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161.
公开(公告)号:US20180179048A1
公开(公告)日:2018-06-28
申请号:US15843332
申请日:2017-12-15
Inventor: Harald SCHENK , Holger CONRAD , Matthieu GAUDET , Klaus SCHIMMANZ , Sergiu LANGA , Bert KAISER
CPC classification number: B81B3/0021 , B81B2201/0257 , B81B2201/036 , B81B2203/0109 , B81B2203/0118 , B81B2203/0127 , B81B2203/0136 , B81B2203/019 , B81B2203/051 , B81C1/00142 , B81C1/0015 , B81C1/00158 , H04R1/023 , H04R1/08 , H04R9/02 , H04R15/00 , H04R17/00 , H04R19/005 , H04R23/002 , H04R2201/003 , H04R2499/11
Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.
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公开(公告)号:US09896327B2
公开(公告)日:2018-02-20
申请号:US15158947
申请日:2016-05-19
Applicant: INVENSENSE, INC.
Inventor: Matthew Julian Thompson
IPC: H01L29/00 , B81B3/00 , H01L41/113
CPC classification number: B81B3/0021 , B81B7/0048 , B81B7/0051 , B81B2201/0264 , B81B2201/036 , B81B2203/0307 , B81B2203/0315 , B81B2207/09 , H01L41/113 , H01L41/1132 , H01L41/1134
Abstract: A micro-electro-mechanical system sensor device is disclosed. The sensor device comprises a micro-electro-mechanical system (MEMS) layer, comprising: an actuator layer and a cover layer, wherein a portion of the actuator layer is coupled to the cover layer via a dielectric; and an out-of-plane sense element interposed between the actuator layer and the cover layer, wherein the MEMS device layer is connected to a complementary metal-oxide-semiconductor (CMOS) substrate layer via a spring and an anchor.
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公开(公告)号:US20180010589A1
公开(公告)日:2018-01-11
申请号:US15712458
申请日:2017-09-22
Applicant: Innovative Micro Technology
Inventor: Benedikt ZEYEN
CPC classification number: F04B19/006 , B81B3/0021 , B81B2201/0264 , B81B2201/032 , B81B2201/036 , B81C1/00182 , F04B17/003 , F04B43/043 , G01L9/0042 , G01L9/0054
Abstract: A microfabricated fluid pump is formed in a multilayer substrate by etching a plurality of shallow and deep wells into the layers, and then joining these wells with voids formed by anisotropic etching. The voids define a flexible membrane over the substrate which deforms when a force is applied. The force may be provided by an embedded layer of piezoelectric material. Embedded strain gauges may allow self-sensing and convenient, precise operational control.
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公开(公告)号:US20170334709A1
公开(公告)日:2017-11-23
申请号:US15158947
申请日:2016-05-19
Applicant: INVENSENSE, INC.
Inventor: Matthew Julian Thompson
IPC: B81B3/00
CPC classification number: B81B3/0021 , B81B7/0048 , B81B7/0051 , B81B2201/0264 , B81B2201/036 , B81B2203/0307 , B81B2203/0315 , B81B2207/09 , H01L41/113 , H01L41/1132 , H01L41/1134
Abstract: A micro-electro-mechanical system sensor device is disclosed. The sensor device comprises a micro-electro-mechanical system (MEMS) layer, comprising: an actuator layer and a cover layer, wherein a portion of the actuator layer is coupled to the cover layer via a dielectric; and an out-of-plane sense element interposed between the actuator layer and the cover layer, wherein the MEMS device layer is connected to a complementary metal-oxide-semiconductor (CMOS) substrate layer via a spring and an anchor.
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公开(公告)号:US20160193407A1
公开(公告)日:2016-07-07
申请号:US15015627
申请日:2016-02-04
Applicant: Cam Med LLC
Inventor: Yanzhe Qin , Zhifei Ge
CPC classification number: A61M5/14248 , A61M5/14586 , A61M5/16881 , A61M39/24 , A61M2005/14252 , A61M2205/3334 , A61M2205/35 , A61M2205/581 , A61M2205/582 , A61M2207/00 , B32B37/12 , B32B2535/00 , B81B2201/036 , B81C1/00158 , B81C2201/034 , F04B43/043 , F04B53/10 , F16K2099/008 , F16K2099/0094
Abstract: A flexible patch pump for controllable accurate subcutaneous delivery of one or more medicaments to a patient includes a laminated layered structure. The pump may have a rigid reservoir layer including a number of rigid reservoirs disposed in a flexible material; a flexible microfluidic layer including a compliant membrane for sealing the rigid reservoirs, a network of microfluidic channels connecting the rigid reservoirs, and a number of inlet and/or outlet valves corresponding to the rigid reservoirs; and a flexible-rigid electronic circuit layer including a number of individually-addressable actuators. In operation, the rigid reservoirs may contain medicament that is dispensed in precise volumes at appropriate times due, for to example, to a pressure change in an addressed reservoir caused by displacement of the compliant membrane or other actuation element.
Abstract translation: 用于将一种或多种药物可控地精确皮下递送给患者的柔性贴剂泵包括层压层状结构。 泵可以具有刚性贮存器层,其包括设置在柔性材料中的多个刚性储存器; 柔性微流体层,其包括用于密封刚性贮存器的柔性膜,连接刚性储存器的微流体通道网络和对应于刚性储存器的多个入口和/或出口阀; 以及包括多个单独寻址的致动器的柔性刚性电子电路层。 在操作中,刚性贮存器可以包含在适当的时间以精确的体积分配的药剂,例如由于顺应性膜或其它致动元件的位移引起的地址储存器中的压力变化。
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166.
公开(公告)号:US09216899B2
公开(公告)日:2015-12-22
申请号:US13862616
申请日:2013-04-15
Applicant: General Electric Company
Inventor: Mehmet Arik , Stanton Earl Weaver
IPC: F04B45/047 , B81B7/00 , H01L23/467 , B81C1/00 , H01L41/09
CPC classification number: B81B7/0093 , B81B2201/036 , B81B2201/058 , B81B2203/0127 , B81C1/00158 , F04B45/047 , H01L23/467 , H01L41/0973 , H01L2924/0002 , H01L2924/00
Abstract: A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.
Abstract translation: 微机电(MEM)合成射流致动器包括具有延伸穿过其中的空腔的半导体衬底,使得第一开口形成在半导体衬底的第一表面中,并且第二开口形成在半导体的第二表面中 基质。 第一柔性膜形成在半导体衬底的前表面的至少一部分上并在第一开口上延伸。 第一柔性膜还包括与第一开口对准的孔口。 MEM合成射流致动器还包括第二柔性膜,其形成在半导体衬底的第二表面的至少一部分上并且在第二开口上延伸,以及一对致动器元件,其耦合到柔性膜并与 以选择性地引起第一和第二柔性膜的位移。
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公开(公告)号:US20150183633A1
公开(公告)日:2015-07-02
申请号:US14503252
申请日:2014-09-30
Applicant: California Institute of Technology
Inventor: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC: B81B3/00
CPC classification number: B32B3/00 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B81B3/0032 , B81B3/0051 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6874 , F04B43/043 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/2224 , Y10T137/87716 , Y10T137/87804 , Y10T137/87812 , Y10T137/87893 , Y10T156/10 , Y10T156/1002 , Y10T156/1064 , Y10T428/24479 , Y10T428/2457 , Y10T428/24612 , Y10T428/24744 , C12Q2535/125
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
Abstract translation: 一种制造弹性体结构的方法,包括:在第一微加工模具的顶部上形成第一弹性体层,所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层,所述第二微加工模具具有第二凸起突起,所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上,使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上,使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。
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公开(公告)号:US20140322489A1
公开(公告)日:2014-10-30
申请号:US14218872
申请日:2014-03-18
Applicant: California Institute of Technology
Inventor: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC: F16K13/00
CPC classification number: B29C51/00 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B33Y80/00 , B81B5/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , B81C2201/034 , C12Q1/6874 , F04B43/043 , F15C1/06 , F15C5/00 , F16K11/20 , F16K13/00 , F16K31/126 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/0497 , Y10T137/2224 , Y10T137/87249 , Y10T156/10 , Y10T428/24479 , Y10T428/24744 , C12Q2535/125
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
Abstract translation: 一种制造弹性体结构的方法,包括:在第一微加工模具的顶部上形成第一弹性体层,所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层,所述第二微加工模具具有第二凸起突起,所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上,使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上,使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。
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公开(公告)号:US08846183B2
公开(公告)日:2014-09-30
申请号:US13278061
申请日:2011-10-20
Applicant: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
Inventor: Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC: B32B3/00 , F16C1/06 , F16K1/00 , F16K7/00 , F16K31/145 , B29C65/00 , B29C45/14 , B01L3/00 , C12Q1/68 , B81C1/00 , F04B43/04 , F15C5/00 , B01L9/00 , F16K99/00 , B32B37/10 , B01L7/00
CPC classification number: B32B3/00 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B81B3/0032 , B81B3/0051 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6874 , F04B43/043 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/2224 , Y10T137/87716 , Y10T137/87804 , Y10T137/87812 , Y10T137/87893 , Y10T156/10 , Y10T156/1002 , Y10T156/1064 , Y10T428/24479 , Y10T428/2457 , Y10T428/24612 , Y10T428/24744 , C12Q2535/125
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:US08707734B2
公开(公告)日:2014-04-29
申请号:US12581695
申请日:2009-10-19
Applicant: Razi-ul Haque , Kensall Wise
Inventor: Razi-ul Haque , Kensall Wise
IPC: C03C27/04
CPC classification number: C03C19/00 , B81B2201/036 , B81B2201/058 , B81C1/00095 , F04B19/006 , Y10T428/24479
Abstract: A method of embedding material in a glass substrate is provided. The method includes providing a glass composition and a mold substrate having a patterned surface defining a recess therein. The mold substrate is formed from a material having a higher reflow temperature than the glass composition. A surface wettability of the patterned surface is increased relative to the glass composition. At least a portion of the glass composition is flowed into the recess defined by the patterned surface of the mold substrate, followed by solidifying the glass composition to form a solidified glass layer. Material is removed from the solidified glass layer until a portion of the underlying patterned surface of the mold substrate is exposed with at least a portion of the mold substrate embedded in the solidified glass layer to thereby form the glass substrate having the material embedded therein.
Abstract translation: 提供了将材料嵌入玻璃基板中的方法。 该方法包括提供玻璃组合物和具有在其中限定凹部的图案化表面的模具基底。 模具基材由具有比玻璃组合物更高的回流温度的材料形成。 图案化表面的表面润湿性相对于玻璃组合物增加。 玻璃组合物的至少一部分流入由模具基材的图案化表面限定的凹部中,然后固化玻璃组合物以形成固化的玻璃层。 将材料从凝固的玻璃层移除,直到模具基板的下面的图案化表面的一部分暴露于模具基底的至少一部分嵌入固化的玻璃层中,从而形成具有嵌入其中的材料的玻璃基板。
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