公开(公告)号：US07501638B1

公开(公告)日：2009-03-10

申请号：US11553160

申请日：2006-10-26

Applicant: Fang Zhou

Inventor： Fang Zhou

IPC: H01J37/10 ,  H01J37/147

CPC classification number: H01J9/505 ,  H01J3/06 ,  H01J37/067 ,  Y02W30/828

Abstract: A charged particle beam emitting device includes at least two charged particle beam guns, each of the at least two charged particle beam guns having a separate charged particle emitter with an emitting surface for emitting a respective charged particle beam. The charged particle beam emitting device further includes an aperture element comprising at least one aperture opening and a deflector unit. The deflector unit is adapted for alternatively directing the charged particle beams of the at least two charged particle beam guns on the at least one aperture opening so that, at the same time, one of the at least two charged particle beams is directed on the aperture opening while the respective other charged particle beam of the at least two charged particle beams is deflected from the aperture opening by the deflector unit. At the same time, only one of the two charged particle beam guns is used so that the temporarily unused charged particle beam gun can be subjected to a cleaning procedure. This ensures that the emitting surfaces of both charged particle beam guns can be alternatively and frequently cleaned with minimum interruption of the operation of the charged particle beam device.

Abstract translation: 带电粒子束发射装置包括至少两个带电粒子束枪，所述至少两个带电粒子束枪中的每一个具有分离的带电粒子发射器，具有用于发射相应带电粒子束的发射表面。 带电粒子束发射装置还包括孔元件，该孔元件包括至少一个孔口和偏转器单元。 偏转器单元适于将至少两个带电粒子束枪的带电粒子束交替地引导到至少一个孔口上，使得同时，至少两个带电粒子束中的一个被引导到孔 所述至少两个带电粒子束的相应的其它带电粒子束由所述偏转器单元从所述开口偏转。 同时，仅使用两个带电粒子束枪中的一个，使得临时使用的带电粒子束枪可以进行清洁程序。 这确保了两个带电粒子束枪的发射表面可以以最小的带电粒子束装置的操作中断来交替地和频繁地清洁。

公开(公告)号：US20080023642A1

公开(公告)日：2008-01-31

申请号：US11495628

申请日：2006-07-31

Applicant: Rodney Rendall ,  Tomohiko Abe

Inventor： Rodney Rendall ,  Tomohiko Abe

IPC: H01J37/065

CPC classification number: H01J37/065 ,  H01J3/021 ,  H01J3/027 ,  H01J37/067 ,  H01J49/08 ,  H01J2237/061 ,  H01J2237/26 ,  H01J2237/28

Abstract: A device which employs an electron beam, for performing a desired function, includes an electron gun for generating the electron beam. The electron gun includes a barrel shaped rotatable structure having a plurality of annularly disposed electron sources. A curvature of a surface portion of the rotatable structure is shaped to optimize electric field concentrations. The rotatable structure further includes end portion protrusions.

Abstract translation: 使用电子束来执行所需功能的装置包括用于产生电子束的电子枪。 电子枪包括具有多个环形设置的电子源的桶形可旋转结构。 可旋转结构的表面部分的曲率被成形为优化电场浓度。 可旋转结构还包括端部突起。

公开(公告)号：US20060151716A1

公开(公告)日：2006-07-13

申请号：US11257244

申请日：2005-10-24

Applicant: Sang Choi ,  Dae Kim ,  Jin Jeong ,  Dae Kim

Inventor： Sang Choi ,  Dae Kim ,  Jin Jeong ,  Dae Kim

IPC: G21G5/00

CPC classification number: H01J37/067 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/1502 ,  H01J2237/2818

Abstract: Provided is a micro-column electron beam apparatus including: a base; an electron lens bracket on which an electron lens modulate can be fixed, mounted in a central portion of the base; an electron beam source tip module vertically disposed on the electron lens module; a pan spring plate stage module that is mounted over the base, supports the electron beam source tip module at a central portion thereof, and includes a three-coupling pan spring plate portion including first through third spring units that are coupled to the electron beam source tip module in three directions on a plane perpendicular to the vertical axis, which vertically passes the center of the electron beam source tip module, to elastically support the electron beam source tip module in three directions; a first piezoelectric actuator coupled to the pan spring plate stage module to move the electron beam source tip module along a first axis perpendicular to the vertical axis; and a second piezoelectric actuator coupled to the pan spring plate stage module to move the electron beam source tip module along a second axis perpendicular to the vertical axis and the first axis.

Abstract translation: 本发明提供一种微柱电子束装置，包括：基底; 可以固定电子透镜调制的电子透镜支架，安装在基座的中心部分; 垂直设置在电子透镜模块上的电子束源头模块; 安装在基座上方的平板弹簧板台模块在其中心部分处支撑电子束源头模块，并且包括三联盘盘弹簧板部分，其包括耦合到电子束源的第一至第三弹簧单元 尖端模块在垂直于垂直轴线的平面上垂直通过电子束源头模块的中心，在三个方向弹性支撑电子束源头模块; 第一压电致动器，其联接到所述盘簧板模块以沿着垂直于所述垂直轴线的第一轴线移动所述电子束源尖端模块; 以及耦合到盘簧级模块的第二压电致动器，用于沿垂直于垂直轴线和第一轴线的第二轴线移动电子束源尖端模块。

公开(公告)号：US20060071175A1

公开(公告)日：2006-04-06

申请号：US10538284

申请日：2003-12-30

Applicant: Ho Kim ,  Seung Ahn ,  Dae Kim

Inventor： Ho Kim ,  Seung Ahn ,  Dae Kim

IPC: H01J3/14

CPC classification number: H01J3/028 ,  H01J3/10 ,  H01J37/067 ,  H01J37/15 ,  H01J2237/1205 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/24465 ,  H01J2237/24507

Abstract: The present invention provides a new extractor for a micro-column and an alignment method of the aperture of the extractor and an electron emitter for a micro-column. Further, the present invention provides a measuring system, a method for measuring, and an alignment method using the principle of the alignment.

Abstract translation: 本发明提供了用于微柱的新提取器和提取器的孔径和用于微柱的电子发射器的对准方法。 此外，本发明提供了使用对准原理的测量系统，测量方法和对准方法。

公开(公告)号：US06297584B1

公开(公告)日：2001-10-02

申请号：US09675567

申请日：2000-09-29

Applicant: Ho-Seob Kim ,  Kim Y. Lee ,  T. H. P. Chang

Inventor： Ho-Seob Kim ,  Kim Y. Lee ,  T. H. P. Chang

IPC: H01J3706

CPC classification number: H01J9/18 ,  H01J37/067 ,  H01J2201/304 ,  H01J2237/1501

Abstract: A method and an accompanied apparatus for aligning an electron emitter with an extractor hole of a microcolumn. Four V-grooves, defined together with the window for forming the membrane and having bottoms situated on two axis are microfabricated on a chip. The axis intersect at a right angle and defines a center point for the extractor hole. The V-grooves are then used as references to align the electron emitter with the extractor hole, one axis at a time. The emitter is precisely aligned to the extractor hole because the extractor hole was formed with reference to the V-grooves. The thickness of the chip is used as the spacing reference between the emitter and the extractor.

Abstract translation: 用于将电子发射器与微柱的提取孔对准的方法和伴随装置。 与形成膜并且具有位于两个轴上的底部的窗口一起定义的四个V形槽在芯片上微加工。 轴线以直角相交，并定义了提取孔的中心点。 然后使用V形槽作为参考，以将电子发射体与提取孔对准，一次一个轴。 由于提取孔是相对于V形槽形成的，所以发射极精确地对准提取孔。 芯片的厚度用作发射器和提取器之间的间距基准。

公开(公告)号：US06171165B2

公开(公告)日：2001-01-09

申请号：US09197092

申请日：1998-11-19

Applicant: Ho-Seob Kim ,  Kim Y. Lee ,  T. H. P. Chang

Inventor： Ho-Seob Kim ,  Kim Y. Lee ,  T. H. P. Chang

IPC: H01J904

CPC classification number: H01J9/18 ,  H01J37/067 ,  H01J2201/304 ,  H01J2237/1501

Abstract: A method and an accompanied apparatus for aligning an electron emitter with an extractor hole of a microcolumn. Four V-grooves, defined together with the window for forming the membrane and having bottoms situated on two axis are microfabricated on a chip. The axis intersect at a right angle and defines a center point for the extractor hole. The V-grooves are then used as references to align the electron emitter with the extractor hole, one axis at a time. The emitter is precisely aligned to the extractor hole because the extractor hole was formed with reference to the V-grooves. The thickness of the chip is used as the spacing reference between the emitter and the extractor.

公开(公告)号：US5686785A

公开(公告)日：1997-11-11

申请号：US503991

申请日：1995-07-19

Applicant: Boris A. Movchan ,  Viktor A. Timashov ,  Evgenii L. Pijuk

Inventor： Boris A. Movchan ,  Viktor A. Timashov ,  Evgenii L. Pijuk

IPC: H01J37/065 ,  H01J37/067 ,  H01J29/46

CPC classification number: H01J37/067 ,  H01J37/065 ,  H01J2237/06308

Abstract: An electron gun for producing a beam of electrons has an elongated, linear thermionic cathode and a focusing electrode. The opposite ends of the cathode are engaged by adjustable holders which enable the spatial separation between the cathode and focusing electrode to be easily varied. The focusing electrode is electrically isolated from the cathode whereby fine tuning of the electron beam may be accomplished by varying the potential difference between the focusing electrode and cathode.

Abstract translation: 用于产生电子束的电子枪具有细长的线性热离子阴极和聚焦电极。 阴极的相对端由可调节的保持器接合，这使得阴极和聚焦电极之间的空间分离容易变化。 聚焦电极与阴极电隔离，由此可以通过改变聚焦电极和阴极之间的电位差来实现电子束的微调。

公开(公告)号：US5218262A

公开(公告)日：1993-06-08

申请号：US863640

申请日：1992-04-06

Applicant: Masami Taguchi ,  Charles A. Brantingham

Inventor： Masami Taguchi ,  Charles A. Brantingham

IPC: G01B7/34 ,  G01N27/00 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q70/02 ,  G12B17/02 ,  H01J1/00 ,  H01J37/02 ,  H01J37/28

CPC classification number: G01Q60/16 ,  B82Y35/00 ,  G01Q70/02 ,  H01J1/00 ,  H01J37/02 ,  H01J37/067 ,  H01J2237/032

Abstract: In an electrode assembly, an electrode holder has a forward end thereof affixed coaxially to an electrode tip. An attachment member is affixed to the holder rearwardly of the electrode. A retaining assembly includes an outer cup component, an inner cup component and a magnet therein. An electrical lead is connected to the inner cup component. The electrode assembly fits coaxially into the retaining assembly with the attachment member adjacent to and retained by the magnet. The electrode holder is seated in electrical contact with the inner cup component. The holder, cup components and attachment member are magnetically permeable, and separated in each assembly by insulators, so as to effect an outer magnetic shielding loop and an inner magnetic shielding loop.

公开(公告)号：US4772817A

公开(公告)日：1988-09-20

申请号：US56659

申请日：1987-06-02

Applicant: Toshiyuki Aida ,  Hiroshi Takeuchi ,  Sumio Hosaka ,  Shigeyuki Hosoki ,  Tadashi Ikeda

Inventor： Toshiyuki Aida ,  Hiroshi Takeuchi ,  Sumio Hosaka ,  Shigeyuki Hosoki ,  Tadashi Ikeda

IPC: G01N37/00 ,  G01Q10/04 ,  G01Q60/10 ,  G01Q70/08 ,  H01J37/067 ,  H01J37/28 ,  H01L41/09 ,  H01L41/18 ,  H01L41/08

CPC classification number: G01Q60/16 ,  B82Y35/00 ,  G01Q10/04 ,  H01J37/067 ,  H01J37/28 ,  H01L41/18 ,  Y10S977/872

Abstract: A piezoelectric crystal without spontaneous polarization such as Li.sub.2 B.sub.4 O.sub.7 or quartz crystal is jointed to a cathode on the side opposite to the tip thereof to finely drive the cathode. The surface observation apparatus mounting the cathode makes it possible to observe the surface of a sample at high speeds.

Abstract translation: 没有诸如Li2B4O7或石英晶体的自发极化的压电晶体在与其尖端相对的一侧的阴极上接合以微调驱动阴极。 安装阴极的表面观察装置使得可以高速地观察样品的表面。

公开(公告)号：US3274425A

公开(公告)日：1966-09-20

申请号：US38672564

申请日：1964-07-31

Applicant: WELDING RESEARCH INC

Inventor： DAVID SCIAKY

IPC: H01J37/065 ,  H01J37/067 ,  H01J37/07

CPC classification number: H01J37/067 ,  H01J37/065 ,  H01J37/07