Spectroscopic systems for the analysis of small and very small
quantities of substances
    51.
    发明授权
    Spectroscopic systems for the analysis of small and very small quantities of substances 失效
    用于分析小量和非常少量物质的光谱系统

    公开(公告)号:US5680209A

    公开(公告)日:1997-10-21

    申请号:US381911

    申请日:1995-05-02

    Inventor: Meinrad Machler

    Abstract: A spectroscopic system for the analysis of small and very small quantities of substances makes use for the purposes of energy transfer of cone-shaped aperture changers (14, 15) which are arranged in the object zone (8) between the light source (L) and the sample (9) and, during absorption measurements, also between the sample (9) and the inlet slot (3) of a spectrometer (1). If the form used is a double cone, the aperture changers (14, 15) facilitate an oblique coupling in a capillary tube accepting the sample (9) which acts as a step-waveguide for the coupled radiation.

    Abstract translation: PCT No.PCT / EP93 / 02166 Sec。 371日期:1995年5月2日 102(e)日期1995年5月2日PCT提交1993年8月13日PCT公布。 出版物WO94 / 04892 日期1994年3月3日用于分析小量和非常少量物质的光谱系统用于锥形孔径变换器(14,15)的能量传递的目的,锥形孔径变换器(14,15)布置在物体区域(8)之间 光源(L)和样品(9),并且在吸收测量期间也在样品(9)和光谱仪(1)的入口槽(3)之间。 如果使用的形式是双锥形,则孔径更换器(14,15)有助于在接受用作耦合辐射的阶跃波导的样品(9)的毛细管中的倾斜耦合。

    Ellipsometer/polarimeter based process monitor and control system
suitable for simultaneous retrofit on molecular beam epitaxy system
RHEED/LEED interface system, and method of use
    52.
    发明授权
    Ellipsometer/polarimeter based process monitor and control system suitable for simultaneous retrofit on molecular beam epitaxy system RHEED/LEED interface system, and method of use 失效
    基于椭偏仪/偏振计的工艺监控系统适用于分子束外延系统RHEED / LEED接口系统的同时改造,以及使用方法

    公开(公告)号:US5582646A

    公开(公告)日:1996-12-10

    申请号:US327107

    申请日:1994-10-21

    CPC classification number: G01N21/211 C23C14/54 G01J3/447 G01J4/00 G01N23/20058

    Abstract: A method of, and system for, applying light beam producing systems such as ellipsometers, polarimeters, polarized light reflectance and functionally similar systems, such that a beam of light produced thereby is caused to be incident upon a process element at an angle in excess of an associated Brewster angle while enabling the production of a signal sufficiently sensitive to changes in process element parameters, for use in "real-time" process element process monitoring and control, is disclosed. In addition a process element processing system and electron beam producing system and light beam producing system combination system is taught, wherein the electron beam producing and light beam producing systems are mounted to the process element processing system, (typically a (MBE) system), by input and output interface systems present at a location appropriate for conventional Reflection High Energy Electron Diffraction (RHEED) systems.

    Abstract translation: 一种用于应用光束产生系统(例如椭圆计,偏振计,偏振光反射和功能相似的系统)的方法和系统,使得由此产生的光束以超过其的角度入射到处理元件上 公开了一种相关联的布鲁斯特角,同时能够产生对过程元件参数的变化足够敏感的信号,用于“实时”过程元件过程监控和控制。 此外,教导了工艺元件处理系统和电子束产生系统和光束产生系统组合系统,其中电子束产生和光束产生系统被安装到处理元件处理系统(通常为(MBE)系统), 通过输入和输出接口系统存在于适合于常规反射高能电子衍射(RHEED)系统的位置。

    Time-resolved Fourier-transform optical spectroscopy utilizing in-phase
and quadrature cyclic perturbation data values
    53.
    发明授权
    Time-resolved Fourier-transform optical spectroscopy utilizing in-phase and quadrature cyclic perturbation data values 失效
    利用同相和正交循环扰动数据值的时间分辨傅里叶变换光谱

    公开(公告)号:US5450196A

    公开(公告)日:1995-09-12

    申请号:US289160

    申请日:1994-08-11

    Inventor: Andrew J. Turner

    CPC classification number: G01J3/447

    Abstract: In FT-DIRLD (Dynamic Infra Red Linear Dichroism) apparatus partly represented in FIG. 1, units 100-105, responding to interferometer output IB (indicated elsewhere), cause unit 106 to yield an interferogram combining static and dynamic dichroism interferograms. Reference signals respectively in phase and quadrature with cyclic sample strain are derived from rheometer 102. At each OPD point of predetermined uninterrupted scans, controller 108 routes simultaneously a data point of the combined interferogram and the reference signals to respective channels of multiplexer 107. A microprocessor (shown elsewhere) subsequently performs a best-fit-to-an ellipse sorting of the data and for each OPD derives: A) the value of the interferogram unaffected by sample modulation; B) the corresponding in phase term; and C) the corresponding in quadrature term; furthermore, from the A, B,C data-point series it generates the interferogram of each series and transforms it into a spectrum. DIRLD analysis is achieved asynchronously and in continuous fast scanning.

    Abstract translation: 在图1中部分表示的FT-DIRLD(动态红外线性二色性)装置中。 如图1所示,单元100-105响应于干涉仪输出IB(在别处指示),使单元106产生组合静态和动态二色性干涉图的干涉图。 参考信号分别与循环样本应变相位和正交来自流变仪102.在预定的不间断扫描的每个OPD点,控制器108同时将组合的干涉图和参考信号的数据点路由到多路复用器107的相应通道。微处理器 (其他地方显示)随后对数据进行最佳拟合到一个椭圆分类,并且对于每个OPD导出:A)不受样本调制影响的干涉图的值; B)对应的相位项; 和C)相应的正交项; 此外,从A,B,C数据点系列,它产生每个系列的干涉图并将其转换成光谱。 DIRLD分析是在异步和连续快速扫描中实现的。

    Polarization interferometer spectrometer
    54.
    发明授权
    Polarization interferometer spectrometer 失效
    偏振干涉仪光谱仪

    公开(公告)号:US5157458A

    公开(公告)日:1992-10-20

    申请号:US598697

    申请日:1990-11-02

    CPC classification number: G01J3/447 G01J3/4537 G01B2290/70 G01J2009/0261

    Abstract: The polarization interferometer comprises a source of light (1), a collimator (2), a first polarizing means (3), a double-refractive means (4,5,6) and a second polarizing means (7) which polarizes the light emerging from the double-refractive means (4,5,6) and directs it to a photon detector (8). The double-refractive means (4,5,6) consists of two optical wedges (5,6) displaceable along those lateral surfaces which face each other, said wedges complementing each other to a right parallelepiped, and of a double-refractive, plane-parallel plate (4) serving as a compensator. The optical axis of the compensator (4) is twisted in a plane perpendicular to the light beam by a finite angle relative to that of the two wedges (5,6), the optical axes of the two wedges (5,6) coinciding with each other. The optical axes of the two polarizing means (3,7) are arranged perpendicularly or parallely to each other and are aligned non-parallely to the axes of the two wedges (5,6) of the double-refractive means (4,5,6).

    Abstract translation: PCT No.PCT / CH90 / 00008 Sec。 371日期1990年11月2日 102(e)1990年11月2日日期PCT 1990年1月15日提交PCT公布。 WO90 / 10191 PCT出版物 日期:1990年9月7日。偏振干涉仪包括光源(1),准直器(2),第一偏振装置(3),双折射装置(4,5,6)和第二偏振装置 (7),其使从双折射装置(4,5,6)出射的光偏振并将其引导到光子检测器(8)。 双折射装置(4,5,6)由两个光楔(5,6)组成,两个光楔(5,6)可沿着彼此面对的侧表面移位,所述楔彼此互补成直角的平行六面体,双折射平面 - 平行板(4)作为补偿器。 补偿器(4)的光轴在垂直于光束的平面中相对于两个楔形物(5,6)的角度被扭转有限的角度,两个楔形物(5,6)的光轴与 彼此。 两个偏振装置(3,7)的光轴彼此垂直或平行布置,并且与双折射装置(4,5,...)的两个楔形物(5,6)的轴线非平行地排列, 6)。

    Acousto-optic spectrometer/polarimeter
    55.
    发明授权
    Acousto-optic spectrometer/polarimeter 失效
    声光谱仪/旋光仪

    公开(公告)号:US5131742A

    公开(公告)日:1992-07-21

    申请号:US597457

    申请日:1990-10-12

    Applicant: Fred L. Schaff

    Inventor: Fred L. Schaff

    Abstract: An acousto-optic spectrometer/polarimeter for analyzing an incident broad-band beam including an acousto-optic tunable filter (AOTF) for separating the incident broad-band beam into a diffracted extraordinary narrow-band beam, a diffracted ordinary narrow-band beam, and at least one undiffracted broad-band beam; first, second and third detectors respectively positioned to respectfully receive at least a portion of the diffracted extraordinary narrow-band beam, the diffracted ordinary narrow broad-band beam and the at least one undiffracted broad-band beam, and to respectively provide first, second and third signals based thereon; a subtracter for providing a polarimeter output by taking the difference between the first and the second signals; and an adder for providing a spectrometer output by adding the first and the second signals. The acousto-optic spectrometer/polarimeter according to the present invention allows broad-band imaging, spectroscopy and polarimetry to be performed simultaneously and through the same optical aperture.

    Abstract translation: 一种用于分析包括声光可调滤波器(AOTF)的入射宽带束的声光谱仪/偏振计,用于将入射的宽带束分离成衍射的非常窄带束,衍射的普通窄带束, 和至少一个未衍射的宽带束; 第一,第二和第三检测器被分别定位成尊重地接收衍射的非常窄带束,衍射普通窄带宽波束和至少一个未衍射宽带波束的至少一部分,并且分别提供第一,第二,第二 和基于此的第三信号; 减法器,用于通过取第一和第二信号之间的差来提供偏振计输出; 以及用于通过添加第一和第二信号来提供光谱仪输出的加法器。 根据本发明的声光谱仪/偏光计允许同时进行宽带成像,光谱学和偏振测定,并且通过相同的光学孔径。

    Frequency modulation-polarization spectroscopy method and device for
detecting spectral features
    56.
    发明授权
    Frequency modulation-polarization spectroscopy method and device for detecting spectral features 失效
    频率调制偏振光谱法和检测光谱特征的装置

    公开(公告)号:US4523847A

    公开(公告)日:1985-06-18

    申请号:US511593

    申请日:1983-07-07

    CPC classification number: G01J3/4338 G01J3/447 G01J9/04 G01N21/19

    Abstract: A method and device for detecting dichroic and/or birefringent narrow spectral features in a sample is described. The method includes the steps of providing a beam of light having an optical frequency bandwidth which is narrow compared to the width of the narrow spectral feature and having a center frequency .omega..sub.c which lies near the narrow spectral feature, polarization phase modulating a beam of light with a single RF frequency to provide a pure FM spectrum having upper and lower sidebands in which either the carrier and sidebands have been polarized with respect to one another, exposing the sample containing the narrow spectral feature to the polarized modulated light so that the FM sidebands probe the narrow spectral feature, polarization analyzing and then photodetecting the light emerging from the sample to detect a RF beat at the specific RF frequency used for the polarization phase modulation, and electronically monitoring the amplitude of the RF beat signal to indicate the strength of the narrow spectral feature. The device includes a polarization phase modulator and a polarization analyzer positioned on opposite sides of the sample. In a preferred embodiment the polarization phase modulator produces a frequency modulated optical spectrum with the sidebands polarized precisely orthogonal to the carrier.

    Abstract translation: 描述了用于检测样品中二色性和/或双折射窄光谱特征的方法和装置。 该方法包括以下步骤:提供具有与窄光谱特征的宽度相比窄的光频带宽的光束,并具有位于窄光谱特征附近的中心频率ωc,调制光束的偏振相位 具有单个RF频率以提供具有上边带和下边带的纯FM频谱,其中载波和边带彼此相对极化,将包含窄频谱特征的样本曝光到偏振调制光,使得FM边带 探测窄谱特征,偏振分析,然后对从样本出射的光进行光电检测,以检测用于极化相位调制的特定RF频率的RF拍频,并电子监测RF拍频信号的幅度,以指示 窄谱特征。 该器件包括位于样品相对两侧的偏振相位调制器和偏振分析器。 在优选实施例中,偏振相位调制器产生频率调制的光谱,其中边带被精确地正交于载波极化。

    Apparatus and method for estimating a phase retarder and method of manufacturing the phase retarder using the same

    公开(公告)号:US12181346B2

    公开(公告)日:2024-12-31

    申请号:US17903313

    申请日:2022-09-06

    Abstract: Disclosed herein an apparatus and method for estimating a phase retarder and method of manufacturing the phase retarder using the same. The apparatus includes: a polarization element configured to output an incident light as a linear polarization and to make the linear polarization incident onto a phase retarder to be tested; a polarization image acquisition module equipped with a plurality of polarized pixels receiving an emitting light that is output from the phase retarder, on which the linear polarization is incident, and configured to obtain a polarization image based on the emitting light that is modulated in the polarized pixels; and a processor configured to evaluate quality of the phase retarder based on uniformity of a brightness value between polarized pixels of the polarization image. The polarized pixels modulate the emitting light based on a plurality of transmission angles and detects the modulated emitting light.

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