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    Fabrication process of a gradient index type of optical element
    83.
    发明授权
    Fabrication process of a gradient index type of optical element 失效
    梯度折射率型光学元件的制作工艺

    公开(公告)号：US6032487A

    公开(公告)日：2000-03-07

    申请号：US324110

    申请日：1999-06-02

    Applicant: Hiroaki Kinoshita

    Inventor： Hiroaki Kinoshita

    IPC: G02B1/00 ,  C03B8/02 ,  C03B19/12 ,  C03B20/00 ,  C03C1/00 ,  C03C3/06 ,  C03C21/00 ,  G02B3/00 ,  C03B8/00 ,  C03C15/00 ,  C03C17/00

    CPC classification number: C03B19/12 ,  C03C1/006 ,  C03C1/008 ,  C03C3/06 ,  C03B2201/30 ,  C03B2201/34 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/54 ,  C03C2201/30 ,  C03C2201/34 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2201/54 ,  C03C2203/36 ,  C03C2203/50

    Abstract: The invention provides a process of obtaining a gradient index type of optical element with profiles of first and second metal component concentrations by the sol-gel method. The process of fabricating a gradient index type of optical element comprises steps of dipping a silicon component-containing wet gel prepared by the sol-gel method in a solution containing an alkoxide of at least one metal component selected from a first group consisting of Ti, Nb, Ta, and Zr or a derivative thereof to thereby impart to the wet gel a concentration gradient with a concentration of the first metal component decreasing from a periphery to a center of the wet gel, allowing at least one metal component selected from a second group consisting of Ba, La, Y, Gd, Sr, Ca, and Zn to be dissolved out of the wet gel to thereby impart to the wet gel a concentration gradient with a concentration of the second metal component increasing from the periphery to the center of the wet gel, and drying, and firing the wet gel.

    Abstract translation: 本发明提供一种通过溶胶 - 凝胶法获得具有第一和第二金属成分浓度分布的光学元件的梯度折射率类型的方法。 制造梯度折射率型光学元件的方法包括以下步骤：将通过溶胶 - 凝胶法制备的含硅成分的湿凝胶浸入含有至少一种金属成分的醇盐的溶液中，所述金属成分选自由Ti， Nb，Ta和Zr或其衍生物，从而赋予湿凝胶浓度梯度，其中第一金属组分的浓度从湿凝胶的周边到中心减小，允许至少一种选自第二 由Ba，La，Y，Gd，Sr，Ca和Zn组成的组，从湿凝胶中溶出，从而赋予湿凝胶浓度梯度，其中第二金属组分的浓度从周边增加到中心 的湿凝胶，并干燥，并焙烧湿凝胶。

    Method and apparatus for making vitreous silica
    85.
    发明授权
    Method and apparatus for making vitreous silica 失效
    制造玻璃态二氧化硅的方法和装置

    公开(公告)号：US4123229A

    公开(公告)日：1978-10-31

    申请号：US803649

    申请日：1977-06-06

    Applicant: Justice N. Carman

    Inventor： Justice N. Carman

    IPC: B01J19/02 ,  C01B33/12 ,  C01B33/18 ,  C03B17/04 ,  C03C3/06 ,  B01J10/00

    CPC classification number: C01B33/182 ,  B01J19/02 ,  C01B33/12 ,  C03B17/04 ,  C03C3/06 ,  B01J2219/0209 ,  C01P2006/80 ,  C03C2201/32 ,  C03C2201/3435 ,  C03C2201/42 ,  C03C2203/00 ,  Y02P20/142

    Abstract: Method and apparatus for making vitreous silica of high purity including producing a melt of liquid silicon in a first chamber, mixing the liquid silicon with carbon dioxide in an upper zone of a second chamber to produce silicon monoxide, mixing the silicon monoxide with oxygen in a lower zone of the second chamber producing silicon dioxide in gaseous form, condensing the silicon dioxide on the wall of the second chamber, and withdrawing the resultant tube of vitreous silica from the lower end of the second chamber. The apparatus is lined with silica to prevent introduction of impurities. The liquid silicon is produced by mixing hydrogen and trichlorosilane.

    Abstract translation: 用于制造高纯度的二氧化硅玻璃的方法和设备，包括在第一室中产生液态硅熔体，在第二室的上部区域中混合液体硅与二氧化碳以产生一氧化硅，将一氧化硅与氧气混合在一起 第二室的下部区域产生气态二氧化硅，将二氧化硅冷凝在第二室的壁上，并从第二室的下端抽出所得到的二氧化硅管。 该装置衬有二氧化硅以防止引入杂质。 液态硅是通过混合氢气和三氯硅烷来生产的。

    Method for manufacturing an optical fibre
    86.
    发明授权
    Method for manufacturing an optical fibre 失效
    光纤制造方法

    公开(公告)号：US3957474A

    公开(公告)日：1976-05-18

    申请号：US569113

    申请日：1975-04-17

    Applicant: Soichi Kobayashi ,  Tatsuo Izawa

    Inventor： Soichi Kobayashi ,  Tatsuo Izawa

    IPC: C03B37/018 ,  A63F3/04 ,  C03B37/00 ,  C03B37/014 ,  C03C3/06 ,  C03C13/04 ,  G02B6/00 ,  C03C25/02 ,  C03C13/00

    CPC classification number: C03B37/01413 ,  C03B37/0142 ,  C03B37/0148 ,  C03C13/045 ,  C03C3/06 ,  C03B2207/81 ,  C03B2207/85 ,  C03B2207/87 ,  C03C2201/30 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/42 ,  C03C2203/44

    Abstract: A method for manufacturing a glass core rod and a cladding layer clothing the glass core rod applied successively or continuously by using a carbon dioxide gas laser. A refractory mandrel is heated by means of carbon dioxide gas laser irradiation and a mixed gas of oxygen and pure silicon tetrachloride vapor and a dopant compound vapor is ejected to the refractory mandrel so as to deposit silicon oxide and oxide of the dopant compound on the mandrel and to form a glass core by fusing it. Further heating is applied by irradiation by the carbon dioxide laser beam on the glass core and a mixed gas oxygen and pure silicon tetrachloride vapor and a dopant compound vapor or of oxygen gas and pure silicon tetrachloride vapor to deposit silicon oxide and oxide of the dopant compound or silicon oxide on the glass core to form a cladding layer of fused silica or fused silica containing the dopant. The preform thus formed by the glass core and the cladding is heated above the softening temperature of the preform so as to spin to form an optical fibre. The method uses laser beam heating which results in less degree of contaminating impurity and water content which might cause absorption and scattering of light also to manufacture an optical fiber having less variation at the boundary of the glass core and the cladding layer.

    Abstract translation: 一种用于制造玻璃芯棒和包层的方法，其通过使用二氧化碳气体激光器连续或连续地施加玻璃芯棒。 通过二氧化碳气体激光照射加热耐火心轴，并将氧和纯四氯化硅蒸汽和掺杂剂化合物蒸汽的混合气体喷射到耐火材料心轴上，以将氧化硅和掺杂剂化合物的氧化物沉积在心轴上 并通过熔化形成玻璃芯。 通过二氧化碳激光束照射在玻璃芯和混合气体氧气和纯四氯化硅蒸气以及掺杂剂化合物蒸气或氧气和纯四氯化硅蒸汽上进行进一步加热，以沉积氧化硅和掺杂剂化合物的氧化物 或硅氧化物，以形成包含掺杂剂的熔融二氧化硅或熔融二氧化硅的包覆层。 将由玻璃芯和包层形成的预制件加热到预成型体的软化温度以上以旋转形成光纤。 该方法使用激光束加热，其导致较少污染杂质和水分含量，这可能导致光的吸收和散射，也可以制造在玻璃芯和包层的边界处具有较小变化的光纤。

    Substrate for a reflective optical element
    88.
    发明授权
    Substrate for a reflective optical element 有权

    公开(公告)号：US11987521B2

    公开(公告)日：2024-05-21

    申请号：US17136642

    申请日：2020-12-29

    Applicant: Carl Zeiss SMT GmbH

    Inventor： Eric Eva

    IPC: C03C3/06 ,  G02B5/08 ,  G02B7/18 ,  C03C17/40

    CPC classification number: C03C3/06 ,  G02B5/0891 ,  G02B7/181 ,  C03B2201/42 ,  C03C17/40 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/42

    Abstract: In order to reduce the degree of relaxation after an optical substrate has been compacted, in particular after a longer period, substrates (51) or reflective optical elements (50), in particular for EUV lithography, with substrates (51) of this type, are proposed. These substrates (51), which have a surface region (511) with a reflective coating (54), are characterised in that, at least near to the surface region (511), the titanium-doped quartz glass has a proportion of Si—O—O—Si bonds of at least 1*1016/cm3 and/or a proportion of Si—Si bonds of at least 1*1016/cm3 or, along a notional line (513) perpendicular to the surface region (511), over a length (517) of 500 nm or more, a hydrogen content of more than 5×1018 molecules/cm3.

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