公开(公告)号：US09719932B1

公开(公告)日：2017-08-01

申请号：US14532971

申请日：2014-11-04

Applicant: KLA-Tencor Corporation

Inventor： Derrick Shaughnessy ,  Michael S. Bakeman ,  Guorong V. Zhuang ,  Andrei V. Shchegrov ,  Leonid Poslavsky

IPC: G01N21/00 ,  G01N21/67 ,  G01N21/95 ,  H01S3/0915

CPC classification number: G01N21/9501 ,  G01N2201/061 ,  G03F7/70616 ,  H01L22/12

Abstract: Methods and systems are described herein for producing high radiance illumination light for use in semiconductor metrology based on a confined, sustained plasma. One or more plasma confining circuits introduce an electric field, a magnetic field, or a combination thereof to spatially confine a sustained plasma. The confinement of the sustained plasma decreases the size of the induced plasma resulting in increased radiance. In addition, plasma confinement may be utilized to shape the plasma to improve light collection and imaging onto the specimen. The induced fields may be static or dynamic. In some embodiments, additional energy is coupled into the confined, sustained plasma to further increase radiance. In some embodiments, the pump energy source employed to sustained the plasma is modulated in combination with the plasma confining circuit to reduce plasma emission noise.

公开(公告)号：US09702820B2

公开(公告)日：2017-07-11

申请号：US14899092

申请日：2014-03-05

Applicant: SIEMENS AKTIENGESELLSCHAFT

Inventor： Florian Benedikt Geiger ,  Martin Kördel ,  Anton Schick

IPC: G01N21/55 ,  G01N21/552 ,  G01N21/25 ,  G01N21/3563 ,  G01N21/3577 ,  G01N21/27 ,  A61B5/00

CPC classification number: G01N21/552 ,  A61B5/0075 ,  A61B5/0086 ,  A61B5/4244 ,  A61B5/6879 ,  A61B2505/05 ,  A61B2562/146 ,  G01N21/253 ,  G01N21/255 ,  G01N21/27 ,  G01N21/3563 ,  G01N21/3577 ,  G01N2201/061 ,  G01N2201/0636

Abstract: An arrangement for attenuated total reflectance (ATR) infrared spectroscopy uses a reflection matrix for location-resolved spectroscopy of aqueous and/or powdery samples with a high signal-to-noise ratio and without previous complex preparation of the samples. The method of using the reflection matrix produces imaging of the sample with a high signal strength.

公开(公告)号：US20170184579A1

公开(公告)日：2017-06-29

申请号：US15456049

申请日：2017-03-10

Applicant: Silicon BioDevices, Inc.

Inventor： Octavian FLORESCU ,  Daniel WONG ,  Tracie MARTIN ,  Duane YAMASAKI ,  Remy CROMER

IPC: G01N33/543 ,  C12Q1/68 ,  G06K19/06 ,  B01L3/00

CPC classification number: G01N33/54326 ,  B01L3/502761 ,  B01L3/561 ,  B01L2200/0605 ,  B01L2200/0668 ,  B01L2200/148 ,  B01L2200/16 ,  B01L2300/023 ,  B01L2300/027 ,  B01L2300/0636 ,  B01L2300/0838 ,  B01L2300/0874 ,  B01L2300/12 ,  B01L2400/0406 ,  B01L2400/043 ,  C12Q1/686 ,  G01N21/255 ,  G01N21/82 ,  G01N27/745 ,  G01N2201/061 ,  G01N2201/068 ,  G06F21/602 ,  G06K19/06028 ,  G06K19/06037 ,  G16H50/20 ,  Y02A90/26

Abstract: An assay system and method for use in the field of chemical testing is disclosed. The assay system can be used for filtering whole blood for testing on an integrated circuit containing digital control functionality.

公开(公告)号：US20170184511A1

公开(公告)日：2017-06-29

申请号：US15388463

申请日：2016-12-22

Applicant: ASML Netherlands B.V.

Inventor： Arie Jeffrey DEN BOEF ,  Simon Gijsbert Josephus MATHIJSSEN ,  Nan LIN ,  Sander Bas ROOBOL

IPC: G01N21/88 ,  G03F7/20

CPC classification number: G01N21/8806 ,  G01N2021/8822 ,  G01N2201/061 ,  G03F7/70191 ,  G03F7/70483 ,  G03F7/7065 ,  G03F9/7049 ,  G03F9/7065

Abstract: A lithographic apparatus is a machine that applies a desired pattern onto a substrate, usually onto a target portion of the substrate. A lithographic apparatus can be used, for example, in the manufacture of integrated circuits (ICs). The lithographic apparatus has an inspection apparatus with an illumination system that utilizes illuminating radiation with a wavelength of 2-40 nm. The illumination system includes an optical element that splits the illuminating radiation into a first and a second illuminating radiation and induces a time delay to the first or the second illuminating radiation. A detector detects the radiation that has been scattered by a target structure. The inspection apparatus has a processing unit operable to control a time delay between the first scattered radiation and the second scattered radiation so as to optimize a property of the combined first and second scattered radiation.

公开(公告)号：US20170176342A1

公开(公告)日：2017-06-22

申请号：US14974210

申请日：2015-12-18

Applicant: General Electric Company

Inventor： Andrew Joseph Colletti

IPC: G01N21/88 ,  F01D5/00 ,  F01D21/00 ,  G01M15/14

CPC classification number: G01N21/8806 ,  F01D5/005 ,  F01D21/003 ,  F05D2220/32 ,  F05D2240/24 ,  F05D2240/30 ,  G01M15/14 ,  G01N21/9515 ,  G01N2201/061 ,  G01N2201/06113 ,  G01N2201/101

Abstract: A system for inspecting surfaces of rotor blades for a surface characteristic. The system may include an assembly having a movable arm and, mounted on the movable arm, a scanner. A row of rotor blades may be positioned near the assembly for inspection. The row of rotor blades may include a plurality of the rotor blades circumferentially spaced about a center axis. The row of rotor blades and the assembly may be moved relative to the other so as to index the row of rotor blades relative to the assembly.

公开(公告)号：US09683929B2

公开(公告)日：2017-06-20

申请号：US14668880

申请日：2015-03-25

Applicant: Anton Paar GmbH

Inventor： Martin Ostermeyer

IPC: G01J4/00 ,  G01N21/21 ,  G01N21/01 ,  G01N21/03 ,  G01N21/05

CPC classification number: G01N21/21 ,  G01N21/01 ,  G01N21/0332 ,  G01N21/05 ,  G01N2021/0106 ,  G01N2021/0367 ,  G01N2201/061 ,  G01N2201/0683

Abstract: An optical measuring system measures polarization optical properties of a sample. The system includes (a) a light source that emits measuring light along an optical axis of an analysis beam path, (b) a polarization state generator, arranged downstream with respect to the light source in the analysis beam path which provides light with a defined polarization state, (c) a sample holder, arranged downstream with respect to the polarization state generator in the analysis beam path which accommodates the sample, (d) a polarization state analyzer, arranged downstream with respect to the sample holder in the analysis beam path which measures the polarization state of the measuring light after passing through the sample, and (e) a mechanical support structure, at which at least the polarization state generator, the sample holder and the polarization state analyzer are directly attached. Also described is a method for producing such an optical measuring system.

公开(公告)号：US09671330B2

公开(公告)日：2017-06-06

申请号：US14980914

申请日：2015-12-28

Applicant: Viavi Solutions Inc.

Inventor： Curtis R. Hruska ,  Charles A. Hulse ,  Brett J. Bryars ,  Marc K. Von Gunten ,  Christopher G. Pederson ,  Nada A. O'Brien ,  Jerry Zieba ,  Benjamin F. Catching

IPC: G01J3/42 ,  G01N21/35 ,  G01N21/359 ,  G01J3/02 ,  G01J3/10 ,  G01J5/08 ,  G01J3/12

CPC classification number: G01N21/35 ,  G01J3/0205 ,  G01J3/0272 ,  G01J3/10 ,  G01J3/26 ,  G01J3/42 ,  G01J5/08 ,  G01J2003/1234 ,  G01N21/359 ,  G01N2201/0221 ,  G01N2201/061 ,  G01N2201/068

Abstract: A portable spectrometer device includes an illumination source for directing at a sample, and a tapered light pipe (TLP) for capturing light interacting with the sample at a first focal ratio and for delivering the light at a second focal ratio lower than the first focal ratio. A linearly variable filter (LVF) separates the captured light into a spectrum of constituent wavelength signals; and a detector array, including a plurality of pixels, each of the plurality of pixels disposed to receive at least a portion of a plurality of the constituent wavelength signals provides a power reading for each constituent wavelength. Preferably, the TLP is lensed at one end, and recessed in a protective boot with stepped inner walls. The gap between the TLP and LVF is minimized to further enhance resolution and robustness.

公开(公告)号：US20170153181A1

公开(公告)日：2017-06-01

申请号：US15431369

申请日：2017-02-13

Applicant: Erico Rolim Mattos ,  Mark Andreas Haidekker ,  Ivan Kruglak

Inventor： Erico Rolim Mattos ,  Mark Andreas Haidekker ,  Ivan Kruglak

IPC: G01N21/64

CPC classification number: G01N21/645 ,  G01N21/6486 ,  G01N2021/635 ,  G01N2201/061

Abstract: A phase synchronizing pulse amplitude modulation fluorometer having an excitation light source capable of emitting a pulse of light that will induce fluorescence in an external object. A photo detector for detecting the pulse and a circuit to synchronize a pulse of light from the excitation light source with a pulse of light from an external light source.

公开(公告)号：US20170131216A1

公开(公告)日：2017-05-11

申请号：US15245695

申请日：2016-08-24

Applicant: Carsten BUCHWALD ,  Jürgen-Peter HERRMANN ,  Marius Michael HERRMANN ,  Wolfgang SCHORN

Inventor： Carsten BUCHWALD ,  Jürgen-Peter HERRMANN ,  Marius Michael HERRMANN ,  Wolfgang SCHORN

IPC: G01N21/90 ,  G02B27/12 ,  G06T7/00 ,  G06K9/62 ,  H04N5/225 ,  G06T7/73

CPC classification number: G01N21/9054 ,  G01N21/8806 ,  G01N21/90 ,  G01N2021/8455 ,  G01N2201/061 ,  G01N2201/062 ,  G01N2201/0638 ,  G02B5/0257 ,  G02B5/0278 ,  G02B6/0053 ,  G02B27/123 ,  G02B27/126 ,  G06K9/6202 ,  G06T7/0002 ,  G06T7/74 ,  G06T2207/30204 ,  H04N5/2256

Abstract: An inspection system for detecting defects in structures of containers, such as beverage bottles, using a light transmission system configured to transmit light through a portion of a bottle. The abstract of the disclosure is submitted herewith as required by 37 C.F.R. §1.72(b). As stated in 37 C.F.R. §1.72(b): A brief abstract of the technical disclosure in the specification must commence on a separate sheet, preferably following the claims, under the heading “Abstract of the Disclosure.” The purpose of the abstract is to enable the Patent and Trademark Office and the public generally to determine quickly from a cursory inspection the nature and gist of the technical disclosure. The abstract shall not be used for interpreting the scope of the claims. Therefore, any statements made relating to the abstract are not intended to limit the claims in any manner and should not be interpreted as limiting the claims in any manner.

公开(公告)号：US09645078B1

公开(公告)日：2017-05-09

申请号：US15067583

申请日：2016-03-11

Applicant: MaestroGen Inc.

Inventor： Sheng-Feng Lin ,  Chong-Jing Peng

IPC: G01N21/00 ,  G01N21/33

CPC classification number: G01N21/33 ,  G01N2021/035 ,  G01N2201/061 ,  G01N2201/068

Abstract: The present invention discloses a quantitative micro-volume nucleic acids detection device, which includes a light source, a first shielding screen, a second shielding screen, a lower glass plate, an upper glass plate and at least one sensor, wherein a pin-hole on the second shielding screen generates an image of a nucleic acid sample solution fixed between the bottom and upper glasses, the image is then captured by the sensor, concentration of the nucleic acid sample solution is determined accordingly. With the implementation of the present invention, the detection is reproducible and repetitive, the detection optical path is invariant, avoid of interfering from the pollution during detection so that the cost and time are greatly reduced. Furthermore, in order to overcome the measurement accuracy problem caused from attenuation of light intensity by the prolonged usage of fiber-optic components equipped in the prior art means, it avoid the use of fiber-optic components in the optical path via the present invention.