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    SUBSTRATE WITH MICROFINE METALLIC LUMPS ARRANGED ON SURFACE
    241.
    发明公开
    SUBSTRATE WITH MICROFINE METALLIC LUMPS ARRANGED ON SURFACE 有权
    随着对表面基板ARRANGED微细金属CURD

    公开(公告)号：EP2003091A9

    公开(公告)日：2009-05-20

    申请号：EP07741001.7

    申请日：2007-04-04

    Applicant: Japan Science and Technology Agency

    Inventor： WATANABE, Shigeru ,  LI, Jingze

    IPC: B82B3/00 ,  B82B1/00 ,  B32B3/14

    CPC classification number: B82Y30/00 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y20/00 ,  B82Y40/00

    Abstract: The objective is to present a metal nanostructure having metal masses with zero valence aligned on a substrate surface wherein the size and shape of the metal masses are controlled and a manufacturing process thereof.
    A micro phase separation membrane comprising an amphiphilic block copolymer assumes a state that contains numerous micro diameter hydrophilic cylinders inside the membrane in the direction perpendicular to the membrane surface. The membrane is prepared using a solution containing an amphiphilic block copolymer and desired metal ions or by bringing a micro phase separation membrane of an amphiphilic block copolymer in contact with a solution containing metal ions after the membrane is formed to localize the metal ions in the hydrophilic micro diameter cylinders. A substrate containing numerous zero valence metal masses in approximately pillar shapes, approximately dot shapes or combinations of these at set intervals can be obtained by conducting a reduction treatment and a treatment to remove organic materials on the micro phase separation membrane. As the treatment, ultraviolet light irradiation or electron beam irradiation, plasma treatments, chemical reduction processes or electrochemical reduction processes may be used.

    METHOD OF ASSEMBLING NANOSCALE AND MICROSCALE OBJECTS IN TWO-AND THREE-DIMENSIONAL STRUCTURES
    242.
    发明申请
    METHOD OF ASSEMBLING NANOSCALE AND MICROSCALE OBJECTS IN TWO-AND THREE-DIMENSIONAL STRUCTURES 审中-公开
    在二维和三维结构中组装纳米级和微米级物体的方法

    公开(公告)号：WO2016077318A8

    公开(公告)日：2017-05-11

    申请号：PCT/US2015059912

    申请日：2015-11-10

    Applicant: CHARLES STARK DRAPER LABORATORY INC

    Inventor： CARTER DAVID J

    IPC: B81C1/00

    CPC classification number: C09J7/00 ,  B81C1/00206 ,  B81C2201/0149

    Abstract: A method of assembly of micro-scale objects includes forming a pattern of a first functional moiety on a surface of a substrate, contacting the surface of the substrate with a first liquid suspension including first micro-scale feedstock elements functionalized with a second functional moiety, complimentary to the first functional moiety, on first portions of the first micro-scale feedstock elements and functionalized with a third functional moiety on second portions of the first micro-scale feedstock elements, aligning the first portions of the first micro-scale feedstock elements with the surface of the substrate, and facilitating bonding the second functional moieties to the first functional moieties to form a first microstructure pattern of the first micro-scale feedstock elements on the surface of the substrate.

    Abstract translation: 组装微米尺度物体的方法包括在基材表面上形成第一功能部分的图案，使基材表面与第一液体悬浮液接触，所述第一液体悬浮液包含用第二官能部分官能化的第一微尺度原料元件， 与第一功能部分互补，在第一微尺度原料元件的第一部分上，并且在第一微尺度原料元件的第二部分上用第三功能部分功能化，将第一微尺度原料元件的第一部分与 基材的表面以及促进将第二官能部分键合至第一官能部分以在基材表面上形成第一微尺度原料元件的第一微结构图案。

    PROCEDE DE CONTROLE DE L'ENERGIE DE SURFACE D'UN SUBSTRAT
    243.
    发明申请
    PROCEDE DE CONTROLE DE L'ENERGIE DE SURFACE D'UN SUBSTRAT 审中-公开
    控制基板表面能量的方法

    公开(公告)号：WO2015121568A1

    公开(公告)日：2015-08-20

    申请号：PCT/FR2015/050285

    申请日：2015-02-06

    Applicant: ARKEMA FRANCE

    Inventor： NAVARRO, Christophe ,  NICOLET, Celia ,  CHEVALIER, Xavier

    IPC: C09D153/00 ,  B82Y30/00 ,  G03F7/00

    CPC classification number: C08F297/026 ,  B81C1/00206 ,  B81C2201/0149 ,  B82Y30/00 ,  C09D153/00 ,  G03F7/0002

    Abstract: L'invention concerne un procédé de contrôle de l'énergie de surface d'un substrat, pour permettre l'obtention d'une orientation particulière des nano-domaines d'un film de copolymère à blocs déposé ultérieurement sur ladite surface, ledit procédé étant caractérisé en ce qu'il comprend les étapes suivantes : - préparer un mélange de polymères, chaque polymère comprenant au moins une fonction permettant son greffage ou sa réticulation sur la surface dudit substrat, - déposer ledit mélange ainsi préparé sur la surface dudit substrat, - procéder à un traitement entraînant le greffage ou la réticulation de chacun des polymères du mélange sur la surface du substrat.

    Abstract translation: 本发明涉及一种用于控制基材的表面能的方法，以获得随后在表面上沉积的嵌段共聚物膜的纳米域的特定取向，其特征在于其包括以下步骤：制备 聚合物的混合物，每个聚合物包含至少一个官能团，使其能够接枝或交联到基底的表面; 将如此制备的混合物沉积在基材的表面上; 进行处理，导致混合物的每种聚合物接枝或交联到基材的表面。

    DEFECT-LESS DIRECT SELF-ASSEMBLY
    244.
    发明申请
    DEFECT-LESS DIRECT SELF-ASSEMBLY 审中-公开
    缺陷直接自组装

    公开(公告)号：WO2015112874A1

    公开(公告)日：2015-07-30

    申请号：PCT/US2015/012705

    申请日：2015-01-23

    Applicant: TOKYO ELECTRON LIMITED ,  TOKYO ELECTRON U.S. HOLDINGS, INC.

    Inventor： DEVILLIERS, Anton J.

    IPC: H01L21/02

    CPC classification number: B81C1/00 ,  B81C1/00031 ,  B81C2201/0149 ,  H01L21/31144 ,  H01L21/76816

    Abstract: Techniques herein enable executing directed self-assembly of block copolymer patterning processes that result in patterns having no defects or a negligibly low occurrence of defects to have a high yield of functional patterns and devices. Methods include executing a same DSA patterning sequence two or more times such that any defects in from a phase-separated first block copolymer film are corrected with a phase-separated second block copolymer film as any defect in the second block copolymer film would only temporarily cover a feature already created and/or transferred from first block copolymer film.

    Abstract translation: 这里的技术能够执行嵌段共聚物图案化工艺的定向自组装，其导致没有缺陷的图案或者可忽略的低缺陷出现以具有高产率的功能图案和装置。 方法包括执行相同的DSA构图序列两次或更多次，使得相分离的第一嵌段共聚物膜中的任何缺陷用相分离的第二嵌段共聚物膜进行校正，因为第二嵌段共聚物膜中的任何缺陷将仅暂时覆盖 已经由第一嵌段共聚物膜产生和/或转移的特征。

    THREE DIMENSIONAL BLOCK-COPOLYMER FILMS FORMED BY ELECTROHYDRODYNAMIC JET PRINTING AND SELF-ASSEMBLY
    247.
    发明申请
    THREE DIMENSIONAL BLOCK-COPOLYMER FILMS FORMED BY ELECTROHYDRODYNAMIC JET PRINTING AND SELF-ASSEMBLY 审中-公开
    通过电动喷射印刷和自组装形成的三维嵌段共聚物薄膜

    公开(公告)号：WO2015023875A1

    公开(公告)日：2015-02-19

    申请号：PCT/US2014/051120

    申请日：2014-08-14

    Applicant: ONSES, Mustafa Serdar ,  ROGERS, John A. ,  FERREIRA, Placid ,  ALLEYNE, Andrew ,  NEALEY, Paul Franklin

    Inventor： ONSES, Mustafa Serdar ,  ROGERS, John A. ,  FERREIRA, Placid ,  ALLEYNE, Andrew ,  NEALEY, Paul Franklin

    IPC: B32B3/00

    CPC classification number: C09D153/00 ,  B41J2/06 ,  B81C1/00031 ,  B81C2201/0149 ,  B81C2201/0198 ,  G03F7/0002

    Abstract: Provided are methods of patterning block copolymer (BCP) films with independent control of the size, periodicity and morphology of the resulting nanoscale domains. Also disclosed are BCP patterns having discrete areas of different self-assembled BCP thin films on a surface, the BCP thin films differing in one or more of molecular weight (MW), composition, morphology, and feature size. In some implementations, multiple BCPs with different MWs can be printed onto a single substrate, thereby providing access to patterns with diverse geometries and feature sizes. The printing approaches can be applied to various BCP chemistries, morphologies and directed self-assembly (DSA) strategies. Also provided are methods of forming BCP thin films on patterns of polymer brushes formed by electrohydrodynamic printing. The methods involve direct, high resolution electrohydrodynamic delivery of random copolymer brushes as surface wetting layers to control the geometries of nanoscale domains in spin-cast and printed BCPs.

    Abstract translation: 提供图案化嵌段共聚物（BCP）膜的方法，其独立控制所得纳米尺度域的尺寸，周期和形态。 还公开了在表面上具有不同自组装BCP薄膜的离散区域的BCP图案，BCP薄膜在分子量（MW），组成，形态和特征尺寸中的一个或多个中不同。 在一些实施方案中，具有不同MW的多个BCP可以印刷到单个基板上，从而提供对具有不同几何形状和特征尺寸的图案的访问。 打印方法可应用于各种BCP化学，形态和定向自组装（DSA）策略。 还提供了通过电动液压印刷形成的聚合物刷的图案上形成BCP薄膜的方法。 该方法涉及直接，高分辨率的电流动力学递送无规共聚物刷作为表面润湿层，以控制旋转铸塑和印刷BCP中纳米级域的几何形状。

    MONOLAYER OF NANORODS ON A SUBSTRATE AND METHOD OF FORMING THE SAME
    248.
    发明申请
    MONOLAYER OF NANORODS ON A SUBSTRATE AND METHOD OF FORMING THE SAME 审中-公开
    基体上的纳米粒子的单体及其形成方法

    公开(公告)号：WO2014137292A1

    公开(公告)日：2014-09-12

    申请号：PCT/SG2014/000107

    申请日：2014-03-05

    Applicant: NANYANG TECHNOLOGICAL UNIVERSITY

    Inventor： XIONG, Qihua ,  PENG, Bo

    IPC: B82B3/00 ,  B82Y40/00 ,  G01N21/65

    CPC classification number: G01N21/658 ,  B05D3/0486 ,  B05D3/066 ,  B81C1/00111 ,  B81C2201/0149 ,  B82Y20/00 ,  B82Y30/00 ,  B82Y40/00

    Abstract: The present invention is directed to a method of forming a monolayer of nanorods on a substrate, wherein the nanorods are at least substantially vertically aligned, the method including providing a droplet of a solution including said nanorods on a substrate, and controlling the temperature and the evaporation of the solution such that the internal region of the droplet is kept at near equilibrium status to allow formation of the monolayer of nanorods. The present invention also relates to the monolayer of nanorods on the substrate thus obtained. The present invention also further relates to an optical arrangement and use of the optical arrangement.

    Abstract translation: 本发明涉及一种在衬底上形成单层纳米棒的方法，其中所述纳米棒至少基本上垂直对齐，所述方法包括在衬底上提供包含所述纳米棒的溶液液滴，并控制温度和 溶液的蒸发使得液滴的内部区域保持在接近平衡状态以允许形成纳米棒的单层。 本发明还涉及如此获得的在衬底上的纳米棒的单层。 本发明还涉及光学装置的光学装置和用途。

    METHOD TO PROVIDE A PATTERNED ORIENTATION TEMPLATE FOR A SELF-ASSEMBLABLE POLYMER
    250.
    发明申请
    METHOD TO PROVIDE A PATTERNED ORIENTATION TEMPLATE FOR A SELF-ASSEMBLABLE POLYMER 审中-公开
    为自组装聚合物提供图案方向模板的方法

    公开(公告)号：WO2013050338A1

    公开(公告)日：2013-04-11

    申请号：PCT/EP2012/069400

    申请日：2012-10-02

    Applicant: ASML NETHERLANDS B.V.

    Inventor： NGUYEN, Thanh ,  FINDERS, Jozef ,  KETELAARS, Wilhelmus ,  WUISTER, Sander ,  VAN DER HEIJDEN, Eddy ,  MEESSEN, Hieronymus ,  KOOLE, Roelof ,  PEETERS, Emiel ,  VAN HEESCH, Chris ,  BRIZARD, Aurelie ,  BOOTS, Henri ,  DRUZHININA, Tamara ,  DE RUITER, Jessica

    IPC: B81C1/00

    CPC classification number: C30B1/12 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y30/00 ,  G03F7/0002 ,  H01L21/0337 ,  Y10T117/10

    Abstract: A graphoepitaxy template to align a self-assembled block polymer adapted to self-assemble into a 2-D array having parallel rows of discontinuous first domains extending parallel to a first axis, mutually spaced along an orthogonal second axis, and separated by a continuous second domain. The graphoepitaxy template has first and second substantially parallel side walls extending parallel to and defining the first axis and mutually spaced along the second axis to provide a compartment to hold at least one row of discontinuous first domains of the self-assembled block copolymer on the substrate between and parallel to the side walls, and separated therefrom by a continuous second domain. The compartment has a graphoepitaxial nucleation feature arranged to locate at least one of the discontinuous first domains at a specific position within the compartment. Methods for forming the graphoepitaxy template and its use for device lithography are also disclosed.

    Abstract translation: 用于使自组装嵌段聚合物对准以将其自组装成具有平行于第一轴线延伸的不连续第一区域的平行行的二维阵列，并且沿着正交的第二轴相互间隔开并由连续的第二轴 域。 所述方解石模板具有第一和第二基本上平行的侧壁，所述第一和第二基本平行的侧壁平行于并限定第一轴线并且限定第一轴线并且沿着第二轴线相互间隔延伸，以提供隔室，以将自组装嵌段共聚物的至少一排不连续的第一区域保持在基板上 在侧壁之间并平行于侧壁，并通过连续的第二结构域与之隔开。 隔室具有图案外延成核特征，布置成将隔离物内的特定位置处的不连续的第一结构域中的至少一个定位。 还公开了用于形成图案石墨模板的方法及其用于器件光刻的方法。

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