公开(公告)号：US11515118B2

公开(公告)日：2022-11-29

申请号：US16794948

申请日：2020-02-19

Applicant: EBARA CORPORATION

Inventor： Kenji Watanabe ,  Shinichi Okada ,  Ryo Tajima ,  Tsutomu Karimata

IPC: H01J37/147 ,  H01J37/244

Abstract: Provided is an electron beam irradiation apparatus including: an aligner configured to perform an alignment of an electron beam by deflecting the electron beam; a deflector having a plurality of electrodes and configured to deflect the electron beam after passing through the aligner; and an adjuster configured to adjust deflection caused by the aligner, wherein the adjuster is configured to perform, on each of the plurality of electrodes, detecting an image of the electron beam by applying a test voltage to one of the plurality of electrodes and applying a reference voltage to the other electrodes, determine a position shift of the electron beam based on each position of the image of the electron beam corresponding to each electrode, and adjust deflection of the aligner so as to cancel the position shift of the electron beam.

公开(公告)号：US10446404B2

公开(公告)日：2019-10-15

申请号：US15873108

申请日：2018-01-17

Applicant: EBARA CORPORATION

Inventor： Ryo Tajima ,  Masahiro Hatakeyama ,  Kenichi Suematsu ,  Kiwamu Tsukamoto ,  Kenji Watanabe ,  Shoji Yoshikawa ,  Shinichi Okada ,  Kenji Terao

IPC: H01L37/00 ,  H01L21/3065 ,  H01J37/147 ,  H01J37/305 ,  H01J37/302 ,  H01L21/027

Abstract: Provided is a method of adjusting an electron-beam irradiated area in an electron beam irradiation apparatus that deflects an electron beam with a deflector to irradiate an object with the electron beam, the method including: emitting an electron beam while changing an irradiation position on an adjustment plate by controlling the deflector in accordance with an electron beam irradiation recipe, the adjustment plate detecting a current corresponding to the emitted electron beam; acquiring a current value detected from the adjustment plate; forming image data corresponding to the acquired current value; determining whether the electron-beam irradiated area is appropriate based on the formed image data; and updating the electron beam irradiation recipe when the electron-beam irradiated area is determined not to be appropriate.

公开(公告)号：US11322335B2

公开(公告)日：2022-05-03

申请号：US16801555

申请日：2020-02-26

Applicant: EBARA CORPORATION

Inventor： Shinichi Okada

IPC: H01J37/317 ,  H01J37/10 ,  H01J37/063 ,  H01J37/32 ,  H01J37/30

Abstract: A charged particle multi-beam device includes a charged particle source, a collimator lens, a multi-light-source forming unit, and a reduction projection optical system. The multi-light-source forming unit has first to third porous electrodes disposed side by side in an optical axis direction. A plurality of holes for causing the multi-beams to pass is formed in each of the first to third porous electrodes. The first porous electrode and the third porous electrode have the same potential and the second porous electrode has potential different from the potential of the first porous electrode and the third porous electrode. A diameter of the holes on the second porous electrode is formed larger further away from an optical axis such that a surface on which the multi-light sources are located is formed in a shape convex to the charged particle source side.

公开(公告)号：US11131826B2

公开(公告)日：2021-09-28

申请号：US16272208

申请日：2019-02-11

Applicant: EBARA CORPORATION

Inventor： Shinichi Okada

IPC: G02B7/02 ,  G02B5/20 ,  H01J37/30 ,  H01J49/28

Abstract: A Wien filter to be disposed inside a lens barrel made of a magnetic material includes: a plurality of electromagnetic poles disposed at equal angular intervals about a center axis of the lens barrel; a first magnetic shield disposed so as to cover the area around the plurality of electromagnetic poles; and a second magnetic shield disposed so as to cover the area around the first magnetic shield. The first magnetic shield is supported by a first support member made of a non-magnetic material provided at an inner surface of the second magnetic shield. The second magnetic shield is supported by a second support member made of a magnetic material provided at an inner surface of the lens barrel.