generate beam current and accelerating biases, as well as a photocathode for providing a source of electrons, the apparatus of the invention is completely optically isolated thereby requiring no direct electrical connections to the apparatus even though multiple accelerating stages are used to facilitate the achievement of very high voltage particle beams.

    Abstract translation: 带电粒子控制装置提供非常高电压的粒子束。 一个或多个光电池阵列为光束加速阶段提供偏置电压。 阵列由多个串联连接的微细胞光电池制成，以产生电压输出，该电压输出是来自各个单元的电压之和。 每个级的阵列串联连接以产生累加级电压，该电压施加到制成该级的一部分的加速电极。 这些加速阶段设置在透明真空室内并与设置在室的一端附近的带电粒子源级间隔开。 该带电粒子源级包括诸如光电阴极的发射源。 加速级的光阵列被串联连接以产生施加到粒子源级的电位。 光功率照亮阶段以产生对加速电极的期望的电压偏压。 当使用该发射源时，使用光源来激发光电阴极。 来自发射源的电子被加速电极加速并且从通常与其他装置结合的室发射。 通过利用光电池阵列产生射束电流和加速偏置，以及用于提供电子源的光电阴极，本发明的装置是完全光学隔离的，因此即使使用多个加速阶段也不需要与设备的直接电连接 有助于实现非常高电压的粒子束。

    Charged-particle accelerator
    42.
    发明授权
    Charged-particle accelerator 失效
    带电粒子加速器

    公开(公告)号：US4703234A

    公开(公告)日：1987-10-27

    申请号：US714613

    申请日：1985-03-21

    Applicant: Shoji Kato

    Inventor： Shoji Kato

    IPC: H01J37/06 ,  G01Q30/02 ,  G01Q30/16 ,  H01J37/248 ,  H05H5/00 ,  H05H5/02 ,  H01J25/10

    CPC classification number: H01J37/248

    Abstract: With an accelerator for accelerating an electron beam by a voltage of about 400 KV having a stability of 10.sup.-6, it is difficult to use a flexible, insulated cable to feed the output from a power supply to an electron beam and an accelerating tube. Accordingly, the present invention employs a rodlike connector instead of such an insulated cable. A guide means is provided to permit the movement of a power supply column in the direction of the axis of the connector. This facilitates cleaning or otherwise maintaining the power supply column, the electron gun, and the accelerating tube.

    Abstract translation: 通过具有稳定度为10-6的约400KV的电压来加速电子束的加速器，难以使用柔性的绝缘电缆将电源的输出馈送到电子束和加速管。 因此，本发明采用棒状连接器代替这种绝缘电缆。 提供引导装置以允许电源柱沿着连接器的轴线的方向移动。 这有助于清洁或以其他方式维持供电柱，电子枪和加速管。

    Electron microscope
    43.
    发明授权
    Electron microscope 失效
    电子显微镜

    公开(公告)号：US3959651A

    公开(公告)日：1976-05-25

    申请号：US463629

    申请日：1974-04-24

    Applicant: Leonard M. Welter

    Inventor： Leonard M. Welter

    IPC: C03C3/21 ,  C03C4/14 ,  H01J37/073 ,  H01J37/09 ,  H01J37/248 ,  H01J37/26

    CPC classification number: C03C3/21 ,  C03C4/14 ,  H01J37/073 ,  H01J37/09 ,  H01J37/248

    Abstract: In a field emission charged particle microscope having a housing defining a vacuum chamber, a field emission tip disposed in the chamber for generating charged particles, electrode means for establishing electrostatic focusing and accelerating field for forming a beam of charged particles, field electrode means in juxtaposition with the tip for developing an electrostatic field for extraction of charged particles generated by the tip and voltage means connected to the electrode means and the tip for supplying electrical potential thereto to establish the electrostatic fields, the inclusion of an apertured, conductive symmetrical glass resistor disposed intermediate the field electrode means and the electrode means for establishing the focusing and accelerating field, and in electrical contact therewith.

    Abstract translation: 在具有限定真空室的壳体的场致发射带电粒子显微镜中，设置在所述腔室中用于产生带电粒子的场致发射尖端，用于建立静电聚焦的电极装置和用于形成带电粒子束的加速场，场并联装置并置 用于产生用于提取由尖端产生的带电粒子的静电场和连接到电极装置的电压装置和用于向其施加电位的尖端以建立静电场的尖端，包括一个有孔导电对称玻璃电阻器 在场电极装置和用于建立聚焦和加速场的电极装置之间并与其电接触。

    High-Voltage Insulating Structure, Charged Particle Gun, and Charged Particle Beam Device
    46.
    发明公开
    High-Voltage Insulating Structure, Charged Particle Gun, and Charged Particle Beam Device 审中-公开

    公开(公告)号：US20240242917A1

    公开(公告)日：2024-07-18

    申请号：US18559408

    申请日：2021-05-17

    Applicant: Hitachi High-Tech Corporation

    Inventor： Yasuchika SUZUKI ,  Shinichi KATO ,  Takashi OHNISHI ,  Shunichi WATANABE

    IPC: H01J37/065 ,  H01J37/248 ,  H01J37/28

    CPC classification number: H01J37/065 ,  H01J37/248 ,  H01J37/28 ,  H01J2237/2802

    Abstract: The purpose of the present disclosure is to provide a high-voltage insulating structure capable of reducing an electric field around a conductor to which a high voltage is applied. In this high-voltage insulating structure, an electrically conductive part, to which a high voltage is applied and which extends in an axial direction, is surrounded by an insulator, wherein the insulator comprises a first insulator 105, a second insulator 203 positioned on the opposite side from the first insulator in the axial direction, and a third insulator 205 positioned between the first and second insulators. The electrical resistivity of the third insulator 205 is smaller than the electrical resistivities of the first and second insulators. As for the thickness of the third insulator 205 in the axial direction, a first thickness at the outer side farther from the electrically conductive part is less than a second thickness at the inner side closer to the electrically conductive part.

    High Voltage Amplifier Circuit and Analyzer Apparatus
    48.
    发明公开
    High Voltage Amplifier Circuit and Analyzer Apparatus 审中-公开

    公开(公告)号：US20230148109A1

    公开(公告)日：2023-05-11

    申请号：US17980653

    申请日：2022-11-04

    Applicant: JEOL Ltd.

    Inventor： Masahiro Arimitsu

    IPC: H02M3/158 ,  H01J37/248

    CPC classification number: H02M3/1584 ,  H01J37/248

    Abstract: An amplifier circuit includes a constant current circuit for outputting a constant current signal at its output terminal, an operational amplifier for outputting an amplified control signal based on the first voltage signal, and an amplified voltage output circuit for outputting a second voltage signal based on both the constant current signal and the amplified control signal. The constant current circuit has a light-emitting device having one end supplied with the constant voltage signal and another end supplied with ground potential, a light responsive electricity generating device for outputting a drive signal in response to light emitted by the light-emitting device, a first transistor generating the constant current signal based on the amplified voltage signal applied thereto and to output the constant current signal; and a current control circuit for detecting the value of the constant current signal and controlling the supply of the drive signal based on the detection.

    Compact, configurable power supply for energizing ozone-producing cells
    50.
    发明授权
    Compact, configurable power supply for energizing ozone-producing cells 有权

    公开(公告)号：US09865426B2

    公开(公告)日：2018-01-09

    申请号：US15056330

    申请日：2016-02-29

    Applicant: MKS Instruments, Inc.

    Inventor： Ken Tran ,  Feng Tian ,  Xing Chen ,  Franklin Lee

    IPC: C01B13/11 ,  H01J37/248

    CPC classification number: H01J37/248 ,  C01B13/115 ,  C01B2201/90

    Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

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