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公开(公告)号：KR101746558B1
公开(公告)日：2017-06-14
申请号：KR1020160059678
申请日：2016-05-16
Applicant: 한국표준과학연구원
IPC: H01L21/66 , H01L21/28 , H01L21/67 , H01L21/768 , G01N21/95
CPC classification number: H01L22/12 , G01N21/9501 , H01L21/28008 , H01L21/67248 , H01L21/76897 , H01L22/30
Abstract: 본발명에따른다층저항식다점온도측정웨이퍼센서(1)는, 웨이퍼(10) 상에복수개의전극배선(21)이형성되어이루어지는전극부(20); 웨이퍼(10) 상에서전극부(20)와다른층에위치하도록설치되며, 복수개의단위저항(31)이연결배선(32)에의해직렬연결되어이루어지는저항부(30); 전극부(20)와저항부(30) 사이에설치되는층간절연층(50); 및전극배선(21) 각각의일단이단위저항(31)들의양단에전기적으로연결되도록층간절연층(50)의비아홀에설치되는도전플러그(55); 를포함하여이루어짐으로써, 전극부(20)를통하여저항부(30)에서의전위차를측정하여웨이퍼(10)의온도균일도를간파하는것을특징으로한다. 본발명에의하면, 전극부(20)와저항부(30)가서로다른층에형성되기때문에저항부(30)의단위저항(31)과연결배선(32)을전극부(20)의방해를받지않고웨이퍼(10)의전면적에설치할수 있다. 따라서웨이퍼(10)의전면적에대해서온도균일도를세밀하게파악할수 있게된다.
Abstract translation: 本发明涉及一种多层电阻多点温度测量晶片传感器（1），包括：电极部分（20），包括形成在晶片（10）上的多个电极布线（21）; 电阻单元30，其以与电极单元20不同的层安装在晶片10上，并且具有通过引线32串联连接的多个单位电阻器31; 设置在电极部分20和电阻部分30之间的层间绝缘层50; 设置在层间绝缘层50的通孔上的导电插塞55，使得电极布线21和21中的每一个的一端电连接到单元电阻31的两端; 为了通过电极部分20测量电阻部分30中的电位差来检测晶片10的温度均匀性。 由于电极单元20和电阻单元30形成在彼此不同的层中，因此防止了电阻单元30的单元电阻31和互连32与电极单元20干涉 它可以安装在晶片10的区域而不接收它。 因此，可以详细掌握相对于晶圆10的面积的温度均匀性。
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公开(公告)号：KR1020170032505A
公开(公告)日：2017-03-23
申请号：KR1020150129458
申请日：2015-09-14
Applicant: 한국표준과학연구원
Abstract: 본발명은두 개의원형플랜지에삽입되는메쉬전극를팽팽하게조립하기위하여상기플랜지에볼록홈과오목홈을구비하고, 상기메쉬전극를맞물린상태에서인장력을이용해잡아당겨주므로조립시간을단축할수 있고제조원가를낮출수 있도록하는정전편향계의메쉬전극구조에관한것이다.
Abstract translation: 本发明可以因为通过在接合状态与拉伸力拉动网状jeongeukreul组装时间减少两个啮合紧紧组装jeongeukreul被插入到设置有凸槽与法兰上的凹槽的圆形凸缘和，并降低制造成本 本发明涉及用于静电偏转仪的网状电极结构。
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公开(公告)号：KR1020170002710A
公开(公告)日：2017-01-09
申请号：KR1020150088279
申请日：2015-06-22
Applicant: 한국표준과학연구원
IPC: G06K9/62
Abstract: 본발명은스마트폰과같은휴대용단말기에설치되어독립적으로구동되는어플리케이션에관한것으로, 더욱상세하게는학회나논문등 각종발표자료및 포스터자료에포함된각종그래프의실제데이터(Raw data)를스마트폰을이용하여간단한조작만으로현장에서즉각적으로분석하고수치화할수 있는, 스마트폰을기반으로하는현장용그래프수치분석어플리케이션및 그를이용한수치분석방법에관한것이다.
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公开(公告)号：KR101535747B1
公开(公告)日：2015-07-10
申请号：KR1020140070151
申请日：2014-06-10
Applicant: 한국표준과학연구원
IPC: H01L21/66 , H01L21/02 , H01L21/3065 , H01L21/205
Abstract: 본발명은제1전극및 상기제1전극과이격되게설치되는제2전극을구비하여, 내부에플라즈마를발생하는진공챔버부; 상기제1전극및 제2전극의사이에위치하는코팅부품장착부; 상기진공챔버부와연결설치되어, 상기진공챔버내의오염입자를집속하는입자집속부; 상기입자집속부와연결설치되어상기오염입자의성분을검출하는입자성분검출부; 및상기입자집속부와연결설치되어상기오염입자의오염정도를측정하는입자측정부; 를포함하는반도체코팅설비의오염진단장치에관한것이다. 본발명은반도체코팅설비의오염진단장치를이용하여코팅부품을진단하는반도체코팅설비의오염진단방법에관한것이다.
Abstract translation: 本发明涉及一种半导体涂层设备的污染诊断装置，包括：真空室单元，用于产生等离子体内部，第一和第二电极设置在分开的位置; 位于第一和第二电极之间的涂层部件安装单元; 粒子聚焦单元，连接到真空室并聚焦在真空室内的污染颗粒上; 粒子分量检测单元，其连接到所述粒子聚焦单元并检测所述污染颗粒的成分; 以及粒子测量单元，其连接到所述粒子聚焦单元并且测量所述污染颗粒的污染程度。 本发明涉及通过使用半导体涂覆设备的污染诊断装置来诊断涂层成分的半导体涂覆设备的污染诊断方法。
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Patent Agency Ranking
公开(公告)号：KR1020140147198A
公开(公告)日：2014-12-30
申请号：KR1020130069757
申请日：2013-06-18
Applicant: 한국표준과학연구원
CPC classification number: G01N21/35 , G01J3/42 , G01J3/45 , G01J2003/451
Abstract: Provided in the present invention are a Fourier transform infrared spectroscopy apparatus and a method thereof. According to an embodiment of the present invention, the Fourier transform infrared spectroscopy apparatus comprises: a broadband light source which outputs light in a first direction; a beam splitter which receives the output light of the broadband light, transmits some part of the output light in the first direction, and reflects the other part of the output light in a second direction vertical to the first direction; a first fixed mirror which is placed by being separated in the first direction from the beam splitter, and reflects the transmitted light; a second fixed mirror which is placed by being separated in the second direction from the beam splitter, and reflects the reflected light; a first cylindrical convex lens which is placed between the first fixed mirror and the beam splitter; a second cylindrical convex lens which is placed between the first cylindrical convex lens and the first fixed mirror; and a light detecting unit which measures an interference signal. The beam splitter provides the interference signal by combining the reflected light from the first fixed mirror with the reflected light from the second fixed mirror. The focus position of the first cylindrical convex lens accords with the focus position of the second cylindrical convex lens. The first and second cylindrical convex lenses provide an optical path which depends on the position.
Abstract translation: 本发明提供傅立叶变换红外光谱仪及其方法。 根据本发明的实施例，傅里叶变换红外光谱仪包括：宽带光源，其沿第一方向输出光; 接收宽带光的输出光的分束器，在第一方向上传送输出光的一部分，并且在与第一方向垂直的第二方向上反射输出光的另一部分; 第一固定镜，其通过在所述第一方向上与所述分束器分离而放置，并且反射所述透射光; 第二固定镜，其通过在所述第二方向上与所述分束器分离而被放置，并且反射所述反射光; 放置在第一固定镜和分束器之间的第一圆柱形凸透镜; 第二圆柱形凸透镜，其被放置在第一圆柱形凸透镜和第一固定镜之间; 以及光检测单元，其测量干扰信号。 分束器通过将来自第一固定镜的反射光与来自第二固定镜的反射光组合来提供干涉信号。 第一圆柱形凸透镜的焦点位置与第二圆柱形凸透镜的焦点位置一致。 第一和第二圆柱形凸透镜提供取决于位置的光路。
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公开(公告)号：KR101442409B1
公开(公告)日：2014-10-07
申请号：KR1020130043451
申请日：2013-04-19
Applicant: 한국표준과학연구원
Abstract: A flow rate control device by means of the present invention comprises: a pipe-shaped first member which includes first flange units having the same shape on both ends thereof; a second member which has second flange units corresponding to the first flange unit, is connected with the first member through the surface contact of the first and second flange units, and includes a screw thread unit formed on the outer circumferential surface thereof; an adjusting member which has a female screw unit formed on the inner circumferential surface to be screwed with the screw thread unit and includes one side end which can be inserted into a position contacting the second flange unit; a moving member which is inserted and disposed in the second member and in an internal spatial part of the adjusting member, is roundly moved in an axial direction by being connected with the rotation of the adjusting member, and includes a body connected with one side end of the adjusting means through surface contact and a tip member coupled with a through-hole formed in the center of the second member so as to adjust the passing flow rate of a gas including particles flowing in the internal spatial part; and a third member which is coupled with the end of the moving member in order to be moved along with the moving member and has a third flange unit.
Abstract translation: 本发明的流量控制装置包括：管状的第一构件，其包括在其两端具有相同形状的第一凸缘单元; 具有与第一凸缘单元相对应的第二凸缘单元的第二构件通过第一和第二凸缘单元的表面接触与第一构件连接，并且包括形成在其外周表面上的螺纹单元; 调节构件，其具有形成在与所述螺纹单元螺合的内周面上的内螺纹单元，并且包括能够插入到与所述第二凸缘单元接触的位置的一个侧端; 插入并设置在第二构件中和调节构件的内部空间部分中的移动构件通过与调节构件的旋转连接而在轴向方向上圆周地移动，并且包括主体，其与一个侧端 调节装置通过表面接触和与形成在第二构件的中心的通孔联接的尖端构件以调节包括在内部空间部分中流动的颗粒的气体的通过流量; 以及与移动构件的端部联接以便与移动构件一起移动并具有第三凸缘单元的第三构件。
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公开(公告)号：KR101378293B1
公开(公告)日：2014-03-28
申请号：KR1020130011029
申请日：2013-01-31
Applicant: 한국표준과학연구원
Abstract: An exhaust system of a particle complex characteristic measurement device for optimal flow control according to the present invention comprises; a particle focusing unit including an aerodynamic lens; and a first chamber in which one end is connected to the particle focusing unit, the internal pressure is controlled to a medium-vacuum state (1 to 10^(-3) Torr), and a nozzle is formed on the other end. The first chamber accelerates particles which are inserted through the particle focusing unit. The exhaust system of the particle complex characteristic measurement device for optimal flow control also comprises a second chamber in which one end is connected to the nozzle of the first chamber, the internal pressure is controlled to a high-vacuum state (10^(-3) to 10^(-7) Torr), and an electron gun for charging the particles accelerated in the first chamber is installed; a third chamber in which one end is connected to the second chamber and an electrostatic deflection device is installed; and a pump which is connected to the first and second chambers through an exhaust flow path and discharges gas within the first and second chambers to the outside. The electrostatic deflection device classifies particles of a specific size among particles which are charged till saturation in the electron gun by applying a specific voltage to the inner side.
Abstract translation: 根据本发明的用于最佳流量控制的颗粒复合特征测量装置的排气系统包括： 包括空气动力学透镜的粒子聚焦单元; 和一端与颗粒聚焦单元连接的第一室，将内部压力控制在中等真空状态（1〜10 ^（ - 3）Torr），另一端形成喷嘴。 第一室加速通过颗粒聚焦单元插入的颗粒。 用于最佳流量控制的颗粒复合特征测量装置的排气系统还包括第二室，其中一端连接到第一室的喷嘴，内压被控制到高真空状态（10 ^（ - 3 ）至10 ^（ - 7）Torr），并且安装用于对在第一室中加速的颗粒进行充电的电子枪; 第三室，其一端连接到第二室，并安装静电偏转装置; 以及泵，其通过排气流路连接到第一和第二室，并将第一和第二室内的气体排出到外部。 静电偏转装置通过向内侧施加特定的电压，对电子枪充满直至饱和的粒子中的粒子进行分类。
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公开(公告)号：KR1020130051624A
公开(公告)日：2013-05-21
申请号：KR1020110116877
申请日：2011-11-10
Applicant: 한국표준과학연구원
Abstract: PURPOSE: A device with a surface contamination preventing unit for analyzing a particle and a by-product generated in a vacuum process is provided to improve analysis reliability by including a surface contamination preventing unit capable of preventing surface contamination on an incident window and a projection window. CONSTITUTION: A device for analyzing a particle and a by-product generated in a vacuum process comprises an exhaust pipe(20), an incident window(30), a projection window(40), an optical generator, a detector, and a surface contamination preventing unit. The exhaust pipe exhausts the particle and by-product generated inside the inside of a chamber of a vacuum state. The incident window includes an incident region where beams are incident into the inside of the incident window through a first hollow unit(21a) of the exhaust pipe and a first supporting region where the circumference of the incident region is supported by the exhaust pipe. The optical generator applies the beams to the incident window. The detector detects the beam incident into the inside of the incident window and projected. The surface contamination preventing unit includes a sound wave generator generating acoustic waves to the incident and projection windows and a sealing member(72) sealing by being pressed between a first supporting region of the incident window and the exhaust pipe and between a second supporting region of the projection window and the exhaust pipe.
Abstract translation: 目的：提供一种具有用于分析真空过程中产生的颗粒和副产物的表面污染防止单元的装置，通过包括能够防止在入射窗和投影窗上的表面污染的表面污染防止单元来提高分析可靠性 。 构成：用于分析在真空过程中产生的颗粒和副产物的装置包括排气管（20），入射窗（30），投影窗（40），光发生器，检测器和表面 防污染装置。 排气管排出在真空状态的室内产生的颗粒和副产物。 入射窗口包括通过排气管的第一中空单元（21a）入射到入射窗的内部的入射区域和入射区域的周边由排气管支撑的第一支撑区域。 光学发生器将光束施加到入射窗口。 检测器检测入射到入射窗内部的光束并投影。 表面污染防止单元包括：声波发生器，其对入射窗和投影窗生成声波;以及密封构件（72），其通过在入射窗的第一支撑区域和排气管之间以及在第二支撑区域 投影窗和排气管。
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