公开(公告)号：KR1020080025818A

公开(公告)日：2008-03-24

申请号：KR1020060090448

申请日：2006-09-19

Applicant: 삼성전자주식회사

Inventor： 이정훈 ,  이창호 ,  김영훈 ,  박경실 ,  김명선 ,  양주형 ,  이명숙

IPC: H01L21/027

CPC classification number: H01L21/3086 ,  G03F7/70433 ,  H01L21/0337 ,  H01L21/0338 ,  H01L21/3088 ,  H01L21/31144

Abstract: A method for forming a hard mask is provided to obtain a photoresist pattern with finer line width while reducing standing wave formation in photoresist by forming the photoresist pattern on a spin-on carbon layer that has low reflectivity to ArF laser. A method for forming a hard mask comprises the steps of: forming a first layer(21) above a substrate(1), wherein the first layer is a spin-on carbon that is an amorphous carbon layer; forming a photoresist pattern(32) above the first layer; forming a second layer(41) having a reflectivity higher than that of the first layer, wherein the second layer is a spin-on glass layer that is a silicon oxide layer; removing the second layer until the photoresist pattern is exposed; removing the photoresist pattern to form a second pattern; and etching the first layer using the second pattern as an etching mask, to form a first pattern.

Abstract translation: 提供一种形成硬掩模的方法，以通过在对ArF激光器具有低反射率的旋涂碳层上形成光致抗蚀剂图案来减少光致抗蚀剂中的驻波形成，从而获得具有更细线宽的光刻胶图案。 形成硬掩模的方法包括以下步骤：在衬底（1）上形成第一层（21），其中第一层是作为无定形碳层的旋涂碳; 在所述第一层上形成光致抗蚀剂图案（32）; 形成具有高于第一层的反射率的第二层（41），其中第二层是作为氧化硅层的旋涂玻璃层; 去除第二层，直到光刻胶图案曝光; 去除光致抗蚀剂图案以形成第二图案; 并且使用第二图案蚀刻第一层作为蚀刻掩模，以形成第一图案。

公开(公告)号：KR100799195B1

公开(公告)日：2008-01-29

申请号：KR1020070003792

申请日：2007-01-12

Applicant: 삼성전자주식회사

Inventor： 최종무 ,  채희중 ,  이정훈 ,  김미순

IPC: H04B7/26 ,  H04B1/40

CPC classification number: H04W4/90 ,  H04W48/18 ,  H04W76/50 ,  H04W8/18

Abstract: A method for connecting an emergency call in a portable terminal and an apparatus thereof are provided to enable the portable terminal to perform an emergency call connection for notifying others of an emergent situation though an SIM(Subscriber Identity Module) card is inserted into the terminal while the terminal is in a situation that the terminal is connectable to only an unlicensed band network. A method for connecting an emergency call in a portable terminal comprises the following several steps. The portable terminal checks which networks are connectable and whether an SIM card is inserted when there occurs an event for an emergency call connection(301). The portable terminal performs an IMS(IP based Multimedia Subsystem) registration procedure by using the SIM card information pre-stored at a memory when the terminal is connectable to an unlicensed band network and the SIM card is not inserted(315-321). The portable terminal performs the IMS registration procedure by using the SIM card information when the portable terminal is connectable to the unlicensed band network and the SIM card is inserted(307). The portable terminal stores the information, recorded in the SIM card, at a memory(309). The portable terminal makes the emergency call connection by using the unlicensed band network(311).

Abstract translation: 提供了一种用于连接便携式终端中的紧急呼叫的方法及其装置，以便便携式终端能够通过SIM（用户识别模块）卡被插入到终端中来执行紧急呼叫连接，以通知其他紧急情况， 终端处于终端仅能够连接到非许可频带网络的情况。 用于连接便携式终端中的紧急呼叫的方法包括以下几个步骤。 便携式终端检查哪个网络可连接以及当发生紧急呼叫连接的事件时是否插入SIM卡（301）。 当终端可连接到非许可频带网络并且未插入SIM卡时，便携式终端通过使用预先存储在存储器中的SIM卡信息来执行IMS（基于IP的多媒体子系统）注册过程（315-321）。 当便携式终端可连接到非许可频带网络并且插入SIM卡时，便携式终端通过使用SIM卡信息来执行IMS注册过程（307）。 便携式终端将记录在SIM卡中的信息存储在存储器（309）中。 便携式终端通过使用非许可频带网络（311）进行紧急呼叫连接。

公开(公告)号：KR1020080006262A

公开(公告)日：2008-01-16

申请号：KR1020060065173

申请日：2006-07-12

Applicant: 삼성전자주식회사

Inventor： 김영훈 ,  김명선 ,  박경실 ,  이정훈 ,  이창호

IPC: H01L21/02

CPC classification number: H01L21/02 ,  B01D53/02 ,  H01L21/6715

Abstract: An assembly for filtering a chemical solution is provided to enhance a filtering effect without dispensing a metal component in the chemical solution during a solution coating process, thereby improving reliability of the chemical solution coating process. An assembly for filtering a chemical solution includes a filter unit(5), a filter housing(10), collection units(20,21). The filter unit filters out impurities included in the chemical solution by filtering the chemical solution. The filter housing has an inlet(2) and an outlet(4). The chemical solution comes in the assembly through the inlet and comes out the assembly through the outlet. The collection units form a magnetic pole and collect a metallic particle included in the chemical solution by being installed on an outer surface of the filter housing.

Abstract translation: 提供用于过滤化学溶液的组件以增强过滤效果，而不会在溶液涂覆过程中在化学溶液中分配金属组分，从而提高化学溶液涂覆过程的可靠性。 用于过滤化学溶液的组件包括过滤器单元（5），过滤器壳体（10），收集单元（20,21）。 过滤器过滤掉化学溶液中包含的杂质。 过滤器壳体具有入口（2）和出口（4）。 化学溶液通过入口进入组件，并通过出口排出组件。 收集单元形成磁极并通过安装在过滤器壳体的外表面上收集包含在化学溶液中的金属颗粒。

公开(公告)号：KR100757371B1

公开(公告)日：2007-09-11

申请号：KR1020060063909

申请日：2006-07-07

Applicant: 삼성전자주식회사

Inventor： 김성우 ,  이정훈 ,  이재섭

IPC: H03F3/20 ,  H04B1/40

CPC classification number: H03C1/36 ,  H03F1/0205 ,  H03F1/0261 ,  H03F1/32 ,  H03F3/24 ,  H03F2200/18 ,  H03F2200/351 ,  H03F2200/387 ,  H03F2200/408 ,  H03F2200/451 ,  H03F2200/541

Abstract: A power amplifier circuit for the envelope modulation of a high frequency signal and a method for the same are provided to improve the performance of a system by being applied to a transmitter of a ubiquitous system. A power amplifier circuit(300) for the envelope modulation of a high frequency signal includes a transformer(TF) and a transistor(Q31). The transformer(TF) generates a signal converted due to receiving a first signal. The transistor generates an output signal combining a second signal and the converted signal through one terminal connected to the converted signal by receiving the second signal having a DC(Direct Current) component. An envelope of the output signal is controlled by the first signal. Two terminals of a first coil receive a first power and the first signal respectively. A first terminal of a second coil is connected to a second power and a second terminal of the second coil generates the converted signal.

Abstract translation: 提供了用于高频信号的包络调制的功率放大器电路及其方法，用于通过应用于普遍存在的系统的发射机来提高系统的性能。 用于高频信号的包络调制的功率放大器电路（300）包括变压器（TF）和晶体管（Q31）。 变压器（TF）由于接收到第一信号而产生转换的信号。 晶体管通过接收具有DC（直流）分量的第二信号，通过连接到转换的信号的一个端子产生组合第二信号和转换的信号的输出信号。 输出信号的包络由第一个信号控制。 第一线圈的两个端子分别接收第一功率和第一信号。 第二线圈的第一端子连接到第二电源，并且第二线圈的第二端子产生转换的信号。

公开(公告)号：KR100745764B1

公开(公告)日：2007-08-02

申请号：KR1020060022322

申请日：2006-03-09

Applicant: 삼성전자주식회사 ,  재단법인서울대학교산학협력재단

Inventor： 유진규 ,  김철순 ,  이정훈

IPC: H01L21/8229 ,  B82Y10/00

Abstract: A method for manufacturing a nano wire memory device and a control system for forming a nano wire used are provided to form the nano wire in position and to improve the yield of a memory cell by forming one nano wire between an electrode and a dummy electrode using a CMOS logic. An electrode(40) and a dummy electrode(42) are formed on a substrate. The current between the electrode and the dummy electrode is measured and a nano wire(44) is formed between the electrode and the dummy electrode. When the measure current is the same as a given value, the power source applied between the electrode and the dummy electrode is blocked. The dummy electrode is removed. The nano wire forming process is performed by using a predetermined system composed of a switching logic and a current monitor under composite electric field conditions. A CMOS logic is used as the predetermined system.

Abstract translation: 提供用于制造纳米线存储器件的方法和用于形成所使用的纳米线的控制系统，以通过使用在电极和虚拟电极之间形成一个纳米线来使纳米线就位并且提高存储器单元的产量 一个CMOS逻辑。 电极（40）和虚拟电极（42）形成在基板上。 测量电极和伪电极之间的电流，并在电极和伪电极之间形成纳米线（44）。 当测量电流与给定值相同时，施加在电极和虚拟电极之间的电源被阻断。 假电极被移除。 纳米线形成工艺通过在复合电场条件下使用由开关逻辑和电流监测器组成的预定系统来执行。 CMOS逻辑被用作预定系统。

公开(公告)号：KR1020070051008A

公开(公告)日：2007-05-17

申请号：KR1020050108343

申请日：2005-11-14

Applicant: 삼성전자주식회사

Inventor： 김명선 ,  윤상웅 ,  이창호 ,  이정훈 ,  김영훈 ,  박경실

IPC: H01L21/027 ,  H01L21/312

Abstract: 포토레지스트 패턴 형성 방법에서, 식각 대상막이 형성된 기판 상에 포토레지스트 수지, 광산 발생제 및 교차 결합 화합물을 포함하는 포토레지스트 막을 형성한 후, 노광 및 현상 공정을 수행하여 포토레지스트 패턴을 형성한다. 이어서, 상기 포토레지스트 패턴을 1차 베이크 처리하여 상기 포토레지스트 패턴을 경화시키고, 상기 경화된 포토레지스트 패턴을 2차 베이크 처리하여, 상기 포토레지스트 수지와 교차 결합 화합물 사이의 교차 결합을 이용하여 상기 포토레지스트 패턴을 치밀화시킨다. 따라서, 상기 포토레지스트 패턴은 기존의 포토레지스트 패턴 대비 치밀화된 특성을 갖는다.

公开(公告)号：KR1020070046297A

公开(公告)日：2007-05-03

申请号：KR1020050102820

申请日：2005-10-31

Applicant: 삼성전자주식회사

Inventor： 김영훈 ,  윤상웅 ,  이창호 ,  이정훈

IPC: H01L27/146

CPC classification number: H01L27/14621 ,  H01L27/14625

Abstract: 씨모스 이미지 센서는 표면 아래에 포토 다이오드가 형성된 반도체 기판과, 상기 반도체 기판 상에 형성되는 층간 절연막과, 상기 층간 절연막 상에 형성되고, 상기 포토 다이오드와 대응되는 영역에 위치하는 컬러 필터 및 상기 컬러 필터 상부에 형성되면서 상기 컬러 필터와 대응되는 영역에 위치하는 마이크로 렌즈를 포함한다. 특히, 상기 컬러 필터는 안트라센 등과 같은 흡광 성분의 물질을 포함하는 포토레지스트 조성물로 이루어진다. 그러므로, 상기 씨모스 이미지 센서의 경우에는 상기 마이크로 렌즈에 의해 집속되는 광을 보다 효율적으로 상기 포토 다이오드까지 전달할 수 있다.

公开(公告)号：KR1020070012127A

公开(公告)日：2007-01-25

申请号：KR1020050066988

申请日：2005-07-22

Applicant: 삼성전자주식회사

Inventor： 김원주 ,  김석필 ,  박윤동 ,  이은홍 ,  현재웅 ,  변성재 ,  이정훈

IPC: H01L27/115 ,  B82Y10/00

CPC classification number: H01L29/7881 ,  G11C16/0483 ,  H01L21/28273 ,  H01L21/28282 ,  H01L27/115 ,  H01L27/11521 ,  H01L27/11568 ,  H01L29/7851 ,  H01L29/792

Abstract: An NVM(non-volatile memory) device having a fin-type channel region is provided to increase operation current of an NVM device by adjusting the height of fins so that the area of channel regions is adjusted. A semiconductor substrate includes a body(102) and at least a pair of fins(105a,105b) that protrudes from the body. The pair of fins are respectively elongated in one direction, separated from each other. A gap between the pair of fins is buried by a first insulation layer formed on the body. At least one pair of sources and drains are respectively formed in the pair of fins, separated from each other. At least one pair of channel regions are respectively formed on the upper part of at least the outer surface of the fins between the pair of the sources/drains and on each surface of the upper surface of the fins. A second insulation layer is formed on the channel regions. At least one control gate electrode(140) is extended in a different direction from the one direction, crossing the upper part of the first and the second insulation layers and insulated from the semiconductor substrate. At least one pair of storage nodes(130a,130b) are interposed between the control gate electrode and the channel regions formed in the upper part of the outer surface of the pair of fins. The pair of fins is used as a bitline, and the control gate electrode is used as a wordline.

Abstract translation: 提供具有翅片型沟道区域的NVM（非易失性存储器）器件，以通过调节鳍片的高度来增加NVM器件的工作电流，从而调节沟道区域的面积。 半导体基板包括主体（102）和从主体突出的至少一对散热片（105a，105b）。 一对翅片分别在一个方向上伸长，彼此分离。 一对翅片之间的间隙被形成在主体上的第一绝缘层所掩埋。 至少一对源和排水口分别形成在彼此分离的一对翅片中。 至少一对通道区域分别形成在一对源/排水沟之间的翅片的至少外表面的上部上方，并且在翅片的上表面的每个表面上形成。 在沟道区上形成第二绝缘层。 至少一个控制栅极电极沿与该一个方向不同的方向延伸，与第一绝缘层和第二绝缘层的上部交叉并与半导体衬底绝缘。 至少一对存储节点（130a，130b）插入在控制栅电极和形成在该对散热片的外表面的上部中的沟道区之间。 一对翅片用作位线，控制栅电极用作字线。

公开(公告)号：KR100659391B1

公开(公告)日：2006-12-19

申请号：KR1020050076529

申请日：2005-08-20

Applicant: 삼성전자주식회사

Inventor： 안선열 ,  강경림 ,  김태성 ,  김영호 ,  이정훈

IPC: C08L33/12

Abstract: Provided are a polymer resin composition for a buffer film which can be developed without exposure and can be cured at a temperature lower than the baking temperature of photoresist, a copolymer used in the composition, a method for forming a pattern by using the composition, and a method for preparing the capacitor of a semiconductor device by using the composition. The polymer resin composition comprises 75-93 wt% of a copolymer which comprises a benzyl methacrylate monomer, a methacrylic acid monomer and a hydroxyethyl methacrylate monomer; 1-7 wt% of a crosslinking agent; 0.01-0.5 wt% of a thermal acid generator; 0.01-1 wt% of a surfactant; and the balance of a solvent. The copolymer comprises 61-75 wt% of a benzyl methacrylate monomer; 8-15 wt% of a methacrylic acid monomer; and 17-24 wt% of a hydroxyethyl methacrylate monomer, and has a polystyrene-reduced weight average molecular weight of 6,700-7,500 and a number average molecular weight of 2,600-3,200. Preferably the copolymer is represented by the formula, wherein L, M and N are a positive integer.

Abstract translation: 本发明提供一种缓冲膜用聚合物树脂组合物，其可以在没有曝光的情况下进行显影，并且可以在低于光刻胶的烘烤温度的温度下固化，该组合物中使用的共聚物，使用该组合物形成图案的方法，以及 通过使用该组合物来制备半导体器件的电容器的方法。 所述聚合物树脂组合物包含75-93重量％的包含甲基丙烯酸苄酯单体，甲基丙烯酸单体和甲基丙烯酸羟乙酯单体的共聚物; 1-7重量％的交联剂; 0.01-0.5重量％的热酸产生剂; 0.01-1重量％的表面活性剂; 和余量的溶剂。 该共聚物包含61-75重量％的甲基丙烯酸苄酯单体; 8-15重量％的甲基丙烯酸单体; 和17-24重量％的甲基丙烯酸羟乙酯单体，并且具有6,700-7,500的聚苯乙烯折合重均分子量和2,600-3,200的数均分子量。 优选该共聚物由下式表示，其中L，M和N是正整数。

公开(公告)号：KR100450675B1

公开(公告)日：2004-10-01

申请号：KR1020020014710

申请日：2002-03-19

Applicant: 삼성전자주식회사

Inventor： 박상현 ,  정세웅 ,  김신덕 ,  이정훈

IPC: G06F12/10

CPC classification number: G06F12/1027 ,  G06F2212/1028 ,  G06F2212/652 ,  G06F2212/681 ,  Y02D10/13

Abstract: 전력소모를 감소시키고 성능을 향상시킬 수 있는 TLB가 개시된다. 가상주소를 물리주소로 변환하는 TLB는 다수개의 뱅크들을 구비하는 제1TLB; 하나의 가상 페이지번호와 2
N (N은 자연수)개의 물리 페이지번호들을 구비하는 엔트리를 다수개 구비하는 제2TLB; 및 선택신호에 응답하여 상기 제1TLB의 출력신호를 상기 제2TLB로 출력하는 선택회로를 구비하며, 상기 제1TLB의 각 뱅크는 다수개의 엔트리들을 구비하고 각 엔트리는 하나의 가상 페이지번호와 하나의 물리 페이지번호를 구비한다. 상기 제 1TLB의 가상 페이지번호가 지정하는 페이지의 크기와 상기 제2TLB의 가상 페이지번호가 지정하는 페이지의 크기는 서로 다르고, 상기 2
N 개의 물리 페이지번호들은 연속적인 가상 페이지번호들 각각에 상응하는 물리 페이지들인 것이 바람직하다. 상기 TLB는 전력소모가 감소하고 성능을 향상시키는 장점이 있다.

Abstract translation: 提供了能够减少功耗并提高存储器性能的翻译后备缓冲器（TLB）。 将虚拟地址转换为物理地址的完全关联TLB包括具有多个存储体的第一TLB; 具有多个条目的第二TLB，每个条目具有一个虚拟页面号和2 SUP页面，其中N是自然数; 以及选择电路，用于响应于选择信号将第一TLB的输出信号输出到第二TLB，其中第一TLB的每个存储体具有多个条目，每个条目具有一个虚拟页面号和一个物理页面号 。 由第一TLB的虚拟页号指示的页的大小不同于由第二TLB的虚拟页号指示的页的大小。