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    Comb structure fabrication methods and systems
    101.
    发明公开
    Comb structure fabrication methods and systems 审中-公开
    Verfahren und Systeme zur Herstellung von Kammstrukturen

    公开(公告)号：EP1845060A1

    公开(公告)日：2007-10-17

    申请号：EP07104337.6

    申请日：2007-03-16

    Applicant: HONEYWELL INC.

    Inventor： Yu, Lianzhong

    IPC: B81B3/00

    CPC classification number: B81C1/00484 ,  B81B2201/0235 ,  B81B2201/033 ,  B81B2203/0136 ,  B81C2201/019

    Abstract: A method of manufacturing a vertical comb structure for a microelectromechanical (MEMS) device. Tooth structures are formed on a first wafer. A second water is then bonded to the tooth structures of the first wafer. The tooth structures are then released to form a comb structure. Forming the tooth structures on the first wafer includes using oxidation, photolithography, etching, epitaxy, and chemical and mechanical polishing to create the tooth structures on the first wafer.

    Abstract translation: 一种制造用于微机电（MEMS）装置的垂直梳结构的方法。 齿结构形成在第一晶片上。 然后将第二水接合到第一晶片的齿结构。 然后释放齿结构以形成梳结构。 在第一晶片上形成齿结构包括使用氧化，光刻，蚀刻，外延和化学和机械抛光以在第一晶片上产生齿结构。

    Double-sided etching method using embedded alignment mark
    102.
    发明公开
    Double-sided etching method using embedded alignment mark 审中-公开
    DoppelseitigesÄtzverfahrenmit eingebetteten Justiermarken

    公开(公告)号：EP1792870A2

    公开(公告)日：2007-06-06

    申请号：EP06254644.5

    申请日：2006-09-06

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Young-chul, Ko ,  Hyun-ku, Jeong

    IPC: B81C1/00

    CPC classification number: B81C1/00547 ,  B81B2201/033

    Abstract: Provided is a double-sided etching method using an embedded alignment mark. The double-sided etching method includes: preparing a substrate having first and second alignment marks embedded in a middle portion thereof; etching an upper portion of the substrate so as to expose the first alignment mark from a first surface of the substrate; etching the upper portion of the substrate using the exposed first alignment mark; etching a lower portion of the substrate so as to expose the second alignment mark from a second surface of the substrate; and etching the lower portion of the substrate using the exposed second alignment mark.

    Abstract translation: 提供了使用嵌入对准标记的双面蚀刻方法。 双面蚀刻方法包括：准备具有嵌入其中间部分的第一和第二对准标记的基板; 蚀刻所述基板的上部以便从所述基板的第一表面露出所述第一对准标记; 使用暴露的第一对准标记蚀刻衬底的上部; 蚀刻所述基板的下部以便从所述基板的第二表面露出所述第二对准标记; 以及使用所述暴露的第二对准标记蚀刻所述基板的下部。

    Micro-actuator and manufacturing method thereof
    105.
    发明公开
    Micro-actuator and manufacturing method thereof 有权
    Mikroaktor和dessen Herstellungsverfahren

    公开(公告)号：EP1180493A3

    公开(公告)日：2003-01-08

    申请号：EP01305088.5

    申请日：2001-06-12

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Lee, Jin-ho ,  Ko, Young-chul ,  Kong, Do-hyun

    IPC: B81B3/00

    CPC classification number: B81C3/001 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/04 ,  B81B2203/058 ,  B81C1/00142 ,  B81C2201/0132 ,  B81C2203/038 ,  Y10T29/42 ,  Y10T29/435

    Abstract: A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving comb-type electrodes are formed on the bottom of the stage, and a plurality of parallel fixed comb-type electrodes are formed on a base plate. At both sides of the stage is a torsion bar that enables the see-saw motion. The torsion bar is supported by a frame comprised of a first frame layer and a second frame layer. The torsion bar and the first frame layer form one body. The first and second frame layers are bonded by a metal eutectic bonding layer between metal layers.

    Abstract translation: 公开了一种具有能够进行跷跷板运动的平台的微致动器及其制造方法。 在本发明的微型致动器中，在台架的底部形成有多个平行的驱动梳状电极，在基板上形成多个平行的固定梳状电极。 在舞台的两边是一个扭杆，可以实现锯片的动作。 扭杆由包括第一框架层和第二框架层的框架支撑。 扭杆和第一框架层形成一体。 第一和第二框架层通过在金属层之间的金属共晶接合层结合。

    MEMS SCANNER
    109.
    发明公开
    MEMS SCANNER 审中-公开
    MEMS-SCANNER

    公开(公告)号：EP3056935A4

    公开(公告)日：2017-08-02

    申请号：EP13895294

    申请日：2013-10-11

    Applicant: KOREA OPTRON CORP

    Inventor： KIM KYUNGSU ,  KIM JUNIL ,  LEE JONGHYUN ,  MOON SEUNGHWAN

    IPC: G02B26/08 ,  B81B3/00 ,  B81C1/00 ,  G02B5/08 ,  G02B26/10 ,  G03B21/00 ,  H01L21/02 ,  H02N1/00 ,  H04N3/08

    CPC classification number: G02B26/0841 ,  B81B3/0048 ,  B81B2201/033 ,  G02B26/10 ,  G02B26/105 ,  G03B21/008 ,  H02N1/008 ,  H04N3/08

    Abstract: Provided is an MEMS scanner, which includes a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode portions, and a driving electrode portion. The lower frame has cavities formed in an upper surface of the lower frame, and a through-hole is formed between the cavities. The pair of upper frames are attached to the upper surface of the lower frame around the cavities to form an installation space in the central portion between the upper frames. The pair of levers are attached to a bottom surface of the both cavities with the through-hole as a center, and are connected to the pair of upper frames, respectively. One sides of the pair of fixed electrode portions are connected to the respective levers and the other sides thereof are connected to the upper frames, the pair of fixed electrode portions have a plurality of fixed electrodes that can be sloped with respect to the horizontal surface, and the plurality of fixed electrodes are disposed toward the through-hole. The driving electrode portion has a plurality of driving electrodes that are alternately disposed with respect to the fixed electrodes of the pair of fixed electrode portions and are disposed in parallel on the upper surfaces of the respective upper frames at both sides of the driving electrode portion, and sides opposite to sides in which the plurality of driving electrodes are formed are attached to the upper surface of the lower frame using rotational springs, respectively.

    Abstract translation: 提供了一种MEMS扫描仪，其包括下框架，一对上框架，一对杠杆，一对固定电极部分和驱动电极部分。 下框架具有形成在下框架的上表面中的空腔，并且在空腔之间形成通孔。 一对上部框架围绕空腔附接到下部框架的上表面，以在上部框架之间的中央部分中形成安装空间。 一对杆分别以贯通孔为中心安装在两腔体的底面上，分别与一对上框架连结。 一对固定电极部分的一侧连接到相应的杠杆并且其另一侧连接到上部框架，一对固定电极部分具有多个可相对于水平表面倾斜的固定电极， 并且多个固定电极朝向通孔设置。 驱动电极部分具有相对于该对固定电极部分的固定电极交替设置的多个驱动电极，并且在驱动电极部分的两侧平行地设置在相应上框架的上表面上， 并且与形成多个驱动电极的侧面相对的侧面分别使用旋转弹簧附接到下框架的上表面。

    IMPROVED GYROSCOPE STRUCTURE AND GYROSCOPE DEVICE
    110.
    发明公开
    IMPROVED GYROSCOPE STRUCTURE AND GYROSCOPE DEVICE 有权
    VERBESSERTE GYROSKOPSTRUKTUR UND GYROSKOP

    公开(公告)号：EP3140614A1

    公开(公告)日：2017-03-15

    申请号：EP15721872.8

    申请日：2015-05-06

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： BLOMQVIST, Anssi

    IPC: G01C19/5762 ,  G01C19/5747

    CPC classification number: G01C19/5762 ,  B81B2201/0242 ,  B81B2201/033 ,  G01C19/5712 ,  G01C19/5747

    Abstract: A microelectromechanical gyroscope structure for detecting angular motion about an axis of angular motion. A drive element is suspended for one-dimensional motion in a direction of a drive axis, and a sense body carries one or more sense rotor electrodes and is coupled to the drive element with a first directional spring structure that forces the sense body to move with the drive element and has a preferred direction of motion in a direction of a sense axis. The drive element includes an actuation body and a drive frame wherein the first spring structure couples the sense body directionally to the drive frame, and a second directional spring structure that couples the drive frame to the actuation body and has a preferred direction of motion in the direction of the sense axis.

    Abstract translation: 一种用于检测角运动轴线的角运动的微机电陀螺仪结构。 驱动元件在驱动轴的方向上被悬挂用于一维运动，并且感测体承载一个或多个感测转子电极，并且以第一定向弹簧结构联接到驱动元件，第一定向弹簧结构迫使感测体与 驱动元件并且在感测轴线的方向上具有优选的运动方向。 驱动元件包括致动体和驱动框架，其中第一弹簧结构将感测体定向地耦合到驱动框架，以及第二定向弹簧结构，其将驱动框架联接到致动体并且具有优选的运动方向 感应轴的方向。

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