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18 records (took 0.017 seconds)

    13.
    发明专利
    未知

    公开(公告)号：DE2703472A1

    公开(公告)日：1977-08-04

    申请号：DE2703472

    申请日：1977-01-28

    Applicant: IBM

    Inventor： LIN BURN JENG ,  MENTESANA JOHN SEBASTIAN ,  SANTY WILLIAM GODFREY ,  WILCZYNSKI JANUSZ STANISLAW

    IPC: H01L21/027 ,  G03B27/20 ,  G03F7/20 ,  H01L21/683 ,  H01L21/68

    Abstract: A jig for positioning an image mask and image receiving medium which includes a housing having a central bore, first means within the bore for supporting a mask or image receiving medium, a flexible diaphragm, second means for drawing vacuum, and a third means for applying superatmospheric pressure on one side of the diaphragm to deform it towards the first means to ensure proper positioning of the mask and image receiving medium. Also, the process for positioning the mask and image receiving medium is provided.

    14.
    发明专利
    未知

    公开(公告)号：DE69611560D1

    公开(公告)日：2001-02-22

    申请号：DE69611560

    申请日：1996-02-13

    Applicant: IBM

    Inventor： CHIU GEORGE LIANG-TAI ,  CIPOLLA THOMAS MARIO ,  DOANY FUAD ELIAS ,  DOVE DEREK BRIAN ,  ROSENBLUTH ALAN EDWARD ,  SINGH RAMA NAND ,  WILCZYNSKI JANUSZ STANISLAW

    IPC: G02F1/13 ,  G02F1/1335 ,  H04N5/74 ,  H04N9/31

    Abstract: An optical system is described consisting of reflection birefringent light valves, polarizing beam splitter, color image combining prisms, illumination system, projection lens, filters for color and contrast control, and screen placed in a configuration offering advantages for a high resolution color display. In particular, the present invention includes a color splitting prism assembly having a plurality of output faces through which a separate color component is directed to be reflected by a respective light valve. Color absorbing filters are disposed at each of the output faces to absorb the color components not corresponding to the color directed through each output face.

    15.
    发明专利
    未知

    公开(公告)号：DE69125328T2

    公开(公告)日：1997-09-25

    申请号：DE69125328

    申请日：1991-07-18

    Applicant: IBM

    Inventor： SINGH RAMA NAND ,  WILCZYNSKI JANUSZ STANISLAW

    IPC: G02B13/24 ,  G02B13/26 ,  G02B17/00 ,  G02B17/08 ,  G02B27/00 ,  G02B27/18 ,  G03F7/20

    Abstract: An optical system having a substantially flat image field (14) is disclosed. The optical system is formed from optical subsystem(18, 12, 20, 22) wherein an input optical subsystem (8) forms an intermediate image (10) which is the object of an output optical system (12). The intermediate image has a curvature which compensates that from the remaining optical components of the system to result in a substantially flat image for the optical system. Preferably, the optical elements preceding the intermediate image and the optical elements succeeding the intermediate image are separately corrected for odd aberrations. The optical elements preceding the intermediate image and the optical elements succeeding the intermediate image compensate for each other and result in a substantially aberration free flat image for the optical system. The optical system preferably contains an input optical subsystem (8) and an output optical subsystem (12) wherein the input optical subsystem is a catadioptric system and wherein the output optical system is a dioptric system. Most preferably the input optical system is a 1X catadioptric system and the output optical system is an NX dioptric system. The optical systems of the present invention are used for subquarter micron photolithography tools for microelectronic fabrication, such as scanners and steppers.

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