公开(公告)号：US20200312606A1

公开(公告)日：2020-10-01

申请号：US16903658

申请日：2020-06-17

Applicant: Hitachi High-Tech Corporation

Inventor： Takanori KISHIMOTO ,  Ichiro TACHIBANA ,  Naomasa SUZUKI

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/10 ,  H01J37/21 ,  H01J37/28

Abstract: This charged particle beam device is provided with: a plurality of detectors for detecting secondary particles, the detectors being disposed in a symmetrical manner around the optical axis of a primary charged particle beam closer to the charged particle source side than an objective lens; electrodes for forming an electric field oriented in directions corresponding to each of the plurality of detectors, the electrodes being provided on the travel routes of secondary particles from a sample to the detectors; and a control power supply for applying a voltage to the electrodes. Adjusting the voltage applied to each of the electrodes makes it possible to detect, upon deflecting, the secondary particles, and to control the range of azimuths of the secondary particles to be detected.

公开(公告)号：US20230170182A1

公开(公告)日：2023-06-01

申请号：US17921737

申请日：2020-04-28

Applicant: Hitachi High-Tech Corporation

Inventor： Kazufumi YACHI ,  Muneyuki FUKUDA ,  Ichiro TACHIBANA ,  Hiroya OHTA

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/145

CPC classification number: H01J37/28 ,  H01J37/145 ,  H01J37/244 ,  H01J2237/057 ,  H01J2237/2806

Abstract: Proposed is a charged particle beam apparatus for the purpose of detecting a charged particle emitted from a sample in a specific direction by discriminating between the charged particle and a charged particle emitted in another direction. As one aspect of achieving the above purpose, proposed is a charged particle beam apparatus including an objective lens configured to focus a beam emitted from a charged particle source, a detector (8) configured to detect at least one of a first charged particle (23) emitted from a sample by irradiating the sample with the beam and a second charged particle emitted from a charged particle collided member by causing the first charged particle to collide with the charged particle collision member disposed on a trajectory of the first charged particle, and an electrostatic lens (12) including a plurality of electrodes disposed between the objective lens and the detector, in which the electrostatic lens is a Butler type.