Method and apparatus for coating of substrates

    公开(公告)号:US07125577B2

    公开(公告)日:2006-10-24

    申请号:US10976348

    申请日:2004-10-27

    Inventor: Ralph A. Chappa

    Abstract: The invention relates to methods and apparatuses that reduce problems encountered during coating of a device, such as a medical device having a cylindrical shape. In an embodiment, the invention includes an apparatus including a bi-directional rotation member. In an embodiment, the invention includes a method with a bi-directional indexing movement. In an embodiment, the invention includes a coating solution supply member having a major axis oriented parallel to a gap between rollers on a coating apparatus. In an embodiment, the invention includes a device retaining member. In an embodiment, the invention includes an air nozzle or an air knife. In an embodiment, the invention includes a method including removing a static charge from a small diameter medical device.

    Nozzle apparatus for stripping edge bead of wafer
    62.
    发明申请
    Nozzle apparatus for stripping edge bead of wafer 失效
    用于剥离晶片边缘珠的喷嘴装置

    公开(公告)号:US20060112979A1

    公开(公告)日:2006-06-01

    申请号:US11250090

    申请日:2005-10-13

    Applicant: Kyoung-Ho Kim

    Inventor: Kyoung-Ho Kim

    Abstract: There is provided a nozzle apparatus for stripping an edge bead from a wafer, which includes a rotatable support arm, and a side rinse nozzle coupled to a leading end of the support arm to remove the bead of photoresist remaining on the edge of a wafer. The side rinse nozzle has a first nozzle for removing the bead on the upper surface of the wafer edge, and a second nozzle for removing the bead on the outer end surface of the wafer. The first and second nozzles each have a shape such that a length thereof is long in a radial direction of the wafer and a width thereof is narrow.

    Abstract translation: 提供了一种用于从晶片剥离边缘珠的喷嘴装置,其包括可旋转的支撑臂,以及联接到支撑臂的前端的侧清洗喷嘴,以去除残留在晶片边缘上的光致抗蚀剂珠。 侧面冲洗喷嘴具有用于去除晶片边缘的上表面上的珠的第一喷嘴和用于去除晶片的外端表面上的珠的第二喷嘴。 第一和第二喷嘴各自具有其长度在晶片的径向长度并且其宽度窄的形状。

    Method and apparatus for coating of substrates

    公开(公告)号:US20060088653A1

    公开(公告)日:2006-04-27

    申请号:US10976193

    申请日:2004-10-27

    Applicant: Ralph Chappa

    Inventor: Ralph Chappa

    CPC classification number: B05B13/0228

    Abstract: The invention relates to methods and apparatuses that reduce problems encountered during coating of a device, such as a medical device having a cylindrical shape. In an embodiment, the invention includes an apparatus including a bi-directional rotation member. In an embodiment, the invention includes a method with a bi-directional indexing movement. In an embodiment, the invention includes a coating solution supply member having a major axis oriented parallel to a gap between rollers on a coating apparatus. In an embodiment, the invention includes a device retaining member. In an embodiment, the invention includes an air nozzle or an air knife. In an embodiment, the invention includes a method including removing a static charge from a small diameter medical device.

    Apparatus for simultaneously coating and measuring parts
    64.
    发明授权
    Apparatus for simultaneously coating and measuring parts 失效
    用于同时涂覆和测量零件的装置

    公开(公告)号:US06991683B2

    公开(公告)日:2006-01-31

    申请号:US10828694

    申请日:2004-04-21

    Applicant: Bruce Nesbitt

    Inventor: Bruce Nesbitt

    Abstract: An apparatus and method for simultaneously coating and measuring a part. The apparatus includes a part support, a sprayer and a part measurer positioned adjacent to the part support and a display device positioned adjacent to the part support. The sprayer applies a coating to a section of the part while the part measurer continuously measures a dimension of the section of the part being coated. In one embodiment, an initial amount of coating and a final amount of coating are applied to the section of the part based on the dimension measurements and desired dimension of the part. In another embodiment, the amount of coating applied to the part is based on the desired coating thickness. As a result, the apparatus and method of the present invention significantly reduces the margin of error related to the application of coatings to parts.

    Abstract translation: 一种用于同时涂覆和测量零件的装置和方法。 该装置包括部件支撑件,喷雾器和邻近部件支撑件定位的零件测量器以及邻近零件支撑件定位的显示装置。 喷涂机将涂层施加到零件的一部分,而零件测量器连续地测量被涂部件的尺寸。 在一个实施例中,基于部件的尺寸测量和所需尺寸,将初始涂层量和最终涂层量施加到零件的该部分。 在另一个实施方案中,施加到部件上的涂层量基于所需的涂​​层厚度。 结果,本发明的装置和方法显着地降低了与涂层对零件的应用相关的误差幅度。

    Apparatus and method for simultaneously coating and measuring parts
    65.
    发明申请
    Apparatus and method for simultaneously coating and measuring parts 有权
    用于同时涂覆和测量零件的装置和方法

    公开(公告)号:US20050110198A1

    公开(公告)日:2005-05-26

    申请号:US11014557

    申请日:2004-12-15

    Applicant: Bruce Nesbitt

    Inventor: Bruce Nesbitt

    Abstract: An apparatus and method for simultaneously coating and measuring a part including a part support, a sprayer, a part measurer including a digital camera and a display device, all of which are positioned adjacent to the part support. The sprayer applies a coating to a section of the part while the part measurer continuously measures at least two dimensions of the section. The digital camera takes at least one picture of the entire section of the part while the part is being coated and enables a user to accurately determine the cross section of the part to the optimum finished part configuration and size and also detect defects, blemishes or coating irregularities formed on the section. The apparatus and method of the present invention significantly reduces the margin of error related to the application of coatings to parts, the number of defective parts and increases the overall efficiency.

    Abstract translation: 一种用于同时涂覆和测量包括部件支撑件,喷雾器,包括数字照相机和显示装置的部件测量器的部件的装置和方法,所有这些部件支撑件都位于与部件支撑件相邻的位置。 喷涂机在部件的一部分上施加涂层,而部件测量器连续测量该部分的至少两个维度。 该数码相机在部件被涂覆的同时拍摄整个部分的至少一张照片,并且使用户能够将部件的横截面精确地确定为最佳成品部件的构造和尺寸,并且还检测缺陷,瑕疵或涂层 该部分形成不规则。 本发明的装置和方法显着地降低了与涂层对零件的应用相关的误差余量,缺陷部件的数量以及整体效率的提高。

    Apparatus and method for heating a steering wheel
    66.
    发明申请
    Apparatus and method for heating a steering wheel 审中-公开
    用于加热方向盘的装置和方法

    公开(公告)号:US20050082269A1

    公开(公告)日:2005-04-21

    申请号:US10983521

    申请日:2004-11-08

    Abstract: Provided for herein is a method of making a heated steering wheel, comprising depositing an electrically conductive layer on at least a portion of a steering wheel substrate to produce thereon a heating element for receiving an electrical current and providing a source of heat. Also disclosed is a heating element for a steering wheel and a heated steering wheel assembly formed using this method.

    Abstract translation: 本文提供了一种制造加热方向盘的方法,包括在方向盘基板的至少一部分上沉积导电层以在其上产生用于接收电流并提供热源的加热元件。 还公开了一种用于方向盘的加热元件和使用该方法形成的加热方向盘组件。

    Pneumatic spinner drive tensioning assembly
    67.
    发明申请
    Pneumatic spinner drive tensioning assembly 失效
    气动旋转驱动张紧组件

    公开(公告)号:US20040180744A1

    公开(公告)日:2004-09-16

    申请号:US10384740

    申请日:2003-03-11

    Abstract: An pneumatic tensioner apparatus is disclosed, the apparatus including: a main drive belt; a chuck assembly, suspended from the main drive belt, having a spinning member and a drive contact portion; a first frictional drive belt in a first track, the first frictional drive belt in contact with the drive contact portion operative to spin the chuck assembly; and a first tension adjusting device having at least one pneumatic tension adjustment member operative to apply pressure to the first frictional drive belt tangentially to the drive contact portion.

    Abstract translation: 公开了一种气动张紧器装置,该装置包括:主驱动带; 从主传动带悬挂的卡盘组件,具有旋转构件和驱动接触部分; 在第一轨道中的第一摩擦传动带,与驱动接触部分相接触的第一摩擦传动带,其用于旋转卡盘组件; 以及第一张力调节装置,其具有至少一个气动张力调节构件,其可操作以与驱动接触部分切向地施加压力到第一摩擦驱动带。

    Method of coating a semiconductor wafer
    69.
    发明授权
    Method of coating a semiconductor wafer 有权
    涂覆半导体晶片的方法

    公开(公告)号:US06423380B1

    公开(公告)日:2002-07-23

    申请号:US09292081

    申请日:1999-04-14

    CPC classification number: G03F7/162 B05B13/0228 B05C11/08

    Abstract: Disclosed is a method and apparatus for coating liquid films on to the surface of a wafer substrate by rotation the substrate at a speed sufficient to cause a liquid, through centrifugal effect, to flow outwardly toward the perimeter of the surface and form a substantially uniform thickness liquid coating thereon and starting at the central region of the wafer surface and moving radially outward therefrom, spraying a fine mist of the liquid to the surface of the wafer.

    Abstract translation: 公开了一种通过以足以使液体通过离心效应朝向表面周边向外流动的速度旋转基板而将液膜涂布在晶片基板的表面上的方法和装置,并形成基本均匀的厚度 在晶片表面的中心区域开始并且从其径向向外移动,将液体的细雾喷射到晶片的表面。

    Method and apparatus for dispensing small volume of liquid, such as with a weting-resistant nozzle
    70.
    发明申请
    Method and apparatus for dispensing small volume of liquid, such as with a weting-resistant nozzle 审中-公开
    用于分配小体积液体的方法和装置,例如具有耐弯曲喷嘴

    公开(公告)号:US20020084290A1

    公开(公告)日:2002-07-04

    申请号:US10012102

    申请日:2001-11-13

    Applicant: Therics, Inc.

    Inventor: Peter A. Materna

    Abstract: A wetting-resistant nozzle for accurately and precisely dispensing small volumes of liquids. The nozzle comprises an internal flowpath, and an external surface that recedes from the discharge point at an angle greater than 90 degrees, and an exceptionally low surface energy for the external surface. The low surface energy material may exist as a coating on top of a shaped substrate. A flat land region may be included and may have sharp edges, one of which may define the boundary of the low surface energy region. Another embodiment includes the low surface energy material as a bulk material through which a hole is drilled. The internal flowpath inside the nozzle may be smoothly tapered. Liquid being dispensed tends not to advance past the edge of the low surface energy region, which may coincide with a geometrically sharp edge. Such nozzles provide improved dispensing of liquids that have both low surface tension and low viscosity, such as organic solvents.

    Abstract translation: 一种防湿喷嘴,用于精确和精确地分配少量液体。 喷嘴包括内部流路,以及以大于90度的角度从排出点后退的外表面,以及外表面的极低的表面能。 低表面能材料可以作为成形基底顶部的涂层存在。 可以包括平坦的区域区域并且可以具有尖锐的边缘,其中一个可以限定低表面能区域的边界。 另一个实施例包括作为大量材料的低表面能材料,通过该材料钻出孔。 喷嘴内的内部流路可以平滑地渐缩。 分配的液体往往不会超过低表面能区域的边缘,这可能与几何锋利的边缘重合。 这种喷嘴提供了具有低表面张力和低粘度的液体的改进分配,例如有机溶剂。

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