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公开(公告)号：KR101025288B1
公开(公告)日：2011-03-29
申请号：KR1020090011637
申请日：2009-02-12
Applicant: 서울과학기술대학교 산학협력단 , 국민대학교산학협력단
IPC: H01L21/027 , B82Y40/00
Abstract: 본 발명은 전자빔 리소그래피 장치의 나노 스테이지에 관한 것으로서, 진공챔버에 출입가능하게 설치되는 한편 스테이지를 X,Y,Z축 방향으로 이동 및 회전시키는 스테이지유닛과, 스테이지 측으로 전자빔을 주사하는 전자주사유닛을 포함하는 전자빔 리소그래피 장치에 있어서, 상기 스테이지유닛의 스테이지 상에는 시료가 구비되는 나노 스테이지가 설치되고, 상기 나노 스테이지는 미세 이동되어 시료를 디플렉션 왜곡이 가장 작은 영역으로 이동시키기 위한 압전소자로 구성된 것을 특징으로 하여, 시료를 나노 스테이지의 미세 이동을 통해 디플렉션 왜곡이 가장 작은 영역으로 이동하여 미소패턴을 연속적으로 생성할 수 있도록 한다.
전자빔, 리소그래피, 나노 스테이지, 압전소자-
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公开(公告)号：KR1020130075181A
公开(公告)日：2013-07-05
申请号：KR1020110143445
申请日：2011-12-27
Applicant: 국민대학교산학협력단
CPC classification number: B60P3/20 , A23B7/10 , B62D33/048 , F25B41/046 , F25B2313/0252 , F25D11/003 , F25D17/04
Abstract: PURPOSE: A refrigerated container for fermented foods is provided to uniformly maintain a constant temperature of the entire internal space of a container to be suitable for transporting Korean traditional fermented foods, fruits, and fresh foods. CONSTITUTION: A refrigerated container (10) for fermented foods comprises a container body (20), a cold air supply unit (30), and a cooling coil (40). The container body comprises an internal space for loading cargoes. The cold air supply unit is equipped on one side of the container body to supply cooled air into the container body.
Abstract translation: 目的：提供一种用于发酵食品的冷藏容器，以均匀地保持容器整个内部空间的恒定温度，以适合运送韩国传统发酵食品，水果和新鲜食品。 构成：用于发酵食品的冷藏容器（10）包括容器主体（20），冷气供给单元（30）和冷却盘管（40）。 容器主体包括用于装载货物的内部空间。 冷空气供应单元设置在容器主体的一侧，以将冷却的空气供应到容器主体中。
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公开(公告)号：KR1020120111424A
公开(公告)日：2012-10-10
申请号：KR1020110029879
申请日：2011-03-31
Applicant: 국민대학교산학협력단
Abstract: PURPOSE: A multi-channel quartz crystal micro-balance having a partitioning groove is provided to reduce interferences that vibration generated by each electrode interferes to other adjacent electrodes. CONSTITUTION: A multi-channel quartz crystal micro-balance(100) having a partitioning groove(40) comprises a crystal substrate(10) and a plurality of electrodes. The crystal substrate consists of a quartz crystal. The electrodes consists of a first electrode(20) and a second electrode. The first electrode is arranged in a front surface of the quartz crystal. The second electrode is arranged in a rear surface of the crystal substrate to be faced to the first electrode. The crystal substrate is divided into a plurality of sensing areas by the partitioning groove concavely formed on a surface of the crystal substrate. Each electrode is respectively arranged in the plurality of sensing areas divided by the partitioning groove.
Abstract translation: 目的：提供具有分隔槽的多通道石英晶体微平衡，以减少由每个电极产生的振动干扰其他相邻电极的干扰。 构成：具有分隔槽（40）的多通道石英晶体微平衡（100）包括晶体基板（10）和多个电极。 晶体衬底由石英晶体组成。 电极由第一电极（20）和第二电极构成。 第一电极布置在石英晶体的前表面中。 第二电极布置在晶体衬底的背面以面向第一电极。 晶体基板通过凹形地形成在晶体基板的表面上的分隔槽分成多个感测区域。 每个电极分别布置在由分隔槽分开的多个感测区域中。
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15.发明公开
公开(公告)号：KR1020100042114A
公开(公告)日：2010-04-23
申请号：KR1020080101252
申请日：2008-10-15
Applicant: 국민대학교산학협력단
IPC: H01L21/027 , B82Y40/00
CPC classification number: G03F7/0002 , B81C1/0046 , B82Y10/00 , B82Y40/00 , H01L21/67248 , Y10S977/887
Abstract: PURPOSE: A UV nano implant lithography device with a temperature control function and a temperature control method are provided to improve accuracy of a pattern by minimizing thermal expansion difference between a mold and a substrate due to heating of a polymer resin. CONSTITUTION: A thermocouple and a heating line are installed on a thermostat plate. A chamber(4) receives a loading plate, a thermostat plate, and a pressure unit in a receiving space which is opened through a door. A temperature sensor(5) is installed inside the chamber to measure an inner temperature of the chamber. An external air handing unit constantly maintains the inner temperature of the chamber by circulating the air inside a chamber. A control board controls the operation of the external air handing unit and controls the temperature of the thermostat plate based on temperature data measured by a thermo couple and a temperature sensor.
Abstract translation: 目的：提供一种具有温度控制功能和温度控制方法的紫外线纳米植入式光刻设备，通过使聚合物树脂的加热使模具和基板之间的热膨胀差最小化来提高图案的精度。 构成：热电偶和加热线安装在恒温盘上。 腔室（4）在通过门打开的接收空间中容纳加载板，恒温器板和压力单元。 温度传感器（5）安装在室内，以测量室的内部温度。 外部空气处理单元通过使室内的空气循环来恒定地维持室的内部温度。 控制板控制外部空气处理单元的操作，并根据由热电偶和温度传感器测量的温度数据来控制恒温板的温度。
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Patent Agency Ranking
公开(公告)号：KR1020090022527A
公开(公告)日：2009-03-04
申请号：KR1020070087953
申请日：2007-08-31
Applicant: 광운대학교 산학협력단 , 국민대학교산학협력단
IPC: H01P5/10
CPC classification number: H01P5/10 , H01P1/20345 , H01P7/08 , H03F3/195 , H03H7/42
Abstract: A broadband balun capable of improving integration by reducing the number of unit device and a manufacturing method thereof are provided to ideally maintain strength of a signal and a phase difference between balanced terminals by using a coupling of a resonator. A broadband balun comprises a first inductor(L1), a second inductor(L2), and a third inductor(L3). The first inductor is connected to an unbalanced terminal(P1). The second inductor and the third inductor are connected to balanced terminals(P2, P3). A direction of the first inductor is opposite direction of the second inductor, and is identical to direction of the third inductor. The first inductor, the second inductor, and the third inductor form a magnetic coupling. The balun is manufactured by a MMIC(Monolithic Microwave Integrated Circuit) technology or a LTCC(Low Temperature Co-fired Ceramic) technology.
Abstract translation: 通过使用谐振器的耦合，提供能够通过减少单元装置的数量及其制造方法来提高集成度的宽带平衡 - 不平衡变换器，以理想地保持信号的强度和平衡端子之间的相位差。 宽带平衡 - 不平衡变换器包括第一电感器（L1），第二电感器（L2）和第三电感器（L3）。 第一电感器连接到不平衡端子（P1）。 第二电感器和第三电感器连接到平衡端子（P2，P3）。 第一电感器的方向与第二电感器的方向相反，并且与第三电感器的方向相同。 第一电感器，第二电感器和第三电感器形成磁耦合。 平衡 - 不平衡变换器由MMIC（单片微波集成电路）技术或LTCC（低温共烧陶瓷）技术制造。
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公开(公告)号：KR101290262B1
公开(公告)日：2013-07-26
申请号：KR1020110029879
申请日：2011-03-31
Applicant: 국민대학교산학협력단
Abstract: 본 발명은 다채널 수정 결정 미소 저울에 관한 것으로서, 수정 결정의 공진 특성을 이용하여 미소 질량을 측정할 수 있는 수정 결정 미소 저울에 있어서, 상기 수정 결정으로 이루어진 수정 기판; 상기 수정 기판의 앞면에 배치된 제1 전극과, 상기 수정 기판의 뒷면에 상기 제1 전극과 대향하도록 배치된 제2 전극이 쌍을 이루는 복수 쌍의 전극;을 구비하며, 상기 수정 기판은, 상기 수정 기판의 표면에 오목하게 형성된 구획홈에 의하여 복수 개의 센싱 영역으로 분리되며, 상기 각 쌍의 전극은, 상기 구획홈에 의하여 분리된 복수 개의 센싱 영역에 각각 배치되어 있는 것을 특징으로 한다.
본 발명에 따르면, 수정 기판의 표면에 오목하게 형성된 구획홈에 의하여 각 쌍의 전극이 서로 분리된 상태로 배치됨으로써, 각 전극에서 발생하는 진동이 주변의 다른 전극에 미치는 간섭을 감소시킬 수 있는 효과가 있다.-
公开(公告)号：KR1020100118795A
公开(公告)日：2010-11-08
申请号：KR1020090037677
申请日：2009-04-29
Applicant: 국민대학교산학협력단
IPC: H01L21/027
CPC classification number: G03F7/0002 , B29C59/022 , G03F7/0005 , H01L21/6734
Abstract: PURPOSE: An apparatus for uniformly pressing an extremely large area is provided to prevent the generation of voids between a substrate stand and an elastic mold by reducing a pressure between the substrate stand and the elastic mold. CONSTITUTION: A chuck module(110) includes a substrate stand(111) in order to support and fix a substrate(10). An elastic mold(120) is arranged on the upper side of the chuck module and is spaced apart from the substrate. A body module(130) fixes the elastic mold. A pressurizing chamber(140) is arranged on the upper side of the elastic mold. A pump injects air in the pressurizing chamber.
Abstract translation: 目的：提供一种用于均匀地挤压极大面积的装置，以通过减小基板支架和弹性模具之间的压力来防止在基板支架和弹性模具之间产生空隙。 构成：卡盘模块（110）包括用于支撑和固定基板（10）的基板支架（111）。 弹性模具（120）布置在卡盘模块的上侧并与衬底间隔开。 身体模块（130）固定弹性模具。 加压室（140）布置在弹性模具的上侧。 泵将空气注入加压室。
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公开(公告)号：KR1020100042113A
公开(公告)日：2010-04-23
申请号：KR1020080101251
申请日：2008-10-15
Applicant: 국민대학교산학협력단
IPC: H01L21/683 , H01L21/687 , H01L21/027 , B82Y40/00
CPC classification number: G03F7/0002 , B25B11/005 , B81C1/0046 , B82Y10/00 , B82Y40/00 , H01L21/6838 , Y10S977/887
Abstract: PURPOSE: A substrate alignment stage for a UV nano imprint device is provided to minimize the change of a substrate by uniformly distributing an adsorption nozzle along the edge of an alignment stage when fixing the substrate on an adsorption plate. CONSTITUTION: An adsorption plate(10) has a flat upper side in which a substrate is received. A vacuum hole(12) is formed on the upper side of the adsorption plate and is connected to a vacuum exhaust pipe through a vacuum path formed inside the absorption plate. An adsorption nozzle(14) is recessed on the upper side of the adsorption plate from the vacuum hole exposed to the upper side of the adsorption plate and forms vacuum pressure for vacuum adsorption of the substrate between the substrate received in the adsorption plate and the adsorption plate.
Abstract translation: 目的：提供一种用于UV纳米压印装置的衬底对准阶段，用于通过在将衬底固定在吸附板上时沿着取向台的边缘均匀地分布吸附喷嘴来最小化衬底的变化。 构成：吸附板（10）具有平坦的上侧，接收基板。 在吸附板的上侧形成有真空孔（12），并且通过形成在吸收板内的真空路径与真空排气管连接。 吸附喷嘴（14）从暴露于吸附板的上侧的真空孔凹入吸附板的上侧，并且形成用于真空吸附吸附板上的基板和吸附板之间的基板的真空压力 盘子。
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公开(公告)号：KR100856559B1
公开(公告)日：2008-09-04
申请号：KR1020070095832
申请日：2007-09-20
Applicant: 국민대학교산학협력단
IPC: H01L21/027 , G03F7/20 , B82Y40/00
CPC classification number: G03F7/0002 , B82Y40/00 , G03F7/70858 , H01L21/67248 , Y10S977/887
Abstract: A temperature controller of a nano imprint apparatus and a nano imprint apparatus including the same are provided to reduce a manufacturing cost of the nano imprint apparatus by controlling arbitrarily and freely an installation position. A heat exchange pin(100) is composed of a heat-conducting material and includes a plurality of air flow paths. A first thermoelectric module(200) is coupled with the one side of the heat exchange pin in order to connect a heat-absorbing reaction part. A second thermoelectric module(300) is coupled with the heat exchange pin in order to connect a heat-radiating reaction part with the other side of the heat exchange pin. An air suction tube(400) is used for forming an air suction path from the inside of the chamber to the air flow path of the heat exchange pin. An air discharge tube(500) is used for forming an air returning path to the inside of the chamber through the heat exchange pin. A temperature sensor(600) senses the temperature of the air through the air suction tube or the air discharge tube. A temperature control unit(700) compares the temperature received from the temperature sensor with the reference temperature and supplies selectively the power to the first and second thermoelectric modules.
Abstract translation: 提供纳米压印装置的温度控制器和包括该温度控制器的纳米压印装置，以通过任意且自由地控制安装位置来降低纳米压印装置的制造成本。 热交换销（100）由导热材料构成，并且包括多个空气流路。 第一热电模块（200）与热交换销的一侧耦合以连接吸热反应部分。 第二热电模块（300）与热交换销耦合以便将热辐射反应部分与热交换销的另一侧连接。 空气吸引管400用于形成从室内到热交换销的空气流路的空气吸入路径。 空气排出管（500）用于通过热交换销形成到室内的空气返回路径。 温度传感器（600）通过吸气管或排气管感测空气的温度。 温度控制单元（700）将从温度传感器接收的温度与参考温度进行比较，并且选择性地向第一和第二热电模块供电。
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