公开(公告)号：US20080111079A1

公开(公告)日：2008-05-15

申请号：US11870341

申请日：2007-10-10

Applicant: Juergen Stein ,  Guntram Pausch ,  Karen Saucke

Inventor： Juergen Stein ,  Guntram Pausch ,  Karen Saucke

IPC: G01J1/20

CPC classification number: H05B33/0818 ,  G01J1/02 ,  G01J1/0295 ,  G01J1/08 ,  G01J1/30 ,  G01T1/40 ,  H05B33/0854 ,  Y02B20/346

Abstract: Method for correction of the temperature dependency of a light quantity L emitted by a light emitting diode (LED), being operated in pulsed mode with substantially constant pulse duration tP, and measured in a light detector, using a predetermined parameter X, correlated to the temperature T of the LED in a predetermined ratio, whereby a correction factor K is determined from the parameter X, preferably using a calibration table, especially preferred using an analytic predetermined function, whereby the measured emitted light quantity L is corrected for the temperature contingent fluctuations of the emitted light quantity, whereby the parameter X is determined from at least two output signals of the LED, which are related to each other in a predetermined manner.

Abstract translation: 用于校正由发光二极管（LED）发射的光量L的温度依赖性的方法，其以脉冲模式以基本上恒定的脉冲持续时间t P P运行，并且在光检测器中测量，使用 预定参数X，以预定比例与LED的温度T相关，由此，优选使用校准表，从参数X确定校正因子K，特别优选使用分析预定功能，由此测量的发射光量 根据发射光量的温度偶然波动来校正L，由此根据预定方式彼此相关的LED的至少两个输出信号来确定参数X.

公开(公告)号：US20080099662A1

公开(公告)日：2008-05-01

申请号：US11591130

申请日：2006-10-31

Applicant: Michael J. Musiel ,  Daniel R. Todd ,  Thomas P. Alberti ,  Bryan D. DeMaster

Inventor： Michael J. Musiel ,  Daniel R. Todd ,  Thomas P. Alberti ,  Bryan D. DeMaster

IPC: G01J1/32

CPC classification number: G01J1/08 ,  G01J1/32 ,  G01S7/4802 ,  G01S7/497 ,  G01S17/023 ,  G01S17/107 ,  G01S17/89 ,  G01S17/936

Abstract: A method for adjusting an object detection apparatus is disclosed and which includes the steps of providing an image intensifier tube having an electroluminescent screen, and which produces a screen current output when the image intensifier tube processes electromagnetic radiation; measuring the screen current output produced by the electroluminescent screen; providing an emitter of electromagnetic radiation which is electrically coupled with a source of electricity, and which, when periodically energized, produces an electromagnetic radiation output; and adjusting the period of time which the emitter of electromagnetic radiation is energized based upon the screen current output which is measured at the electroluminescent screen.

Abstract translation: 公开了一种用于调整物体检测装置的方法，其包括以下步骤：提供具有电致发光屏的图像增强管，并且当图像增强管处理电磁辐射时产生屏幕电流输出; 测量由电致发光屏产生的屏幕电流输出; 提供与电源电耦合的电磁辐射发射器，并且当周期性地通电时产生电磁辐射输出; 并且基于在电致发光屏幕处测量的屏幕电流输出来调整电磁辐射发射器被激励的时间段。

公开(公告)号：US20070295912A1

公开(公告)日：2007-12-27

申请号：US11569102

申请日：2004-05-14

Applicant: Stein Jurgen ,  Guntram Pausch ,  Karen Saucke ,  Guntram Pausch ,  Karen Saucke

Inventor： Stein Jurgen ,  Guntram Pausch ,  Karen Saucke ,  Guntram Pausch ,  Karen Saucke

IPC: H05B37/02 ,  G01T1/20

CPC classification number: H05B33/0818 ,  G01J1/02 ,  G01J1/0295 ,  G01J1/08 ,  G01J1/30 ,  G01T1/40 ,  H05B33/0854 ,  Y02B20/346

Abstract: Method for correction of the temperature dependency of a light quantity L emitted by a light emitting diode (LED), being operated in pulsed mode with substantially constant pulse duration tP, and measured in a light detector, using a predetermined parameter X, correlated to the temperature T of the LED in a predetermined ratio, whereby a correction factor K is determined from the parameter X, preferably using a calibration table, especially preferred using an analytic predetermined function, whereby the measured emitted light quantity L is corrected for the temperature contingent fluctuations of the emitted light quantity, whereby the parameter X is determined from at least two output signals of the LED, which are related to each other in a predetermined manner.

Abstract translation: 用于校正由发光二极管（LED）发射的光量L的温度依赖性的方法，其以脉冲模式以基本上恒定的脉冲持续时间t P P运行，并且在光检测器中测量，使用 预定参数X，以预定比例与LED的温度T相关，由此，优选使用校准表，从参数X确定校正因子K，特别优选使用分析预定功能，由此测量的发射光量 根据发射光量的温度偶然波动来校正L，由此根据预定方式彼此相关的LED的至少两个输出信号来确定参数X.

公开(公告)号：US20070242264A1

公开(公告)日：2007-10-18

申请号：US11737827

申请日：2007-04-20

Applicant: Kazuaki Ohkubo

Inventor： Kazuaki Ohkubo

IPC: G01J1/00

CPC classification number: G01J1/42 ,  G01J1/04 ,  G01J1/0422 ,  G01J1/0455 ,  G01J1/08 ,  G01J2001/0481 ,  G01J2001/4247

Abstract: An optical measuring device according to the present invention includes: a plane mirror (3), which has a central opening that functions as either a light entering window or a light source fitting hole (5) and an observation window 6′ that enables a photodetector (6) to take measurements; and an integrating hemisphere (2), which has its center of radius of curvature defined within the central opening of the plane mirror (3) and of which the inner wall surface functions as a light diffuse reflective surface (1). The plane mirror (3) and the integrating hemisphere (2) form an integrating space inside.

Abstract translation: 根据本发明的光学测量装置包括：平面镜（3），其具有用作光进入窗口或光源装配孔（5）的中心开口和观察窗6'，其能够使光电检测器 （6）进行测量; 以及整体半球（2），其具有限定在平面镜（3）的中心开口内的曲率半径的中心，并且其内壁表面用作光漫反射表面（1）。 平面镜（3）和积分半球（2）在内部形成积分空间。

公开(公告)号：US07256411B2

公开(公告)日：2007-08-14

申请号：US11593121

申请日：2006-11-06

Applicant: Howard A. Mizes ,  Peter Paul ,  Michael D. Borton ,  Stanley J. Wallace

Inventor： Howard A. Mizes ,  Peter Paul ,  Michael D. Borton ,  Stanley J. Wallace

IPC: G01N21/86

CPC classification number: G01J1/08 ,  G01J1/0266

Abstract: Systems and methods provide calibration for a linear array sensor. A test pattern having a plurality of lines is used. Comparison between expected and measured spacing between a pair of neighboring lines is used to determine sensor position displacement.

Abstract translation: 系统和方法为线性阵列传感器提供校准。 使用具有多行的测试图案。 使用一对相邻线之间的预期间隔和测量间距的比较来确定传感器位置位移。

公开(公告)号：US07255458B2

公开(公告)日：2007-08-14

申请号：US10897309

申请日：2004-07-21

Applicant: Ian Ashdown

Inventor： Ian Ashdown

IPC: F21V5/00

CPC classification number: F21V5/002 ,  F21S4/20 ,  F21Y2113/00 ,  F21Y2115/10 ,  G01J1/04 ,  G01J1/0474 ,  G01J1/08 ,  G01J3/10

Abstract: The present invention provides a system and method for the diffusion of illumination from discrete light sources such that the illumination is blended and directed in one or more desired directions. The illumination system comprises a substrate having a plurality of light-emitting elements thereon which are arranged in an array, wherein these light-emitting elements produce illumination at one or more wavelengths. Proximate to the light-emitting elements is a diffuser, which collects the illumination produced by the discrete light-emitting elements and redirects this illumination in one or more predetermined directions, thereby blending together the one or more wavelengths of illumination and concentrating the illumination in the predetermined directions. The illumination system further comprises a power system, which provides energy to the light-emitting elements thereby resulting in their activation. Through the blending of the illumination produced by the discrete light-emitting elements together with the redirection of the illumination in a desired direction, both of which are enabled by the diffuser placed proximate to the discrete light-emitting elements, the creation of a blended pattern of illumination from these discrete light-emitting elements is provided, wherein this pattern of illumination can be one or more lines or planes of illumination.

Abstract translation: 本发明提供了一种用于从分立光源扩散照明的系统和方法，使得照明在一个或多个所需方向上被混合和定向。 照明系统包括其上布置有阵列中的多个发光元件的基板，其中这些发光元件以一个或多个波长产生照明。 近似于发光元件是散射器，其收集由分立的发光元件产生的照明并且在一个或多个预定方向上重定向该照明，从而将一个或多个照明波长共同组合在一起，并将照明集中在 预定方向 该照明系统还包括电力系统，其向发光元件提供能量，从而导致其激活。 通过将由分立的发光元件产生的照明与所要求的方向上的照明的重定向混合在一起，这两者可通过靠近离散的发光元件设置的扩散器来实现， 提供了来自这些离散的发光元件的照明，其中这种照明模式可以是一个或多个照明线或平面。

公开(公告)号：US20070181834A1

公开(公告)日：2007-08-09

申请号：US11622241

申请日：2007-01-11

Applicant: JUERGEN KLEINSCHMIDT

Inventor： JUERGEN KLEINSCHMIDT

IPC: G01J3/10

CPC classification number: G01J1/08 ,  B82Y10/00 ,  G01J1/04 ,  G01J1/0414 ,  G03F7/70033 ,  G03F7/70041 ,  G03F7/7005 ,  G03F7/70166 ,  G03F7/70208

Abstract: The invention is directed to an arrangement and a method for the generation of EUV radiation of high average output, preferably for the wavelength region of 13.5 nm for use in semiconductor lithography. It is the object of the invention to find a novel possibility for generating EUV radiation of high average output which permits a time-multiplexing of the radiation of a plurality of source modules in a simple manner without overloading the source modules and without requiring extremely high rotational speeds of optical-mechanical components. This object is met, according to the invention, in that a plurality of identically constructed source modules which are arranged so as to be distributed around a common optical axis are directed to a rotatably mounted reflector arrangement which successively couples in the beam bundles of the source modules along the optical axis. The reflector arrangement has a drive unit by which a reflecting optical element is adjustable so as to be stopped temporarily in angular positions that are defined for the source modules and is oriented to the next source module in intervals between two exposure fields of a wafer by means of control signals emitted by an exposure system.

Abstract translation: 本发明涉及一种用于产生高平均输出的EUV辐射的装置和方法，优选用于半导体光刻中用于13.5nm的波长区域。 本发明的目的是找到一种产生高平均输出的EUV辐射的新颖可能性，其允许以简单的方式对多个源模块的辐射进行时间复用，而不会使源模块过载，而不需要极高的旋转 光学机械部件的速度。 根据本发明，满足本发明的目的在于，将多个相同构造的源模块布置成围绕公共光轴分布，被引导到可旋转地安装的反射器装置，该反射器装置在源的束束中连续耦合 模块沿光轴。 反射器装置具有驱动单元，反射光学元件可以通过该驱动单元被调节，以便临时停止在为源模块定义的角位置中，并且以晶片的两个曝光场之间的间隔定向到下一个源模块 由曝光系统发射的控制信号。

公开(公告)号：US07227128B2

公开(公告)日：2007-06-05

申请号：US11173113

申请日：2005-06-30

Applicant: Dmitry M. Sagatelyan

Inventor： Dmitry M. Sagatelyan

IPC: G12B13/00

CPC classification number: G01J1/08 ,  G01J1/4228 ,  G01J3/28 ,  G01J3/2803 ,  G01N21/274 ,  G01N21/6428 ,  G01N21/6452 ,  G01N21/6456 ,  H04N5/35536 ,  H04N5/357 ,  H04N5/361 ,  H04N17/002

Abstract: A method and system for characterizing and quantifying various error and calibration components of signals associated with photo-detectors. By varying the detector operational parameters such as input light intensity and integration times, measured signals can be analyzed to separate out and quantify various components of the measured signals. The various components thus determined may be categorized according to their dependencies on the operational parameters. Such component characterization allows better understanding of the detector system and ways in which such system can be improved so as to yield an improved measurement result for which the detector is being utilized.

Abstract translation: 用于表征和量化与光电检测器相关联的信号的各种误差和校准分量的方法和系统。 通过改变检测器的操作参数，例如输入光强度和积分时间，可以分析测量信号以分离和量化测量信号的各种分量。 这样确定的各种组件可以根据其对操作参数的依赖性进行分类。 这种组件表征允许更好地理解检测器系统以及可以改进这种系统的方式，以便产生检测器被利用的改进的测量结果。

公开(公告)号：US20070045524A1

公开(公告)日：2007-03-01

申请号：US11593015

申请日：2006-11-06

Applicant: Jack Rains ,  Don May ,  David Ramer

Inventor： Jack Rains ,  Don May ,  David Ramer

IPC: G01J1/00

CPC classification number: F21V7/0008 ,  F21K9/62 ,  F21K9/68 ,  F21S2/00 ,  F21S10/02 ,  F21V5/002 ,  F21V5/008 ,  F21V7/22 ,  F21V11/10 ,  F21V14/06 ,  F21V23/0442 ,  F21V23/0457 ,  F21V2200/13 ,  F21W2131/406 ,  F21Y2113/00 ,  F21Y2113/13 ,  F21Y2113/20 ,  F21Y2115/10 ,  G01J1/08 ,  G01J3/02 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/0254 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0286 ,  G01J3/10 ,  G01J3/50 ,  G01J3/501 ,  G02B5/0252 ,  G02B5/0278 ,  G02B5/0284 ,  G02B6/0008 ,  G03B15/06 ,  G09F13/0404 ,  G09F13/06 ,  G09F13/14 ,  G09F13/22 ,  H05B33/0803 ,  H05B33/0812 ,  H05B33/0842 ,  H05B33/0863 ,  H05B33/0869 ,  H05B33/0872 ,  H05B35/00 ,  Y02B20/343

Abstract: A light fixture, using one or more solid state light emitting elements utilizes a diffusely reflect chamber to provide a virtual source of uniform output light, at an aperture or at a downstream optical processing element of the system. Systems disclosed herein also include a detector, which detects electromagnetic energy from the area intended to be illuminated by the system, of a wavelength absent from a spectrum of the combined light system output. A system controller is responsive to the signal from the detector. The controller typically may control one or more aspects of operation of the solid state light emitter(s), such as system ON-OFF state or system output intensity or color. Examples are also discussed that use the detection signal for other purposes, e.g. to capture data that may be carried on electromagnetic energy of the wavelength sensed by the detector.

Abstract translation: 使用一个或多个固态发光元件的灯具利用漫反射室来在系统的孔径或下游光学处理元件处提供均匀输出光的虚拟源。 本文公开的系统还包括检测器，其从组合光系统输出的频谱中不存在的波长检测来自系统要被照明的区域的电磁能。 系统控制器响应来自检测器的信号。 控制器通常可以控制固态光发射器的操作的一个或多个方面，诸如系统开 - 关状态或系统输出强度或颜色。 还讨论了将其用于其它目的的检测信号的实例。 以捕获可以由检测器感测的波长的电磁能量承载的数据。

公开(公告)号：US07148470B2

公开(公告)日：2006-12-12

申请号：US11294564

申请日：2005-12-06

Applicant: Jack C. Rains, Jr. ,  Don F. May ,  David P. Ramer

Inventor： Jack C. Rains, Jr. ,  Don F. May ,  David P. Ramer

IPC: F21V9/00

CPC classification number: F21S10/02 ,  F21S2/00 ,  F21S8/00 ,  F21V5/002 ,  F21V5/008 ,  F21V7/22 ,  F21V11/10 ,  F21V14/06 ,  F21V2200/13 ,  F21W2131/406 ,  F21Y2113/00 ,  F21Y2113/13 ,  F21Y2113/20 ,  F21Y2115/10 ,  G01J1/08 ,  G01J3/0254 ,  G01J3/0264 ,  G01J3/10 ,  G01J3/501 ,  G02B5/0252 ,  G02B5/0278 ,  G02B5/0284 ,  G02B6/0008 ,  G03B15/06 ,  G09F13/0404 ,  G09F13/06 ,  G09F13/14 ,  G09F13/22 ,  H05B33/0812 ,  H05B33/0842 ,  H05B33/0863 ,  H05B33/0869 ,  H05B33/0872 ,  H05B35/00 ,  Y02B20/343 ,  Y10S362/80 ,  Y10S362/812

Abstract: A system to provide radiant energy of selectable spectral characteristic (e.g. a selectable color combination of light) uses an optical integrating cavity to combine energy of different wavelengths from different sources. Sources of radiant energy of different wavelengths, typically different-color LEDs, supply radiant energy into the interior of the cavity. The cavity has a diffusely reflective interior surface and an aperture for allowing emission of combined radiant energy. Control of the intensity of emission of the sources sets the amount of each wavelength of energy in the combined output and thus determines a spectral characteristic of the radiant energy output through the aperture. A variety of different elements may optically process the combined light output, such a deflector, a variable iris, a lens, a variable focusing lens system, a collimator, a holographic diffuser and combinations thereof. Such systems are useful in various luminous applications as well as various illumination applications.