Abstract:
PURPOSE: An optical modulator module package is provided to reduce manufacture costs by attaching a light modulator element on a second substrate. CONSTITUTION: A wiring pattern is formed on a first substrate(4). A plurality of driver ICs(6) generates a driving voltage according to a control signal. A second substrate(2) is attached on the first substrate of a driver IC. The second substrate comprises a via hole(18), which is electrically interlinks the bottom and top of the boding. The second substrate comprises a window(24) at the center. The light modulator element(8) comprises a micro-mirror(10). The light modulator element is attached on the second substrate. The micro-mirror diffracts the incident light and outputs the diffracted light. The diffracted light has a plurality of order of diffractions.
Abstract:
An optical modulator with a protective layer is provided to reduce defects related to the operation characteristic of a piezo-electric actuator by preventing an empty void from being formed at an interface between the piezo-electric actuator and the protective layer. An optical modulator with a protective layer(160) is composed of a substrate(110); an insulating layer(120) positioned on the substrate; a structure layer(140) of which a center portion is disposed separately from the insulating layer at a predetermined gap; a piezo-electric actuator(150) disposed on the structure layer to vertically move the center portion of the structure layer; a first protective layer positioned on the piezo-electric actuator to protect the piezo-electric actuator; and sacrificial layers(130) formed at the upper side of the insulating layer and the lower side of the structure layer to support the structure layer, and separated from the insulating layer at a predetermined gap by etching a part positioned at the underside of the center portion of the structure layer.
Abstract:
Disclosed herein is a light modulator package having an inclined light transmissive lid which is manufactured or positioned such that a surface of the light transmissive lid is inclined relative to a reflective surface of a light modulating array.
Abstract:
PURPOSE: A hingeless mirror device and a control method thereof are provided to suppress erroneous generation of an electrostatic force by supplying a constant voltage to a box-type conductor portion. CONSTITUTION: A box-type conductor portion(5) is made of a conductive material and includes two apertures at facing sides thereof. The conductor portion further includes a closed space therein. A planar conductive mirror(1) is arranged in the closed space. A plurality of driving electrodes(2-1,2-2) are insulated from one another and arranged on one aperture of the conductor portion. A transparent electrode(3) is arranged to be insulated from the other aperture of the conductor portion and is implemented to face the driving electrodes. A power supply(8) supplies predetermined voltages to the conductor portion and the transparent electrode. A controller(13) applies binary control voltages to the driving electrodes and induces an electrostatic force, thereby controlling a tilt angle of the conductive mirror.
Abstract:
PURPOSE: A method for controlling optically controlled device, the optically controlled device, a spatial optical modulator, and a projector are provided to improve accuracy in a control operation when a voltage difference between a driving electrode and a moving mirror is low. CONSTITUTION: An optical system supplies a control light. A transparent electrode(202) is optically transparent. A conductivity varying portion(203) is implemented on the transparent electrode and has an electrical conductivity which is changed according to an amount of the control light passing through the transparent electrode. A driving electrode(204) is formed on the conductivity varying portion. A moving portion is moved to a predetermined position. A support portion(206) movably supports the moving portion. A power supply supplies a voltage which is modulated according to an input signal or a constant voltage to the transparent electrode. The control light with a constant intensity is projected to the transparent electrode. The moving portion is moved to the predetermined position by a force applied between the driving electrode and the moving portion. The force is generated by varying the conductivity of the conductivity varying portion.
Abstract:
The present invention relates to a micro electro mechanical systems (MEMS) scanner capable of enabling stable operation while increasing the driving angle between a fixed electrode and a driving electrode through an MEMS process. According to the present invention, the MEMS scanner includes a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode units, and a driving electrode unit. The lower frame has a cavity on the top surface, and at the center of the cavity, a through hole is formed. The pair of the upper frames is attached onto the top surface of the lower frame around the cavity and forms an installation space at the center. The pair of the levers is attached onto the bottom surface of the cavity at both ends around the through hole, and each of the levers is connected to each of the pair of the upper frames. The pair of the fixed electrode units has a plurality of fixed electrodes which are formed at an angle to a horizontal plane as one ends are connected to the pair of the levers and the other ends are connected to the upper frames, and the plurality of the fixed electrodes are formed towards the through hole. The driving electrode unit is placed alternately to the fixed electrodes of the pair of the fixed electrode units. A plurality of driving electrodes, arranged in parallel to the upper surface of the upper frame, is formed at both ends. Each of the both ends opposite to the side where the driving electrodes are formed is attached onto the top surface of the lower frame using a rotary spring.
Abstract:
PURPOSE: An optical modulator module package is provided to miniature a package while reducing the whole area by laminating a light modulator element and a driver IC. CONSTITUTION: A light modulator module package comprises a substrate(2), a driver IC(14), and a light modulator element(10). The driver IC is attached on the substrate. The driver IC comprises a first pad(16) in upper part. The driver IC generates the driving voltage according to a control signal. The driver IC outputs a driving voltage through a first pad. The light modulator element comprises a second pad(8) in a lower part. The light modulator element comprises a micro mirror(12). The micro-mirror outputs a diffracted light. The light modulator element is laminated on the driver IC which having a via hole(18).
Abstract:
A micro mirror of an electrostatic driving mode and a micro mirror array using the same are provided to obtain a maximum rotation angle although a predetermined voltage is supplied between a first address electrode and a reflector. A micro mirror(200) includes an insulation substrate(210), an address electrode(220a), an electric charge part(240a), and a reflector(250). The address electrode, a stop electrode(280a), and supporting parts(270a,270b) are formed on the insulation substrate. The insulation substrate supports the reflector in order to separate the address electrode from the address electrode and the electric charge part. The address electrode is formed on the insulation substrate, and is made of conductive material. The electric charge part is insulated with a first address electrode and a second address electrode by a first insulation layer and a second insulation layer. A discharge-preventing layer is formed on a surface of the electric charge part.
Abstract:
A MEMS device and a method for forming a comb electrode at the same are provided to improve an arrangement structure of a comb electrode to maintain a linear state between an inputted driving voltage and a rotation angle as an outputted stage. A method for forming a comb electrode at a MEMS device includes a step of forming a plurality of trenches on one surface of a first silicon substrate in parallel to form a first region and a second region having a step difference from each other along one surface. An oxide layer having a step difference is formed along the first region and the second region by performing an oxidation process on the first silicon substrate. A poly silicon layer burying the step difference is formed on the oxide layer. A second substrate is directly integrated on the poly silicon layer. An upper comb electrode(111) is formed at the first region by selectively etching the second silicon substrate and the poly silicon layer with a first mask.
Abstract:
A fine control of rotation and translation of a discretely controlled micro-mirror is provided to translate incident lights freely by using a micro-mirror array. A fine control of rotation and translation of a discretely controlled micro-mirror includes a bottom layer supporting a micro-mirror control system. At least one stopper plate(120) is rotated with one axis. The stopper plate has an top side and a bottom side. A micro-mirror having a top side and a bottom side is communicatively coupled with the stopper plate. The stopper plate has a reflecting surface reflecting lights to the top side. At least one stopper plate post(125) is communicatively coupled with the stopper plate and the bottom layer.