公开(公告)号：AT287098T

公开(公告)日：2005-01-15

申请号：AT98952017

申请日：1998-09-28

Applicant: BREWER SCIENCE INC

Inventor： MEADOR JIM D ,  GUERRERO DOUGLAS J ,  SHAO XIE ,  KRISHNAMURTHY VANDANA

IPC: G03F7/11 ,  C08F8/00 ,  C08F220/32 ,  C08F283/10 ,  C09D133/06 ,  G03F7/09 ,  G03C1/492 ,  G03C1/815

Abstract: Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate with grafted dyes.

公开(公告)号：DE69807913T2

公开(公告)日：2003-01-30

申请号：DE69807913

申请日：1998-10-20

Applicant: BREWER SCIENCE INC

Inventor： SHAO XIE ,  HESTER COLIN ,  FLAIM D ,  BREWER L

IPC: G03F7/11 ,  C08G63/54 ,  C09D167/00 ,  G03F7/09 ,  G03C1/492 ,  E01B9/12

Abstract: Thermosetting, bottom-applied polymeric anti-reflective coatings exhibiting high optical density, rapid plasma etch rates, high solubility in preferred coating solvents, excellent feature coverage, and improved stability in solution are disclosed. The principal component of these new anti-reflective coatings is a polyester resin produced by the reaction of one or more difunctional aliphatic carboxylic acids with a stoichiometric excess of a di- and/or a trifunctional aliphatic primary alcohol, wherein at least one of the dicarboxylic acids may contain a reactive methylene (-CH2-) group. The resulting polyester resin reaction product is further modified by attaching light-absorbing groups to some or all of the reactive methylene groups (if present) and/or hydroxy groups present on the resin. The dye-attached polyester resin is combined with an aminoplast crosslinking agent and acid catalyst in a suitable solvent system to form the final anti-reflective coating.

公开(公告)号：AU6790000A

公开(公告)日：2001-03-19

申请号：AU6790000

申请日：2000-08-17

Applicant: BREWER SCIENCE INC

Inventor： LAMB JAMES E III ,  SHAO XIE

IPC: H01L21/302 ,  H01L21/3065 ,  H01L21/312 ,  H01L21/3205 ,  H01L21/768 ,  H01L21/47 ,  H01L21/66

Abstract: An improved via and contact hole fill composition and method for using the composition in the dual damascene production of circuits is provided. Broadly, the fill compositions include a quantity of solid components including a polymer binder and a solvent system for the solid components. The boiling point of the solvent system is less than the cross-linking temperature of the composition. Preferred solvents for use in the solvent system include those selected from the group consisting of alcohols, ethers, glycol ethers, amides, ketones, and mixtures thereof. Preferred polymer binders are those having an aliphatic backbone and a molecular weight of less than about 80,000, with polyesters being particularly preferred. In use, the fill composition is applied to the substrate surfaces forming the contact or via holes as well as to the substrate surfaces surrounding the holes, followed by heating to the composition reflow temperature so as to cause the composition to uniformly flow into and cover the hole-forming surfaces and substrate surfaces. The composition is then cured, and the remainder of the dual damascene process is carried out.

公开(公告)号：DE69518171T2

公开(公告)日：2001-03-15

申请号：DE69518171

申请日：1995-12-14

Applicant: BREWER SCIENCE INC

Inventor： FLAIM TONY D ,  MEADOR JIM D ,  SHAO XIE ,  BREWER TERRY L

IPC: C08G59/16 ,  C08G59/14 ,  C08G59/40 ,  C08G59/68 ,  C08L63/00 ,  C09D163/00 ,  G03F7/09

Abstract: A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.

公开(公告)号：DE69518171D1

公开(公告)日：2000-08-31

申请号：DE69518171

申请日：1995-12-14

Applicant: BREWER SCIENCE INC

Inventor： FLAIM TONY D ,  MEADOR JIM D ,  SHAO XIE ,  BREWER TERRY L

IPC: C08G59/16 ,  C08G59/14 ,  C08G59/40 ,  C08G59/68 ,  C08L63/00 ,  C09D163/00 ,  G03F7/09

Abstract: A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.

公开(公告)号：CA2305461A1

公开(公告)日：1999-04-29

申请号：CA2305461

申请日：1998-10-20

Applicant: BREWER SCIENCE INC

Inventor： SHAO XIE ,  HESTER COLIN ,  FLAIM TONY D ,  BREWER TERRY L

IPC: G03F7/11 ,  C08G63/54 ,  C09D167/00 ,  G03F7/09 ,  G03C1/492

Abstract: Thermosetting, bottom-applied polymeric anti-reflective coatings exhibiting high optical density, rapid plasma etch rates, high solubility in preferred coating solvents, excellent feature coverage, and improved stability in solution are disclosed. The principal component of these new anti-reflective coatings is a polyester resin produced by the reaction of one or more difunctional aliphatic carboxylic acids with a stoichiometric excess of a diand/or a trifunctional aliphatic primary alcohol, wherein at least one of the dicarboxylic acids may contain a reactive methylene (-CH2-) group. The resulting polyester resin reaction product is further modified by attaching light-absorbing groups to some or all of the reactive methylene groups (if present) and/or hydroxy groups present on the resin. The dye-attached polyester resin is combined with an aminoplast crosslinking agent and acid catalyst in a suitable solvent system to form the final anti-reflective coating.

公开(公告)号：WO02099531A2

公开(公告)日：2002-12-12

申请号：PCT/US0215694

申请日：2002-05-14

Applicant: BREWER SCIENCE INC

Inventor： PULIGADDA RAMA ,  LAMB JAMES E III ,  FLAIM TONY D ,  HUANG RUNHUI ,  SHAO XIE

IPC: H01L21/312 ,  G03F7/09 ,  G03F

CPC classification number: G03F7/091 ,  Y10S438/952 ,  Y10T428/31511 ,  Y10T428/31525

Abstract: Anti-reflective compositions and methods of using those compositions with low dielectric constant materials are provided. In one embodiment, the compositions include polymers comprising recurring monomers having unreacted epoxide groups. In another embodiment, the polymers further comprise recurring monomers comprising epoxide rings reacted with a light attenuating compound so as to open the ring. The compositions can be applied to dielectric layers so as to minimize or prevent reflection during the dual damascene process while simultaneously blocking via or photoresist poisoning which commonly occurs when organic anti-reflective coatings are applied to low dielectric constant layers.

Abstract translation: 提供抗反射组合物和使用具有低介电常数材料的那些组合物的方法。 在一个实施方案中，组合物包括包含具有未反应的环氧基团的重复单体的聚合物。 在另一个实施方案中，聚合物还包含包含与光衰减化合物反应以便打开环的环氧化物环的重复单体。 组合物可以施加到电介质层，以便在双镶嵌工艺期间最小化或防止反射，同时阻挡当将有机抗反射涂层施加到低介电常数层时通常发生的通孔或光致抗蚀剂中毒。

公开(公告)号：EP1392508A4

公开(公告)日：2006-06-07

申请号：EP02762137

申请日：2002-04-15

Applicant: BREWER SCIENCE INC

Inventor： SHAO XIE ,  MEADOR JIM D ,  BHAVE MANDAR ,  KRISHNAMURTHY VANDANA ,  NOWAK KELLY A ,  FOWLER MICHELLE ,  DESHPANDE SHREERAM V

IPC: G03F7/11 ,  B32B7/02 ,  C08J3/24 ,  C09D5/00 ,  C09D7/12 ,  C09D105/00 ,  C09D133/00 ,  C09D161/20 ,  C09D163/00 ,  C09D167/00 ,  C09D171/00 ,  C09D179/08 ,  C09D201/00 ,  G03F7/004 ,  G03F7/09 ,  H01L21/027 ,  B32B27/36 ,  G03C1/492

CPC classification number: C08J3/241 ,  G03F7/091 ,  Y10S430/151

Abstract: Anti-reflective compositions and methods of using those compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In one embodiment, the compositions comprise less than about 0.3% by weight of a strong acid. In another embodiment, the weight ratio of strong acid to weak acid in the composition is from about 0:100 to about 25:75. Examples of preferred weak acid compounds include phenolic compounds (e.g., Bisphenol S, Bisphenol A, alpha-cyano-4-hydroxycinnamic acid), carboxylic acids (e.g., acetic acid), phosphoric acid, and cyano compounds. The polymer and other ingredients are preferably physically mixed in a solvent system. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature).

公开(公告)号：EP1090332A4

公开(公告)日：2001-08-29

申请号：EP99921436

申请日：1999-04-20

Applicant: BREWER SCIENCE INC

Inventor： SHAO XIE ,  MEADOR JIM D ,  BREWER TERRY LOWELL

IPC: G03F7/11 ,  C08B15/06 ,  C08L1/10 ,  C08L1/26 ,  C08L61/32 ,  C09D5/00 ,  C09D101/08 ,  C09D101/14 ,  C09D161/20 ,  G02B1/11 ,  G03F7/09 ,  C09D101/10

CPC classification number: C09D101/14 ,  G02B1/111 ,  G03F7/091

Abstract: Anti-reflective compostions are prepared from cellulosic binders and alkylated aminoplast cross-linking agents derived from melamine, urea, benzoguanamine or glycoluril. These compositions are used to form bottom anti-reflective layers with high plasma etch selectivity when used in multilayer photoresist processes.

公开(公告)号：EP1025462A4

公开(公告)日：2001-01-17

申请号：EP98952384

申请日：1998-10-20

Applicant: BREWER SCIENCE INC

Inventor： SHAO XIE ,  HESTER COLIN ,  FLAIM TONY D ,  BREWER TERRY L

IPC: G03F7/11 ,  C08G63/54 ,  C09D167/00 ,  G03F7/09 ,  G03C1/492 ,  G03F7/038

CPC classification number: G03F7/091 ,  C09D167/00 ,  Y10S430/109 ,  C08L61/20

Abstract: Thermosetting, bottom-applied polymeric anti-reflective coatings exhibiting high optical density, rapid plasma etch rates, high solubility in preferred coating solvents, excellent feature coverage, and improved stability in solution are disclosed. The principal component of these new anti-reflective coatings is a polyester resin produced by the reaction of one or more difunctional aliphatic carboxylic acids with a stoichiometric excess of a di- and/or a trifunctional aliphatic primary alcohol, wherein at least one of the dicarboxylic acids may contain a reactive methylene (-CH2-) group. The resulting polyester resin reaction product is further modified by attaching light-absorbing groups to some or all of the reactive methylene groups (if present) and/or hydroxy groups present on the resin. The dye-attached polyester resin is combined with an aminoplast crosslinking agent and acid catalyst in a suitable solvent system to form the final anti-reflective coating.