公开(公告)号：US08426829B2

公开(公告)日：2013-04-23

申请号：US12894229

申请日：2010-09-30

Applicant: William H Leavitt ,  Theodore H Smick ,  Joseph Daniel Gillespie ,  William H Park ,  Paul Eide ,  Drew Arnold ,  Geoffrey Ryding

Inventor： William H Leavitt ,  Theodore H Smick ,  Joseph Daniel Gillespie ,  William H Park ,  Paul Eide ,  Drew Arnold ,  Geoffrey Ryding

IPC: H01J37/317

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/2001 ,  H01J2237/2007 ,  H01J2237/201

Abstract: An ion implanter has an implant wheel with a plurality of wafer carriers distributed about a periphery of the wheel. Each wafer carrier has a heat sink for removing heat from a wafer on the carrier during the implant process by thermal contact between the wafer and the heat sink. The wafer carriers have wafer retaining fences formed as cylindrical rollers with axes in the respective wafer support planes of the wafer carriers. The cylindrical surfaces of the rollers provide wafer abutment surfaces which can move transversely to the wafer support surfaces so that no transverse loading is applied by the fences to wafer edges as the wafer is pushed against the heat sink by centrifugal force. The wafer support surfaces comprise layers of elastomeric material and the movable abutment surfaces of the fences allow even thermal coupling with the heat sink over the whole area of the wafer.

Abstract translation: 离子注入机具有植入轮，其具有围绕轮的周边分布的多个晶片载体。 每个晶片载体具有散热器，用于在植入过程期间通过晶片和散热器之间的热接触从载体上的晶片去除热量。 晶片载体具有晶片保持栅栏，其形成为具有在晶片载体的相应晶片支撑平面中的轴线的圆柱形辊。 辊的圆柱形表面提供可以横向移动到晶片支撑表面的晶片邻接表面，使得当晶片通过离心力推靠在散热片上时，栅栏不会向晶片边缘施加横向负载。 晶片支撑表面包括弹性体材料层，并且栅栏的可移动邻接表面允许在晶片的整个区域上与散热器的均匀热耦合。

公开(公告)号：US08405053B2

公开(公告)日：2013-03-26

申请号：US13026568

申请日：2011-02-14

Applicant: Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

Inventor： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC: G21K5/08

CPC classification number: G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A focused ion beam apparatus, including: a specimen transferring unit having a probe to which a micro-specimen extracted from a specimen, can be joined through a joining deposition film, for transferring the micro-specimen to a sample holder; and wherein, the specimen transferring unit holds the probe which is joined through the joining deposition film to the micro-specimen extracted from the specimen, and the sample stage moves so that the sample holder mounted on the holder clasp is provided into an irradiated range of the focused ion beam, and the specimen transferring unit approaches the probe to the sample holder, and the gas nozzle supplies the deposition gas so that the micro-specimen is fixed to the sample holder through a fixing deposition film, and the ion beam irradiating optical system irradiates the focused ion beam to the micro-specimen fixed to the sample holder for various procedures.

Abstract translation: 一种聚焦离子束装置，其特征在于，包括：具有从样本中提取微量试样的探针的检体转印单元，能够通过接合沉积膜接合，将所述微观样品转印到样品保持体上; 并且其中，所述检体转印单元将通过所述接合沉积膜接合的所述探针保持在从所述检体提取的所述微量试样上，并且所述样品台移动，使得安装在所述保持器扣上的样品保持器被设置在 聚焦离子束和样品转印单元接近探针到样品保持器，并且气体喷嘴提供沉积气体，使得微量样品通过定影沉积膜固定到样品保持器，并且离子束照射光学 系统将聚焦的离子束照射到固定到样品保持器上的微量样品用于各种程序。

公开(公告)号：US08378317B1

公开(公告)日：2013-02-19

申请号：US13226590

申请日：2011-09-07

Applicant: Theodore Smick ,  Geoffrey Ryding ,  Takao Sakase ,  William Park, Jr. ,  Joseph Gillespie ,  Ronald Horner ,  Paul Eide

Inventor： Theodore Smick ,  Geoffrey Ryding ,  Takao Sakase ,  William Park, Jr. ,  Joseph Gillespie ,  Ronald Horner ,  Paul Eide

IPC: A61N5/00

CPC classification number: C23C14/48 ,  C23C14/505 ,  H01J37/20 ,  H01J37/3171 ,  H01J2237/201 ,  H01J2237/20214

Abstract: An apparatus and a method of ion implantation using a rotary scan assembly having an axis of rotation and a periphery. A plurality of substrate holders is distributed about the periphery, and the substrate holders are arranged to hold respective planar substrates. Each planar substrate has a respective geometric center on the periphery. A beam line assembly provides a beam of ions for implantation in the planar substrates on the holders. The beam line assembly is arranged to direct said beam along a final beam path.

Abstract translation: 使用具有旋转轴和周边的旋转扫描组件的离子注入的装置和方法。 多个基板保持器围绕周边分布，并且基板保持器布置成保持相应的平面基板。 每个平面基板在周边上具有相应的几何中心。 束线组件提供离子束以用于植入在支架上的平面基底中。 束线组件被布置成沿着最终光束路径引导所述光束。

公开(公告)号：US20120189813A1

公开(公告)日：2012-07-26

申请号：US13193578

申请日：2011-07-28

Applicant: Lorenz Lechner ,  Ute Kaiser ,  Johannes Biskupek

Inventor： Lorenz Lechner ,  Ute Kaiser ,  Johannes Biskupek

IPC: B32B3/30 ,  G21K5/08

CPC classification number: G01N1/28 ,  G01N1/32 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/31745 ,  Y10T428/24479

Abstract: A process for manufacturing a TEM-lamella includes mounting (51) a plate shaped substrate having a thickness in a support, manufacturing (53) a first, strip-shaped recess on a first side of the substrate under a first angle to the support by means of a particle beam, and manufacturing (55) a second strip-shaped recess on a second side of the substrate under a second angle to the support by means of a particle beam, such that the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region of lesser thickness. The lamella has a thicker rim region and a thinner central region, with a first strip-shaped, recess on a first side of the lamella and a second strip-shaped recess on a second side of the lamella, wherein the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region having a thickness of below 100 nm. An apparatus for executing the process or manufacturing the lamella includes a lamella support pivotable about a transverse axis and a longitudinal axis inclined, to the vertical direction, a device for rotating about the longitudinal axis, and stop means for limiting a tilt of the lamella support about the transverse axis.

Abstract translation: 制造TEM薄片的方法包括将具有厚度的板状基板安装（51）在支撑体中，在基板的第一侧上以与支撑件成第一角度的方式制造（53）第一条形凹槽 并且通过粒子束在所述基板的第二侧上以第二角度制造（55）第二条形凹槽，使得所述第一和第二条形凹部相互 形成锐角或直角，并且它们之间形成较小厚度的重叠区域。 薄片具有较厚的边缘区域和较薄的中心区域，在薄片的第一侧上具有第一带状凹部，在薄片的第二侧上具有第二条形凹部，其中第一和第二条带 形状的凹部相互形成锐角或直角，并且它们之间形成厚度低于100nm的重叠区域。 用于执行该方法或制造薄片的装置包括可围绕横向轴线枢转的薄片支撑件和沿垂直方向倾斜围绕纵向轴线旋转的装置的纵向轴线，以及限制薄片支撑件倾斜的止动装置 围绕横轴。

公开(公告)号：US20120085924A1

公开(公告)日：2012-04-12

申请号：US13326783

申请日：2011-12-15

Applicant: Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

Inventor： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC: G21K5/08

CPC classification number: G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A focused ion beam apparatus, including: a sample holder provided with a fixing surface for fixing, via a deposition film, a micro-specimen extracted from a specimen using a method for fabrication by a focused ion beam, in which a width of the fixing surface is smaller than 50 microns; a specimen transferring unit having a probe to which the specimen can be joined through the deposition film, and transferring the micro-specimen extracted from the specimen by the focused ion-beam fabrication method, to the sample holder; and a sample chamber in which the sample, the sample holder and the probe are laid out, wherein, in the sample chamber, the micro-specimen extracted from the specimen by the focused ion-beam fabrication method is fixed to the fixing surface of the sample holder through the deposition film, and the micro-specimen fixed to the fixing surface is fabricated by irradiating the focused ion beam.

Abstract translation: 一种聚焦离子束装置，包括：样本保持器，其设置有固定表面，用于通过沉积膜固定从样本提取的微量样本，其中使用聚焦离子束制造方法，其中定影宽度 表面小于50微米; 具有可以通过沉积膜将样品接合的探针的样本转移单元，通过聚焦离子束制造方法将从样品提取的微量样品转移到样品保持器; 以及样本室，样本保持器和探针布置在其中，其中，在样本室中，通过聚焦离子束制造方法从样本提取的微量样本被固定到 通过沉积膜的样品保持器和固定到固定表面的微型样品通过照射聚焦离子束来制造。

公开(公告)号：US07902527B2

公开(公告)日：2011-03-08

申请号：US12194515

申请日：2008-08-19

Applicant: Jiong Chen ,  Nicholas R. White

Inventor： Jiong Chen ,  Nicholas R. White

IPC: H01J37/317 ,  H01J37/28 ,  G21K1/00

CPC classification number: H01J37/08 ,  H01J37/147 ,  H01J37/1472 ,  H01J37/3171 ,  H01J2237/022 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/083 ,  H01J2237/1503 ,  H01J2237/201 ,  H01J2237/31701

Abstract: An ion implantation apparatus with multiple operating modes is disclosed. The ion implantation apparatus has an ion source and an ion extraction means for extracting a ribbon-shaped ion beam therefrom. The ion implantation apparatus includes a magnetic analyzer for selecting ions with specific mass-to-charge ratio to pass through a mass slit to project onto a substrate. Multipole lenses are provided to control beam uniformity and collimation. A two-path beamline in which a second path incorporates a deceleration or acceleration system incorporating energy filtering is disclosed. Finally, methods of ion implantation are disclosed in which the mode of implantation may be switched from one-dimensional scanning of the target to two-dimensional scanning.

Abstract translation: 公开了一种具有多种工作模式的离子注入装置。 离子注入装置具有离子源和用于从其提取带状离子束的离子提取装置。 离子注入装置包括用于选择具有特定质荷比的离子的磁分析器，以通过质量狭缝投影到基底上。 提供多极镜头以控制光束的均匀性和准直。 公开了一种二路光束线，其中第二路径包括并入能量过滤的减速或加速系统。 最后，公开了离子注入的方法，其中注入模式可以从目标的一维扫描切换到二维扫描。

公开(公告)号：US20100327190A1

公开(公告)日：2010-12-30

申请号：US12494270

申请日：2009-06-30

Applicant: Hilton Glavish ,  Geoffrey Ryding ,  Theodore H. Smick ,  Kenneth Harry Purser

Inventor： Hilton Glavish ,  Geoffrey Ryding ,  Theodore H. Smick ,  Kenneth Harry Purser

IPC: H01J37/08

CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J37/08 ,  H01J37/20 ,  H01J2237/057 ,  H01J2237/061 ,  H01J2237/082 ,  H01J2237/166 ,  H01J2237/2001 ,  H01J2237/2006 ,  H01J2237/201 ,  H01J2237/202

Abstract: A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and a ribbon beam of hydrogen ions is directed down on a peripheral edge of the wheel. The ribbon beam extends over the full radial width of wafers on the wheel. The beam is generated by an ion source providing an extracted ribbon beam having at least 100 mm major cross-sectional diameter. The ribbon beam may be passed through a 90° bending magnet which bends the beam in the plane of the ribbon. The magnet provides intensity correction across the ribbon to compensate for the dependency on the radial distance from the wheel axis of the speed at which parts of the wafers pass through the ribbon beam.

Abstract translation: 用于从硅晶片剥离硅的氢离子注入机使用大的扫描轮，围绕其周边承载50个以上的晶圆并围绕一个轴线旋转。 在一个实施例中，车轮的旋转轴线是固定的，并且带状的氢离子束被向下指向车轮的周缘。 带状束在轮上的晶片的整个径向宽度上延伸。 光束由离子源产生，提供具有至少100mm主横截面直径的抽出的带状束。 带状光束可以穿过将光束弯曲在色带平面中的90°弯曲磁体。 磁体在色带上提供强度校正，以补偿与轮轴的径向距离对晶圆部分通过带状束的速度的依赖性。

公开(公告)号：US20100230592A1

公开(公告)日：2010-09-16

申请号：US12788037

申请日：2010-05-26

Applicant: Takashi GUNJI ,  Hidetoshi Sato ,  Katsuya Kawakami ,  Hideko Yatabe

Inventor： Takashi GUNJI ,  Hidetoshi Sato ,  Katsuya Kawakami ,  Hideko Yatabe

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/18 ,  H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67769 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L21/67236 ,  H01L21/67259 ,  H01L21/67742

Abstract: There is provided a mini environment type transfer unit which can efficiently transfer a sample to a critical dimension scanning electron microscope (CD-SEM) even in the case of use of a SMIF pod which can store only one photomask. In addition to a load port, a stocker which can store a plurality of photomasks is provided in the mini environment type transfer unit. A mask storage slot in which a plurality of storage units are stacked is provided in the stocker, and one photomask is stored in each storage unit. A sensor is provided in each storage unit to determine whether or not the photomask is normally stored. Additionally, a sensor is provided in each storage unit to detect whether or not the photomask exists.

Abstract translation: 提供了即使在使用只能存储一个光掩模的SMIF盒的情况下也可以将样品有效地转移到临界尺寸扫描电子显微镜（CD-SEM）的微型环境型转印单元。 除了负载端口之外，可以存储多个光掩模的储料器设置在迷你环境型转印单元中。 储存器中设置有多个存储单元堆叠的掩模存储槽，并且在每个存储单元中存储一个光掩模。 在每个存储单元中提供传感器以确定光掩模是否正常存储。 此外，在每个存储单元中提供传感器以检测是否存在光掩模。

公开(公告)号：US07791050B2

公开(公告)日：2010-09-07

申请号：US12168241

申请日：2008-07-07

Applicant: Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

Inventor： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC: H01J37/20

CPC classification number: G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A specimen fabrication apparatus, including: an ion beam irradiating optical system to irradiate a sample placed in a chamber, with an ion beam; a specimen holder to mount a specimen separated by the irradiation with the ion beam; a holder cassette to hold the specimen holder; a sample stage to hold the sample and the holder cassette; and a probe to move the specimen to the specimen holder, wherein the holder cassette is transferred to outside of the chamber in a condition of holding the specimen holder with the specimen mounted.

Abstract translation: 一种标本制造装置，包括：离子束照射光学系统，用离子束照射放置在室中的样品; 用于安装通过用离子束照射分离的样本的样本保持器; 用于保持样品架的保持器盒; 用于保持样品和保持器盒的样品台; 以及用于将样本移动到样本保持器的探针，其中在保持试样保持器的情况下，保持器盒被转移到腔室的外部。

公开(公告)号：US20100093022A1

公开(公告)日：2010-04-15

申请号：US12312832

申请日：2007-11-28

Applicant: Kenneth Hayworth ,  Narayanan Kasthuri ,  Jeff Lichtman ,  Erika Hartwieg

Inventor： Kenneth Hayworth ,  Narayanan Kasthuri ,  Jeff Lichtman ,  Erika Hartwieg

IPC: G01N1/30 ,  B26D5/08 ,  H01J37/28 ,  G05B13/02

CPC classification number: G01N1/06 ,  G01N1/312 ,  G01N2001/066 ,  G01N2001/362 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/26 ,  Y10T83/04 ,  Y10T83/141

Abstract: Methods and apparatus for providing and processing serial tissue sections. In one example, an “automatic tape collecting lathe ultramicrotome” (ATLUM) slices a block of tissue sample having various geometries into a continuous ribbon of thin tissue, or multiple thin tissue sections, and disposes the sliced thin tissue on an appropriate substrate to facilitate subsequent imaging of the sliced thin tissue. Closed-loop control of section thickness of the sliced thin tissue sections or ribbons is implemented to produce thinner sliced tissue sections or ribbons and tightly regulate thickness. Thin tissue sections or ribbons may be particularly processed/prepared to facilitate imaging with a scanning electron microscope (SEM). Collected thin tissue sections or ribbons may be used to create UltraThin Section Libraries (UTSLs) that allow for fully automated, time-efficient imaging in the SEM to facilitate expansive tissue studies.

Abstract translation: 用于提供和处理连续组织切片的方法和装置。 在一个示例中，“自动收集车床超薄切片机”（ATLUM）将具有各种几何形状的组织样品块切割成薄组织或多个薄组织切片的连续带，并将切片的薄组织置于合适的基底上以便于 切片薄组织的随后成像。 实施切片的薄组织切片或带的切片厚度的闭环控制以产生更薄的切片的组织切片或丝带并且紧密地调节厚度。 薄组织切片或带可以特别加工/制备，以便于用扫描电子显微镜（SEM）进行成像。 收集的薄组织切片或条带可用于创建UltraThin Section Libraries（UTSL），允许在SEM中进​​行全自动，时间有效的成像，以促进膨胀性组织研究。