公开(公告)号：US12000789B2

公开(公告)日：2024-06-04

申请号：US17561497

申请日：2021-12-23

Applicant: FEI Company

Inventor： Libor Novak ,  Krishna Kanth Neelisetty ,  Veronika Hammerova ,  Jan Lasko

IPC: G01N23/2204 ,  G01N23/2251 ,  G01N23/2273 ,  H01J37/20

CPC classification number: G01N23/2204 ,  G01N23/2251 ,  G01N23/2273 ,  H01J37/20

Abstract: A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.

公开(公告)号：US12165833B2

公开(公告)日：2024-12-10

申请号：US17748927

申请日：2022-05-19

Applicant: FEI Company

Inventor： Michal Hrouzek ,  Libor Novak ,  Krishna Kanth Neelisetty ,  Petr Wandrol

IPC: H01J37/20 ,  H01J37/244 ,  H01J37/302 ,  H01J37/304 ,  H01J37/305

Abstract: Systems and methods for efficiently processing multiple samples with a BIB system, are disclosed. An example method for efficiently processing multiple samples with a BIB system according to the present invention comprises removing an individual sample holder containing a sample from a storage location within the BIB system, wherein the BIB system includes multiple sample holders positioned in one or more storage locations, loading the individual sample holder onto a sample stage configured to hold the sample holder during polishing of the corresponding sample held by the individual sample holder, and causing a BIB source to emit a broad ion beam towards the sample, wherein the broad ion beam removes at least a portion of the sample upon which it is incident. Once a desired portion of the sample is removed, the sample holder is removed from the sample stage and loaded back into the storage location.

公开(公告)号：US10134563B2

公开(公告)日：2018-11-20

申请号：US14939218

申请日：2015-11-12

Applicant: FEI Company

Inventor： Jacob Simon Faber ,  Lubomir Tuma ,  Timothy Burnett ,  Libor Novak

IPC: G01K1/08 ,  H01J37/26 ,  G01K11/30 ,  H01J37/20 ,  H01J37/244

Abstract: Disclosed is a method of using a charged particle microscope for inspecting a sample mounted on a sample holder. The microscope is equipped with a solid state detector for detecting secondary particles emanating from the sample in response to irradiation of the sample with the primary beam, with the solid state detector in direct optical view of the sample. In some embodiments, the sample is mounted on a heater with a fast thermal response time. The method comprises contactless measurement of the temperature of the sample and/or sample holder using the solid state detector.

公开(公告)号：US12228484B2

公开(公告)日：2025-02-18

申请号：US17748878

申请日：2022-05-19

Applicant: FEI Company

Inventor： Michal Hrouzek ,  Krishna Kanth Neelisetty ,  Petr Wandrol ,  Libor Novak

IPC: H01J37/305 ,  G01N1/28 ,  G01N1/32 ,  H01J37/20

Abstract: Systems and methods for operating a broad ion beam (BIB) polisher in a sample preparation workflow having improved uptime, are disclosed. An example method for operating a broad ion beam (BIB) polisher having improved uptime according to the present invention comprises causing a first BIB source to emit a first broad ion beam towards a sample positioned within an interior volume of the BIB polisher while the first BIB source is in emitting the first broad ion beam towards the sample, removing a second BIB source from the BIB polisher that is configured to emit a second broad ion beam towards the sample when in use.

公开(公告)号：US12216029B2

公开(公告)日：2025-02-04

申请号：US17826782

申请日：2022-05-27

Applicant: FEI Company

Inventor： Libor Novak ,  Tomas Kazda

IPC: G01N1/10

Abstract: The present invention relates to a method for preparing and/or processing a sample. The sample comprises at least one fluid, and the method comprises directing a charged particle beam onto the at least one fluid and causing the at least one fluid to flow in response to the charged particle beam being directed on to it. The present invention also relates to a system and a computer program product used to carry out the method.

公开(公告)号：US12106931B2

公开(公告)日：2024-10-01

申请号：US17748972

申请日：2022-05-19

Applicant: FEI Company

Inventor： Michal Hrouzek ,  Libor Novak ,  Tomas Vystavel ,  Krishna Kanth Neelisetty ,  Jan Neuzil ,  Ondrej Klvac

IPC: H01J37/20 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/208 ,  H01J2237/31745

Abstract: Systems and methods for pre-aligning samples for more efficient processing of multiple samples with a BIB system according to the present invention comprises affixing a sample to an adjustable portion of a sample holder, nesting the sample holder with a first mask having a first mask edge, wherein the first mask is positioned outside of a BIB system, and aligning the sample such that it has a desired geometric relationship to the first mask edge. The first mask may be geometrically similar with a second mask within the BIB system that has a second mask edge such that the geometric relationship between the first mask edge and the sample when the sample holder is nested with the first mask is the same as the geometric relationship between the second mask edge and the sample when the sample holder is nested with the second mask.

公开(公告)号：US20170103868A1

公开(公告)日：2017-04-13

申请号：US15206523

申请日：2016-07-11

Applicant: FEI Company

Inventor： Libor Novak ,  Petr Hlavenka ,  Marek Uncovsky ,  Martin Cafourek

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2001 ,  H01J2237/2065 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448

Abstract: A method of examining a specimen in a Charged Particle Microscope, comprising the following steps: Providing a specimen on a specimen holder; Heating the specimen to a temperature of at least 250° C.; Directing a beam of charged particles from a source through an illuminator so as to irradiate the specimen; Using a detector to detect a flux of electrons emanating from the specimen in response to said irradiation, wherein said detector comprises: A scintillator module, which produces photons in response to impingement by electrons in said flux; A photon sensor, for sensing said photons, and is configured to: Preferentially register a first category of photons, associated with impingement of electrons on said scintillator module; Selectively suppress a second category of photons, comprising thermal radiation from the heated specimen.

公开(公告)号：US20160133436A1

公开(公告)日：2016-05-12

申请号：US14939218

申请日：2015-11-12

Applicant: FEI Company

Inventor： Jacob Simon Faber ,  Lubomir Tuma ,  Timothy Burnett ,  Libor Novak

IPC: H01J37/26 ,  G01K11/30

CPC classification number: H01J37/261 ,  G01K11/30 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/2001 ,  H01J2237/2065 ,  H01J2237/28

Abstract: Disclosed is a method of using a charged particle microscope for inspecting a sample mounted on a sample holder. The microscope is equipped with a solid state detector for detecting secondary particles emanating from the sample in response to irradiation of the sample with the primary beam, with the solid state detector in direct optical view of the sample. In some embodiments, the sample is mounted on a heater with a fast thermal response time. The method comprises contactless measurement of the temperature of the sample and/or sample holder using the solid state detector.

Abstract translation: 公开了使用带电粒子显微镜来检查安装在样品架上的样品的方法。 显微镜配备有固态检测器，用于响应于初级束的样品照射而检测从样品发出的二次颗粒，固态检测器以样品的直接光学视图。 在一些实施例中，将样品安装在具有快速热响应时间的加热器上。 该方法包括使用固态检测器对样品和/或样品保持器的温度进行非接触式测量。