광변조기 모듈 패키지
    91.
    发明公开
    광변조기 모듈 패키지 无效
    光学调制器模块封装

    公开(公告)号:KR1020100055198A

    公开(公告)日:2010-05-26

    申请号:KR1020080114162

    申请日:2008-11-17

    Abstract: PURPOSE: An optical modulator module package is provided to reduce manufacture costs by attaching a light modulator element on a second substrate. CONSTITUTION: A wiring pattern is formed on a first substrate(4). A plurality of driver ICs(6) generates a driving voltage according to a control signal. A second substrate(2) is attached on the first substrate of a driver IC. The second substrate comprises a via hole(18), which is electrically interlinks the bottom and top of the boding. The second substrate comprises a window(24) at the center. The light modulator element(8) comprises a micro-mirror(10). The light modulator element is attached on the second substrate. The micro-mirror diffracts the incident light and outputs the diffracted light. The diffracted light has a plurality of order of diffractions.

    Abstract translation: 目的:提供光调制器模块封装以通过将光调制器元件附接在第二基板上来降低制造成本。 构成:在第一基板(4)上形成布线图案。 多个驱动器IC(6)根据控制信号产生驱动电压。 第二基板(2)附接在驱动器IC的第一基板上。 所述第二基板包括通孔(18),所述通孔(18)电连接所述封装的底部和顶部。 第二基板包括在中心的窗口(24)。 光调制元件(8)包括微镜(10)。 光调制器元件附接在第二基板上。 微镜衍射入射光并输出衍射光。 衍射光具有多个衍射级。

    보호층을 가지는 광변조기 소자
    92.
    发明公开
    보호층을 가지는 광변조기 소자 失效
    具有保护层的空间光学调制器

    公开(公告)号:KR1020070063412A

    公开(公告)日:2007-06-19

    申请号:KR1020060097435

    申请日:2006-10-02

    CPC classification number: G02B26/0858 B81B3/0078 B81B2201/04 G02B26/001

    Abstract: An optical modulator with a protective layer is provided to reduce defects related to the operation characteristic of a piezo-electric actuator by preventing an empty void from being formed at an interface between the piezo-electric actuator and the protective layer. An optical modulator with a protective layer(160) is composed of a substrate(110); an insulating layer(120) positioned on the substrate; a structure layer(140) of which a center portion is disposed separately from the insulating layer at a predetermined gap; a piezo-electric actuator(150) disposed on the structure layer to vertically move the center portion of the structure layer; a first protective layer positioned on the piezo-electric actuator to protect the piezo-electric actuator; and sacrificial layers(130) formed at the upper side of the insulating layer and the lower side of the structure layer to support the structure layer, and separated from the insulating layer at a predetermined gap by etching a part positioned at the underside of the center portion of the structure layer.

    Abstract translation: 提供具有保护层的光调制器,以通过防止在压电致动器和保护层之间的界面处形成空隙而减少与压电致动器的操作特性相关的缺陷。 具有保护层(160)的光学调制器由衬底(110)组成; 位于所述基板上的绝缘层(120); 结构层(140),其中心部分以预定间隙与所述绝缘层分开设置; 设置在所述结构层上以垂直移动所述结构层的中心部分的压电致动器(150); 定位在压电致动器上以保护压电致动器的第一保护层; 以及牺牲层(130),形成在绝缘层的上侧和结构层的下侧以支撑结构层,并且通过蚀刻位于中心的下侧的部分以预定间隙与绝缘层分离 部分结构层。

    힌지리스 미러 장치 및 그 제어 방법
    94.
    发明公开
    힌지리스 미러 장치 및 그 제어 방법 无效
    用于抑制静电力产生故障的无绳镜子装置及其控制方法

    公开(公告)号:KR1020050020701A

    公开(公告)日:2005-03-04

    申请号:KR1020040065833

    申请日:2004-08-20

    CPC classification number: G02B26/0841 B81B7/02 B81B2201/04 G02B26/02

    Abstract: PURPOSE: A hingeless mirror device and a control method thereof are provided to suppress erroneous generation of an electrostatic force by supplying a constant voltage to a box-type conductor portion. CONSTITUTION: A box-type conductor portion(5) is made of a conductive material and includes two apertures at facing sides thereof. The conductor portion further includes a closed space therein. A planar conductive mirror(1) is arranged in the closed space. A plurality of driving electrodes(2-1,2-2) are insulated from one another and arranged on one aperture of the conductor portion. A transparent electrode(3) is arranged to be insulated from the other aperture of the conductor portion and is implemented to face the driving electrodes. A power supply(8) supplies predetermined voltages to the conductor portion and the transparent electrode. A controller(13) applies binary control voltages to the driving electrodes and induces an electrostatic force, thereby controlling a tilt angle of the conductive mirror.

    Abstract translation: 目的:提供无铰链镜装置及其控制方法,以通过向盒型导体部分提供恒定电压来抑制静电力的错误产生。 构成:盒形导体部分(5)由导电材料制成,并且在其相对侧面上包括两个孔。 导体部分还包括其中的封闭空间。 平面导电镜(1)布置在封闭空间中。 多个驱动电极(2-1,2-2)彼此绝缘并且布置在导体部分的一个孔上。 透明电极(3)被布置成与导体部分的另一个孔绝缘,并且被实现为面向驱动电极。 电源(8)向导体部分和透明电极提供预定的电压。 控制器(13)对驱动电极施加二进制控制电压并引起静电力,从而控制导电镜的倾斜角度。

    광 제어 장치의 제어 방법, 광 제어 장치, 공간 광 변조 장치 및 프로젝터
    95.
    发明公开
    광 제어 장치의 제어 방법, 광 제어 장치, 공간 광 변조 장치 및 프로젝터 失效
    用于控制光控器件的方法,光控制器件,空间光学调制器和具有改进的控制精度的投影仪

    公开(公告)号:KR1020050020664A

    公开(公告)日:2005-03-04

    申请号:KR1020040065113

    申请日:2004-08-18

    Abstract: PURPOSE: A method for controlling optically controlled device, the optically controlled device, a spatial optical modulator, and a projector are provided to improve accuracy in a control operation when a voltage difference between a driving electrode and a moving mirror is low. CONSTITUTION: An optical system supplies a control light. A transparent electrode(202) is optically transparent. A conductivity varying portion(203) is implemented on the transparent electrode and has an electrical conductivity which is changed according to an amount of the control light passing through the transparent electrode. A driving electrode(204) is formed on the conductivity varying portion. A moving portion is moved to a predetermined position. A support portion(206) movably supports the moving portion. A power supply supplies a voltage which is modulated according to an input signal or a constant voltage to the transparent electrode. The control light with a constant intensity is projected to the transparent electrode. The moving portion is moved to the predetermined position by a force applied between the driving electrode and the moving portion. The force is generated by varying the conductivity of the conductivity varying portion.

    Abstract translation: 目的:提供一种用于控制光学控制装置,光学控制装置,空间光学调制器和投影仪的方法,以提高驱动电极和移动镜之间的电压差低时的控制操作的精度。 构成:光学系统提供控制灯。 透明电极(202)是光学透明的。 在透明电极上实施导电率变化部(203),其导电率根据透过透明电极的控制光的量而变化。 驱动电极(204)形成在电导率变化部分上。 移动部分移动到预定位置。 支撑部分(206)可移动地支撑移动部分。 电源向透明电极提供根据输入信号或恒定电压调制的电压。 具有恒定强度的控制光被投射到透明电极。 通过施加在驱动电极和移动部分之间的力将移动部分移动到预定位置。 通过改变导电率变化部分的导电率来产生力。

    멤스 스캐너
    96.
    发明授权
    멤스 스캐너 有权
    MEMS扫描仪

    公开(公告)号:KR101430123B1

    公开(公告)日:2014-09-25

    申请号:KR1020130120963

    申请日:2013-10-11

    Abstract: The present invention relates to a micro electro mechanical systems (MEMS) scanner capable of enabling stable operation while increasing the driving angle between a fixed electrode and a driving electrode through an MEMS process. According to the present invention, the MEMS scanner includes a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode units, and a driving electrode unit. The lower frame has a cavity on the top surface, and at the center of the cavity, a through hole is formed. The pair of the upper frames is attached onto the top surface of the lower frame around the cavity and forms an installation space at the center. The pair of the levers is attached onto the bottom surface of the cavity at both ends around the through hole, and each of the levers is connected to each of the pair of the upper frames. The pair of the fixed electrode units has a plurality of fixed electrodes which are formed at an angle to a horizontal plane as one ends are connected to the pair of the levers and the other ends are connected to the upper frames, and the plurality of the fixed electrodes are formed towards the through hole. The driving electrode unit is placed alternately to the fixed electrodes of the pair of the fixed electrode units. A plurality of driving electrodes, arranged in parallel to the upper surface of the upper frame, is formed at both ends. Each of the both ends opposite to the side where the driving electrodes are formed is attached onto the top surface of the lower frame using a rotary spring.

    Abstract translation: 本发明涉及能够通过MEMS工艺增加固定电极和驱动电极之间的驱动角度而能够稳定工作的微机电系统(MEMS)扫描仪。 根据本发明,MEMS扫描仪包括下框架,一对上框架,一对杆,一对固定电极单元和驱动电极单元。 下框架在顶表面上具有空腔,并且在空腔的中心形成有通孔。 一对上框架围绕空腔附接到下框架的顶表面上,并在中心处形成安装空间。 一对杠杆在通孔周围的两端附着在空腔的底表面上,并且每个杠杆连接到一对上框架中的每一个。 一对固定电极单元具有多个固定电极,它们形成为与水平面成一定角度,因为一端连接到一对杠杆,另一端连接到上框架,并且多个固定电极单元 固定电极朝向通孔形成。 驱动电极单元交替地配置到一对固定电极单元的固定电极。 在两端形成多个平行于上框架的上表面的驱动电极。 使用旋转弹簧将与形成有驱动电极的一侧相对的两端的每一端安装在下框架的上表面上。

    광변조기 모듈 패키지
    97.
    发明公开
    광변조기 모듈 패키지 无效
    光学调制器模块封装

    公开(公告)号:KR1020100055200A

    公开(公告)日:2010-05-26

    申请号:KR1020080114165

    申请日:2008-11-17

    Abstract: PURPOSE: An optical modulator module package is provided to miniature a package while reducing the whole area by laminating a light modulator element and a driver IC. CONSTITUTION: A light modulator module package comprises a substrate(2), a driver IC(14), and a light modulator element(10). The driver IC is attached on the substrate. The driver IC comprises a first pad(16) in upper part. The driver IC generates the driving voltage according to a control signal. The driver IC outputs a driving voltage through a first pad. The light modulator element comprises a second pad(8) in a lower part. The light modulator element comprises a micro mirror(12). The micro-mirror outputs a diffracted light. The light modulator element is laminated on the driver IC which having a via hole(18).

    Abstract translation: 目的:提供光调制器模块封装,通过层叠光调制器元件和驱动器IC来减小封装的整体面积。 构成:光调制器模块封装包括衬底(2),驱动器IC(14)和光调制器元件(10)。 驱动器IC附着在基板上。 驱动器IC包括在上部的第一焊盘(16)。 驱动器IC根据控制信号产生驱动电压。 驱动器IC通过第一焊盘输出驱动电压。 光调制元件包括下部的第二焊盘(8)。 光调制器元件包括微镜(12)。 微镜输出衍射光。 光调制元件层压在具有通孔(18)的驱动器IC上。

    마이크로 미러 및 이를 이용한 마이크로 미러 어레이
    98.
    发明公开
    마이크로 미러 및 이를 이용한 마이크로 미러 어레이 有权
    MICRO MIRROR和MICRO MIRROR ARRAY使用它

    公开(公告)号:KR1020090038100A

    公开(公告)日:2009-04-20

    申请号:KR1020070103410

    申请日:2007-10-15

    CPC classification number: G02B26/0841 B81B2201/04 G02B17/002 G02B26/105

    Abstract: A micro mirror of an electrostatic driving mode and a micro mirror array using the same are provided to obtain a maximum rotation angle although a predetermined voltage is supplied between a first address electrode and a reflector. A micro mirror(200) includes an insulation substrate(210), an address electrode(220a), an electric charge part(240a), and a reflector(250). The address electrode, a stop electrode(280a), and supporting parts(270a,270b) are formed on the insulation substrate. The insulation substrate supports the reflector in order to separate the address electrode from the address electrode and the electric charge part. The address electrode is formed on the insulation substrate, and is made of conductive material. The electric charge part is insulated with a first address electrode and a second address electrode by a first insulation layer and a second insulation layer. A discharge-preventing layer is formed on a surface of the electric charge part.

    Abstract translation: 提供静电驱动模式的微反射镜和使用其的微反射镜阵列以获得最大旋转角度,尽管在第一寻址电极和反射器之间提供预定电压。 微反射镜(200)包括绝缘基板(210),寻址电极(220a),电荷部分(240a)和反射器(250)。 寻址电极,停止电极(280a)和支撑部分(270a,270b)形成在绝缘基板上。 绝缘基板支撑反射器,以便将地址电极与地址电极和电荷部分分开。 寻址电极形成在绝缘基板上,并由导电材料制成。 电荷部分通过第一绝缘层和第二绝缘层与第一寻址电极和第二寻址电极绝缘。 在电荷部的表面上形成防放电层。

    맴스 디바이스의 콤전극 형성 방법
    99.
    发明公开
    맴스 디바이스의 콤전극 형성 방법 失效
    MEMS器件及其相同电极的制造方法

    公开(公告)号:KR1020070118882A

    公开(公告)日:2007-12-18

    申请号:KR1020060053142

    申请日:2006-06-13

    Abstract: A MEMS device and a method for forming a comb electrode at the same are provided to improve an arrangement structure of a comb electrode to maintain a linear state between an inputted driving voltage and a rotation angle as an outputted stage. A method for forming a comb electrode at a MEMS device includes a step of forming a plurality of trenches on one surface of a first silicon substrate in parallel to form a first region and a second region having a step difference from each other along one surface. An oxide layer having a step difference is formed along the first region and the second region by performing an oxidation process on the first silicon substrate. A poly silicon layer burying the step difference is formed on the oxide layer. A second substrate is directly integrated on the poly silicon layer. An upper comb electrode(111) is formed at the first region by selectively etching the second silicon substrate and the poly silicon layer with a first mask.

    Abstract translation: 提供了一种MEMS器件及其形成梳状电极的方法,以改善梳状电极的布置结构,以将输入的驱动电压和旋转角度之间的线性状态保持为输出级。 在MEMS器件上形成梳状电极的方法包括在第一硅衬底的一个表面上平行形成多个沟槽以形成沿着一个表面彼此具有台阶差的第一区域和第二区域的步骤。 通过对第一硅衬底进行氧化处理,沿着第一区域和第二区域形成具有台阶差的氧化物层。 在氧化物层上形成埋入台阶差的多晶硅层。 第二衬底直接集成在多晶硅层上。 通过用第一掩模选择性蚀刻第二硅衬底和多晶硅层,在第一区域形成上梳状电极(111)。

    불연속적으로 제어되는 마이크로미러의 회전운동과병진운동의 미세 제어
    100.
    发明公开
    불연속적으로 제어되는 마이크로미러의 회전운동과병진운동의 미세 제어 有权
    微控制器的旋转和翻译的精细控制

    公开(公告)号:KR1020070118619A

    公开(公告)日:2007-12-17

    申请号:KR1020077022671

    申请日:2006-03-03

    Abstract: A fine control of rotation and translation of a discretely controlled micro-mirror is provided to translate incident lights freely by using a micro-mirror array. A fine control of rotation and translation of a discretely controlled micro-mirror includes a bottom layer supporting a micro-mirror control system. At least one stopper plate(120) is rotated with one axis. The stopper plate has an top side and a bottom side. A micro-mirror having a top side and a bottom side is communicatively coupled with the stopper plate. The stopper plate has a reflecting surface reflecting lights to the top side. At least one stopper plate post(125) is communicatively coupled with the stopper plate and the bottom layer.

    Abstract translation: 提供离散控制的微反射镜的旋转和平移的精细控制,以通过使用微镜阵列来自由地转移入射光。 离散控制微镜的旋转和平移的精细控制包括支撑微镜控制系统的底层。 至少一个止动板(120)以一个轴线旋转。 止动板具有顶侧和底侧。 具有顶侧和底侧的微反射镜与止动板连通地连接。 止动板具有将光反射到顶侧的反射面。 至少一个止动板柱(125)与止动板和底层连通地连接。

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