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    CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM
    4.
    发明申请
    CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM 有权

    公开(公告)号：US20210057256A1

    公开(公告)日：2021-02-25

    申请号：US16990839

    申请日：2020-08-11

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Nicholas Michael Bergantz ,  Andreas Schmid ,  Leon Volfovski ,  Sanggyum Kim ,  Damon Cox ,  Paul Wirth

    IPC: H01L21/68 ,  G01B11/27 ,  B25J11/00 ,  H01L21/67 ,  H01L21/687

    Abstract: A method for calibrating an aligner station of an electronics processing system is provided. A calibration is retrieved, by a first robot arm of a transfer chamber, from a processing chamber connected to the transfer chamber. The calibration object has a target orientation in the processing chamber. The calibration is placed, by the first robot art, in a load lock connected to the transfer chamber. The calibration is retrieved from the load lock by a second robot arm of a factory interface connected to the load lock. The calibration object is placed, by the second robot arm, at an aligner station housed in or connected to the factory interface. The calibration object has a first orientation at the aligner station. A difference is determined between the first orientation at the aligner station and an initial target orientation at the aligner station. The initial target orientation at the aligner station is associated with the target orientation in the processing chamber. A first characteristic error value associated with the processing chamber is determined based on the difference between the first orientation and the initial target orientation. The first characteristic error value is recorded in a storage medium. The aligner station is to use the first characteristic error value for alignment of objects to be placed in the processing chamber.

    METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING
    5.
    发明申请
    METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING 有权
    基板边缘清洗方法与装置

    公开(公告)号：US20140251375A1

    公开(公告)日：2014-09-11

    申请号：US13785903

    申请日：2013-03-05

    Applicant: APPLIED MATERIALS, INC.

    Inventor： JAMES MATTHEW HOLDEN ,  SONG-MOON SUH ,  TODD EGAN ,  Kalyanjit Ghosh ,  Leon Volfovski ,  Michael R. Rice ,  Richard Giljum

    IPC: H01L21/67 ,  H01L21/02

    CPC classification number: H01L21/67028 ,  B01D39/12 ,  B08B5/00 ,  B08B7/00 ,  H01L21/02076 ,  H01L21/02087 ,  H01L21/0209 ,  H01L21/67051

    Abstract: A substrate cleaning apparatus may include a substrate support having a support surface to support a substrate to be cleaned, wherein the substrate support is rotatable about a central axis normal to the support surface; a first nozzle to provide a first cleaning gas to a region of the inner volume corresponding to the position of an edge of the substrate when the substrate is supported by the support surface of the substrate support; a first annular body disposed opposite and spaced apart from the support surface of the substrate support by a gap, the first annular body having a central opening defined by an inner wall shaped to provide a reducing size of the gap between the first annular body and the support surface in a radially outward direction; and a first gas inlet to provide a first gas to the central opening of the first annular body.

    Abstract translation: 基板清洁装置可以包括具有支撑表面以支撑要清洁的基板的基板支撑件，其中基板支撑件可绕垂直于支撑表面的中心轴线旋转; 第一喷嘴，用于当所述基板由所述基板支撑件的支撑表面支撑时，将第一清洁气体提供到所述内部体积的与所述基板的边缘的位置相对应的区域; 第一环形体，其通过间隙与衬底支撑件的支撑表面相对设置并间隔开，第一环形体具有由内壁限定的中心开口，内壁被成形为提供第一环形体和第二环形体之间的间隙的减小尺寸 支撑表面沿径向向外的方向; 以及第一气体入口，用于向第一环形体的中心开口提供第一气体。

    Sensor-based correction of robot-held object
    6.
    发明授权
    Sensor-based correction of robot-held object 有权

    公开(公告)号：US11626305B2

    公开(公告)日：2023-04-11

    申请号：US16452091

    申请日：2019-06-25

    Applicant: Applied Materials, Inc.

    Inventor： Nicholas Michael Kopec ,  Damon K. Cox ,  Leon Volfovski

    IPC: B25J9/16 ,  H01L21/67 ,  H01L21/677 ,  G06T1/00

    Abstract: A robotic object handling system comprises a robot arm, a non-contact sensor, a first station, and a computing device. The computing device is to cause the robot arm to pick up an object on an end effector, cause the robot arm to position the object within a detection area of the non-contact sensor, cause the non-contact sensor to generate sensor data of the object, determine at least one of a rotational error of the object relative to a target orientation or a positional error of the object relative to a target position based on the sensor data, cause an adjustment to the robot arm to approximately remove at least one of the rotational error or the positional error from the object, and cause the robot arm to place the object at the first station, wherein the placed object lacks at least one of the rotational error or the positional error.

    Multi-object capable loadlock system
    7.
    发明授权
    Multi-object capable loadlock system 有权

    公开(公告)号：US11211269B2

    公开(公告)日：2021-12-28

    申请号：US16923903

    申请日：2020-07-08

    Applicant: Applied Materials, Inc.

    Inventor： Andrew Paul Harbert ,  Michael C Kuchar ,  Nicholas Michael Bergantz ,  Leon Volfovski ,  Sivakumar Ramalingam ,  Karuppasamy Muthukamatchi ,  Douglas R McAllister

    IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677 ,  H01L21/673

    Abstract: A method includes receiving, by a first loadlock chamber of the loadlock system, a first object from a factory interface via a first opening. The first object is transferred into the first loadlock chamber via a first robot arm. The factory interface is at a first state. The first loadlock chamber is configured to receive different types of objects. The method further includes sealing a first loadlock door against the first opening to create a first sealed environment at the first state in the first loadlock chamber and causing the first sealed environment of the first loadlock chamber to be changed to a second state. The method further includes actuating a second loadlock door to provide a second opening between the first loadlock chamber and a transfer chamber. The first object is to be transferred from the first loadlock chamber to the transfer chamber via a second robot arm.

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