公开(公告)号：DE50013864D1

公开(公告)日：2007-01-25

申请号：DE50013864

申请日：2000-07-24

Applicant: INFINEON TECHNOLOGIES AG

Inventor： ROEHL SIEGFRIED ,  VON BASSE PAUL-WERNER ,  SCHEITER THOMAS ,  SASSE THORSTEN ,  OPOLKA HEINZ

IPC: H01L21/314 ,  G01D5/24 ,  G06K9/00 ,  G06K9/20

Abstract: A conductor layer is patterned into flat portions, for example of a fingerprint sensor that effects capacitive measurement. The conductor layer is fragmented in a lattice-like manner by cutouts so that an applied passivation layer rests on a base layer that is present beneath the conductor layer. The interlaminar shear strength of the passivation is increased in this way.

公开(公告)号：AT357743T

公开(公告)日：2007-04-15

申请号：AT00907422

申请日：2000-01-13

Applicant: INFINEON TECHNOLOGIES AG

Inventor： OPOLKA HEINZ ,  VON BASSE PAUL-WERNER ,  SCHEITER THOMAS ,  GROSSMANN RAINER ,  PETERS CHRISTIAN ,  FISCHBACH REINHARD ,  GAYMANN ANDREAS ,  ROSTECK THOMAS ,  SIPRAK DOMAGOJ ,  SASSE THORSTEN ,  GOELLNER REINHARD ,  BIERNER JUSTIN ,  MELZL MICHAEL ,  HAMMER KLAUS ,  WITTE MARKUS

IPC: H01L27/04 ,  G06K9/00 ,  H01L21/822 ,  H01L23/485 ,  H01L23/60 ,  H01L27/02 ,  H01L27/06

Abstract: An electronic component is described and has a dielectric layer which is constructed on a substrate, conductive surfaces that are constructed on the dielectric layer, and an electrically conductive guard structure. The guard structure is disposed in a plane above the conductive surfaces such that the conductive surfaces are not completely covered by the guard structure.

公开(公告)号：DE59712371D1

公开(公告)日：2005-08-25

申请号：DE59712371

申请日：1997-11-18

Applicant: INFINEON TECHNOLOGIES AG

Inventor： SCHEITER THOMAS ,  HIEROLD CHRISTOPHER ,  NAEHER ULRICH

IPC: H01L21/314 ,  B81B3/00 ,  B81C1/00 ,  G01L9/00 ,  H01L21/316 ,  H01L21/318 ,  H01L29/84

Abstract: In a process for manufacturing a micromechanical component, a 5 nm to 50 nm thick oxide or nitride layer is deposited as a protective layer (6) on a functional element (4) made of polysilicon by LPCVD (low pressure chemical vapour deposition).

公开(公告)号：DE59710477D1

公开(公告)日：2003-08-28

申请号：DE59710477

申请日：1997-10-28

Applicant: INFINEON TECHNOLOGIES AG

Inventor： ECCARDT PETER-CHRISTIAN ,  NIEDERER KURT ,  SCHEITER THOMAS ,  VOSSIEK MARTIN ,  KOELPIN THOMAS

IPC: G01H11/06 ,  H01L41/09 ,  H04R17/00 ,  H04R31/00

Abstract: A spacer layer (7) with a cavity (8) etched out therein and a diaphragm (2) arranged thereabove on the spacer layer are located on a silicon substrate (1) with a doped region (5) formed therein, whereby the doped region and the diaphragm are electrically connected via terminal contacts (4, 6) to electronic components (13) that are likewise integrated in the substrate (1). The electronic component are a component part of the operating circuit that can also be used for the drive of the diaphragm and for evaluating the diaphragm oscillations. The integration makes it possible to arrange the micromachined transducer components as array that can be electronically driven as phased array.

公开(公告)号：ES2173760T3

公开(公告)日：2002-10-16

申请号：ES99952375

申请日：1999-08-12

Applicant: INFINEON TECHNOLOGIES AG

Inventor： VON BASSE PAUL-WERNER ,  WILLER JOSEF ,  SCHEITER THOMAS ,  MARKSTEINER STEPHAN

IPC: G01B7/28 ,  A61B5/117 ,  G06K7/08 ,  G06K9/00 ,  G06T1/00

Abstract: A grid-shaped array of conductor areas is used for capacitive image acquisition. Shielding conductors are disposed in each case between the conductors that are provided for measurement. During a plurality of charging and discharging cycles, the potential is always carried along on the conductors belonging to a respective pixel in order to prevent displacement currents between the shielding capacitors. By way of example, a compensation line with a feedback operational amplifier can be used for identically altering the electrical potentials on the conductors.

公开(公告)号：AT214179T

公开(公告)日：2002-03-15

申请号：AT99952375

申请日：1999-08-12

Applicant: INFINEON TECHNOLOGIES AG

Inventor： VON BASSE PAUL-WERNER ,  WILLER JOSEF ,  SCHEITER THOMAS ,  MARKSTEINER STEPHAN

IPC: G01B7/28 ,  A61B5/117 ,  G06K7/08 ,  G06K9/00 ,  G06T1/00

Abstract: A grid-shaped array of conductor areas is used for capacitive image acquisition. Shielding conductors are disposed in each case between the conductors that are provided for measurement. During a plurality of charging and discharging cycles, the potential is always carried along on the conductors belonging to a respective pixel in order to prevent displacement currents between the shielding capacitors. By way of example, a compensation line with a feedback operational amplifier can be used for identically altering the electrical potentials on the conductors.