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公开(公告)号：JP2002164396A
公开(公告)日：2002-06-07
申请号：JP2001269047
申请日：2001-09-05
Applicant: CASCADE MICROTECH INC
Inventor： NORDGREN GREG , DUNKLEE JOHN
Abstract: PROBLEM TO BE SOLVED: To obtain a chuck assembly having a reduced shaking and stress that acts on a plunger, which enables arranging of a wafer on a probe more easily and correctly, during inspecting the wafer and the like by the probe. SOLUTION: This chuck assembly is provided with an adjustment plate 182, which is freely rotatable toward the chuck assembly, suitable for supporting the chuck and has a tab 203 and a plunger 200. The plunger 200 that is connected to the adjustment plate has a receptacle 201, by the rotations of which the adjustment plate is rotated selectively. A position stage 184 has a pair of straight bearings and is a basic insulator for supporting for the adjustment plate. A downward force will not be applied to the plunger, while the adjustment plate is being rotated and activated by the plunger.
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公开(公告)号：JP2001013168A
公开(公告)日：2001-01-19
申请号：JP2000167610
申请日：2000-06-05
Applicant: CASCADE MICROTECH INC
Inventor： REED GLEASON , MICHAEL A BAIN , KENNETH SMITH
Abstract: PROBLEM TO BE SOLVED: To increase horizontal strength so as to form a proper alignment by arranging a conductive material inside a pressing part, eliminating an excessive part from a dielectric layer upper face, arranging a flat plane over the whole and eliminating a base board after patterning a track on the dielectric layer and the conductive material. SOLUTION: A polyimide layer 220 and a base board 200 is plated with a conductive material 250 by electrical plating, and the conductive material 250 such as nickel and rhodium is provided in a pressing part. Then, an excessive part of the conductive material 250 is removed from the upper face of the polyimide layer 22, and lapping is carried out for arranging a flat surface over the whole. A track 252 is patterned on the polyimide layer 220 and the conductive material 250 so as to be turned into an excellent conductor such as copper, aluminum, and gold. Subsequently, the base board 200 is removed by etching using hydrochloric acid or sulfonic acid.
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公开(公告)号：JPH08321530A
公开(公告)日：1996-12-03
申请号：JP9685396
申请日：1996-04-18
Applicant: CASCADE MICROTECH INC
Inventor： RANDEI SHIYUWAINDO
Abstract: PROBLEM TO BE SOLVED: To greatly reduce the noise observed in a low-current and low-voltage measurement by electrically connecting a conductive material layer fixed to an insulation layer to either a chuck supporting a tester or a support surface and placing these two layers between a support surface and the chuck. SOLUTION: A sensor 81 detects temp. near a tester 60 higher or lower than the ambient temp., to thereby control the temp. of a gas or fluid flowing through a temp. chuck 50 according to this detected temp., and two layers are provided which form a conductive layer 40 fixed to a support surface 45 for the tester 60 and an insulation layer 10. The conductive layer 40 electrically is connected to the chuck 50 or the support surface 45, and its two layers are disposed between the surface 45 and chuck 50, thereby greatly reducing the noise observed during a low-current and low-voltage measuring.
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公开(公告)号：JPH0650988A
公开(公告)日：1994-02-25
申请号：JP13837993
申请日：1993-06-10
Applicant: CASCADE MICROTECH INC
Inventor： KENISU RADARITSUKU SUMISU , KEE RIIDO GURIISON , JIEFURII ARAN UIRIAMUZU , ROORA ROREIN SUPAAGAA
Abstract: PURPOSE: To obtain a returning unit for a high frequency probe apparatus capable of electrically connecting a signal probe to a ground probe and holding with reliability therebetween even if the distance between the signal probe and the ground probe is changed. CONSTITUTION: This returning unit 20 comprises a sheet-like conductive strap 25 for connecting the conductor of a signal probe 22 to the conductor of a ground probe 24, wherein the first end 52 of the strap is connected to the conductive clad 38 of the signal probe with conductive adhesive 58, and connected by inserting the ground probe into the winding of the second end 54 of the strap 25 having self-windability. The number of turns is automatically increased or decreased at the end 54 of the strap 25, the distance between both the probes can be simply altered, and hence the returning circuit of the probe 22 to the probe 24 maintains the reliable electric connection. Even if the distance between both the probes becomes excessive, the end 54 of the strap 5 is automatically removed from the ground probe, and hence the probe or the other is not damaged.
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公开(公告)号：JPH05251906A
公开(公告)日：1993-09-28
申请号：JP10832491
申请日：1991-04-15
Applicant: CASCADE MICROTECH INC
Inventor： EDOWAADO EMU GOTSUDOSHIYAAKU , KIISU II JIYOONZU
Abstract: PURPOSE: To provide a waveguide structure hardly causing reflection or attenuation and capable of being efficiently connected to a coplanar waveguide and transmitting broadband signal. CONSTITUTION: The waveguide structure is provided with a conductive tubular waveguide part having an inner slender ridge 12 facing an inside thin and long trough 14 directly. The tubular waveguide part has a rectangular cross section. The slender ridge 12 has its lateral width narrower than the lateral width of the slender trough 14 and is extended into the slender trough to generate horizontal electric field arrangement. Broadband signal transmission characteristics are obtained with this ridge.
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Patent Agency Ranking
公开(公告)号：JPH02187666A
公开(公告)日：1990-07-23
申请号：JP28729289
申请日：1989-11-02
Applicant: CASCADE MICROTECH INC
Abstract: PURPOSE: To replace a probe chip economically by connecting a connector with a detachable probe chip through a flat dielectric circuit board having a transmission line of flat conductor and making the circuit board detachable and fixing circuit components. CONSTITUTION: A ground line 16 and a signal line 18 are provided on a dielectric elastic board 20 and a coplanar transmission line probe chip 14 is formed. A transmission line circuit board 26 connecting a connector 12 and a chip 14 operably is also provided. The circuit board 26 is detachable and includes a ground line 28 and a signal line 30 which are jointed with the ground line 16 and signal line 18 of the chip 14 while overlapping in the longitudinal direction. Circuit parts are mounted previously on the circuit board 26. According to the structure, only the chip 14 can be replaced when it is damaged and since the circuit components are fixed closely to the chip 14, phase shift and signal loss are reduced.
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公开(公告)号：JP2002033374A
公开(公告)日：2002-01-31
申请号：JP2001136081
申请日：2001-05-07
Applicant: CASCADE MICROTECH INC
Inventor： DANIEL L HARRIS , PETER R MCCANN
Abstract: PROBLEM TO BE SOLVED: To provide a compact chuck for a probe station that quickly and accurately carries out angle indexing to a device to be tested. SOLUTION: This chuck 12 is equipped with bases 16 and 56, mounted on the probe station 10, a shaft 52 mounted on the bases, while the shaft can be rotated, and a device-mounting member 50 that is fixed to the shaft, while the member is rotated with the shaft. Essentially regardless of the direction of the shaft to the device-mounting member 50, the device-mounting member has a direction of a plane to the base. An O-ring 76, with a large diameter is provided between the base and the device-mounting member and the device- mounting member, is supported by the O-ring 76 regardless of the verticality of the shaft 52 for maintaining consistent horizontality, thus reducing the length of the shaft, the height and volume of the chuck, and making the probe station compact.
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公开(公告)号：JPH0661319A
公开(公告)日：1994-03-04
申请号：JP12142793
申请日：1993-05-24
Applicant: CASCADE MICROTECH INC
Inventor： WAAREN KEI HAAUTSUDO , POORU EI TAABO , RICHIYAADO ETSUCHI WAANAA
IPC: G01R31/26 , G01R1/067 , H01L21/66 , H01L21/683 , H01L21/68
Abstract: PURPOSE: To achieve a continuous test by using an auxiliary chuck that can be interconnected to a wafer chuck removably. CONSTITUTION: A system 120 of auxiliary chucks 92 and 94 is inserted between a stage 83 and the auxiliary chucks 92 and 94, thus performing level adjustment between the upper smoothing surface of the auxiliary chucks 92 and 94 and that of a wafer chuck 80 or the other auxiliary chucks 92 and 94 and hence compensating for the difference in thickness among a wafer, a contact substrate, and a calibration substrate that are placed on a chuck member 20 simultaneously and moving a wafer probe 30 from one to the other easily without any difference in a contact pressure or without any risk of the preceding stage of a probe chip 32 from being damaged owing to a level difference. As a result, a continuous test can be performed.
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公开(公告)号：JPH0653293A
公开(公告)日：1994-02-25
申请号：JP13596393
申请日：1993-06-07
Applicant: CASCADE MICROTECH INC
Inventor： RANDEII JIEI SHIYUBINDO , UOOREN KEI HAAUTSUDO , POORU EI TAABO , KENESU AARU SUMISU , RICHIYAADO ETSUCHI WAANAA , PIITAA DEII ANDORIYUUSU
Abstract: PURPOSE: To obtain a probe station having Kelvin connection and shielding system which is immediately applicable and protective by installing a detachable electric connector assembly on a chuck assembly, having connector elements which are connected, in a pair relation, with first and second chuck assemblies. CONSTITUTION: This probe station is provided with an integrated protective system which facilitates the use of a station for measuring a small current, and integrated Kelvin connection for eliminating voltage loss due to line resistance. The station has a chuck assembly 20 constituted of three chuck assembly elements 80, 81, 83. The first element 80 retains a test equipment. The second element 81 under the first element acts as a protective body for reducing a leakage current. The elements 80, 81 are electrically insulating from each other and from a retaining structure, which is the third element 83 located below.
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公开(公告)号：JP2010133954A
公开(公告)日：2010-06-17
申请号：JP2009266779
申请日：2009-11-24
Inventor： NEGISHI KAZUKI , HANSEN MARK
Abstract: PROBLEM TO BE SOLVED: To provide a flicker noise test system that improves frequency response characteristics of measurement system components to ascertain characteristics of flicker noise of smaller devices, eliminates or controls electrical noise that may inversely affect the system and ensures the accuracy of DC measurements for the device under test. SOLUTION: The flicker noise test system has a guarded signal path and an unguarded signal path selectively connectable to respective terminals of a device under test. The selected signal path is connectable to a terminal without disconnecting cables or switching probes. COPYRIGHT: (C)2010,JPO&INPIT
Abstract translation: 要解决的问题：为了提供一种提高测量系统组件的频率响应特性以确定较小设备的闪烁噪声特性的闪烁噪声测试系统，消除或控制可能对系统产生负面影响的电气噪声，并确保 被测设备的直流测量。
解决方案：闪烁噪声测试系统具有有保护的信号路径和无保护的信号路径，可选择性地连接到被测器件的相应端子。 选择的信号路径可连接到终端，而不断开电缆或切换探头。 版权所有（C）2010，JPO＆INPIT
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