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    Sensor for measuring a substrate temperature
    62.
    发明授权
    Sensor for measuring a substrate temperature 有权
    用于测量衬底温度的传感器

    公开(公告)号：US06406179B2

    公开(公告)日：2002-06-18

    申请号：US09756945

    申请日：2001-01-08

    Applicant: Bruce Adams ,  Aaron Hunter ,  Alex Rubinchik ,  Mark Yam ,  Paul A. O'Brien

    Inventor： Bruce Adams ,  Aaron Hunter ,  Alex Rubinchik ,  Mark Yam ,  Paul A. O'Brien

    IPC: G01J508

    CPC classification number: G01J5/04 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/046 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0809 ,  G01J5/0815 ,  G01J5/0818 ,  G01J5/0821 ,  G01J5/0846 ,  G01J5/0862 ,  G01J2005/0048

    Abstract: A temperature sensor for measuring a temperature of a substrate in a thermal processing chamber is described. The chamber includes a reflector forming a reflecting cavity with a substrate when the substrate is positioned in the chamber. The temperature sensor includes a probe having an input end positioned to receive radiation from the reflecting cavity, and a detector optically coupled to an output end of the probe. The radiation entering the probe includes reflected radiation and non-reflected radiation. The detector measures an intensity of a first portion of the radiation entering the probe to generate a first intensity signal and measures an intensity of a second portion of the radiation entering the probe to generate a second intensity signal. The detector is configured so that a ratio of the reflected radiation to the non-reflected radiation is higher in the first portion than the second portion. The two intensity signals are used to calculate the temperature and emissivity of the substrate.

    Abstract translation: 描述了用于测量热处理室中的基板的温度的温度传感器。 该腔室包括一反射镜，当该基片定位在腔室中时，该反射器形成具有基底的反射腔。 温度传感器包括探针，其具有定位成接收来自反射腔的辐射的输入端，以及光学耦合到探针的输出端的检测器。 进入探头的辐射包括反射辐射和未反射的辐射。 检测器测量进入探头的辐射的第一部分的强度，以产生第一强度信号并测量进入探头的辐射的第二部分的强度以产生第二强度信号。 检测器被配置为使得反射辐射与非反射辐射的比率在第一部分中比第二部分高。 两个强度信号用于计算衬底的温度和发射率。

    Sensitivity of iterative spectrally smooth temperature/emissivity separation to instrument noise
    63.
    发明申请
    Sensitivity of iterative spectrally smooth temperature/emissivity separation to instrument noise 有权
    迭代光谱平滑温度/发射率分离到仪器噪声的灵敏度

    公开(公告)号：US20020035454A1

    公开(公告)日：2002-03-21

    申请号：US09917388

    申请日：2001-07-26

    Applicant: Raytheon Company

    Inventor： Paul M. Ingram JR. ,  Archie H. Muse

    IPC: G06F017/10

    CPC classification number: G01J5/00 ,  G01J5/007 ,  G01J5/60 ,  G01J2005/0048

    Abstract: A method for estimating the error statistic for retrieved temperature and emissivity of a surface material includes determining the second order analytical error propagation from a measured radiance that differs from the true radiance by additive gaussian noise, which is independent in each band. The radiance error is translated into a diagonal covariance matrix and an analytical estimate results in a determination of the standard deviation and bias of surface temperature. Further, the method for estimating the error statistic utilizes Monte Carlo simulation from a sufficiently large ensemble of radiance spectra for the retrieved surface temperature and emissivity. Temperature and emissivity of the surface material were retrieved using ISSTES algorithm.

    Abstract translation: 用于估计检索到的温度和表面材料的发射率的误差统计量的方法包括从与每个波段独立的加性高斯噪声不同于真实辐射度的测量辐射度确定二阶分析误差传播。 辐射误差被转换成对角协方差矩阵，并且分析估计导致测定表面温度的标准偏差和偏差。 此外，用于估计误差统计量的方法利用来自足够大的辐射谱集合的蒙特卡罗模拟来获得的表面温度和发射率。 使用ISSTES算法检索表面材料的温度和发射率。

    Radiation thermometer and method of computing the temperature
    65.
    发明授权
    Radiation thermometer and method of computing the temperature 有权
    辐射温度计和计算温度的方法

    公开(公告)号：US6149298A

    公开(公告)日：2000-11-21

    申请号：US212817

    申请日：1998-12-16

    Applicant: Bernhard Kraus ,  Manfred Kaiser

    Inventor： Bernhard Kraus ,  Manfred Kaiser

    IPC: G01J5/10 ,  A61B5/01 ,  G01J5/00 ,  G01J5/04 ,  G01K13/00

    CPC classification number: G01J5/04 ,  G01J5/049 ,  G01J5/08 ,  G01J5/0818 ,  G01J2005/0048 ,  G01J2005/068

    Abstract: The invention is directed to a method of computing the radiation temperature of a body from the signals of a radiation and an ambient temperature sensor, and further to a radiation thermometer, in particular a clinical radiation thermometer. In the method of the present invention, computation of the temperature is not using the Stefan Boltzmann law, but rather, a polynomial is used, preferably a third-degree polynomial, which is adjusted to the radiation-optical properties of the thermometer in the relevant wavelength range. The reciprocal value of the sensitivity of the radiation sensor is preferably represented as a polynomial as well. In this manner, the computation of a fourth root or divisions which are otherwise customary are avoided, enabling the necessary computations to be also performed, for example, by a 4-bit microprocessor with great speed.

    Abstract translation: 本发明涉及一种从辐射和环境温度传感器的信号以及辐射温度计，特别是临床辐射温度计计算身体辐射温度的方法。 在本发明的方法中，温度的计算不使用斯蒂芬·玻尔兹曼定律，而是使用多项式，优选三次多项式，其被调整为相关温度计的辐射光学特性 波长范围。 辐射传感器的灵敏度的倒数值也优选地表示为多项式。 以这种方式，避免了另外习惯的第四根或分区的计算，使得能够例如通过4位微处理器以高速度执行必要的计算。

    Infrared thermometer
    66.
    发明授权
    Infrared thermometer 失效
    红外线温度计

    公开(公告)号：US6129673A

    公开(公告)日：2000-10-10

    申请号：US093464

    申请日：1998-06-08

    Applicant: Jacob Fraden

    Inventor： Jacob Fraden

    IPC: A61B5/01 ,  G01J5/04 ,  G01K13/00 ,  A61B5/00 ,  G01J5/00

    CPC classification number: G01J5/04 ,  G01J5/046 ,  G01J5/049 ,  G01J5/10 ,  G01J5/16 ,  G01J5/24 ,  G01J5/522 ,  G01J2005/0048 ,  G01J2005/068

    Abstract: An infrared (IR) thermometer for performing temperature measurement of an object without having contact with the object. The IR thermometer comprises at least one IR sensing element which, upon exposure to IR radiation, produces a response. The IR sensing element comprises a flat thermistor flake supported by a substrate. The IR thermometer further comprises a processing circuit which analyzes the response to predict the steady-state response of the at least one IR sensing element and temperature of the object. In one embodiment, the processing circuit may obtain two or more responses separated by a predetermined period of time to predict temperature of the object. The processing circuit may also associate reference data in its prediction algorithm.

    Abstract translation: 一种用于对物体进行温度测量而不与物体接触的红外（IR）温度计。 IR温度计包括至少一个IR感测元件，其在暴露于IR辐射时产生响应。 IR感测元件包括由衬底支撑的扁平热敏电阻片。 IR温度计还包括处理电路，其分析响应以预测至少一个IR感测元件的稳态响应和对象的温度。 在一个实施例中，处理电路可以获得在预定时间段内分开的两个或更多个响应，以预测对象的温度。 处理电路还可以在其预测算法中关联参考数据。

    Apparatus for infrared pyrometer calibration in a thermal processing system
    67.
    发明授权
    Apparatus for infrared pyrometer calibration in a thermal processing system 有权
    热处理系统中用于红外高温计校准的装置

    公开(公告)号：US6086245A

    公开(公告)日：2000-07-11

    申请号：US154533

    申请日：1998-09-16

    Applicant: Mark Yam

    Inventor： Mark Yam

    IPC: G01K15/00 ,  G01J5/00 ,  G01J5/02 ,  G01J5/52 ,  H01L21/66

    CPC classification number: G01J5/522 ,  G01J5/0003 ,  G01J5/52 ,  G01J2005/0048

    Abstract: A calibration instrument for calibrating a temperature probe, such as pyrometer, uses a stable light source, such as a light emitting diode, to simulate a blackbody of a known temperature. The light source is located inside a chamber and emits light through an aperture. The calibration instrument may be inserted into a thermal processing chamber, or the temperature probe may be removed from the chamber. An alignment tool aligns the aperture to the input of the temperature probe. The calibration instrument may be integrated with the alignment tool, or it may be removable.

    Abstract translation: 用于校准温度探针（例如高温计）的校准仪器使用稳定的光源（例如发光二极管）来模拟已知温度的黑体。 光源位于室内并通过孔发射光。 校准仪器可以插入到热处理室中，或者温度探针可以从腔室中移除。 对准工具将光圈对准温度探头的输入。 校准仪器可以与对准工具集成，也可以是可拆卸的。

    Method of calibrating a radiation thermometer
    68.
    发明授权
    Method of calibrating a radiation thermometer 失效
    校准辐射温度计的方法

    公开(公告)号：US6065866A

    公开(公告)日：2000-05-23

    申请号：US976354

    申请日：1997-11-21

    Applicant: Bernhard Kraus ,  Frank Beerwerth ,  Klaus Heubach ,  Manfred Kaiser

    Inventor： Bernhard Kraus ,  Frank Beerwerth ,  Klaus Heubach ,  Manfred Kaiser

    IPC: G01K15/00 ,  G01J5/00 ,  G01J5/10

    CPC classification number: G01J5/522 ,  G01J2005/0048 ,  G01J2005/068

    Abstract: A method of calibrating a radiation thermometer including a radiation sensor and an ambient temperature sensor, the method including the steps of using a first radiation standard having a known temperature T.sub.S (1) and with the ambient temperature sensor at a first ambient temperature T.sub.U (1), using the radiation thermometer to read the temperature of the first radiation standard and while doing so, measuring a first output signal U(1) of the radiation sensor; using a second radiation standard having a known temperature T.sub.S (2) and with the ambient temperature sensor again at the first ambient temperature T.sub.U (1), using the radiation thermometer to read the temperature of the second radiation standard and while doing so, measuring a second output signal U(2) of the radiation sensor; and calibrating the radiation sensor and the ambient temperature sensor by using the values obtained for U(1) and U(2) and without using a value for T.sub.U (1) that is derived from measuring an output of the ambient sensor.

    Abstract translation: 一种校准包括辐射传感器和环境温度传感器的辐射温度计的方法，所述方法包括以下步骤：使用具有已知温度TS（1）的第一辐射标准和环境温度传感器处于第一环境温度TU（1 ），使用辐射温度计读取第一辐射标准的温度，同时测量辐射传感器的第一输出信号U（1）; 使用具有已知温度TS（2）的第二辐射标准和环境温度传感器再次处于第一环境温度TU（1），使用辐射温度计读取第二辐射标准的温度，同时测量 第二输出信号U（2）; 并且通过使用对于U（1）和U（2）获得的值来校准辐射传感器和环境温度传感器，并且不使用从测量环境传感器的输出导出的TU（1）的值。

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