Abstract:
The present invention relates to a bipolar strain sensor having a carbon nanotube (CNT) network film on a flexible substrate and a manufacturing method thereof. The bipolar strain sensor of the present invention can electrically detect and measure the size and orientation of the strain by applying metallic carbon nanotubes and the semiconducting carbon nanotubes, which are randomly arranged and connected, on one surface of the flexible substrate. Moreover, the bipolar strain sensor of the present invention has an advantage of being mass-manufactured at low cost through an easy and simple process and of being used as a chemical sensor capable of electrically detecting the presence and concentration of certain chemicals.
Abstract:
The purpose of the present invention is to provide a method for fabricating a thin film pattern using soft lithography and a thin film pattern fabricated by the same. The soft lithography used for the method for fabricating a thin film pattern according to the present invention comprises: a first step of depositing a thin film on a substrate; a second step of forming a silicon resin adhesive layer on the thin film; a third step of fabricating a silicon resin stamp for forming a pattern on the thin film; a fourth step of converting the adhesive layer formed in the second step and the pattern part of the silicon resin stamp formed in the step 3 into an active adhesive layer by performing surface modification; a fifth step of attaching the pattern part of the silicon stamp converted into the active adhesive layer in the fourth step to the adhesive layer and causing a dehydration condensation reaction; and a sixth step of forming the pattern on the substrate by removing the silicon resin stamp from the substrate. The thin film pattern is fabricated using the method and includes a pattern formed on a thin film, which is made of one type of thin film among a crystalline thin film, metal thin film, amorphous thin film, and polymer thin film, on a substrate. According to the present invention, a pattern can be formed on films made of all types of materials including a crystalline thin film by using the soft lithography process.