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公开(公告)号:DE69115755D1
公开(公告)日:1996-02-08
申请号:DE69115755
申请日:1991-05-16
Applicant: IBM
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公开(公告)号:DE69332196D1
公开(公告)日:2002-09-19
申请号:DE69332196
申请日:1993-03-22
Applicant: IBM
Inventor: FERENCE THOMAS GEORGE , GRUBER PETER ALFRED , HERNANDEZ BERNARDO , PALMER MICHAEL JOHN , ZINGHER ARTHUR RICHARD
Abstract: An apparatus and method are described for injection molding solder mounds onto electronic devices. The apparatus has a reservoir (46) for molten solder which is disposed over a cavity in an injection plate (34). The injection plate is disposed over a mold (32) having an array of cavities therein into which solder is injection molded. The mold is disposed over a workpiece (50), such as a semiconductor chip or a semiconductor chip packaging substrate. The cavities in the mold are aligned with electrical contact locations on the chip or substrate. The workpiece is heated and the molten solder is forced under gas pressure into the cavity (68) in the injection plate (34) disposed above the array of cavities in the mold. The molten solder is forced into the array of cavities in the mold. The injection plate (34) is advanced to slide over the mold to wipe away the excess solder above the mold at a plurality of wiping apertures in the injection plate. The injection plate is further advanced to a location having a nonsolder wettable surface at which location the injection plate is removed. The mold is then removed to leave solder mounds disposed on the workpiece. The workpiece can be a semiconductor chip, a semiconductor chip packaging substrate or a dummy substrate onto which the injected molded solder adheres such as a polymer layer to form a carrier substrate for a solder mound array which can be subsequently transferred to a substrate such as a semiconductor chip or a semiconductor chip packaging substrate. The apparatus and methods of the present invention can be integrated into an automated manufacturing system for depositing an array of solder mounds onto a substrates.
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公开(公告)号:DE3276679D1
公开(公告)日:1987-08-06
申请号:DE3276679
申请日:1982-04-27
Applicant: IBM
Inventor: ZINGHER ARTHUR RICHARD
Abstract: A method of manufacturing substrates for LSI chips starts with the usual steps of punching holes in green sheets, screening patterning paste (adapted to form cermet conductors or the like after firing) onto the greensheets, and inspecting the greensheets optically. Subsets of green sheets are then stacked and compressed into sub-laminates. The sub-laminates are then functionally inspected electrical i.e. before firing the greensheets. Inspection is done by means of electromechanical contact, scanning electron microscope like techniques, or by other means (e.g. light or ions) of irradiating the conductors to energize them for electrical measurement. Secondary electrons can measure the specimen's potential locally or change its charge. This method can also be employed for the purpose of inspecting other multilayer structures (such as large multilayer printed circuits formed on a plastic base) prior to final assembly of the conductors and the various substrates into a laminated support for electrical circuits.
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公开(公告)号:DE69332196T2
公开(公告)日:2003-05-15
申请号:DE69332196
申请日:1993-03-22
Applicant: IBM
Inventor: FERENCE THOMAS GEORGE , GRUBER PETER ALFRED , HERNANDEZ BERNARDO , PALMER MICHAEL JOHN , ZINGHER ARTHUR RICHARD
Abstract: An apparatus and method are described for injection molding solder mounds onto electronic devices. The apparatus has a reservoir (46) for molten solder which is disposed over a cavity in an injection plate (34). The injection plate is disposed over a mold (32) having an array of cavities therein into which solder is injection molded. The mold is disposed over a workpiece (50), such as a semiconductor chip or a semiconductor chip packaging substrate. The cavities in the mold are aligned with electrical contact locations on the chip or substrate. The workpiece is heated and the molten solder is forced under gas pressure into the cavity (68) in the injection plate (34) disposed above the array of cavities in the mold. The molten solder is forced into the array of cavities in the mold. The injection plate (34) is advanced to slide over the mold to wipe away the excess solder above the mold at a plurality of wiping apertures in the injection plate. The injection plate is further advanced to a location having a nonsolder wettable surface at which location the injection plate is removed. The mold is then removed to leave solder mounds disposed on the workpiece. The workpiece can be a semiconductor chip, a semiconductor chip packaging substrate or a dummy substrate onto which the injected molded solder adheres such as a polymer layer to form a carrier substrate for a solder mound array which can be subsequently transferred to a substrate such as a semiconductor chip or a semiconductor chip packaging substrate. The apparatus and methods of the present invention can be integrated into an automated manufacturing system for depositing an array of solder mounds onto a substrates.
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公开(公告)号:DE3851077D1
公开(公告)日:1994-09-22
申请号:DE3851077
申请日:1988-02-19
Applicant: IBM
Inventor: GOTWALD CHARLES ALLEN , OKTAY SEVGIN , SHARMA AJAY , SONNAD VIJAY , ZINGHER ARTHUR RICHARD
IPC: H01L23/467 , H01L23/473
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公开(公告)号:DE3265985D1
公开(公告)日:1985-10-10
申请号:DE3265985
申请日:1982-04-27
Applicant: IBM
Inventor: CHANG TAI-HON PHILIP , COANE PHILIP JAMES , HOHN FRITZ-JURGEN , MOLZEN WALTER WILLIAM , ZINGHER ARTHUR RICHARD
IPC: G01R1/06 , G01R1/073 , G01R31/02 , G01R31/26 , G01R31/302 , G01R31/305 , H01B1/24 , H01L21/66 , H05K3/46 , G01R31/28
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公开(公告)号:DE69115755T2
公开(公告)日:1996-07-11
申请号:DE69115755
申请日:1991-05-16
Applicant: IBM
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公开(公告)号:DE3851077T2
公开(公告)日:1995-03-30
申请号:DE3851077
申请日:1988-02-19
Applicant: IBM
Inventor: GOTWALD CHARLES ALLEN , OKTAY SEVGIN , SHARMA AJAY , SONNAD VIJAY , ZINGHER ARTHUR RICHARD
IPC: H01L23/467 , H01L23/473
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