Vacuum Ultraviolet Photon Source, Ionization Apparatus, and Related Methods
    2.
    发明申请
    Vacuum Ultraviolet Photon Source, Ionization Apparatus, and Related Methods 有权
    真空紫外光源,电离装置及相关方法

    公开(公告)号:US20140167612A1

    公开(公告)日:2014-06-19

    申请号:US13796292

    申请日:2013-03-12

    CPC classification number: H01J61/06 H01J61/526 H01J65/046 H05H1/2406

    Abstract: A vacuum ultraviolet (VUV) photon source includes a body, a VUV window, electrodes disposed on the body outside an interior thereof, and a dielectric barrier between the electrodes. A method for generating VUV photons includes generating a dielectric barrier discharge (DBD) in an interior of a photon source by applying a periodic voltage between a first electrode and a second electrode separated by a dielectric barrier, wherein the DBD produces excimers from a gas in a gap between the electrodes, and transmitting VUV photons through a window of the photon source.

    Abstract translation: 真空紫外(VUV)光子源包括主体,VUV窗口,设置在其内部的主体上的电极以及电极之间的介电阻挡层。 一种用于产生VUV光子的方法包括通过在由电介质屏障隔开的第一电极和第二电极之间施加周期性电压来在光子源的内部产生电介质势垒放电(DBD),其中DBD从气体 电极之间的间隙,并通过光子源的窗口传输VUV光子。

    Vacuum ultraviolet photon source, ionization apparatus, and related methods
    3.
    发明授权
    Vacuum ultraviolet photon source, ionization apparatus, and related methods 有权
    真空紫外光源,电离装置及相关方法

    公开(公告)号:US09153427B2

    公开(公告)日:2015-10-06

    申请号:US13796292

    申请日:2013-03-12

    CPC classification number: H01J61/06 H01J61/526 H01J65/046 H05H1/2406

    Abstract: A vacuum ultraviolet (VUV) photon source includes a body, a VUV window, electrodes disposed on the body outside an interior thereof, and a dielectric barrier between the electrodes. A method for generating VUV photons includes generating a dielectric barrier discharge (DBD) in an interior of a photon source by applying a periodic voltage between a first electrode and a second electrode separated by a dielectric barrier, wherein the DBD produces excimers from a gas in a gap between the electrodes, and transmitting VUV photons through a window of the photon source.

    Abstract translation: 真空紫外(VUV)光子源包括主体,VUV窗口,设置在其内部的主体上的电极以及电极之间的介电阻挡层。 一种用于产生VUV光子的方法包括通过在由电介质屏障隔开的第一电极和第二电极之间施加周期性电压来在光子源的内部产生电介质势垒放电(DBD),其中DBD从气体中产生极化子 电极之间的间隙,并通过光子源的窗口传输VUV光子。

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