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    MEASUREMENT APPARATUS AND MEASUREMENT METHOD
    2.
    发明申请
    MEASUREMENT APPARATUS AND MEASUREMENT METHOD 有权
    测量装置和测量方法

    公开(公告)号：US20160139034A1

    公开(公告)日：2016-05-19

    申请号：US14657209

    申请日：2015-03-13

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Toru MIKAMI

    IPC: G01N21/25 ,  G01J3/02 ,  G01B11/02 ,  G01J3/44

    CPC classification number: G01B11/02 ,  G01J3/0264 ,  G01J3/4412 ,  G01J2003/284 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2021/95615

    Abstract: In accordance with an embodiment, a measurement apparatus includes a library creation unit, a spectral profile acquiring unit, and a measurement unit. The library creation unit creates a library in which a layer stack model is matched to a theoretical profile regarding a pattern of stacked layers. The spectral profile acquiring unit acquires an actual measured profile by applying light to a measurement target pattern obtained when the pattern is actually created. The measurement unit measures the sectional shape of the measurement target pattern by performing fitting of the theoretical profile to the actual measured profile. The layer stack model is created by calculating a feature value that reflects the intensity of reflected light from an interface for each of the layers, determining a priority order of analysis from the feature value, and sequentially performing fitting of the theoretical profile to the measured profile in the determined priority order.

    Abstract translation: 根据实施例，测量装置包括库创建单元，光谱轮廓获取单元和测量单元。 库创建单元创建库，其中层堆栈模型与关于层叠图案的理论简档相匹配。 光谱轮廓获取单元通过将光施加到当实际创建图案时获得的测量目标图案来获取实际测量的轮廓。 测量单元通过将理论曲线拟合到实际测量曲线来测量测量目标图案的截面形状。 通过计算反映来自每个层的界面的反射光的强度的特征值来创建层堆叠模型，从特征值确定分析的优先级顺序，并且顺序地将理论分布拟合到测量的轮廓 以确定的优先顺序。

    Method and device for spectral reconstruction
    3.
    发明授权
    Method and device for spectral reconstruction 失效
    光谱重建方法和装置

    公开(公告)号：US4642778A

    公开(公告)日：1987-02-10

    申请号：US585575

    申请日：1984-03-02

    Applicant: Gary M. Hieftje ,  David H. Honigs

    Inventor： Gary M. Hieftje ,  David H. Honigs

    IPC: G01J3/28 ,  G01N21/35 ,  G06F15/46

    CPC classification number: G01J3/28 ,  G01N21/3577 ,  G01J2003/284 ,  G01J2003/2866

    Abstract: A method is presented for spectral reconstruction which comprises first obtaining component concentrations of a series of mixtures, which component concentrations constitute a set of reference values. The spectral value of each member of that series of mixtures is measured at a first wavelength, which spectral value possesses contribution from individual components in the mixture, whose individual contribution is unknown. The spectral values for the series of mixtures are then mathematically cross-correlated with the component concentrations in said series of mixtures, at the first wavelength, thereby obtaining the spectral contribution for said components at that first wavelength. The spectral value of each member of that series of mixtures is measured at the second wavelength, which spectral values are then cross-correlated with component concentrations in the series of mixtures thereby obtaining the spectral contribution for said components at the second wavelength. This operation is repeated for a series of wavelengths until the spectrum of the desired component in the mixture is reconstructed. Devices are presented which implement the methods for spectral reconstruction of the present invention.

    Abstract translation: 提出了一种用于光谱重建的方法，其包括首先获得一系列混合物的组分浓度，该组分浓度构成一组参考值。 该系列混合物的每个成员的光谱值在第一波长处测量，该光谱值具有来自混合物中各个成分的贡献，其个体贡献是未知的。 然后，该系列混合物的光谱值在第一波长处与所述混合物系列中的组分浓度数学上交叉相关，由此获得在该第一波长处的所述组分的光谱贡献。 在第二波长处测量该系列混合物的每个成员的光谱值，该光谱值然后与该系列混合物中的成分浓度交叉相关，从而获得第二波长处的所述成分的光谱贡献。 对于一系列波长重复该操作，直到重构混合物中所需组分的光谱。 给出了实现本发明的光谱重建方法的装置。

    HYPERSPECTRAL IMAGE SENSOR AND SYSTEM EMPLOYING THE SAME
    7.
    发明公开
    HYPERSPECTRAL IMAGE SENSOR AND SYSTEM EMPLOYING THE SAME 审中-公开

    公开(公告)号：US20240280406A1

    公开(公告)日：2024-08-22

    申请号：US18443488

    申请日：2024-02-16

    Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

    Inventor： Mooseok JANG ,  Gookho Song ,  Dong-Gu Lee

    IPC: G01J3/28 ,  G01J3/45

    CPC classification number: G01J3/2823 ,  G01J3/45 ,  G01J2003/284

    Abstract: Provided are a hyperspectral image sensor and a hyperspectral imaging system including the hyperspectral image sensor. The hyperspectral image sensor includes a light-receiving sensor that is pixelated, and a plurality of metasurfaces that are arranged in front of the light-receiving sensor apart from each other in a stacking direction, and each have an array of meta-atoms. At least one of the plurality of metasurfaces is a random metasurface in which the meta-atoms are disorderly arranged, and a speckle pattern is formed on a sensing surface of the light-receiving sensor by the plurality of metasurfaces.

    METHOD OF ANALYZING A SPECTRAL PEAK
    8.
    发明公开
    METHOD OF ANALYZING A SPECTRAL PEAK 审中-公开

    公开(公告)号：US20230194344A1

    公开(公告)日：2023-06-22

    申请号：US18064651

    申请日：2022-12-12

    Applicant: Thermo Fisher Scientific (Bremen) GmbH

    Inventor： Ning Ning Pan

    IPC: G01J3/28 ,  G01J3/18

    CPC classification number: G01J3/2803 ,  G01J3/1809 ,  G01J2003/284 ,  G01J2003/2859

    Abstract: Systems, devices, and methods of analyzing an interfered peak of a sample spectrum is disclosed. The sample spectrum may be generated using a detector of an optical spectrometer. The interfered peak may be produced by a plurality of spectral peaks of different wavelengths. The method may include generating interfered curve parameters representative of the peak shape of each spectral emission in the interfered peak based at least in part on a model of expected curve parameters for the optical spectrometer and a location of the interfered peak on the detector of the optical spectrometer; fitting a plurality of curves to the interfered peak, each curve corresponding to one of the plurality of spectral emissions of different wavelengths forming the interfered peak, wherein each curve is fitted using the interfered curve parameters provided by the model of expected peak parameters; and outputting the plurality of curves for further analysis.

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