Thermoelectron generating source and ion beam irradiation device equipped with it

    公开(公告)号:JP2004134354A

    公开(公告)日:2004-04-30

    申请号:JP2003055765

    申请日:2003-03-03

    Abstract: PROBLEM TO BE SOLVED: To provide a thermoelectron generating source of indirect heating method, in which space charge limitation can be moderated when thermoelectrons are extracted, and the thermal electrons with low energy can be generated in a large amount. SOLUTION: The thermoelectron generating source 10 constituting this ion beam irradiation device is provided with the sheet type main negative electrode 24 to emit the thermoelectrons 28 by being heated from others, a filament 20 to heat the main negative electrode 24 from its rear and to make the thermoelectrons 28 be emitted, an extraction electrode 26 which is installed in the forward vicinity of the main negative electrode 24 and which extracts the thermoelectrons 28 emitted from the main negative electrode by an electric field, and two deflecting electrodes 30, 32 arranged at the right and left in the forward vicinity of the extraction electrode 26 so as to pinch the extraction electrode 26. Potential of the both deflecting electrodes 30, 32 ia kept in the relationship of VL>VR≥0, when making the potential of one of the deflecting electrode 30 as V L , and the potential of the other deflecting electrode 32 as V R . COPYRIGHT: (C)2004,JPO

    Electron Gun, Method of Controlling Same, and Electron Beam Additive Manufacturing Machine
    154.
    发明申请
    Electron Gun, Method of Controlling Same, and Electron Beam Additive Manufacturing Machine 有权
    电子枪,控制方法和电子束添加剂制造机

    公开(公告)号:US20150270088A1

    公开(公告)日:2015-09-24

    申请号:US14621526

    申请日:2015-02-13

    Applicant: JEOL Ltd.

    Inventor: Takashi Satoh

    Abstract: There is disclosed a method of controlling an electron gun without causing decreases in brightness of the electron beam if a current-limiting aperture cannot be used. The electron gun (10) has a cathode (11), a Wehnelt electrode (12), a control electrode (13), an anode (14), and a controller (22). The Wehnelt electrode (12) has a first opening (12c) in which the tip of the cathode is inserted, and focuses thermal electrons emitted from the tip of the cathode (11). The thermal electrons emitted from the tip of the cathode (11) are caused to pass into a second opening (13c) by the control electrode (13). The anode (14) accelerates the thermal electrons emitted from the cathode (11) such that the thermal electrons passed through the second opening (13c) pass through a third opening (14b) and impinge as an electron beam (B1) on a powdered sample (8). The controller (22) sets the bias voltage and the control voltage based on combination conditions of the bias voltage and control voltage to maintain the brightness of the beam constant.

    Abstract translation: 如果不能使用限流孔,则公开了一种控制电子枪而不引起电子束亮度降低的方法。 电子枪(10)具有阴极(11),Wehnelt电极(12),控制电极(13),阳极(14)和控制器(22)。 Wehnelt电极(12)具有插入阴极顶端的第一开口(12c),并聚焦从阴极(11)的尖端发射的热电子。 从阴极(11)的顶端发射的热电子被控制电极(13)通入第二开口(13c)。 阳极(14)加速从阴极(11)发射的热电子,使得穿过第二开口(13c)的热电子通过第三开口(14b)并作为电子束(B1)撞击在粉末样品上 (8)。 控制器(22)基于偏置电压和控制电压的组合条件设置偏置电压和控制电压,以保持光束的亮度恒定。

    ENCLOSURE AND METHOD FOR HANDLING ELECTRIC GUN OR ION GUN
    157.
    发明申请
    ENCLOSURE AND METHOD FOR HANDLING ELECTRIC GUN OR ION GUN 有权
    用于处理电枪或离子枪的外壳和方法

    公开(公告)号:US20140000104A1

    公开(公告)日:2014-01-02

    申请号:US14005469

    申请日:2012-02-21

    Abstract: The present invention is a charged-particle gun (EG) in which a negative electrode (1) and a positive electrode (9) are integrated and assembled in advance, and which can be stored and transported in a state in which the negative electrode and the positive electrode are integrated, wherein the negative electrode and the positive electrode are connected by a conductor (11) during storage and transportation of the charged-particle gun. It is thereby possible to prevent an electrode tip of the charged-particle gun from being damaged by electrical discharge caused by static electricity during storage and transportation.

    Abstract translation: 本发明是一种带电粒子枪(EG),其中负极(1)和正极(9)预先集成并组装,并且可以在负极和 正极集成在一起,其中在带电粒子枪的储存和运输期间,负极和正极通过导体(11)连接。 由此,可以防止带电粒子枪的电极头在储存和运输期间由静电引起的放电损坏。

    Converter of orbital momentum into spin momentum for the polarization of particle beams
    158.
    发明授权
    Converter of orbital momentum into spin momentum for the polarization of particle beams 有权
    轨道动量转换为自旋动量,用于粒子束的极化

    公开(公告)号:US08552398B2

    公开(公告)日:2013-10-08

    申请号:US13715662

    申请日:2012-12-14

    Abstract: An apparatus for spin polarizing a particle beam is adapted to process an input particle beam in such a way as to generate an at least partially spin polarized output particle beam. A vortex beam generator for imparting orbital angular momentum to the input particle beam. An electromagnetic field generator generates a transverse magnetic field, space-variant and symmetric with respect to the axis of the input particle beam, in such a way as to change the spin of the particles and attach thereto different values of orbital angular momentum in dependence on their input spin values. A beam component separating group spatially separates the particles in dependence on their orbital angular momentum values, in such a way as to obtain the at least partially spin polarized output particle beam.

    Abstract translation: 用于自旋极化粒子束的装置适于处理输入粒子束,以便产生至少部分旋转偏振的输出粒子束。 用于将轨道角动量传递给输入粒子束的涡流束发生器。 电磁场发生器以相对于输入粒子束的轴线的空间变化和对称的方式产生横向磁场,以便改变粒子的旋转,并依附于其上附加不同的轨道角动量值 他们的输入自旋值。 光束分量分组基于其轨道角动量值空间上分离颗粒,以获得至少部分自旋极化输出粒子束。

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