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公开(公告)号：US20160111248A1
公开(公告)日：2016-04-21
申请号：US14882817
申请日：2015-10-14
Applicant: JEOL Ltd.
Inventor： Masaki Morita , Akira Yasuhara
CPC classification number: H01J37/222 , H01J37/28 , H01J2237/221 , H01J2237/2442 , H01J2237/24585 , H01J2237/2802
Abstract: An electron microscope includes an acquisition section that acquires an electron microscope image of a specimen that includes a plurality of identical patterns, and a spectrum at each pixel of the electron microscope image, and an elemental map generation section that adds up the spectrum at each pixel of each of a plurality of areas that are included in the electron microscope image and have an identical size to generate an elemental mapping image of the specimen.
Abstract translation: 电子显微镜包括获取包含多个相同图案的样本的电子显微镜图像的获取部和电子显微镜图像的每个像素处的光谱，以及将每个像素的光谱相加的基本图生成部 包括在电子显微镜图像中的多个区域中的每一个具有相同的尺寸以产生样本的基本映射图像。
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公开(公告)号：US10020162B2
公开(公告)日：2018-07-10
申请号：US15451546
申请日：2017-03-07
Applicant: JEOL Ltd.
Inventor： Yuko Shimizu , Akira Yasuhara , Kazuya Yamazaki , Fumio Hosokawa
CPC classification number: H01J37/1478 , H01J37/1471 , H01J37/20 , H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/1506 , H01J2237/221 , H01J2237/223 , H01J2237/2802
Abstract: There is provided a beam alignment method capable of easily aligning an electron beam with a coma-free axis in an electron microscope. The method starts with tilting the electron beam (EB) in a first direction (+X) relative to a reference axis (A) and obtaining a first TEM (transmission electron microscope) image. Then, the beam is tilted in a second direction (−X) relative to the reference axis, the second direction (−X) being on the opposite side of the reference axis (A) from the first direction (+X), and a second TEM image is obtained. The reference axis is incrementally varied so as to reduce the brightness of the differential image between a power spectrum of the first TEM image and a power spectrum of the second TEM image.
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公开(公告)号：US20170301507A1
公开(公告)日：2017-10-19
申请号：US15451546
申请日：2017-03-07
Applicant: JEOL Ltd.
Inventor： Yuko Shimizu , Akira Yasuhara , Kazuya Yamazaki , Fumio Hosokawa
IPC: H01J37/147 , H01J37/28 , H01J37/20 , H01J37/22
CPC classification number: H01J37/1478 , H01J37/1471 , H01J37/20 , H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/1506 , H01J2237/221 , H01J2237/223 , H01J2237/2802
Abstract: There is provided a beam alignment method capable of easily aligning an electron beam with a coma-free axis in an electron microscope. The method starts with tilting the electron beam (EB) in a first direction (+X) relative to a reference axis (A) and obtaining a first TEM (transmission electron microscope) image. Then, the beam is tilted in a second direction (−X) relative to the reference axis, the second direction (−X) being on the opposite side of the reference axis (A) from the first direction (+X), and a second TEM image is obtained. The reference axis is incrementally varied so as to reduce the brightness of the differential image between a power spectrum of the first TEM image and a power spectrum of the second TEM image.
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公开(公告)号：US09627175B2
公开(公告)日：2017-04-18
申请号：US14882817
申请日：2015-10-14
Applicant: JEOL Ltd.
Inventor： Masaki Morita , Akira Yasuhara
CPC classification number: H01J37/222 , H01J37/28 , H01J2237/221 , H01J2237/2442 , H01J2237/24585 , H01J2237/2802
Abstract: An electron microscope includes an acquisition section that acquires an electron microscope image of a specimen that includes a plurality of identical patterns, and a spectrum at each pixel of the electron microscope image, and an elemental map generation section that adds up the spectrum at each pixel of each of a plurality of areas that are included in the electron microscope image and have an identical size to generate an elemental mapping image of the specimen.
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