公开(公告)号：FI127159B

公开(公告)日：2017-12-15

申请号：FI20155151

申请日：2015-03-09

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： VARPULA AAPO ,  PRUNNILA MIKA ,  GRIGORAS KESTUTIS

IPC: G01J3/26 ,  G01B9/02 ,  G01J3/45 ,  G02B5/08 ,  G02B26/00

公开(公告)号：FI126586B

公开(公告)日：2017-02-28

申请号：FI20115151

申请日：2011-02-17

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： PENSALA TUOMAS ,  JAAKKOLA ANTTI ,  GANCHENKOVA MARIA ,  PRUNNILA MIKA ,  KIIHAMÄKI JYRKI

IPC: B81B3/00 ,  H01L41/18 ,  H03H3/007 ,  H03H9/02 ,  H03H9/24

公开(公告)号：FI20115465A

公开(公告)日：2012-11-14

申请号：FI20115465

申请日：2011-05-13

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： PRUNNILA MIKA ,  JAAKKOLA ANTTI ,  PENSALA TUOMAS

Abstract: The invention relates to a micromechanical device comprising a semiconductor element capable of deflecting or resonating and comprising at least two regions having different material properties and drive or sense means functionally coupled to said semiconductor element. According to the invention, at least one of said regions comprises one or more n-type doping agents, and the relative volumes, doping concentrations, doping agents and/or crystal orientations of the regions being configured so that the temperature sensitivities of the generalized stiffness are opposite in sign at least at one temperature for the regions, and the overall temperature drift of the generalized stiffness of the semiconductor element is 50 ppm or less on a temperature range of 100° C. The device can be a resonator. Also a method of designing the device is disclosed.

公开(公告)号：EP2707953A4

公开(公告)日：2014-12-03

申请号：EP12786090

申请日：2012-05-11

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT

Inventor： PRUNNILA MIKA ,  JAAKKOLA ANTTI ,  PENSALA TUOMAS

IPC: H03H9/02 ,  B81B3/00 ,  H03H9/24

CPC classification number: B81B3/0072 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0271 ,  B81C2201/0164 ,  B81C2201/0167 ,  B81C2201/0177 ,  G06F17/5045 ,  H03H9/02448 ,  H03H9/2447 ,  H03H2009/2442