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    PASSIVE DETECTORS FOR IMAGING SYSTEMS
    53.
    发明申请
    PASSIVE DETECTORS FOR IMAGING SYSTEMS 审中-公开
    成像系统被动探测器

    公开(公告)号：US20170023406A1

    公开(公告)日：2017-01-26

    申请号：US15131048

    申请日：2016-04-18

    Applicant: DIGITAL DIRECT IR, INC.

    Inventor： Peter N. Kaufman ,  Lynn F. Fuller

    IPC: G01J1/44 ,  G01J1/02

    CPC classification number: G01J1/44 ,  G01J1/0204 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/046 ,  G01J5/06 ,  G01J5/0806 ,  G01J5/10 ,  G01J5/34 ,  G01J5/40 ,  G01J5/44 ,  G01J2005/0077 ,  G01J2005/065

    Abstract: Passive detector structures for imaging systems are provided, which are based on a coefficient of thermal expansion (CTE) framework. For example, an imaging device includes a substrate, and a photon detector disposed over a surface of the substrate. The photon detector comprises a stack of thin film layers including a resonator member and an unpowered detector member. The resonator member generates an output signal having a frequency or period of oscillation. The unpowered detector member has a CTE, which causes the unpowered detector member to expand or contract due to thermal heating resulting from photon exposure, and apply a mechanical force to the resonator member. The mechanical force causes a change in the frequency or period of oscillation of the output signal generated by the resonator member, wherein the change in the frequency or period of oscillation is utilized to determine an amount of photon exposure of the photon detector.

    Abstract translation: 提供了用于成像系统的被动检测器结构，其基于热膨胀系数（CTE）框架。 例如，成像装置包括衬底和设置在衬底表面上的光子检测器。 光子检测器包括一层薄膜层，包括谐振器构件和无动力检测器构件。 谐振器构件产生具有振荡频率或周期的输出信号。 无动力检测器构件具有CTE，其由于由光子暴露导致的热加热而使无动力的检测器构件膨胀或收缩，并且向谐振器构件施加机械力。 机械力引起由谐振器构件产生的输出信号的频率或振荡周期的变化，其中利用频率或振荡周期的变化来确定光子检测器的光子曝光量。

    TEMPERATURE MEASUREMENT ARRANGEMENT
    55.
    发明申请
    TEMPERATURE MEASUREMENT ARRANGEMENT 有权
    温度测量装置

    公开(公告)号：US20160223402A1

    公开(公告)日：2016-08-04

    申请号：US15021454

    申请日：2014-09-11

    Applicant: Avner LIBMAN ,  Lior DARSHAN ,  GOJI LIMITED

    Inventor： Avner LIBMAN ,  Lior DARSHAN

    IPC: G01J5/08 ,  G01J5/06

    CPC classification number: G01J5/0862 ,  G01J5/06 ,  G01J2005/065 ,  H05B6/705 ,  Y02B40/146

    Abstract: Disclosed is a system for dielectrically processing a product in a radio frequency (RF) cavity. The system may include a cavity; an RF feeding module that includes a plurality of radiating elements configured to feed RF radiation into the cavity, and a plurality of dummy loads for receiving RF energy coupled from the cavity into the radiating elements; and the system includes a processor configured to (a) estimate an effect operating the system at each of a plurality of sets of operating parameters will have on the temperature of each of the dummy loads; (b) choosing among the plurality of sets of operating parameters at least one set based on the estimation; and (c) controlling the system to operate at the chosen at least one set of operating parameters.

    Abstract translation: 公开了一种用于在射频（RF）空腔中对产品进行介电处理的系统。 该系统可以包括空腔; RF馈送模块，其包括被配置为将RF辐射馈送到空腔中的多个辐射元件，以及用于接收从空腔耦合到辐射元件的RF能量的多个虚拟负载; 并且所述系统包括处理器，其被配置为（a）估计在多组操作参数中的每一个将对每个所述虚拟负载的温度具有的操作系​​统的影响; （b）基于所述估计在所述多组运行参数中选择至少一组; 以及（c）控制所述系统在所选择的至少一组操作参数下操作。

    Infra-red imager
    56.
    发明授权
    Infra-red imager 有权
    红外成像仪

    公开(公告)号：US09194750B2

    公开(公告)日：2015-11-24

    申请号：US13291411

    申请日：2011-11-08

    Applicant: Dov Oster ,  Michael Singer ,  Alina Koifman ,  Tuvy Markovitz

    Inventor： Dov Oster ,  Michael Singer ,  Alina Koifman ,  Tuvy Markovitz

    IPC: G01J5/06 ,  G01J5/08 ,  G01J5/00 ,  G01J5/60

    CPC classification number: G01J5/06 ,  G01J5/061 ,  G01J5/08 ,  G01J5/0806 ,  G01J2005/0077 ,  G01J2005/065 ,  G01J2005/607

    Abstract: An infrared (IR) imaging system is presented. The system includes a cooling chamber associated with a cooler generating a certain temperature condition inside the chamber. The cooling chamber has an optical window, and includes thereinside an IR detection unit including one or more detectors thermally coupled to the cooler and at least two cold shields thermally coupled to the cooler and carrying at least two imaging optical assemblies. The at least two imaging optical assemblies are enclosed by the cold shields in between the detection unit and the optical window and thereby define at least two different optical channels for imaging light from the optical window onto the one or more detectors of the detection unit.

    Abstract translation: 介绍了红外（IR）成像系统。 该系统包括与冷却器相关联的冷却室，其在室内产生一定温度条件。 冷却室具有光学窗口，并且包括IR检测单元，其包括热耦合到冷却器的一个或多个检测器和与冷却器热耦合并携带至少两个成像光学组件的至少两个冷屏蔽件。 所述至少两个成像光学组件被所述检测单元和所述光学窗口之间的冷屏蔽包围，从而限定至少两个不同的光学通道，用于将来自所述光学窗口的光成像到所述检测单元的所述一个或多个检测器。

    PYROMETER BACKGROUND ELIMINATION
    57.
    发明申请
    PYROMETER BACKGROUND ELIMINATION 有权
    染色体背景消除

    公开(公告)号：US20150131699A1

    公开(公告)日：2015-05-14

    申请号：US14522858

    申请日：2014-10-24

    Applicant: Applied Materials, Inc.

    Inventor： Wolfgang R. ADERHOLD

    IPC: G01J5/06

    CPC classification number: G01J5/06 ,  G01J5/0007 ,  G01J2005/0085 ,  G01J2005/065 ,  H01L21/67115

    Abstract: Embodiments disclosed herein provide an RTP system for processing a substrate. An RTP chamber has a radiation source configured to deliver radiation to a substrate disposed within a processing volume. One or more pyrometers are coupled to the chamber body opposite the radiation source. In one example, the radiation source is disposed below the substrate and the pyrometers are disposed above the substrate. In another example, the radiation source is disposed above the substrate and the pyrometers are disposed below the substrate. The substrate may be supported in varying manners configured to reduce physical contact between the substrate support and the substrate. An edge ring and shield are disposed within the processing volume and are configured to reduce or eliminate background radiation from interfering with the pyrometers. Additionally, an absorbing surface may be coupled to the chamber body to further reduce background radiation interference.

    Abstract translation: 本文公开的实施例提供了一种用于处理衬底的RTP系统。 RTP室具有被配置为将辐射传送到设置在处理容积内的衬底的辐射源。 一个或多个高温计耦合到与辐射源相对的腔体。 在一个示例中，辐射源设置在衬底下方，高温计设置在衬底上方。 在另一示例中，辐射源设置在衬底上方，高温计设置在衬底下方。 衬底可以以不同的方式被支撑，其被配置为减少衬底支撑件和衬底之间的物理接触。 边缘环和屏蔽件设置在处理体积内并且被配置为减少或消除背景辐射干扰高温计。 此外，吸收表面可以联接到腔体，以进一步减少背景辐射干扰。

    METHOD FOR THE TEMPERATURE MEASUREMENT OF SUBSTRATES IN A VACUUM CHAMBER
    59.
    发明申请
    METHOD FOR THE TEMPERATURE MEASUREMENT OF SUBSTRATES IN A VACUUM CHAMBER 审中-公开
    基板在真空室中的温度测量方法

    公开(公告)号：US20140369387A1

    公开(公告)日：2014-12-18

    申请号：US14345019

    申请日：2012-09-07

    Applicant: Siegfried Krassnitzer ,  Markus Esselbach

    Inventor： Siegfried Krassnitzer ,  Markus Esselbach

    IPC: G01K7/10 ,  G01K7/04

    CPC classification number: G01K7/10 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/061 ,  G01J2005/0048 ,  G01J2005/065 ,  G01J2005/068 ,  G01K7/04

    Abstract: The present invention relates to a temperature-measuring system, comprising a temperature sensor and a reference body, wherein means for determining temperature changes of the reference body and/or for control of the temperature of the reference body are provided. When the temperature measuring-system is used in a vacuum, the reference body forms no substantial material thermal bridges to the temperature sensor and the reference body shields the temperature sensor with respect to the environment in such a way that only radiation that comes from the surfaces of the reference and from surfaces of which the temperature is to be determined reaches the surface of the temperature sensor.

    Abstract translation: 本发明涉及一种温度测量系统，包括温度传感器和参考体，其中提供了用于确定参考体的温度变化和/或用于控制参考体的温度的装置。 当在真空中使用温度测量系统时，参考体不形成温度传感器的实质材料热桥，并且参考体相对于环境屏蔽温度传感器，使得只有来自表面的辐射 的参考值和从其表面测定温度到达温度传感器的表面。

    Electromagnetic radiation detecting device comprising an active bolometer and a shielded reference bolometer
    60.
    发明授权
    Electromagnetic radiation detecting device comprising an active bolometer and a shielded reference bolometer 有权
    电磁辐射检测装置包括有源测辐射热计和屏蔽参考测辐射热计

    公开(公告)号：US08772718B2

    公开(公告)日：2014-07-08

    申请号：US13270633

    申请日：2011-10-11

    Applicant: Jean-Louis Ouvrier-Buffet ,  Jerome Meilhan

    Inventor： Jean-Louis Ouvrier-Buffet ,  Jerome Meilhan

    IPC: G01J5/00 ,  G01J5/12 ,  G01J5/04 ,  G01J5/02 ,  G01J5/20 ,  G01J5/06

    CPC classification number: G01J5/06 ,  G01J5/02 ,  G01J5/0285 ,  G01J5/04 ,  G01J5/045 ,  G01J5/12 ,  G01J5/20 ,  G01J2005/065 ,  G01J2005/068

    Abstract: A device for detecting electromagnetic radiation that comprises an active bolometer provided with a first element sensitive to said electromagnetic radiation and a reference bolometer identical to the active bolometer, provided with a second element sensitive to said electromagnetic radiation. The active bolometer and reference bolometer are arranged close to one another on the same substrate. A cover covers at least the part of the second sensitive element exposed to the electromagnetic radiation and arranges an empty space between said second sensitive element and the cover. The inner wall of the cover is constituted by an absorbent layer made from a material absorbing at least the thermal radiations emitted by the second sensitive element. A reflecting shield forms at least a part of the outer wall exposed to said electromagnetic radiation.

    Abstract translation: 一种用于检测电磁辐射的装置，其包括具有对所述电磁辐射敏感的第一元件的活性测辐射热计和与活性测辐射热计相同的参考辐射热计，其具有对所述电磁辐射敏感的第二元件。 主动测辐射热计和参考测辐射热谱仪在同一基板上彼此靠近。 覆盖物覆盖暴露于电磁辐射的第二敏感元件的至少一部分，并且在所述第二敏感元件和盖之间布置空白空间。 盖的内壁由吸收层构成，吸收层由至少吸收第二敏感元件发射的热辐射的材料制成。 反射屏蔽形成暴露于所述电磁辐射的外壁的至少一部分。

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