公开(公告)号：US3359422A

公开(公告)日：1967-12-19

申请号：US46533354

申请日：1954-10-28

Applicant: GEN ELECTRIC

Inventor： POLLOCK HERBERT C

IPC: H01J27/08 ,  H05H6/00

CPC classification number: H05H6/00 ,  H01J27/08

公开(公告)号：US2935634A

公开(公告)日：1960-05-03

申请号：US66556857

申请日：1957-06-13

Applicant: CSF

Inventor： ALFRED LERBS

IPC: H01J27/08

CPC classification number: H01J27/08

公开(公告)号：US2600151A

公开(公告)日：1952-06-10

申请号：US69080446

申请日：1946-08-15

Applicant: BACKUS JOHN G

Inventor： BACKUS JOHN G

IPC: H01J27/08

CPC classification number: H01J27/08

公开(公告)号：US11664183B2

公开(公告)日：2023-05-30

申请号：US17308732

申请日：2021-05-05

Applicant: Applied Materials, Inc.

Inventor： Graham Wright ,  Daniel Alvarado ,  Eric Donald Wilson ,  Robert Lindberg

IPC: H01J37/08 ,  H01J27/08 ,  H01J27/02 ,  H01J37/30

CPC classification number: H01J27/08 ,  H01J27/022 ,  H01J37/08 ,  H01J37/3002

Abstract: A system and method for extending the life of a cathode and repeller in an IHC ion source is disclosed. The system monitors the health of the cathode by operating using a known set of parameters and measuring the bias power used to generate the desired extracted beam current or the desired current from the arc voltage power supply. Based on the measured bias power, the system may determine whether the cathode is becoming too thin, and may take a corrective action. This corrective action may be to alert the operator; to operate the IHC ion source using a predetermined set of parameters; or to change the dilution used within the IHC source. By performing these actions, the life of the cathode may be more than doubled.

公开(公告)号：US10043635B2

公开(公告)日：2018-08-07

申请号：US15320104

申请日：2014-09-25

Applicant: Mitsubishi Electric Corporation

Inventor： Sunao Aya

IPC: H01J37/317 ,  H01J37/18 ,  H01J37/08

CPC classification number: H01J37/3171 ,  H01J27/08 ,  H01J37/08 ,  H01J37/18 ,  H01J2237/006 ,  H01J2237/08

Abstract: A vacuum is maintained inside a vacuum partition (1). The whole of the solid packed container (3) is disposed inside the vacuum partition (1). A heater (7) sublimates the aluminum chloride (8) packed in the solid packed container (3) to generate an aluminum chloride gas (9). An arc chamber (6) ionizes the aluminum chloride gas (9) and emits an ion beam (11) of the ionized aluminum chloride gas (9). A gas supply nozzle (10) leads the aluminum chloride gas (9) from the solid packed container (3) into the arc chamber (6). A supporting part (4) supports and fixes the solid packed container (3) on the vacuum partition (1). A thermal conductivity of the supporting part (4) is lower than thermal conductivities of the vacuum partition (1) and the solid packed container (3).

公开(公告)号：US09978554B1

公开(公告)日：2018-05-22

申请号：US15416131

申请日：2017-01-26

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Bon-Woong Koo ,  Jun Lu ,  Frank Sinclair ,  Eric D. Hermanson ,  Joseph E. Pierro ,  Michael D. Johnson ,  Michael S. DeLucia ,  Antonella Cucchetti

IPC: H01J27/20 ,  H01J27/08 ,  H01J1/50 ,  H01J27/02 ,  H01J37/317

CPC classification number: H01J27/205 ,  H01J1/50 ,  H01J27/024 ,  H01J27/08 ,  H01J37/3171 ,  H01J2237/30472 ,  H01J2237/31701

Abstract: An ion source having dual indirectly heated cathodes is disclosed. Each of the cathodes may be independently biased relative to its respective filament so as to vary the profile of the beam current that is extracted from the ion source. In certain embodiments, the ion source is used in conjunction with an ion implanter. The ion implanter comprises a beam profiler to measure the current of the ribbon ion beam as a function of beam position. A controller uses this information to independently control the bias voltages of the two indirectly heated cathodes so as to vary the uniformity of the ribbon ion beam. In certain embodiments, the current passing through each filament may also be independently controlled by the controller.

公开(公告)号：US09552952B2

公开(公告)日：2017-01-24

申请号：US15091433

申请日：2016-04-05

Applicant: COLORADO STATE UNIVERSITY RESEARCH FOUNDATION

Inventor： Lauren P. Rand ,  John D. Williams ,  Rafael A. Martinez

IPC: H01J27/14 ,  H01J27/08 ,  H01J1/02 ,  H01J1/14

CPC classification number: H01J1/025 ,  F03H1/0068 ,  H01J1/14 ,  H01J27/08 ,  H01J27/146 ,  H01J2237/08

Abstract: The use of the electride form of 12CaO-7Al2O3, or C12A7, as a low work function electron emitter in a hollow cathode discharge apparatus is described. No heater is required to initiate operation of the present cathode, as is necessary for traditional hollow cathode devices. Because C12A7 has a fully oxidized lattice structure, exposure to oxygen does not degrade the electride. The electride was surrounded by a graphite liner since it was found that the C12A7 electride converts to it's eutectic (CA+C3A) form when heated (through natural hollow cathode operation) in a metal tube.

Abstract translation: 描述了在空心阴极放电装置中使用12CaO-7Al2O3或C12A7的电子形式作为低功函电子发射体。 根据传统的空心阴极器件的需要，不需要加热器来启动本阴极的操作。 因为C12A7具有完全氧化的晶格结构，所以暴露于氧气不会降低电极。 电极被石墨衬垫包围，因为发现当在金属管中加热（通过天然空心阴极操作）时，C12A7电致转变成它的共晶（CA + C3A）形式。

公开(公告)号：US20160217961A1

公开(公告)日：2016-07-28

申请号：US15091433

申请日：2016-04-05

Applicant: COLORADO STATE UNIVERSITY RESEARCH FOUNDATION

Inventor： Lauren P. Rand ,  John D. Williams ,  Rafael A. Martinez

IPC: H01J1/02 ,  H01J1/14

CPC classification number: H01J1/025 ,  F03H1/0068 ,  H01J1/14 ,  H01J27/08 ,  H01J27/146 ,  H01J2237/08

Abstract: The use of the electride form of 12CaO-7Al2O3, or C12A7, as a low work function electron emitter in a hollow cathode discharge apparatus is described. No heater is required to initiate operation of the present cathode, as is necessary for traditional hollow cathode devices. Because C12A7 has a fully oxidized lattice structure, exposure to oxygen does not degrade the electride. The electride was surrounded by a graphite liner since it was found that the C12A7 electride converts to it's eutectic (CA+C3A) form when heated (through natural hollow cathode operation) in a metal tube.

Abstract translation: 描述了在空心阴极放电装置中使用12CaO-7Al2O3或C12A7的电子形式作为低功函电子发射体。 根据传统的空心阴极器件的需要，不需要加热器来启动本阴极的操作。 因为C12A7具有完全氧化的晶格结构，所以暴露于氧气不会降低电极。 电极被石墨衬垫包围，因为发现当在金属管中加热（通过天然空心阴极操作）时，C12A7电致转变成它的共晶（CA + C3A）形式。

公开(公告)号：US09318298B2

公开(公告)日：2016-04-19

申请号：US14536946

申请日：2014-11-10

Applicant: Sumitomo Heavy Industries Ion Technology Co., Ltd.

Inventor： Masateru Sato

IPC: G21K5/00 ,  H01J27/08 ,  H01J37/08 ,  H01J37/317

CPC classification number: H01J27/08 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/31705

Abstract: An ion generator is provided with: an arc chamber that is at least partially made up of a material containing carbon; a thermal electron emitter that emits thermal electrons into the arc chamber; and a gas introducer that introduces a source gas and a compound gas into the arc chamber. The source gas to be introduced into the arc chamber contains a halide gas, and the compound gas to be introduced into the arc chamber contains a compound having carbon atoms and hydrogen atoms.

Abstract translation: 离子发生器具有：至少部分由含碳材料组成的电弧室; 将热电子发射到电弧室中的热电子发射体; 以及将源气体和复合气体引入电弧室的气体导入器。 被引入电弧室的源气体含有卤化物气体，导入电弧室的化合物气体含有具有碳原子和氢原子的化合物。

公开(公告)号：US20160018818A1

公开(公告)日：2016-01-21

申请号：US14397818

申请日：2013-12-24

Applicant: Halliburton Energy Services, Inc.

Inventor： David L. PERKINS ,  Robert Paul FREESE ,  Christopher Michael JONES ,  Richard Neal GARDNER

IPC: G05B19/418 ,  C23C14/54 ,  G01N21/21 ,  H01J27/08 ,  H01J27/02 ,  G01N21/25 ,  C23C14/30 ,  H01J37/34

CPC classification number: G05B19/41875 ,  C23C14/30 ,  C23C14/547 ,  G01B11/0625 ,  G01B11/0683 ,  G01N21/211 ,  G01N21/25 ,  G01N21/8422 ,  G01N2021/213 ,  G05B2219/32368 ,  H01J27/022 ,  H01J27/08 ,  H01J37/3488

Abstract: Techniques include receiving a design of an integrated computational element (ICE), the ICE design including specification of a substrate and a plurality of layers, their respective target thicknesses and complex refractive indices, complex refractive indices of adjacent layers being different from each other, and a notional ICE fabricated in accordance with the ICE design being related to a characteristic of a sample; forming at least some of the plurality of layers of the ICE in accordance with the ICE design; performing at least two different types of in-situ measurements; predicting, using results of the at least two different types of in situ measurements, performance of the ICE relative to the ICE design; and adjusting the forming of the layers remaining to be formed, at least in part, by updating the ICE design based on the predicted performance.

Abstract translation: 技术包括接收集成计算元件（ICE）的设计，ICE设计包括基板和多个层的规格，它们各自的目标厚度和复折射率，相邻层的复折射率彼此不同，以及 根据ICE设计制造的名义ICE与样品的特性相关; 根据ICE设计形成ICE的多个层中的至少一些层; 执行至少两种不同类型的原位测量; 使用至少两种不同类型的原位测量的结果来预测ICE相对于ICE设计的性能; 并且至少部分地通过基于预测的性能更新ICE设计来调整形成剩余的层的形成。