公开(公告)号：US20140217615A1

公开(公告)日：2014-08-07

申请号：US14127580

申请日：2012-06-29

Applicant: Heikki Kuisma

Inventor： Heikki Kuisma

IPC: H01L23/528 ,  H01L23/00

CPC classification number: B81B7/0074 ,  B81B2201/0235 ,  B81B2201/025 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2201/036 ,  B81B2207/012 ,  B81B2207/095 ,  B81C1/00333 ,  G01C19/5783 ,  G01L19/0084 ,  G01L19/148 ,  G01P1/023 ,  G01P1/026 ,  G01P15/0802 ,  H01L21/568 ,  H01L23/528 ,  H01L23/5389 ,  H01L24/16 ,  H01L24/17 ,  H01L24/19 ,  H01L24/32 ,  H01L24/73 ,  H01L24/83 ,  H01L24/92 ,  H01L24/96 ,  H01L24/97 ,  H01L25/16 ,  H01L25/18 ,  H01L25/50 ,  H01L27/14618 ,  H01L2223/6677 ,  H01L2224/12105 ,  H01L2224/16145 ,  H01L2224/16227 ,  H01L2224/1703 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/8312 ,  H01L2224/8319 ,  H01L2224/92125 ,  H01L2224/97 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/18162 ,  H01L2224/81 ,  H01L2224/83 ,  H01L2924/00012 ,  H01L2924/00

Abstract: A method of making a system-in-package device, and a system-in-package device is disclosed. In the method, at least one first species die with predetermined dimensions, at least one second species die with predetermined dimensions, and at least one further component of the system-in-device is included in the system-in package device. At least one of the first and second species dies is selected for redimensioning, and material is added to at least one side of the selected die such that the added material and the selected die form a redimensioned die structure. A connecting layer is formed on the redimensioned die structure. The redimensioned die structure is dimensioned to allow mounting of the non-selected die and the at least one further component into contact with the redimensioned die structure via the connecting layer.

Abstract translation: 公开了一种制造系统级封装器件的方法，以及一种系统级封装器件。 在该方法中，具有预定尺寸的至少一个第一种类模具，具有预定尺寸的至少一种第二种类模具，并且系统级装置中的至少一个其它部件包括在系统级封装装置中。 选择第一和第二种类模具中的至少一种用于重新定向，并且将材料添加到所选择的模具的至少一侧，使得添加的材料和所选择的模具形成重新定型的模具结构。 在重新定型的模具结构上形成连接层。 尺寸设计为重新定型的模具结构，以允许非选择的模具和至少一个另外的部件通过连接层与重新定向的模具结构接触。

公开(公告)号：US08763641B2

公开(公告)日：2014-07-01

申请号：US13662824

申请日：2012-10-29

Applicant: Rheonix, Inc.

Inventor： Peng Zhou ,  Lincoln C. Young

IPC: F15C3/00 ,  B29C65/00 ,  B81C1/00 ,  F15C1/08 ,  B01F5/06 ,  B01L3/00 ,  B01F11/00 ,  F04B43/04 ,  B29C65/48 ,  F04B43/06 ,  F16K99/00 ,  B29K25/00 ,  B29L31/00 ,  B29K101/12 ,  B01F13/00 ,  B29K69/00 ,  B29K33/00

CPC classification number: F16K7/12 ,  B01F5/0683 ,  B01F5/0688 ,  B01F11/0071 ,  B01F13/0059 ,  B01F2215/0034 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/0867 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/06 ,  B01L2400/0638 ,  B01L2400/0655 ,  B01L2400/084 ,  B29C65/4895 ,  B29C66/004 ,  B29C66/54 ,  B29C66/5412 ,  B29C66/71 ,  B29K2025/00 ,  B29K2025/04 ,  B29K2033/08 ,  B29K2069/00 ,  B29K2101/12 ,  B29L2031/7496 ,  B29L2031/7506 ,  B29L2031/756 ,  B81B3/0021 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C1/00103 ,  B81C1/00158 ,  F04B43/028 ,  F04B43/043 ,  F04B43/06 ,  F15C1/08 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0021 ,  F16K99/0034 ,  F16K99/0055 ,  F16K99/0057 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T29/49405 ,  Y10T137/212 ,  Y10T137/2202 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/85978 ,  Y10T156/1002 ,  Y10T156/1043 ,  B29K2033/12 ,  B29K2025/06

Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

公开(公告)号：US20120273455A1

公开(公告)日：2012-11-01

申请号：US13098101

申请日：2011-04-29

Applicant: William Martin Lackowski ,  William Neil Everett ,  Joseph F. Pinkerton

Inventor： William Martin Lackowski ,  William Neil Everett ,  Joseph F. Pinkerton

IPC: H01B3/08

CPC classification number: B82B3/0023 ,  B81B2201/018 ,  B81B2201/036 ,  B81B2203/0109 ,  B81B2207/053 ,  B81C3/001 ,  B81C2201/019 ,  B81C2201/0194 ,  B81C2203/036 ,  B81C2203/051 ,  G01L9/0042 ,  H01H1/0094

Abstract: The present invention relates to thin membranes (such as graphene windows) and methods of aligned transfer of such thin membranes to substrates. The present invention further relates to devices that include such thin membranes.

Abstract translation: 本发明涉及薄膜（例如石墨烯窗）和将这种薄膜对准转移到基底的方法。 本发明还涉及包括这种薄膜的装置。

公开(公告)号：US08293053B2

公开(公告)日：2012-10-23

申请号：US12248521

申请日：2008-10-09

Applicant: Lincoln C. Young ,  Peng Zhou

Inventor： Lincoln C. Young ,  Peng Zhou

IPC: B29C65/54

CPC classification number: F16K7/12 ,  B01F5/0683 ,  B01F5/0688 ,  B01F11/0071 ,  B01F13/0059 ,  B01F2215/0034 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/0867 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/06 ,  B01L2400/0638 ,  B01L2400/0655 ,  B01L2400/084 ,  B29C65/4895 ,  B29C66/004 ,  B29C66/54 ,  B29C66/5412 ,  B29C66/71 ,  B29K2025/00 ,  B29K2025/04 ,  B29K2033/08 ,  B29K2069/00 ,  B29K2101/12 ,  B29L2031/7496 ,  B29L2031/7506 ,  B29L2031/756 ,  B81B3/0021 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C1/00103 ,  B81C1/00158 ,  F04B43/028 ,  F04B43/043 ,  F04B43/06 ,  F15C1/08 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0021 ,  F16K99/0034 ,  F16K99/0055 ,  F16K99/0057 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T29/49405 ,  Y10T137/212 ,  Y10T137/2202 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/85978 ,  Y10T156/1002 ,  Y10T156/1043 ,  B29K2033/12 ,  B29K2025/06

Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

Abstract translation: 塑料微流体结构具有基本上刚性的膜片，其在松弛状态之间起作用，其中隔膜抵靠衬底的表面，以及致动状态，其中隔膜移动离开衬底。 从以下描述可以看出，用这种隔膜形成的微流体结构提供易于制造和坚固的系统，以及易于制造的部件，例如阀和泵。

公开(公告)号：US20120091374A1

公开(公告)日：2012-04-19

申请号：US13278061

申请日：2011-10-20

Applicant: Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake

Inventor： Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake

IPC: F16K31/12

CPC classification number: B32B3/00 ,  B01J2219/00355 ,  B01J2219/00378 ,  B01J2219/00396 ,  B01J2219/00398 ,  B01J2219/00439 ,  B01J2219/005 ,  B01J2219/00527 ,  B01J2219/00605 ,  B01J2219/00612 ,  B01J2219/00659 ,  B01J2219/00707 ,  B01J2219/00722 ,  B01J2219/00725 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L7/54 ,  B01L9/527 ,  B01L2200/025 ,  B01L2200/027 ,  B01L2200/0605 ,  B01L2200/10 ,  B01L2300/0681 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2300/14 ,  B01L2300/18 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/0655 ,  B01L2400/0688 ,  B32B2037/1081 ,  B81B3/0032 ,  B81B3/0051 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  C12Q1/6874 ,  F04B43/043 ,  F15C5/00 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0051 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/0491 ,  Y10T137/2224 ,  Y10T137/87716 ,  Y10T137/87804 ,  Y10T137/87812 ,  Y10T137/87893 ,  Y10T156/10 ,  Y10T156/1002 ,  Y10T156/1064 ,  Y10T428/24479 ,  Y10T428/2457 ,  Y10T428/24612 ,  Y10T428/24744 ,  C12Q2535/125

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Abstract translation: 一种制造弹性体结构的方法，包括：在第一微加工模具的顶部上形成第一弹性体层，所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层，所述第二微加工模具具有第二凸起突起，所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上，使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上，使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。

公开(公告)号：US08124218B2

公开(公告)日：2012-02-28

申请号：US12556373

申请日：2009-09-09

Applicant: Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake

Inventor： Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake

IPC: B32B3/00 ,  F16C1/06 ,  F16K1/00 ,  F16K7/00 ,  F16K31/145

CPC classification number: B32B3/00 ,  B01J2219/00355 ,  B01J2219/00378 ,  B01J2219/00396 ,  B01J2219/00398 ,  B01J2219/00439 ,  B01J2219/005 ,  B01J2219/00527 ,  B01J2219/00605 ,  B01J2219/00612 ,  B01J2219/00659 ,  B01J2219/00707 ,  B01J2219/00722 ,  B01J2219/00725 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L7/54 ,  B01L9/527 ,  B01L2200/025 ,  B01L2200/027 ,  B01L2200/0605 ,  B01L2200/10 ,  B01L2300/0681 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2300/14 ,  B01L2300/18 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/0655 ,  B01L2400/0688 ,  B32B2037/1081 ,  B81B3/0032 ,  B81B3/0051 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  C12Q1/6874 ,  F04B43/043 ,  F15C5/00 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0051 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/0491 ,  Y10T137/2224 ,  Y10T137/87716 ,  Y10T137/87804 ,  Y10T137/87812 ,  Y10T137/87893 ,  Y10T156/10 ,  Y10T156/1002 ,  Y10T156/1064 ,  Y10T428/24479 ,  Y10T428/2457 ,  Y10T428/24612 ,  Y10T428/24744 ,  C12Q2535/125

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：US20080173365A1

公开(公告)日：2008-07-24

申请号：US11932107

申请日：2007-10-31

Applicant: Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake ,  Markus M. Enzelberger ,  Mark L. Adams ,  Carl L. Hansen

Inventor： Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake ,  Markus M. Enzelberger ,  Mark L. Adams ,  Carl L. Hansen

IPC: F15C1/06

CPC classification number: B05D3/04 ,  B01J2219/00355 ,  B01J2219/00378 ,  B01J2219/00396 ,  B01J2219/00398 ,  B01J2219/00439 ,  B01J2219/005 ,  B01J2219/00527 ,  B01J2219/00605 ,  B01J2219/00612 ,  B01J2219/00621 ,  B01J2219/00659 ,  B01J2219/00707 ,  B01J2219/00722 ,  B01J2219/00725 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L7/54 ,  B01L9/527 ,  B01L2200/025 ,  B01L2200/027 ,  B01L2200/0605 ,  B01L2200/10 ,  B01L2300/0681 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2300/14 ,  B01L2300/18 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/06 ,  B01L2400/0655 ,  B01L2400/0688 ,  B32B2037/1081 ,  B65B31/00 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  C12Q1/6832 ,  C12Q1/6874 ,  C30B29/54 ,  F04B43/043 ,  F15C1/06 ,  F15C3/00 ,  F15C5/00 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0051 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/0424 ,  Y10T137/206 ,  Y10T137/2082 ,  Y10T137/2164 ,  Y10T137/2169 ,  Y10T137/2174 ,  Y10T137/2202 ,  Y10T137/2224 ,  Y10T137/3084 ,  Y10T137/7837 ,  Y10T137/86027 ,  Y10T156/10 ,  Y10T428/24479 ,  Y10T428/24612 ,  C12Q2535/125

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：US07250128B2

公开(公告)日：2007-07-31

申请号：US11111264

申请日：2005-04-20

Applicant: Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake ,  Jian Liu ,  Mark L. Adams ,  Carl L. Hansen

Inventor： Marc A. Unger ,  Hou-Pu Chou ,  Todd A. Thorsen ,  Axel Scherer ,  Stephen R. Quake ,  Jian Liu ,  Mark L. Adams ,  Carl L. Hansen

IPC: B29C39/02

CPC classification number: B29C39/02 ,  B01J2219/00355 ,  B01J2219/00378 ,  B01J2219/00396 ,  B01J2219/00398 ,  B01J2219/00439 ,  B01J2219/005 ,  B01J2219/00527 ,  B01J2219/00605 ,  B01J2219/00612 ,  B01J2219/00621 ,  B01J2219/00659 ,  B01J2219/00707 ,  B01J2219/00722 ,  B01J2219/00725 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L7/54 ,  B01L9/527 ,  B01L2200/025 ,  B01L2200/027 ,  B01L2200/0605 ,  B01L2200/10 ,  B01L2300/0681 ,  B01L2300/0861 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2300/14 ,  B01L2300/18 ,  B01L2400/046 ,  B01L2400/0481 ,  B01L2400/0655 ,  B01L2400/0688 ,  B32B2037/1081 ,  B81B2201/036 ,  B81B2201/054 ,  B81C1/00119 ,  B81C2201/019 ,  C12Q1/6874 ,  F04B43/043 ,  F15C5/00 ,  F16K31/126 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0026 ,  F16K99/0046 ,  F16K99/0051 ,  F16K99/0055 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0094 ,  Y10T137/2174 ,  Y10T137/2224 ,  Y10T137/7879 ,  Y10T137/87877 ,  C12Q2535/125

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Abstract translation: 一种制造弹性体结构的方法，包括：在第一微加工模具的顶部上形成第一弹性体层，所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层，所述第二微加工模具具有第二凸起突起，所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上，使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上，使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。

公开(公告)号：US07155911B2

公开(公告)日：2007-01-02

申请号：US11107787

申请日：2005-04-18

Applicant: Kia Silverbrook

Inventor： Kia Silverbrook

IPC: F01B29/10

CPC classification number: B41J2/1645 ,  B41J2/14427 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1648 ,  B81B3/007 ,  B81B2201/031 ,  B81B2201/036 ,  B81B2201/052 ,  Y10T29/42 ,  Y10T29/49083 ,  Y10T29/49401

Abstract: A thermal bend actuator (6) is provided with a group of upper arms (23, 25, 26) and a group of lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26,27,28) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material

Abstract translation: 热弯曲致动器（6）设置有一组上臂（23,25,26）和一组非平面的下臂（27,28），因此增加了臂的刚度。 臂（23,25,26,27,28）可以彼此横向间隔开，并且在平面图中不会彼此过多，因此能够通过沉积单层臂形成材料来形成所有臂

公开(公告)号：US07090471B2

公开(公告)日：2006-08-15

申请号：US10757973

申请日：2004-01-13

Applicant: Jun Xie ,  Jason Shih ,  Yu-Chong Tai

Inventor： Jun Xie ,  Jason Shih ,  Yu-Chong Tai

IPC: F04B17/03 ,  E03B1/00

CPC classification number: B81C1/00119 ,  B81B2201/036 ,  B81B2203/0127 ,  B81B2203/0338 ,  F04B43/043 ,  F04B43/082 ,  F04B43/12 ,  Y10T137/87692

Abstract: An electrostatic fluid regulating device and methods. The device has a substrate. The device also has a first electrode coupled to the substrate. The device has a polymer based diaphragm. A second electrode is coupled to the diaphragm. A polymer based fluid chamber is coupled to the diaphragm. The device also has an inlet coupled to the polymer based fluid chamber and an outlet coupled to the polymer based fluid chamber.

Abstract translation: 一种静电流体调节装置及方法。 该装置具有基板。 该器件还具有耦合到衬底的第一电极。 该装置具有基于聚合物的隔膜。 第二电极耦合到隔膜。 基于聚合物的流体室耦合到隔膜。 该装置还具有连接到基于聚合物的流体室的入口和连接到基于聚合物的流体室的出口。