公开(公告)号：KR101076152B1

公开(公告)日：2011-10-21

申请号：KR1020040063195

申请日：2004-08-11

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 가와노유키히로 ,  다나카시노부 ,  다테야마기요히사 ,  미야자키가즈히토 ,  야마사키쓰요시 ,  가와구치요시히로

IPC: G03F7/16

Abstract: 노즐부(156)에있어서, 주사방향(X-방향)의후방또는반대측을향하는면, 즉배면(160)에는노즐길이방향으로수평또는일직선으로이어지는단차부(162)가형성되어있다. 도포처리중, 기판(G) 상으로토출된레지스트액(R)이젖음현상에의해레지스트노즐(120)의노즐부(156)의배면(160)에부착하여높이방향으로넓어져, 그정상위치는단차부(162)에서안정화내지고정된다. 이렇게해서, 레지스트노즐(120)의노즐부(156)의배면(160)을적시는레지스트액(R)의정상라인, 즉웨트라인(WL)이단차부(162)에의해서일의적(一義的)으로결정된다.

公开(公告)号：KR1020100031066A

公开(公告)日：2010-03-19

申请号：KR1020090071989

申请日：2009-08-05

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 가와구치요시히로 ,  모토마쓰가즈키

IPC: H01L21/324

CPC classification number: H01L21/67098 ,  H01L21/67259 ,  H01L21/67706

Abstract: PURPOSE: A substrate processing apparatus is provided to improve a temperature uniformity of the substrate in a floating stage method by preventing the substrate from bending in order to maintain the floating gap of the substrate. CONSTITUTION: Floating stages(82, 84) includes a inclined transfer route(130). The floating stages are heated at a pre-set temperature and float a substrate horizontally by the pressure of a process gas. The substrate transfers to the floating stages through the inclined transfer route. A heat treatment is performed between the substrate which is floating and the floating stage by a heat transfer.

Abstract translation: 目的：提供一种基板处理装置，用于通过防止基板弯曲来提高基板的温度均匀性，以便保持基板的浮动间隙。 构成：浮动级（82,84）包括倾斜传送路线（130）。 浮动级在预设温度下被加热并且通过处理气体的压力水平地漂浮衬底。 衬底通过倾斜的转移路线转移到浮动级。 通过热传递在漂浮的基板和浮动台之间进行热处理。

公开(公告)号：KR1020100007725A

公开(公告)日：2010-01-22

申请号：KR1020090059707

申请日：2009-07-01

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 가와구치요시히로 ,  모토마츠가즈키

IPC: B65G49/06 ,  B05C13/00 ,  H01L21/027

CPC classification number: G03F7/168 ,  B65G49/065 ,  G03F7/70716 ,  G03F7/70733 ,  G03F7/70816 ,  H01L21/67703

Abstract: PURPOSE: A substrate processing apparatus is provided to carry substrates on a flotation stage through a stable board transfer gap due to horizontal flow conveyance. CONSTITUTION: A flotation stage(100) is heated or cooled at fixed temperature. The flotation stage buoys a processed substrate with the pressure of the gas. A first horizontal flow conveyor which is apart from the floatation stage is placed on the upper steam of a substrate conveyance line. A second horizontal flow conveyor is mounted on the front end of the floatation stage in the substrate conveyance line. The first horizontal flow conveyor comprises a first drive roller(86).

Abstract translation: 目的：提供一种基板处理装置，用于通过水平流动传送通过稳定的板传送间隙在浮选台上承载基板。 构成：浮选阶段（100）在固定温度下被加热或冷却。 浮选阶段用气体的压力浮置经处理的基板。 离开浮选台的第一水平流动输送器被放置在基板输送线的上部蒸汽上。 第二水平流动输送器安装在基板输送线中浮选台的前端。 第一水平流动输送机包括第一驱动辊（86）。