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    Particle beam device having a sample holder
    235.
    发明授权
    Particle beam device having a sample holder 有权
    具有样品架的颗粒束装置

    公开(公告)号：US09190242B2

    公开(公告)日：2015-11-17

    申请号：US13239535

    申请日：2011-09-22

    Applicant: Josef Biberger ,  Ralph Pulwey

    Inventor： Josef Biberger ,  Ralph Pulwey

    IPC: H01J37/20 ,  H01J37/28

    CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20285 ,  H01J2237/20292

    Abstract: A particle beam device and a sample receptacle apparatus, which has a sample holder, are disclosed. The sample holder is arranged in a movable fashion along at least a first axis and along at least a second axis. Furthermore, the sample holder is arranged in a rotatable fashion about a first axis of rotation and about a second axis of rotation. A first sample holding device is arranged relative to the sample holder in a rotatable fashion about a third axis of rotation, in which the third axis of rotation and the second axis of rotation are at least in part arranged laterally offset with respect to one another. Furthermore, a control apparatus is provided, in which the first sample holding device is rotatable about the third axis of rotation into an analysis position and/or treating position using the control apparatus.

    Abstract translation: 公开了一种具有样品保持器的粒子束装置和样品容器装置。 样品保持器沿着至少第一轴线和至少第二轴线以可移动的方式布置。 此外，样品保持器围绕第一旋转轴线和约第二旋转轴线可旋转地布置。 第一样品保持装置以关于第三旋转轴线的可旋转方式相对于样品保持器布置，其中第三旋转轴线和第二旋转轴线至少部分地相对于彼此横向偏移地布置。 此外，提供一种控制装置，其中第一样品保持装置可以使用控制装置绕第三旋转轴线旋转到分析位置和/或处理位置。

    Semiconductor device manufacturing method and semiconductor manufacturing apparatus
    236.
    发明授权
    Semiconductor device manufacturing method and semiconductor manufacturing apparatus 有权
    半导体装置的制造方法和半导体制造装置

    公开(公告)号：US09159563B2

    公开(公告)日：2015-10-13

    申请号：US14427852

    申请日：2012-09-26

    Applicant: Tomohide Terashima ,  Yasuhiro Yoshiura ,  Eiko Otsuki

    Inventor： Tomohide Terashima ,  Yasuhiro Yoshiura ,  Eiko Otsuki

    IPC: H01L21/02 ,  H01L21/263 ,  H01L21/67 ,  H01L21/68 ,  H01L21/677 ,  H01J37/30

    CPC classification number: H01L21/263 ,  H01J37/30 ,  H01J37/3002 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/20221 ,  H01J2237/30455 ,  H01J2237/317 ,  H01L21/67115 ,  H01L21/67718 ,  H01L21/67745 ,  H01L21/6776 ,  H01L21/68

    Abstract: A semiconductor device manufacturing method according to the present invention includes a step of arranging a plurality of processing objects on a first tray and a second tray adjacent to the first tray, a plurality of application steps in which application of an application substance to the plurality of processing objects is repeated a certain number of times by emitting the application substance from an application device formed right above a contact position at which the first tray and the second tray contact each other, by swinging the application device along a first direction across the contact position, and by moving the first tray and the second tray in a second direction perpendicular to the first direction, and an interchange step of interchanging the first tray and the second tray in position without changing the directions of the first tray and the second tray corresponding to the second direction, the interchange step being executed at least one time among the plurality of application steps.

    Abstract translation: 根据本发明的半导体器件制造方法包括将多个处理对象布置在与第一托盘相邻的第一托盘和第二托盘上的步骤，多个施加步骤，其中将应用物质应用于多个 通过从第一托盘和第二托盘彼此接触的接触位置正上方形成的施加装置发射施加物质，通过沿着第一方向跨越接触位置摆动施加装置来重复加工物体一定次数 并且通过沿着与第一方向垂直的第二方向移动第一托盘和第二托盘，以及互换步骤，将第一托盘和第二托盘互换在适当位置，而不改变对应于第一托盘和第二托盘的方向 所述第二方向，所述交换步骤在所述多个之中至少执行一次 应用步骤。

    Sample carrier for an electron microscope
    237.
    发明授权
    Sample carrier for an electron microscope 有权
    电子显微镜样品载体

    公开(公告)号：US09159531B2

    公开(公告)日：2015-10-13

    申请号：US14154753

    申请日：2014-01-14

    Applicant: FEI Company

    Inventor： Frank Nederlof

    IPC: H01J37/20 ,  G01N23/22 ,  G01N23/225

    CPC classification number: H01J37/20 ,  G01N23/2204 ,  G01N23/2251 ,  H01J2237/201 ,  H01J2237/26

    Abstract: The invention relates to a sample carrier for a transmission electron microscope. When using state of the art sample carriers, such as half-moon grids in combination with detectors detecting, for example, X-rays emitted at a large emittance angle, shadowing is a problem. Similar problems occur when performing tomography, in which the sample is rotated over a large angle.The invention provides a solution to shadowing by forming the parts of the grid bordering the interface between sample and grid as tapering parts.

    Abstract translation: 本发明涉及透射电子显微镜的样品载体。 当使用现有技术的采样载体（例如半月板）与检测器（例如，以大的发射角发射的X射线）组合时，阴影是一个问题。 执行断层扫描时会出现类似的问题，其中样品在大角度旋转。 本发明通过形成与样品和格栅之间的界面接近的网格部分作为渐缩部分来提供阴影的解决方案。

    Protein Layers And Their Use In Electron Microscopy
    238.
    发明申请
    Protein Layers And Their Use In Electron Microscopy 有权
    蛋白质层及其在电子显微镜中的应用

    公开(公告)号：US20150053856A1

    公开(公告)日：2015-02-26

    申请号：US14489108

    申请日：2014-09-17

    Applicant: Isis Innovation Limited

    Inventor： John Charles Sinclair ,  Martin Edward Mäntylä Noble

    IPC: H01J37/22 ,  G01N33/68 ,  H01J37/26

    CPC classification number: H01J37/222 ,  C07K14/001 ,  C07K14/24 ,  C07K14/36 ,  C07K14/47 ,  C07K14/7151 ,  C07K19/00 ,  C07K2319/00 ,  G01N33/6803 ,  H01J37/20 ,  H01J37/261 ,  H01J37/295 ,  H01J2237/201 ,  H01J2237/2802 ,  H01J2237/2803

    Abstract: Protein layers (1) repeating regularly in two dimensions comprise protein protomers (2) which each comprise at least two monomers (5), (6) genetically fused together. The monomers (5), (6) are monomers of respective oligomer assemblies (3), (4) into which the monomers are assembled to assembly of the protein layer. The first oligomer assembly (3) belongs to a dihedral point group of order O, where O equals (3), (4) or (6) and has a set of O rotational symmetry axes of order (2). The second oligomer assembly (4) has a rotational symmetry axis of order (2). Due to the symmetry of the oligomer assemblies (3), (4), the rotational symmetry axes of each second oligomer assembly (4) is aligned with one of said set of O rotational symmetry axes of a first oligomer assembly (3) with (2) protomers being arranged symmetrically therearound. Thus, an 2-fold fusion between the oligomer assemblies (3), (4) is produced and the arrangements of the rotational symmetry axes of the oligomer assemblies (3), (4) cause the protein layer to repeat regularly. The protein layer has many uses, for example to support molecular entities for biosensing, x-ray crystallography or electron microscopy.

    Abstract translation: 在二维中规则重复的蛋白质层（1）包含蛋白质反转录剂（2），其每个包含至少两个基因融合在一起的单体（5），（6）。 单体（5），（6）是各自的低聚物组件（3），（4）的单体，其中单体组装成蛋白质层的组装。 第一低聚物组件（3）属于阶数为O的二面点组，其中O等于（3），（4）或（6），并具有一组O旋转对称轴（2）。 第二低聚物组件（4）具有顺序（2）的旋转对称轴。 由于低聚物组件（3），（4）的对称性，每个第二低聚物组件（4）的旋转对称轴线与第一低聚物组件（3）的所述一组O旋转对称轴线之一与（ 2）检测器在其周围对称布置。 因此，产生低聚物组件（3），（4）之间的2倍融合，并且低聚物组件（3），（4）的旋转对称轴的布置导致蛋白质层定期重复。 蛋白质层具有许多用途，例如用于支持用于生物传感，X射线晶体学或电子显微镜的分子实体。

    WORKPIECE CARRIER
    239.
    发明申请
    WORKPIECE CARRIER 有权
    工作承运人

    公开(公告)号：US20140361197A1

    公开(公告)日：2014-12-11

    申请号：US13915149

    申请日：2013-06-11

    Applicant: Axcelis Technologies, Inc.

    Inventor： William Davis Lee ,  Kevin J. Hoyt ,  David Shanner ,  Jason Beringer

    IPC: H01J37/20 ,  H01J37/317 ,  H01L21/683 ,  B23Q3/18

    CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/08 ,  H01J2237/2007 ,  H01J2237/201 ,  H01L21/6831 ,  H01L21/68785 ,  Y10S901/31

    Abstract: A workpiece carrier comprises a first plate having a first outer diameter, a first inner diameter, and a first recess extending a first distance from the first inner diameter toward the first outer diameter. The workpiece carrier further comprises a second plate having a second outer diameter, a second inner diameter, and a second recess extending a second distance from the second inner diameter toward the second outer diameter. A plurality of mating features associated with the first plate and second plate are configured to selectively fix a position of a first workpiece between the first plate and second plate within the first recess and second recess.

    Abstract translation: 工件载体包括具有第一外径，第一内径和从第一内径向第一外径延伸第一距离的第一凹槽的第一板。 工件托架还包括具有第二外径，第二内径和从第二内径向第二外径延伸第二距离的第二凹槽的第二板。 与第一板和第二板相关联的多个配合特征被配置为在第一凹部和第二凹部内选择性地将第一工件的位置固定在第一板和第二板之间。

    SAMPLE HOLDER FOR ELECTRON MICROSCOPE
    240.
    发明申请
    SAMPLE HOLDER FOR ELECTRON MICROSCOPE 有权
    电子显微镜样品座

    公开(公告)号：US20140353499A1

    公开(公告)日：2014-12-04

    申请号：US14371032

    申请日：2012-12-03

    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

    Inventor： Shohei Terada ,  Yoshifumi Taniguchi ,  Yasuhira Nagakubo

    IPC: H01J37/20 ,  H01J37/28

    CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/20214 ,  H01J2237/2802

    Abstract: A sample holder for an electron microscope has multiple sample stands, can allow at least one sample stand to move, and enables multiple samples for a transmission electron microscope to be prepared by a focused ion beam apparatus. A holder tip opening is provided in a tip of the sample holder. A back end of the sample holder has a knob, a rolling mechanism, a coarse adjustment mechanism, and a connector. By pressing the knob, fixation of the rolling mechanism is canceled, and the back end from the rolling mechanism and the tip of the sample holder will rotate. This rolling mechanism enables arrangement of the samples to be rotated in both the observing of a sample and the preparing of a sample for a transmission electron microscope with the focused ion beam apparatus. Moreover, the sample stand is movable by the coarse adjustment mechanism and the fine adjustment mechanism.

    Abstract translation: 用于电子显微镜的样品架具有多个样品台，可以允许至少一个样品台移动，并且可以通过聚焦离子束装置制备用于透射电子显微镜的多个样品。 保持器顶端开口设置在样品保持器的尖端中。 样品架的后端具有旋钮，滚动机构，粗调机构和连接器。 通过按压旋钮，取消滚动机构的固定，并且来自滚动机构的后端和样品架的尖端将旋转。 该滚动机构能够在样品的观察和用聚焦离子束装置的透射型电子显微镜准备样品的同时进行旋转的样品的配置。 此外，样品台可以通过粗调机构和微调机构移动。

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