公开(公告)号：DE60329621D1

公开(公告)日：2009-11-19

申请号：DE60329621

申请日：2003-11-14

Applicant: IBM

Inventor： ECONOMIKOS LAERTIS ,  DELIGIANNI HARIKLIA ,  COTTE JOHN M ,  GRABARZ HENRY J ,  CHEN BOMY

IPC: C25D5/22 ,  C25D5/48 ,  C25D7/12 ,  C25D17/00 ,  H01L21/288 ,  H01L21/321 ,  H01L21/768

Abstract: A method and apparatus are described for performing both electroplating of a metal layer and planarization of the layer on a substrate. Electroplating and electroetching of metal (such as copper) are performed in a repeated sequence, followed by chemical-mechanical polishing. An electroplating solution, electroetching solution, and a non-abrasive slurry are dispensed on a polishing pad in the respective process steps. The substrate is held against the pad with a variable force in accordance with the process, so that the spacing between substrate and pad may be less during electroplating than during electroetching.

公开(公告)号：SG55361A1

公开(公告)日：1998-12-21

申请号：SG1997002904

申请日：1997-08-11

Applicant: IBM

Inventor： COTTE JOHN M ,  DATTA MADHAV ,  SHENOY RAVINDRA

IPC: H01M4/06 ,  H01M4/50 ,  H01M4/62 ,  H01M4/66 ,  H01M6/12 ,  H01M6/16 ,  H01M6/18 ,  H01M6/22 ,  H01M6/50 ,  H01M6/02 ,  H01M6/06

公开(公告)号：DE112010004190T8

公开(公告)日：2013-03-14

申请号：DE112010004190

申请日：2010-07-29

Applicant: IBM

Inventor： COTTE JOHN M ,  JAHNES CHRISTOPHER V ,  PENG HONGBO ,  ROSSNAGEL STEPHEN M

IPC: G01R27/26 ,  G01N27/60

公开(公告)号：GB2488928A

公开(公告)日：2012-09-12

申请号：GB201209216

申请日：2010-07-29

Applicant: IBM

Inventor： COTTE JOHN M ,  JAHNES CHRISTOPHER V ,  PENG HONGBO ,  ROSSNAGEL STEPHEN M

IPC: B01D67/00 ,  B01D71/02 ,  G01N27/60 ,  G01R27/26

Abstract: A filter includes a membrane having a plurality of nanochannels (14) formed therein. A first surface charge material (18) is deposited on an end portion of the nanochannels. The first surface charge material includes a surface charge to electrostatically influence ions in an electrolytic solution (20) such that the nanochannels reflect ions back into the electrolytic solution while passing a fluid of the electrolytic solution. Methods for making and using the filter are also provided.

公开(公告)号：SG73521A1

公开(公告)日：2000-06-20

申请号：SG1998001454

申请日：1998-06-18

Applicant: IBM

Inventor： COTTE JOHN M ,  DATTA MADHAV ,  SHENOY RAVINDRA

IPC: H01M2/02 ,  H01M4/06 ,  H01M6/18 ,  H01M6/22 ,  H01M4/50