公开(公告)号：US11926522B1

公开(公告)日：2024-03-12

申请号：US17719045

申请日：2022-04-12

Applicant: CORPORATION FOR NATIONAL RESEARCH INITIATIVES

Inventor： Michael A. Huff

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/007 ,  B81C1/00301 ,  B81B2201/0264 ,  B81B2201/054 ,  B81B2207/092 ,  B81B2207/095 ,  B81B2207/096 ,  B81C2203/019

Abstract: A package and method of packaging for integrated microfluidic devices and systems is disclosed wherein a package is made from individually processed and patterned layers of LTCC green tape, that is aligned and stacked, and then co-fired to form a stable LTCC ceramic packaging modules. Subsequently, microfluidic device die and/or integrated microfluidic systems device die are bonded to pre-determined areas of the packaging modules and the modules are aligned bonded together to form leak-free, sealed packages for the microfluidic devices and systems. The use of LTCC materials and techniques provides a low-cost flexible and easily customizable packaging approach for microfluidic devices and systems that can be designed and transitioned into production with significant development time and cost.

公开(公告)号：US20230298862A1

公开(公告)日：2023-09-21

申请号：US17696594

申请日：2022-03-16

Applicant: Applied Materials, Inc.

Inventor： Alexander BERGER ,  Ming XU

IPC: H01J37/32 ,  B81B7/04 ,  H05K1/02 ,  C23C16/50 ,  C23C16/455

CPC classification number: H01J37/32449 ,  B81B7/04 ,  H05K1/0272 ,  C23C16/50 ,  C23C16/45565 ,  B81B2201/054 ,  B81B2207/053 ,  B81B2207/99 ,  B81B2207/012 ,  H05K2201/10083 ,  H05K2201/10522 ,  H05K2201/10545 ,  H05K2201/09063 ,  H05K1/181

Abstract: A showerhead for a processing chamber includes a faceplate with a plurality of openings. A plurality of compartments are recessed into a top surface of the faceplate. The showerhead includes a plurality of MEMS devices. Each MEMS device is disposed in a corresponding compartment of the plurality of compartments. A printed circuit board including a plurality of ports therethrough is coupled to each MEMS device. Each MEMS device is configured to regulate a gas flow into each corresponding compartment through a corresponding port of the plurality of ports in the printed circuit board.

公开(公告)号：US20180051308A1

公开(公告)日：2018-02-22

申请号：US15679885

申请日：2017-08-17

Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.

Inventor： Thomas LISEC ,  Fabian LOFINK

IPC: C12Q1/00 ,  C23C16/455 ,  G01R33/02

CPC classification number: C12Q1/002 ,  B81B2201/0235 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81C1/00182 ,  C23C16/45525 ,  G01R33/02

Abstract: A method of producing a device includes providing a substrate which has a recess. A multitude of loose particles is introduced into the recess. A first portion of the particles is coated by using a coating process having a depth of penetration which extends from an opening of the recess, along a direction of depth, and into the recess, so that the first portion is connected to form a solidified porous structure. The depth of penetration of the coating process which extends into the recess is set such that a second portion of the particles is not connected by means of the coating, and such that the solidified first portion of the particles is arranged between the second portion of the particles and surroundings of the recess. According to the invention, the second portion of the particles is at least partly removed from the recess.

公开(公告)号：US09714443B2

公开(公告)日：2017-07-25

申请号：US13679328

申请日：2012-11-16

Applicant: California Institute of Technology

Inventor： Sebastian J. Maerkl ,  Todd A. Thorsen ,  Xiaoyan Bao ,  Stephen R. Quake ,  Vincent Studer

IPC: B81B3/00 ,  B81B7/00 ,  B01L3/00 ,  C12Q1/28 ,  B81C1/00 ,  F15C5/00 ,  F16K99/00

CPC classification number: C12Q1/28 ,  B01L3/5025 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0655 ,  B81B2201/0214 ,  B81B2201/054 ,  B81B2201/07 ,  B81C1/00119 ,  F15C5/00 ,  F16K11/20 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T137/0318 ,  Y10T137/0329 ,  Y10T137/2224 ,  Y10T137/85938 ,  Y10T137/87249

Abstract: High-density microfluidic chips contain plumbing networks with thousands of micromechanical valves and hundreds of individually addressable chambers. These fluidic devices are analogous to electronic integrated circuits fabricated using large scale integration (LSI). A component of these networks is the fluidic multiplexor, which is a combinatorial array of binary valve patterns that exponentially increases the processing power of a network by allowing complex fluid manipulations with a minimal number of inputs. These integrated microfluidic networks can be used to construct a variety of highly complex microfluidic devices, for example the microfluidic analog of a comparator array, and a microfluidic memory storage device resembling electronic random access memories.

公开(公告)号：US09638338B2

公开(公告)日：2017-05-02

申请号：US14274698

申请日：2014-05-10

Applicant: RHEONIX, INC.

Inventor： Peng Zhou ,  Lincoln C. Young

IPC: F15C3/04 ,  F16K7/12 ,  B01F5/06 ,  B01F11/00 ,  B01F13/00 ,  B01L3/00 ,  B29C65/48 ,  B29C65/00 ,  B81C1/00 ,  F04B43/04 ,  F04B43/06 ,  F16K99/00 ,  F15C1/08 ,  B29K25/00 ,  B29K33/00 ,  B29K69/00 ,  B29K101/12 ,  B29L31/00

CPC classification number: F16K7/12 ,  B01F5/0683 ,  B01F5/0688 ,  B01F11/0071 ,  B01F13/0059 ,  B01F2215/0034 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/0867 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/06 ,  B01L2400/0638 ,  B01L2400/0655 ,  B01L2400/084 ,  B29C65/4895 ,  B29C66/004 ,  B29C66/54 ,  B29C66/5412 ,  B29C66/71 ,  B29K2025/00 ,  B29K2025/04 ,  B29K2033/08 ,  B29K2069/00 ,  B29K2101/12 ,  B29L2031/7496 ,  B29L2031/7506 ,  B29L2031/756 ,  B81B3/0021 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C1/00103 ,  B81C1/00158 ,  F04B43/028 ,  F04B43/043 ,  F04B43/06 ,  F15C1/08 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0021 ,  F16K99/0034 ,  F16K99/0055 ,  F16K99/0057 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T29/49405 ,  Y10T137/212 ,  Y10T137/2202 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/85978 ,  Y10T156/1002 ,  Y10T156/1043 ,  B29K2033/12 ,  B29K2025/06

Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

公开(公告)号：US20140102636A1

公开(公告)日：2014-04-17

申请号：US13808853

申请日：2011-04-25

Applicant: Florian Laouenan ,  Ingo Aranburu ,  Jesus Ruano ,  Maria Agirregabiria ,  Jorge Elizalde ,  Javier Berganzo ,  Luis J. Fernandez ,  Aitor Ezkerra

Inventor： Florian Laouenan ,  Ingo Aranburu ,  Jesus Ruano ,  Maria Agirregabiria ,  Jorge Elizalde ,  Javier Berganzo ,  Luis J. Fernandez ,  Aitor Ezkerra

IPC: B01L3/00

CPC classification number: B01L3/5027 ,  B29C65/76 ,  B29C66/028 ,  B29C66/112 ,  B29C66/114 ,  B29C66/53461 ,  B29C66/71 ,  B29C66/73117 ,  B29C66/7352 ,  B29C66/73921 ,  B29L2031/756 ,  B81B2201/054 ,  B81C3/001 ,  B81C2203/032 ,  B81C2203/036 ,  F16K99/0001 ,  F16K99/0015 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  B29K2023/38

Abstract: Fabrication method of microfluidic devices consisting of a sheet (1) which is 200 micrometre thick or less and a rigid part (3), both made of thermoplastic polymeric material includes degasification of a polymeric sheet of thermoplastic material (1), an auxiliary rigid part (2), and a polymeric rigid part of thermoplastic material (3). A temporary bonding procedure, of the degassed thermoplastic polymeric sheet (1) to a degassed auxiliary rigid part (2), is conducted producing a sheet-auxiliary part set (4). A permanent bonding procedure bonds the thermoplastic polymeric sheet (1) of the sheet-auxiliary part set (4) obtained in the previous temporary bonding stage, to the thermoplastic polymeric rigid part (3) which was initially degassed. The auxiliary rigid part (2) of the thermoplastic polymeric sheet (1) permanently bonded to the thermoplastic rigid part (3), is detached to produce a final part which is completely polymeric (5).

Abstract translation: 由200微米或更小的片材（1）和由热塑性聚合材料制成的刚性部分（3）组成的微流体装置的制造方法包括热塑性材料（1）的聚合物片脱模，辅助刚性部分 （2）和热塑性材料（3）的聚合物刚性部分。 进行脱气的热塑性聚合物片材（1）到脱气的辅助刚性部件（2）的临时粘结程序，产生片材辅助部件组件（4）。 永久性粘合方法将先前临时粘合阶段中获得的片材 - 辅助部件组（4）的热塑性聚合物片材（1）与最初脱气的热塑性聚合物刚性部件（3）结合。 永久地结合到热塑性刚性部分（3）上的热塑性聚合物片材（1）的辅助刚性部分（2）被分离以产生完全聚合的最终部件（5）。

公开(公告)号：US08662468B2

公开(公告)日：2014-03-04

申请号：US13058146

申请日：2009-07-09

Applicant: Harry Hunnicutt

Inventor： Harry Hunnicutt

IPC: F16K31/00

CPC classification number: F16K99/0001 ,  B81B3/0051 ,  B81B2201/054 ,  F16K99/0044 ,  F16K2099/0074 ,  F16K2099/008

Abstract: A microvalve device includes a body, a valve element supported for movement relative to the body, and an actuator operatively coupled to the valve element for moving the valve element in a normal range of travel. A travel limiting structure operatively cooperates with at least one of the valve element and the actuator to effectively limit the magnitude of movement of the valve element or the actuator outside the normal range of travel to prevent failure of the body, the valve element, or the actuator due to exceeding failure stress limits. A method of forming a microvalve with such a travel limiting structure is also disclosed.

Abstract translation: 微型阀装置包括主体，被支撑用于相对于主体运动的阀元件，以及可操作地联接到阀元件的致动器，用于在正常行驶范围内移动阀元件。 行程限制结构与阀元件和致动器中的至少一个可操作地配合以有效地限制阀元件或致动器在正常行程范围内的运动的大小，以防止阀体，阀元件或 由于超过故障应力极限，执行器。 还公开了一种用这种行程限制结构形成微型阀的方法。

公开(公告)号：US08646482B2

公开(公告)日：2014-02-11

申请号：US12855058

申请日：2010-08-12

Applicant: Peng Zhou ,  Lincoln C. Young

Inventor： Peng Zhou ,  Lincoln C. Young

IPC: F15C3/00

CPC classification number: F16K7/12 ,  B01F5/0683 ,  B01F5/0688 ,  B01F11/0071 ,  B01F13/0059 ,  B01F2215/0034 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/0867 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/06 ,  B01L2400/0638 ,  B01L2400/0655 ,  B01L2400/084 ,  B29C65/4895 ,  B29C66/004 ,  B29C66/54 ,  B29C66/5412 ,  B29C66/71 ,  B29K2025/00 ,  B29K2025/04 ,  B29K2033/08 ,  B29K2069/00 ,  B29K2101/12 ,  B29L2031/7496 ,  B29L2031/7506 ,  B29L2031/756 ,  B81B3/0021 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C1/00103 ,  B81C1/00158 ,  F04B43/028 ,  F04B43/043 ,  F04B43/06 ,  F15C1/08 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0021 ,  F16K99/0034 ,  F16K99/0055 ,  F16K99/0057 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T29/49405 ,  Y10T137/212 ,  Y10T137/2202 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/85978 ,  Y10T156/1002 ,  Y10T156/1043 ,  B29K2033/12 ,  B29K2025/06

Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

Abstract translation: 塑料微流体结构具有基本上刚性的膜片，其在松弛状态之间起作用，其中隔膜抵靠衬底的表面，以及致动状态，其中隔膜移动离开衬底。 从以下描述可以看出，用这种隔膜形成的微流体结构提供易于制造和坚固的系统，以及易于制造的部件，例如阀和泵。

公开(公告)号：US08535020B2

公开(公告)日：2013-09-17

申请号：US12248496

申请日：2008-10-09

Applicant: Lincoln C. Young ,  Peng Zhou

Inventor： Lincoln C. Young ,  Peng Zhou

IPC: F04B49/00 ,  F04B53/10

CPC classification number: F16K7/12 ,  B01F5/0683 ,  B01F5/0688 ,  B01F11/0071 ,  B01F13/0059 ,  B01F2215/0034 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/0867 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/06 ,  B01L2400/0638 ,  B01L2400/0655 ,  B01L2400/084 ,  B29C65/4895 ,  B29C66/004 ,  B29C66/54 ,  B29C66/5412 ,  B29C66/71 ,  B29K2025/00 ,  B29K2025/04 ,  B29K2033/08 ,  B29K2069/00 ,  B29K2101/12 ,  B29L2031/7496 ,  B29L2031/7506 ,  B29L2031/756 ,  B81B3/0021 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C1/00103 ,  B81C1/00158 ,  F04B43/028 ,  F04B43/043 ,  F04B43/06 ,  F15C1/08 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0021 ,  F16K99/0034 ,  F16K99/0055 ,  F16K99/0057 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T29/49405 ,  Y10T137/212 ,  Y10T137/2202 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/85978 ,  Y10T156/1002 ,  Y10T156/1043 ,  B29K2033/12 ,  B29K2025/06

Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

Abstract translation: 塑料微流体结构具有基本上刚性的膜片，其在松弛状态之间起作用，其中隔膜抵靠衬底的表面，以及致动状态，其中隔膜移动离开衬底。 从以下描述可以看出，用这种隔膜形成的微流体结构提供易于制造和坚固的系统，以及易于制造的部件，例如阀和泵。

公开(公告)号：US20130105017A1

公开(公告)日：2013-05-02

申请号：US13662824

申请日：2012-10-29

Applicant: Rheonix, Inc.

Inventor： Peng Zhou ,  Lincoln C. Young

IPC: F15C1/08

CPC classification number: F16K7/12 ,  B01F5/0683 ,  B01F5/0688 ,  B01F11/0071 ,  B01F13/0059 ,  B01F2215/0034 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/0867 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/06 ,  B01L2400/0638 ,  B01L2400/0655 ,  B01L2400/084 ,  B29C65/4895 ,  B29C66/004 ,  B29C66/54 ,  B29C66/5412 ,  B29C66/71 ,  B29K2025/00 ,  B29K2025/04 ,  B29K2033/08 ,  B29K2069/00 ,  B29K2101/12 ,  B29L2031/7496 ,  B29L2031/7506 ,  B29L2031/756 ,  B81B3/0021 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C1/00103 ,  B81C1/00158 ,  F04B43/028 ,  F04B43/043 ,  F04B43/06 ,  F15C1/08 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0021 ,  F16K99/0034 ,  F16K99/0055 ,  F16K99/0057 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T29/49405 ,  Y10T137/212 ,  Y10T137/2202 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/85978 ,  Y10T156/1002 ,  Y10T156/1043 ,  B29K2033/12 ,  B29K2025/06

Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

Abstract translation: 塑料微流体结构具有基本上刚性的膜片，其在松弛状态之间起作用，其中隔膜抵靠衬底的表面，以及致动状态，其中隔膜移动离开衬底。 从以下描述可以看出，用这种隔膜形成的微流体结构提供易于制造和坚固的系统，以及易于制造的部件，例如阀和泵。