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公开(公告)号：US09208983B2
公开(公告)日：2015-12-08
申请号：US14011575
申请日：2013-08-27
Applicant: SEN Corporation
Inventor： Masateru Sato
CPC classification number: H01J5/10 , H01J27/08 , H01J37/08 , H01J2237/082 , H01J2237/31701
Abstract: An ion generation method uses a direct current discharge ion source provided with an arc chamber formed of a high melting point material, and includes: generating ions by causing molecules of a source gas to collide with thermoelectrons in the arc chamber and producing plasma discharge; and causing radicals generated in generating ions to react with a liner provided to cover an inner wall of the arc chamber at least partially. The liner is formed of a material more reactive to radicals generated as the source gas is dissociated than the material of the arc chamber.
Abstract translation: 离子产生方法使用设置有由高熔点材料形成的电弧室的直流放电离子源，并且包括：通过使源气体的分子与电弧室中的热电子碰撞并产生等离子体放电而产生离子; 并且使产生离子产生的自由基与至少部分地覆盖电弧室的内壁的衬垫反应。 衬垫由与源电极气体相比所产生的自由基反应的材料形成为比电弧室的材料更为反应。
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公开(公告)号：US20150340194A1
公开(公告)日：2015-11-26
申请号：US14721808
申请日：2015-05-26
Inventor： Masateru Sato
CPC classification number: H01J37/06 , H01J27/08 , H01J37/08 , H01J2237/082
Abstract: An ion generator includes an arc chamber, a cathode that extends outward from the inside of the arc chamber in an axial direction and that emits a thermal electron into the arc chamber, a thermal reflector with a cylindrical shape provided around the cathode in a radial direction and extending in the axial direction, and a narrow structure configured to narrow a width in the radial direction of a gap between the cathode and the thermal reflector at a given position in the axial direction.
Abstract translation: 离子发生器包括电弧室，阴极，其沿着轴向从电弧室的内部向外延伸并且向电弧室发射热电子;沿半径方向设置在阴极周围的具有圆筒形的热反射器 并且在轴向方向上延伸，窄结构构造成在轴向的给定位置处使阴极和热反射器之间的间隙的径向宽度变窄。
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公开(公告)号：US20140354138A1
公开(公告)日：2014-12-04
申请号：US14263970
申请日：2014-04-28
Inventor： Lauren P. Rand , John D. Williams , Rafael A. Martinez
IPC: H01J1/02
CPC classification number: H01J1/025 , F03H1/0068 , H01J1/14 , H01J27/08 , H01J27/146 , H01J2237/08
Abstract: The use of the electride form of 12CaO-7Al2O3, or C12A7, as a low work function electron emitter in a hollow cathode discharge apparatus is described. No heater is required to initiate operation of the present cathode, as is necessary for traditional hollow cathode devices. Because C12A7 has a fully oxidized lattice structure, exposure to oxygen does not degrade the electride. The electride was surrounded by a graphite liner since it was found that the C12A7 electride converts to it's eutectic (CA+C3A) form when heated (through natural hollow cathode operation) in a metal tube.
Abstract translation: 描述了在空心阴极放电装置中使用12CaO-7Al2O3或C12A7的电子形式作为低功函电子发射体。 根据传统的空心阴极器件的需要，不需要加热器来启动本阴极的操作。 因为C12A7具有完全氧化的晶格结构，所以暴露于氧气不会降低电极。 电极被石墨衬垫包围，因为发现当在金属管中加热（通过天然空心阴极操作）时，C12A7电致转变成它的共晶（CA + C3A）形式。
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公开(公告)号：US20140263993A1
公开(公告)日：2014-09-18
申请号：US13830401
申请日：2013-03-14
Applicant: Schlumberger Technology Corporation
Inventor： Luke Perkins , Benjamin Levitt , Peter Wraight , Arthur D. Liberman
CPC classification number: H01J27/205 , G21G4/02 , H01J27/02 , H01J27/08 , H01J27/16
Abstract: An ion source for use in a radiation generator includes a sealed envelope containing an ionizable gas therein. The ion source also includes a RF antenna external to the sealed envelope, the RF antenna to transmit time-varying electromagnetic fields within the sealed envelope for producing ions from the ionizable gas. There is at least one extractor within the sealed envelope having a potential such that the ions are attracted toward the at least one extractor.
Abstract translation: 用于辐射发生器的离子源包括其中含有可电离气体的密封外壳。 离子源还包括在密封外壳外部的RF天线，RF天线用于传输密封外壳内的时变电磁场，用于从可电离气体产生离子。 密封外壳内有至少一个提取器具有使得离子被吸引到至少一个提取器的电位。
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公开(公告)号：US20140062286A1
公开(公告)日：2014-03-06
申请号：US14011575
申请日：2013-08-27
Applicant: SEN Corporation
Inventor： Masateru Sato
IPC: H01J5/10
CPC classification number: H01J5/10 , H01J27/08 , H01J37/08 , H01J2237/082 , H01J2237/31701
Abstract: An ion generation method uses a direct current discharge ion source provided with an arc chamber formed of a high melting point material, and includes: generating ions by causing molecules of a source gas to collide with thermoelectrons in the arc chamber and producing plasma discharge; and causing radicals generated in generating ions to react with a liner provided to cover an inner wall of the arc chamber at least partially. The liner is formed of a material more reactive to radicals generated as the source gas is dissociated than the material of the arc chamber.
Abstract translation: 离子产生方法使用设置有由高熔点材料形成的电弧室的直流放电离子源，并且包括：通过使源气体的分子与电弧室中的热电子碰撞并产生等离子体放电而产生离子; 并且使产生离子产生的自由基与至少部分地覆盖电弧室的内壁的衬垫反应。 衬垫由与源电极气体相比所产生的自由基反应的材料形成为比电弧室的材料更为反应。
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Patent Agency Ranking
公开(公告)号：US08263944B2
公开(公告)日：2012-09-11
申请号：US12340812
申请日：2008-12-22
Applicant: John Bon-Woong Koo , David J. Twiss , Chris Campbell , Frank Sinclair , Alexander S. Perel , Craig R. Chaney , Wilhelm P. Platow , Eric R. Cobb
Inventor： John Bon-Woong Koo , David J. Twiss , Chris Campbell , Frank Sinclair , Alexander S. Perel , Craig R. Chaney , Wilhelm P. Platow , Eric R. Cobb
IPC: H01J27/00
CPC classification number: H01J27/08 , H01J37/08 , H01J37/3171 , H01J2237/006 , H01J2237/022 , H01J2237/061
Abstract: In an ion implanter, an inert gas is directed at a cathode assembly near an ion source chamber via a supply tube. The inert gas is provided with a localized directional flow toward the cathode assembly to reduce unwanted concentrations of cleaning or dopant gases introduced into the ion source chamber, thereby reducing the effects of unwanted filament growth in the cathode assembly and extending the manufacturing life of the ion source.
Abstract translation: 在离子注入机中，惰性气体通过供应管被引导到离子源室附近的阴极组件。 向惰性气体提供朝向阴极组件的局部定向流，以减少引入离子源室的清洁或掺杂气体的不期望浓度，从而减少阴极组件中不想要的细丝生长的影响并延长离子的制造寿命 资源。
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公开(公告)号：US08253334B2
公开(公告)日：2012-08-28
申请号：US12804277
申请日：2010-07-19
Applicant: Manuel A. Jerez
Inventor： Manuel A. Jerez
CPC classification number: H01J27/08 , H01J37/08 , H01J2237/061 , H01J2237/082 , H01J2237/31701
Abstract: A cathode sub-assembly is comprised of a retainer, a cathode and a collar, each of which has smooth unthreaded surfaces that slidably engage each other. A shield serves to hold the sub-assembly in a support plate. The cathode projects from the sub-assembly into an arc chamber with a tortuous path created therebetween for passage of a plasma flow.
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公开(公告)号：US08143590B2
公开(公告)日：2012-03-27
申请号：US12838309
申请日：2010-07-16
Applicant: Tsai-Cheng Wang , Chin-Chung Yang , An-Ting Hsiao , Yu-Li Tsai
Inventor： Tsai-Cheng Wang , Chin-Chung Yang , An-Ting Hsiao , Yu-Li Tsai
CPC classification number: H01J27/08 , H01J37/08 , H01J2237/0041 , H01J2237/022 , H01J2237/061
Abstract: An ion source apparatus has an ion source assembly and a neutralizer. The ion source assembly has a body, a heat-dissipating device, an anode chunk and a gas distributor. The heat-dissipating device has a thermal transfer plate and a first thermal side sheet. The thermal transfer plate has a top, a protrusion and an annular disrupting recess. The protrusion is formed at the top of the thermal transfer plate. The disrupting recess is radially formed around the protrusion. The first thermal side sheet surrounds the protrusion. The gas distributor is mounted securely in the protrusion. Because the protrusion is located between the gas distributor and the first thermal side sheet and the disrupting recess is radially formed around the protrusion, accumulated ions, molecules and deposition film particles are longitudinally disrupted and do not form a short circuit between the gas distributor and the first thermal side sheet.
Abstract translation: 离子源装置具有离子源组件和中和器。 离子源组件具有主体，散热装置，阳极块和气体分配器。 散热装置具有热转印板和第一热侧片。 热转印板具有顶部，突起和环形破坏凹部。 突起形成在热转印板的顶部。 破裂凹部围绕突起径向地形成。 第一热侧片围绕突起。 气体分配器牢固地安装在突起中。 因为突起位于气体分配器和第一热侧片之间，并且破裂凹部围绕突起径向地形成，所以累积的离子，分子和沉积膜颗粒被纵向破坏，并且不会在气体分布器和 第一热侧片。
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公开(公告)号：US20120013249A1
公开(公告)日：2012-01-19
申请号：US12804277
申请日：2010-07-19
Applicant: Manuel A. Jerez
Inventor： Manuel A. Jerez
CPC classification number: H01J27/08 , H01J37/08 , H01J2237/061 , H01J2237/082 , H01J2237/31701
Abstract: A cathode sub-assembly is comprised of a retainer, a cathode and a collar, each of which has smooth unthreaded surfaces that slidably engage each other. A shield serves to hold the sub-assembly in a support plate. The cathode projects from the sub-assembly into an arc chamber with a tortuous path created therebetween for passage of a plasma flow.
Abstract translation: 阴极子组件包括保持器，阴极和套环，其中每个具有可滑动地彼此接合的平滑无螺纹表面。 屏蔽件用于将子组件保持在支撑板中。 阴极从子组件突出到具有在其间形成的曲折路径的电弧室，用于通过等离子体流。
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公开(公告)号：US07947966B2
公开(公告)日：2011-05-24
申请号：US12183961
申请日：2008-07-31
Applicant: William F. DiVergilio
Inventor： William F. DiVergilio
IPC: H01J27/02
CPC classification number: H01J27/16 , H01J27/08 , H01J27/205 , H01J37/08 , H01J2237/006 , H01J2237/0817 , H01J2237/082 , H01J2237/31701
Abstract: An ion source includes a first plasma chamber including a plasma generating component and a first gas inlet for receiving a first gas such that said plasma generating component and said first gas interact to generate a first plasma within said first plasma chamber, wherein said first plasma chamber further defines an aperture for extracting electrons from said first plasma, and a second plasma chamber including a second gas inlet for receiving a second gas, wherein said second plasma chamber further defines an aperture in substantial alignment with the aperture of said first plasma chamber, for receiving electrons extracted therefrom, such that the electrons and the second gas interact to generate a second plasma within said second plasma chamber, said second plasma chamber further defining an extraction aperture for extracting ions from said second plasma.
Abstract translation: 离子源包括包括等离子体产生部件的第一等离子体室和用于接收第一气体的第一气体入口，使得所述等离子体产生部件和所述第一气体相互作用以在所述第一等离子体室内产生第一等离子体，其中所述第一等离子体室 进一步限定用于从所述第一等离子体提取电子的孔，以及包括用于接收第二气体的第二气体入口的第二等离子体室，其中所述第二等离子体室还限定与所述第一等离子体室的孔基本对准的孔，用于 接收从其提取的电子，使得电子和第二气体相互作用以在所述第二等离子体室内产生第二等离子体，所述第二等离子体室还限定用于从所述第二等离子体提取离子的提取孔。
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