VIBRATION MEASUREMENT DEVICE
    72.
    发明申请

    公开(公告)号:US20180283847A1

    公开(公告)日:2018-10-04

    申请号:US15938591

    申请日:2018-03-28

    Abstract: A vibration measurement device includes: a vibration-inducing section; a laser source; a scanning section for illuminating a partial area of a measurement area on an object with laser light and moving the illumination area; an illumination control section for sequentially illuminating each point within the measurement area with an illuminating duration equal to or shorter than one third of the vibration period; a displacement measurement section for measuring, for each point within the measurement area, an interfering light obtained by splitting an object light from the object into two bundles of light to measure a relative displacement in a back-and-forth direction between two closely-located points within the measurement area; and a vibration state determination section for determining the state of vibration of the entire measurement area, based on the relative displacement in the back-and-forth direction between two closely-located points at each point within the measurement area.

    INSPECTION OBJECT IMAGING APPARATUS, INSPECTION OBJECT IMAGING METHOD, SURFACE INSPECTION APPARATUS, AND SURFACE INSPECTION METHOD

    公开(公告)号:US20180202941A1

    公开(公告)日:2018-07-19

    申请号:US15564154

    申请日:2016-12-19

    Abstract: [Object] To find, with high sensitivity, an unevenness defect or the like that has occurred on the surface of an inspection object having a surface roughness comparable to wavelengths of visible light and is comparable to several times the surface roughness, and accurately distinguish between dirt and an unevenness flaw present on the surface of the inspection object, and also enable a reduction in the size of an apparatus.[Solution] An inspection object imaging apparatus according to the present invention includes: a light source configured to produce a light beam belonging to an infrared wavelength band and having a predetermined spread half-angle on a surface of an inspection object; a projection optical system configured to project the light beam on the surface of the inspection object at a predetermined projection angle; and an imaging unit configured to image reflected light from the surface of the inspection object. The imaging unit includes an imaging optical system including at least one convex lens, configured to condense reflected light and branch the reflected light to two different directions, and a first image sensor and a second image sensor each configured to image the reflected light that has passed through the imaging optical system. The first image sensor is positioned on the inspection object side with respect to a position of the imaging optical system that is conjugate with the surface of the inspection object, along an optical axis of the reflected light. The second image sensor is positioned on the reflected-light travel direction side with respect to the conjugate position.

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