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公开(公告)号：KR1020030023166A
公开(公告)日：2003-03-19
申请号：KR1020010056188
申请日：2001-09-12
Applicant: 한국전자통신연구원
IPC: H01L21/3065
Abstract: PURPOSE: An apparatus for driving a sample holder of semiconductor fabrication equipment and an etching method using the same are provided to form smoothly an incline boundary by controlling an incident angle of ion beam and a revolution speed of a sample. CONSTITUTION: A gear teeth(11) is formed on a sample holder(10). A rotation driving portion is connected with the gear tooth(11) of the sample holder(10). A slope driving portion(30) is used for shifting the sample holder(10) as much as a predetermined angle. The rotation driving portion includes a motor(21), a gear portion(22), a driving shaft(23), the first bevel gear(24), the second bevel gear(25), and the third bevel gear(27). The slope driving portion(30) is formed with a rotary handle bar(31), a worm(33) installed at a rotary shaft(32), a horizontal gear(34), and a fixing member(36). A supply line(40) is connected with a cooling line(41) of a vacuum chamber. A flange(42) is adhered on the vacuum chamber.
Abstract translation: 目的：提供一种用于驱动半导体制造设备的样品架的设备和使用其的蚀刻方法，以通过控制离子束的入射角和样品的转速来平滑地形成倾斜边界。 构成：齿轮齿（11）形成在样品架（10）上。 旋转驱动部与样品保持架（10）的齿轮齿（11）连接。 倾斜驱动部（30）用于将样品架（10）移动多达预定角度。 旋转驱动部分包括马达（21），齿轮部分（22），驱动轴（23），第一锥齿轮（24），第二锥齿轮（25）和第三锥齿轮（27）。 斜面驱动部30形成有旋转手柄31，安装在旋转轴32上的蜗杆33，水平齿轮34和固定部36。 供应管线（40）与真空室的冷却管线（41）连接。 凸缘（42）粘附在真空室上。
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公开(公告)号：KR1020150059060A
公开(公告)日：2015-05-29
申请号：KR1020140032779
申请日：2014-03-20
Applicant: 한국전자통신연구원
IPC: G01N21/27 , G01N33/483 , G01N35/08
Abstract: 본발명은기판상에광원(light source), 광감지기(photodetector), 광도파로(optical waveguide) 및마이크로켄틸레버(microcantilever)을집적하여이를통해바이오분자를고감도로분석할수 있는일체형비표지식바이오센서및 이를이용한바이오항원의감지방법에관한것이다. 본발명에따른일체형비표지식바이오센서는제조비용이저렴하고실리콘전자소자와의집적화측면에서매우용이한장점이있으면서동시에바이오분자를비표지식방법으로고감도로감지할수 있다.
Abstract translation: 本发明涉及一种不含基底标签的生物传感器及其分析方法，该方法在基板上积聚光源，光电检测器，光波导和微型悬臂梁，并可以通过其分析高灵敏度的生物分子。 根据本发明，可以以低成本制造无标签的生物传感器，在硅电子器件的积累方面具有优点，同时可以通过无标记方法检测高灵敏度的生物分子 。
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公开(公告)号：KR1020140075075A
公开(公告)日：2014-06-19
申请号：KR1020120142663
申请日：2012-12-10
Applicant: 한국전자통신연구원
Abstract: Disclosed is a driver condition-based control method capable of recognizing a health condition of a driver and safely controlling a vehicle in case of emergency. The control method includes a step of determining whether a driver is registered driver or not based on a comparison between the collected biometric data of the driver and pre-recorded biometric data; a step of determining whether the health condition of the registered driver is changed or not based on the comparison between the collected biometric of the driver and the pre-recorded biometric data; and a step of providing information of a change in the health condition if it is determined that the health condition of the registered driver is changed. Therefore, the present invention can prevent vehicle accidents by safely controlling vehicles in case of an unexpected change in the health condition of the driver and enables prompt rescue.
Abstract translation: 公开了一种能够识别驾驶员的健康状况并在紧急情况下安全地控制车辆的驾驶员状态控制方法。 控制方法包括基于所收集的驾驶员的生物特征数据与预先记录的生物体数据之间的比较来确定驾驶员是否是注册驾驶员的步骤; 基于所收集的驾驶员的生物特征与预先记录的生物体数据之间的比较，确定登记的驾驶员的健康状况是否改变的步骤; 如果确定登记的驾驶员的健康状况改变，则提供健康状况改变的信息的步骤。 因此，本发明能够在驾驶员的健康状况发生意外变化的情况下，通过安全地控制车辆来防止车辆事故，能够迅速地抢救。
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公开(公告)号：KR101073431B1
公开(公告)日：2011-10-17
申请号：KR1020080124133
申请日：2008-12-08
Applicant: 한국전자통신연구원
CPC classification number: A61N1/0534
Abstract: 본발명은 RF기반선택적기능성생체이식형뇌자극전극및 그제작방법에관한것으로, 본발명의실시예에따른 RF기반선택적기능성생체이식형뇌자극전극은나노구조물로이루어진전극팁(tip); 전극팁의나노구조물을지지해주고전원을전달하는지지부; 전극팁(Tip)에전원을전달하도록전극팁및 지지부에피복된투명전도막및 지지부를외부환경에대해서절연되도록피복된절연보호막중 하나이상을포함하는코팅부; 및지지부를통해전극팁으로외부에서무선으로공급되는전원및 무선신호의주파수에따라자극을선택적으로분류하여전달하는전원부를포함하는것을특징으로한다.
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公开(公告)号：KR100987385B1
公开(公告)日：2010-10-12
申请号：KR1020070089169
申请日：2007-09-03
Applicant: 한국전자통신연구원 , 금오공과대학교 산학협력단
CPC classification number: H01J9/025 , H01J1/304 , H01J2201/30469 , H01J2329/0455 , Y10T428/24355
Abstract: 본 발명은 나노 구조물 복합체 및 그의 제조 방법에 관한 것으로서, 더욱 구체적으로는 기판; 상기 기판 위에 형성되고 탄소 나노 구조물로 이루어진 제 1 층; 및 상기 제 1 층 위에 형성되고 금속 산화물의 나노 구조물로 이루어진 제 2 층을 포함하는 나노 구조물 복합체 및 그의 제조 방법에 관한 것이다. 본 발명의 나노 구조물 복합체를 이용하면, 기존의 전계 방출 소자보다 더욱 우수한 고효율 전계방출 특성을 실현할 수 있을 뿐만 아니라, 훨씬 더 낮은 온도와 상압에서도 제조가 가능하기 때문에 가격이 저렴하고 대면적 공정이 가능한 장점이 있다.
나노구조물, 복합체, 금속 산화물, 전이금속, 메탈로이드, 촉매 금속-
Patent Agency Ranking
公开(公告)号：KR1020100068179A
公开(公告)日：2010-06-22
申请号：KR1020090089686
申请日：2009-09-22
Applicant: 한국전자통신연구원
Abstract: PURPOSE: A biosensor for magnetic resistance measurement and a manufacturing method thereof are provided to manufacture a biosensor for convenient sample application by forming a sample application container in a sample contact metal film through etching of a substrate without a separate process. CONSTITUTION: A method for manufacturing a biosensor for magnetic resistance measurement is as follows. A sample contact metal film(120), a dielectric layer(130), a magneto resistive sensor(150), and an electrode(160) are successively laminated on a substrate(100). The substrate is etched from the bottom so that the sample contact metal film is exposed and the rest unexposed part functions as a sample application container(180). A protective layer(170) for protecting the magneto resistive sensor and the electrode is formed. A metal layer(110) for adhesion enhancement is formed between the substrate and the sample contact metal film or/and between the sample contact metal film and the dielectric layer.
Abstract translation: 目的：提供一种用于磁阻测量的生物传感器及其制造方法，用于通过在不进行单独的工艺的情况下蚀刻基板，通过在样品接触金属膜中形成样品施加容器来方便地进行样品施加。 构成：用于制造用于磁阻测量的生物传感器的方法如下。 在衬底（100）上依次层叠样品接触金属膜（120），电介质层（130），磁阻传感器（150）和电极（160）。 从底部蚀刻衬底，使得样品接触金属膜暴露，其余的未曝光部分用作样品施加容器（180）。 形成用于保护磁阻传感器和电极的保护层（170）。 在基板和样品接触金属膜之间或/以及样品接触金属膜和电介质层之间形成用于粘附增强的金属层（110）。
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公开(公告)号：KR100875930B1
公开(公告)日：2008-12-26
申请号：KR1020070051050
申请日：2007-05-25
Applicant: 한국전자통신연구원
IPC: H01L21/027 , B82Y40/00
Abstract: A gold pattern formation method using the gold electron-beam resist is provided to form the gold pattern of nano scale using the electron beam writer. A gold pattern formation method using the gold electron-beam resist includes the step for synthesizing the gold electron-beam resist(200); the step for forming the gold electron beam resist film by coating the synthesized gold electron-beam resist on the top of the substrate(220); the step for forming the gold electron beam resist pattern by patterning the gold electron beam resist film using the electron beam writer(260); the step for changing the gold pattern into the gold electron beam resist pattern by applying the thermal treatment to the gold electron beam resist pattern.
Abstract translation: 提供使用金电子束抗蚀剂的金图案形成方法以使用电子束写入器形成纳米级的金图案。 使用金电子束抗蚀剂的金图案形成方法包括合成金电子束抗蚀剂（200）的步骤; 通过将合成的金电子束抗蚀剂涂覆在衬底（220）的顶部上来形成金电子束抗蚀剂膜的步骤; 通过使用电子束写入器（260）构图金电子束抗蚀剂膜来形成金电子束抗蚀剂图案的步骤; 通过对金电子束抗蚀剂图案进行热处理来将金图案改变为金电子束抗蚀剂图案的步骤。
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公开(公告)号：KR100853199B1
公开(公告)日：2008-08-20
申请号：KR1020070030357
申请日：2007-03-28
Applicant: 한국전자통신연구원
Inventor： 김상협 , 명혜진 , 맹성렬 , 아마라툰가지.에이.제이. , 이선영
CPC classification number: C01G1/02 , B82Y30/00 , C01B13/36 , C01G9/02 , C01P2004/03 , C01P2004/10 , C01P2004/16 , C01P2004/64
Abstract: A method of massproducing oxide-based nanostructure is provided to obtain oxide type nanostructure having uniform electrical characteristics and homogeneous composition in a simple process and to prevent the problems involved with the crystallographic discordance between the nanostructure and substrate by chemical wet-process and physical dry-process. A method of massproducing oxide-based nanostructure comprises steps of: preparing a first organic solution containing metal(S10); mixing the first solution with a second organic solution containing hydroxylic group(S20); stirring the mixture solution(S30); standing the mixture solution(S40); filtering the mixture solution in order to collect the formed oxide-based nanostructure from the mixture solution(S50); drying the collected oxide-based nanostructure in order to remove the remaining organic solution(S60); and subjecting the dried oxide-based nanostructure to heat-treatment(S70). The metal contains an element selected from a group consisting of Sc, Ti, Cr, Mn, Fe, Co, Ni, Cu, Zn, Y, Zr, Nb, Mo, Tc, Ru, Rh, Pd Ag, Cd, Hf, Ta, W, Re, Os, Ir, Pt, Au, Hg, lanthanide, actinoid, Si, Ge, Sn, As, Sb, Bi, Ga and In. The second organic solution contains one selected from a group consisting of methanol, ethanol, ethylene glycol, glycerol, propanol, butanol, phenol, catechol, cresol, pyrogallol and naphthol.
Abstract translation: 提供大规模生产基于氧化物的纳米结构的方法，以简单的方法获得具有均匀电特性和均匀组成的氧化物型纳米结构，并通过化学湿法和物理干法处理纳米结构和基底之间的结晶不一致问题， 处理。 大量生产基于氧化物的纳米结构的方法包括以下步骤：制备含有金属的第一有机溶液（S10）; 将第一溶液与含有羟基的第二有机溶液混合（S20）; 搅拌混合溶液（S30）; 静置混合液（S40）; 过滤混合溶液以从混合溶液中收集形成的氧化物基纳米结构（S50）; 干燥所收集的氧化物基纳米结构以除去剩余的有机溶液（S60）; 并对干燥的氧化物基纳米结构进行热处理（S70）。 该金属含有选自Sc，Ti，Cr，Mn，Fe，Co，Ni，Cu，Zn，Y，Zr，Nb，Mo，Tc，Ru，Rh，Pd Ag，Cd，Hf， Ta，W，Re，Os，Ir，Pt，Au，Hg，镧系元素，锕系元素，Si，Ge，Sn，As，Sb，Bi，Ga和In。 第二有机溶液含有选自甲醇，乙醇，乙二醇，甘油，丙醇，丁醇，苯酚，邻苯二酚，甲酚，连苯三酚和萘酚中的一种。
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公开(公告)号：KR100779090B1
公开(公告)日：2007-11-27
申请号：KR1020060067095
申请日：2006-07-18
Applicant: 한국전자통신연구원
CPC classification number: G01N27/12 , Y10T29/49002
Abstract: A gas sensor using zinc oxide and a manufacturing method thereof are provided to detect gas with high sensitivity and apply relatively high detecting temperature during gas sensing. A gas sensor using zinc oxide includes a substrate(12), a nano zinc oxide structure(14), a plurality of metal islands, a first electrode(22), a second electrode(24), and a current change detector(50). The nano zinc oxide structure is formed on the substrate. The metal islands are coated on the nano structure, separated from each other. The first electrode is electrically connected to an end of the nano structure. The second electrode is electrically connected to the other end of the nano structure. The current change detector is connected to the first electrode and the second electrode for detecting changes of current flowing through the first electrode and the second electrode.
Abstract translation: 提供使用氧化锌的气体传感器及其制造方法，以高灵敏度地检测气体，并且在气体感测期间应用较高的检测温度。 使用氧化锌的气体传感器包括基板（12），纳米氧化锌结构（14），多个金属岛，第一电极（22），第二电极（24）和电流变化检测器（50） 。 在衬底上形成纳米氧化锌结构。 金属岛被涂覆在纳米结构上，彼此分离。 第一电极电连接到纳米结构的一端。 第二电极电连接到纳米结构的另一端。 电流变化检测器连接到第一电极和第二电极，用于检测流过第一电极和第二电极的电流的变化。
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公开(公告)号：KR100494557B1
公开(公告)日：2005-06-13
申请号：KR1020020053452
申请日：2002-09-05
Applicant: 한국전자통신연구원
IPC: H05B33/22
CPC classification number: H05B33/22
Abstract: 본 발명은 발광소자의 발광층에서의 광발생률을 높여 발광효율이 우수한 발광소자를 제공하는 것을 목적으로 한다. 본 발명에서 제안하는 발광소자는 발광소자 내부의 발광층 굴절률보다 큰 굴절률을 가지는 고(高)굴절률체를 발광소자의 상단면에 적층하여 형성한 덮개층을 가지고 있는 것이 특징이다. 본 발명에 따르면, 발광소자의 내부로 반사되는 광의 비율을 높임으로써 발광층에서 광흡수가 증가되므로 발광층에서의 광발생률이 높아지며, 동일한 발광층 재료를 사용하더라도 발광소자의 효율을 향상시킬 수 있어 고휘도 디스플레이라는 상업적 요구를 충족시킬 수 있다.
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