公开(公告)号：US08848185B2

公开(公告)日：2014-09-30

申请号：US13980504

申请日：2012-01-18

Applicant: Gilad Barak ,  Boaz Brill

Inventor： Gilad Barak ,  Boaz Brill

IPC: G01J4/00 ,  G01B11/02 ,  G01B11/22 ,  G01N21/956 ,  G01N21/95 ,  H04L25/02 ,  G01B11/12 ,  G01N21/88 ,  H04L27/26 ,  H01L21/66

CPC classification number: G01N21/9501 ,  G01B11/02 ,  G01B11/12 ,  G01B11/22 ,  G01B2210/56 ,  G01N21/956 ,  G01N2021/8822 ,  H01L22/12 ,  H01L2924/0002 ,  H04L25/0216 ,  H04L25/0222 ,  H04L25/0226 ,  H04L27/2607 ,  H04L27/2655 ,  H01L2924/00

Abstract: An optical system is presented for use in measuring in patterned structures having vias. The system is configured and operable to enable measurement of a via profile parameters. The system comprises an illumination channel for propagating illuminated light onto the structure being measured, a detection channel for collecting light returned from the illuminated structure to a detection unit, and a modulating assembly configured and operable for implementing a dark-field detection mode by carrying out at least one of the following: affecting at least one parameter of light propagating along at least one of the illumination and detection channels, and affecting propagation of light along at least the detection channel.

Abstract translation: 提供了一种用于在具有通孔的图案化结构中进行测量的光学系统。 该系统被配置并且可操作以允许测量通孔轮廓参数。 该系统包括用于将被照射的光传播到所测量的结构上的照明通道，用于将从照明结构返回的光聚集到检测单元的检测通道，以及调制组件，其配置和可操作以通过执行暗区检测模式 以下中的至少一个：影响沿着照明和检测通道中的至少一个传播的光的至少一个参数，并且影响光沿着至少检测通道的传播。

公开(公告)号：US20140285813A1

公开(公告)日：2014-09-25

申请号：US14224353

申请日：2014-03-25

Applicant: UNIVERSITY OF ROCHESTER

Inventor： Zhimin Shi ,  Robert W. Boyd ,  Mohammad Mirhosseini ,  Mehul Malik

IPC: G01J4/00

CPC classification number: G01J9/02 ,  G01J4/04 ,  G01J2009/0261

Abstract: A wavefront sensing technique using Polarization Rotation INTerferometry (PRINT) provides a self-referencing, high-resolution, direct measurement of the spatially dependent phase profile of a given optical beam. A self-referencing technique is used to create a reference beam in the orthogonal polarization and a polarization measurement to measure the spatial-dependent polarization parameters to directly determine the absolute phase profile of the beam under test. A high-resolution direct measurement of the spatially-resolved phase profile of one or more optical beams is realized.

Abstract translation: 使用极化旋转INTerferometry（PRINT）的波前感测技术提供给定光束的空间依赖相位曲线的自参考，高分辨率直接测量。 使用自参考技术在正交极化中产生参考光束，并使用偏振测量来测量空间相关的极化参数，以直接确定被测光束的绝对相位分布。 实现了一个或多个光束的空间分辨相位轮廓的高分辨率直接测量。

公开(公告)号：US08830465B2

公开(公告)日：2014-09-09

申请号：US13700150

申请日：2011-06-17

Applicant: Atsushi Taniguchi ,  Yukihiro Shibata ,  Taketo Ueno ,  Shunichi Matsumoto

Inventor： Atsushi Taniguchi ,  Yukihiro Shibata ,  Taketo Ueno ,  Shunichi Matsumoto

IPC: G01J4/00 ,  G01N21/956 ,  G01N21/95 ,  G01N21/94

CPC classification number: G01N21/956 ,  G01N21/94 ,  G01N21/9501

Abstract: A defect inspecting apparatus includes an irradiation optical system having a light source that emits illumination light and a polarization generation part that adjusts polarization state of the illumination light emitted from the light source, a detection optical system having a polarization analysis part that adjusts polarization state of scattered light from a sample irradiated by the irradiation optical system and a detection part that detects the scattered light adjusted by the polarization analysis part, and a signal processing system that processes the scattered light detected by the detection optical system to detect a defect presenting in the sample. The polarization generation part adjusts the polarization state of the illumination light emitted from the light source on the basis of predetermined illumination conditions and the polarization analysis part adjusts the polarization state of the illumination light emitted from the light source on the basis of predetermined detection conditions.

Abstract translation: 缺陷检查装置包括具有发出照明光的光源的照射光学系统和调整从光源发出的照明光的偏振状态的偏振光产生部，具有调整偏振状态的偏振光分析部的检测光学系统 由照射光学系统照射的样本的散射光和检测由偏振分析部调节的散射光的检测部，以及处理由检测光学系统检测出的散射光的信号处理系统， 样品。 偏光产生部根据规定的照明条件来调整从光源发出的照明光的偏光状态，偏光分析部基于规定的检测条件来调整从光源发出的照明光的偏振状态。

公开(公告)号：US08830464B2

公开(公告)日：2014-09-09

申请号：US13669804

申请日：2012-11-06

Applicant: KLA-Tencor Corporation

Inventor： David Feiler ,  Kurt Haller

IPC: G01J4/00 ,  G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/211 ,  G01N21/8422

Abstract: The present disclosure is directed to a method for inspecting a wafer, the wafer including a film deposited on a surface of the wafer. The film may have a thickness that varies over the surface of the wafer. The method includes the step of measuring the thickness, refractive index, and extinction coefficient of the film across the surface of the wafer. With this data a film curve is created in real time. The method also includes the step of determining a size of a defect on the surface based on at least the film curve.

Abstract translation: 本公开涉及一种用于检查晶片的方法，所述晶片包括沉积在晶片的表面上的膜。 膜可以具有在晶片的表面上变化的厚度。 该方法包括测量薄膜跨越晶片表面的厚度，折射率和消光系数的步骤。 使用这些数据，实时创建一个电影曲线。 该方法还包括基于至少薄膜曲线确定表面上的缺陷尺寸的步骤。

公开(公告)号：US08810792B2

公开(公告)日：2014-08-19

申请号：US13038555

申请日：2011-03-02

Applicant: C. Brent Dane ,  Edward W. H. Lao ,  Scott N. Fochs

Inventor： C. Brent Dane ,  Edward W. H. Lao ,  Scott N. Fochs

IPC: G01J4/00 ,  G01J1/22 ,  G01J1/04

CPC classification number: G01J1/22 ,  B23K26/043 ,  B23K26/0643 ,  B23K26/0652 ,  B23K26/0732 ,  B23K26/082 ,  B23K26/0884 ,  B23K26/146 ,  B23K26/356 ,  B23K26/705 ,  G01J1/04 ,  G02B27/0927 ,  G02B27/0955 ,  G02B27/0966 ,  G02B27/283

Abstract: A beam sampling system, includes a first beam splitter adapted to split a laser beam having a primary polarization component and a secondary polarization component, into a first intermediate sample beam, and a first beam splitter output beam, the intermediate sample beam including first percentage of the primary polarization component and a second percentage of the secondary polarization component. A 90-degree polarization rotator is positioned in the intermediate sample beam line. A second beam splitter is mounted so that the intermediate sample beam is split into an output sample beam on an output sample beam line, and a second transmitted beam, the output sample beam including substantially said first percentage of the secondary polarization component and substantially said second percentage of the primary polarization component.

Abstract translation: 一种光束采样系统，包括适于将具有主极化分量和次极化分量的激光束分裂成第一中间采样光束的第一分束器和第一分束器输出光束，所述中间样品光束包括第一百分比 主极化分量和次极化分量的第二百分比。 90度偏振旋转器位于中间样品光束线中。 安装第二分束器，使得中间采样光束在输出采样光束线上被分成输出样本光束，而第二透射光束，输出样本光束基本上包括第二百分比的二次偏振分量和基本上所述第二 主偏振分量的百分比。

公开(公告)号：US08797532B2

公开(公告)日：2014-08-05

申请号：US13636983

申请日：2011-03-24

Applicant: Nir Davidson ,  Asher Friesem ,  Moti Fridman

Inventor： Nir Davidson ,  Asher Friesem ,  Moti Fridman

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01J4/02

Abstract: Measuring polarization profile along an input optical beam cross-section using an optical system includes a polarization beam splitting assembly for splitting the input beam into a predetermined number of beam components with a predetermined polarization relation between them, and including a polarization beam splitter in an optical path of the input beam splitting it into beam components having a polarization relationship and a birefringent element in an optical path of the beam components for splitting each of them into a pair of beams having ordinary and extraordinary polarizations, thereby producing the predetermined number of output beam components. The pixel matrix is located in substantially non-intersecting optical paths of the output beam components and generates a number of output data pieces indicative of intensity distribution within the output beam components and data contained therein being indicative of the polarization profile along the input beam cross-section.

Abstract translation: 使用光学系统沿着输入光束横截面测量偏振曲线包括偏振分束组件，用于将输入光束分成具有预定偏振关系的预定数量的光束分量，并且包括光学中的偏振分束器 输入光束的路径将其分裂为具有偏振关系的光束分量和光束分量的光路中的双折射元件，用于将它们中的每一个分成具有普通和非常偏振的一对光束，从而产生预定数量的输出光束 组件。 像素矩阵位于输出光束分量的基本上不相交的光路中，并且产生指示输出光束分量内的强度分布的多个输出数据片段，其中包含的数据表示沿着输入光束交叉的偏振轮廓， 部分。

公开(公告)号：US08780347B2

公开(公告)日：2014-07-15

申请号：US13159225

申请日：2011-06-13

Applicant: Petros Kotidis ,  Erik Deutsch ,  Ninghui Zhu ,  Dan Cavicchio

Inventor： Petros Kotidis ,  Erik Deutsch ,  Ninghui Zhu ,  Dan Cavicchio

IPC: G01J4/00

CPC classification number: G01N21/39 ,  B82Y20/00 ,  G01J3/108 ,  G01J3/26 ,  G01J3/4338 ,  G01J3/45 ,  G01N21/272 ,  G01N21/35 ,  G01N21/3504 ,  G01N21/3563 ,  G01N21/3577 ,  G01N2021/1793 ,  G01N2021/399 ,  G01N2201/0221 ,  G01N2201/0612 ,  G01N2201/068 ,  G01N2201/08 ,  G02B21/0028 ,  G02B21/008 ,  G02B21/06 ,  H01S5/0071 ,  H01S5/141 ,  H01S5/3401 ,  H01S5/3402 ,  H01S5/4012 ,  H01S5/4031

Abstract: A spectroscopy system comprising at least two laser modules, each of the laser modules including a laser cavity, a quantum cascade gain chip for amplifying light within the laser cavity, and a tuning element for controlling a wavelength of light generated by the modules. Combining optics are used to combine the light generated by the at least two laser modules into a single beam and a sample detector detects the single beam returning from a sample.

Abstract translation: 一种包括至少两个激光模块的光谱系统，每个激光模块包括激光腔，用于放大激光腔内的光的量子级联增益芯片，以及用于控制由模块产生的光的波长的调谐元件。 组合光学器件用于将由至少两个激光模块产生的光组合成单个光束，并且样品检测器检测从样品返回的单个光束。

公开(公告)号：US08767210B1

公开(公告)日：2014-07-01

申请号：US13713033

申请日：2012-12-13

Applicant: The United States of America as represented by the Administrator of the National Aeronautics and Space Administration

Inventor： Constantine Lukashin ,  Bruce A. Wielicki

IPC: G01J4/00

CPC classification number: G01J1/10 ,  B64G1/1021 ,  B64G2001/1028 ,  G01J1/0429 ,  G01J1/08 ,  G01J1/4257 ,  G01J3/0224 ,  G01J3/28 ,  G01J11/00 ,  G01J2001/4238 ,  G01J2003/2866

Abstract: The present invention comprises an approach for calibrating the sensitivity to polarization, optics degradation, spectral and stray light response functions of instruments on orbit. The concept is based on using an accurate ground-based laser system, Ground-to-Space Laser Calibration (GSLC), transmitting laser light to instrument on orbit during nighttime substantially clear-sky conditions. To minimize atmospheric contribution to the calibration uncertainty the calibration cycles should be performed in short time intervals, and all required measurements are designed to be relative. The calibration cycles involve ground operations with laser beam polarization and wavelength changes.

Abstract translation: 本发明包括用于校准轨道上的仪器的偏振灵敏度，光学降级，光谱和杂散光响应函数的方法。 这个概念是基于使用精确的地面激光系统，地面到空间激光校准（GSLC），在夜间基本上天空条件下，将激光传输到轨道上的仪器。 为了尽量减少对校准不确定度的大气贡献，校准周期应在短时间间隔内执行，所有需要的测量都设计为相对的。 校准周期涉及具有激光束偏振和波长变化的地面操作。

公开(公告)号：US08705805B2

公开(公告)日：2014-04-22

申请号：US12930517

申请日：2011-01-10

Applicant: Peter A. Forrest

Inventor： Peter A. Forrest

IPC: G06K9/00 ,  G06K9/46 ,  G01N21/00 ,  G01J4/00

CPC classification number: B42D15/00 ,  G07D7/121 ,  G07D7/2033

Abstract: A portable token and systems and methods for identification and authentication of the same are disclosed. The portable token may be utilized for a variety of purposes and uses a thin section of rock as a unique identifying element, which is extremely resistant to forgery or duplication. Identification and authorization of tokens is achieved by a system that uses optical examination of the microstructure and the refractive properties of crystalline minerals within the identifying element, by transmitted polarized light techniques. Comparison between stored reference data and acquired examination data is the basis for verifying authenticity. The naturally-occurring three-dimensional orientations of the optical axes of mineral crystals contribute to the identification information by their effects.

Abstract translation: 公开了用于识别和认证的便携式令牌及其系统和方法。 便携式令牌可以用于各种目的，并且使用薄的岩石部分作为独特的识别元件，其极大地抵抗伪造或重复。 通过透射偏振光技术，通过使用光学检查识别元件内的结晶矿物的微结构和折射特性的系统来实现令牌的识别和授权。 存储的参考数据与获取的检查数据之间的比较是验证真实性的基础。 矿物晶体的光轴的天然存在的三维取向通过它们的作用有助于识别信息。

公开(公告)号：US08705033B2

公开(公告)日：2014-04-22

申请号：US13128090

申请日：2009-11-30

Applicant: Hyun Mo Cho ,  Yong Jai Cho ,  Won Chegal

Inventor： Hyun Mo Cho ,  Yong Jai Cho ,  Won Chegal

IPC: G01J4/00 ,  G01N21/55

CPC classification number: G01N21/553 ,  G01N2021/212

Abstract: Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer; and a multi-channel flow unit which supplies a buffer solution containing a bio material binding to or dissociation from a metal thin film generating surface plasmon.

Abstract translation: 提供了使用光束轮廓椭偏仪的多通道表面等离子体共振传感器; 更具体地说，涉及一种高灵敏度测量技术，其与使用多入射角测量方法的垂直照明型聚焦光束椭偏仪和沉积有金属薄膜的表面等离子体共振（SPR）感测部件相结合。 多通道表面等离子体共振传感器包括其中光被极化的垂直照明型聚焦光束椭偏仪; 设置在聚焦光束椭偏仪的物镜部分的表面等离子体共振（SPR）感测部分; 以及多通道流动单​​元，其提供包含与金属薄膜产生表面等离子体激元结合或解离的生物材料的缓冲溶液。