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    Integrated semiconductor device including a heater for bringing about phase changes in microfluid systems
    11.
    发明公开
    Integrated semiconductor device including a heater for bringing about phase changes in microfluid systems 审中-公开
    与加热元件集成半导体器件，以使微流体系统中的相变

    公开(公告)号：EP1176017A1

    公开(公告)日：2002-01-30

    申请号：EP00830536.9

    申请日：2000-07-28

    Applicant: STMicroelectronics S.r.l.

    Inventor： Mastromatteo, Ubaldo ,  Murari, Bruno ,  Vigna, Benedetto

    IPC: B41J2/14 ,  H03K17/94 ,  F04B43/04

    CPC classification number: B41J2/14129 ,  F04B17/00 ,  F04B43/043

    Abstract: An integrated device (40) forming a microfluid system includes a substrate (41) of semiconductor material and a lid element (56) forming a channel (55) filled with a liquid. A heating element (51) is carried by the substrate and faces the channel so as to heat the liquid and generate a gas bubble, when activated. The substrate (41) houses a cavity (42) arranged on the opposite side of the heating element (51; 66) with respect to the channel (55) in order to reduce thermal dispersion of the heating element (51) towards the substrate (41). The heating element includes a resistive region (45) coated, on the side facing the channel (55), by a protective region (49, 50) and, on the side facing the cavity (42), by an insulating layer (44).

    Abstract translation: 形成流体系统的集成装置（40）包括半导体材料以及形成填充有液体的通道（55）的盖部件（56）的一个微型的底物（41）。 的加热元件（51）由基板承载并面向通道，以便加热所述液体和产生气泡，当被激活时。 基板（41）容纳布置在所述加热元件（51; 66）的相对侧上的腔体（42），相对于以所述通道（55），以减少所述加热元件（51）朝向所述基板的热扩散（ 41）。 所述加热元件包括涂覆（45）的电阻区域，在上绝缘层面向通道（55）由保护区（49，50），并且在由面向空腔（42）的侧上的侧（44） ，

    Semiconductor integrated inertial sensor with calibration microactuator
    12.
    发明公开
    Semiconductor integrated inertial sensor with calibration microactuator 有权
    Integrierter Halbleiter-Inertialsensor mit Mikroantrieb zur Kalibration

    公开(公告)号：EP1083430A1

    公开(公告)日：2001-03-14

    申请号：EP99830566.8

    申请日：1999-09-10

    Applicant: STMicroelectronics S.r.l.

    Inventor： Zerbini, Sarah ,  Vigna, Benedetto ,  Garavaglia, Massimo ,  Tomesi, Gianluca

    IPC: G01P15/10 ,  G01P21/00 ,  G01P15/125

    CPC classification number: G01P21/00 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0814

    Abstract: The inertial sensor (1) comprises an inner stator (2) and an outer rotor (3) which are electrostatically coupled together by means of mobile sensor arms (5) and fixed sensor arms (9a, 9b). The rotor (3) is connected to a calibration microactuator (12) comprising four sets (27) of actuator elements (13) arranged one for each quadrant of the inertial sensor. There are two actuator elements (13) making up each set, which are identical to each other, are angularly equidistant, and each of which comprises a mobile actuator arm (15) connected to the rotor (3) and bearing a plurality of mobile actuator electrodes (16), and a pair of fixed actuator arms (17a, 17b) which are set on opposite sides with respect to the corresponding mobile actuator arm and bear a plurality of fixed actuator electrodes (19a, 19b). The mobile actuator electrodes (16) and fixed actuator electrodes (19a, 19b) are connected to a driving unit (20) which biases them so as to cause a preset motion of the rotor (3), the motion being detected by a sensing unit (24) connected to the fixed sensor arms (9a, 9b).

    Abstract translation: 惯性传感器（1）包括通过移动传感器臂（5）和固定传感器臂（9a，9b）静电耦合在一起的内部定子（2）和外部转子（3）。 转子（3）连接到校准微致动器（12），该校准微致动器（12）包括为惯性传感器的每个象限布置的一组致动器元件（13）的四组（27）。 构成彼此相同的每组的两个致动器元件（13）成角度等距，并且每个致动器元件（13）包括连接到转子（3）的移动致动器臂（15）并且承载多个移动致动器 电极（16）和一对固定致动器臂（17a，17b），其相对于相应的移动致动器臂设置在相对侧上并且承载多个固定致动器电极（19a，19b）。 移动致动器电极（16）和固定致动器电极（19a，19b）连接到驱动单元（20），该驱动单元（20）偏置它们，以使转子（3）发生预设的运动，运动由感测单元 （24）连接到固定传感器臂（9a，9b）。

    Process for manufacturing mechanical, electromechanical and opto-electromechanical microstructures having suspended regions subject to mechanical stresses during assembly
    13.
    发明公开
    Process for manufacturing mechanical, electromechanical and opto-electromechanical microstructures having suspended regions subject to mechanical stresses during assembly 有权
    一种用于生产机械，机电以及光电机械微结构的过程被暴露带有悬浮区，其在组装过程中的机械应力

    公开(公告)号：EP1031736A1

    公开(公告)日：2000-08-30

    申请号：EP99830107.1

    申请日：1999-02-26

    Applicant: STMicroelectronics S.r.l.

    Inventor： Vigna, Benedetto ,  Mastromatteo, Ubaldo

    IPC: F16B1/00

    CPC classification number: B81C1/00896

    Abstract: To reduce the risk of breakage of the moving parts of an integrated microstructure during manufacture steps causing mechanical stresses to the moving parts, a temporary immobilization and support structure (20; 30; 40) is formed thereby a moving region (12, 13) of the microstructure is temporarily integral with the fixed region (10, 11). The temporary structure (20; 30; 40) is removed at the end of the assembly operations by non-mechanical removal methods. According to one solution, the temporary structure is formed by a fusible element (20) removed by melting or evaporation, by applying a sufficient quantity of energy thereto. Alternatively, a structural region (30) of polymer material is formed in the trench (15) separating the moving part from the fixed part, or an adhesive material layer (40) sensitive to ultraviolet radiation is applied.

    Abstract translation: 为了减少一个集成微结构的移动部件的破损的在制造步骤的风险，从而导致机械应力施加到移动部件，临时固定和支撑结构（20; 30; 40）由此形成的移动区域（12，13） 微结构是与所述固定区域（10，11）暂时成为一体。 临时结构（20; 30; 40）在所述组装操作的由非机械去除方法的端部除去。 。根据一个方案，所述临时结构由通过熔化或蒸发除去，通过向其施加能量的足够量的可熔元件（20）形成。 可替代地，聚合物材料的结构区（30）形成在从固定部分中分离出运动部分的沟槽（15），或以粘合材料层（40）被施加到紫外辐射敏感。

    Integrated device comprising a semiconductor material microactuator, in particular for a hard disc read/write head
    14.
    发明公开
    Integrated device comprising a semiconductor material microactuator, in particular for a hard disc read/write head 失效
    与半导体微驱动器的集成器件，尤其是对于读/写头，用于硬盘

    公开(公告)号：EP0975086A1

    公开(公告)日：2000-01-26

    申请号：EP98830447.3

    申请日：1998-07-22

    Applicant: STMicroelectronics S.r.l.

    Inventor： Cini, Dario ,  Vigna, Benedetto

    IPC: H02N1/00 ,  G11B21/02

    CPC classification number: G11B21/02 ,  H02N1/006

    Abstract: The microactuator (1) comprises an outer stator (2'), and an inner rotor (4) electrostatically coupled to the stator (2'). The rotor (4) comprises a suspended mass (6) with a substantially circular shape, and a plurality of mobile arms (8) extending radially towards the exterior, starting from the suspended mass (6). The stator (2') has a plurality of pairs of fixed arms (22a', 22b', 22a'', 22b'') extending radially to the suspended mass (6), a respective mobile arm (8) being arranged between each pair of fixed arms. The fixed arms (20a', 20b', 20a'', 20b'') are divided into fixed drive arms (20a', 20b') connected to a drive stage (30) for actuating the microactuator (1'), and into fixed measure arms (20a'', 20b'') connected to a measure stage (32), and define a capacitive uncoupling structure (34').

    Abstract translation: 微致动器（1）外定子的包括（2“），并在帧内转子（4）静电耦合到所述定子（2”）。 转子（4）包括一个悬挂质量（6）具有基本上圆形的形状，并移动臂（8）径向延伸的朝向外部，从暂停（6）质量启动多个。 所述定子（2“）具有固定的臂的双（22a的多元性”，22B'，22A“ 22B”“）径向延伸到所述悬挂质量（6），一个respectivement移动臂（8）的每个之间布置 一对固定臂。 被分成固定的驱动臂的固定臂连接到用于致动微致动器（1“）的驱动级（30）（20A '20B'，20A ''，20B ''）（20A '20B'），并且进入 固定措施臂连接到一个测量阶段（32）（20A“”，20B“”），并定义电容解偶联结构（34“）。

    Integrated angular speed sensor device and production method thereof
    15.
    发明公开
    Integrated angular speed sensor device and production method thereof 失效
    Integrierter Winkelgeschwindigkeitssensor und Verfahren zu seiner Herstellung

    公开(公告)号：EP0911606A1

    公开(公告)日：1999-04-28

    申请号：EP97830537.3

    申请日：1997-10-23

    Applicant: STMicroelectronics S.r.l.

    Inventor： Ferrari, Paolo ,  Vigna, Benedetto ,  Foroni, Mario ,  Ferrera, Marco ,  Montanini, Pietro

    IPC: G01C19/56

    CPC classification number: G01C19/574 ,  G01C19/5769 ,  G01P15/0802 ,  H01L21/76202 ,  H01L21/764

    Abstract: The angular speed sensor comprises a pair of mobile masses (2a, 2b) which are formed in the epitaxial layer (37) and are anchored to one another and to the remainder of the device by anchorage elements; the mobile masses are symmetrical with one another, and have mobile excitation electrodes (6a) which are intercalated with respective fixed excitation electrodes (7a 1 , 7a 2 ) and mobile detection electrodes (6b) which are intercalated with fixed detection electrodes (7b 1 , 7b 2 ). The mobile and fixed excitation electrodes extend in a first direction and the mobile and fixed detection electrodes extend in a second direction which is perpendicular to the first direction and is disposed on a single plane parallel to the surface of the device.

    Abstract translation: 角速度传感器包括一对移动质量块（2a，2b），它们形成在外延层（37）中，并通过锚定元件相互锚定并固定到装置的其余部分; 移动质量彼此对称，并且具有插入有固定的检测电极（7b1,7b2）的固定激励电极（7a1,7a2）和移动检测电极（6b）的移动激励电极（6a）。 移动和固定激励电极沿第一方向延伸，并且移动和固定检测电极在垂直于第一方向的第二方向上延伸并且设置在平行于装置表面的单个平面上。

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